公开(公告)号：US07225528B2

公开(公告)日：2007-06-05

申请号：US10972325

申请日：2004-10-26

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G11B5/127 ,  H01R31/00

CPC分类号： G11B5/855 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.

摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。

公开(公告)号：US20070059562A1

公开(公告)日：2007-03-15

申请号：US11600725

申请日：2006-11-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

发明人： Kazuhiro Hattori ,  Mitsuru Takai ,  Takahiro Suwa

IPC分类号： G11B5/65

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/74 ,  G11B5/743 ,  G11B5/851 ,  G11B11/10582

摘要： A magnetic recording medium which is prevented from deterioration of the partitioned recording elements is provided. A magnetic recording medium has partitioned recording elements, a non-magnetic body filled in grooves between the partitioned recording elements, and a barrier film formed between the partitioned recording elements and the non-magnetic body.

摘要翻译： 提供防止划分的记录元件劣化的磁记录介质。 磁记录介质具有划分的记录元件，填充在分隔的记录元件之间的凹槽中的非磁性体以及形成在分隔的记录元件和非磁性体之间的阻挡膜。

公开(公告)号：US20060115584A1

公开(公告)日：2006-06-01

申请号：US10544895

申请日：2004-08-03

申请人： Kazuhiro Hattori ,  Mitsuru Takai

发明人： Kazuhiro Hattori ,  Mitsuru Takai

IPC分类号： B05D5/12 ,  G11B5/84

CPC分类号： G11B5/855

摘要： A manufacturing method and a manufacturing apparatus of a magnetic recording medium are provided, which can efficiently manufacture a magnetic recording medium having good magnetic characteristics while suppressing warpage of the medium, magnetic degradation of divided recording elements, and misalignment of the processed shape of the divided recording elements. In the manufacturing method and the manufacturing apparatus, both surfaces of an object to be processed 10 are simultaneously processed. As a dry etching technique for a continuous recording layer 20, ion beam etching is employed. A resist layer 26 is removed before dry etching of the continuous recording layer 20.

摘要翻译： 提供一种磁记录介质的制造方法和制造装置，其能够有效地制造具有良好磁特性的磁记录介质，同时抑制介质的翘曲，划分的记录元件的磁性劣化，以及分割的记录元件的加工形状的未对准 录音元素 在制造方法和制造装置中，同时处理被处理物体10的两面。 作为连续记录层20的干蚀刻技术，采用离子束蚀刻。 在连续记录层20的干蚀刻之前去除抗蚀剂层26。

公开(公告)号：US20050284842A1

公开(公告)日：2005-12-29

申请号：US11156469

申请日：2005-06-21

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  C23F4/00 ,  G11B5/65 ,  G11B5/73 ,  G11B5/74 ,  G11B5/82 ,  G11B5/855

CPC分类号： B82Y10/00 ,  C23F4/00 ,  G11B5/732 ,  G11B5/7325 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.

摘要翻译： 在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。 接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。 通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。 主掩模层主要由碳制成。 在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

公开(公告)号：US20050089725A1

公开(公告)日：2005-04-28

申请号：US10932139

申请日：2004-09-02

申请人： Mitsuru Takai ,  Kazuhiro Hattori

发明人： Mitsuru Takai ,  Kazuhiro Hattori

IPC分类号： C03C15/00 ,  C03C17/00 ,  C03C17/09 ,  C03C17/22 ,  C03C17/34 ,  G11B5/73 ,  G11B5/84 ,  G11B5/64 ,  B05D5/12 ,  B32B1/00

CPC分类号： G11B5/7315 ,  C03C15/00 ,  C03C17/002 ,  C03C17/09 ,  C03C17/22 ,  C03C17/34 ,  C03C2204/08 ,  G11B5/82 ,  G11B5/8404 ,  Y10T428/265

摘要： A substrate for a magnetic recording medium with a small surface roughness at a low cost, a magnetic recording medium including the substrate for the magnetic recording medium, and a method of manufacturing the same are provided. The substrate for a magnetic recording medium includes a main substrate one face of which serves as a base surface, and a sub-substrate formed on the base surface of the main substrate by a deposition technique such as a bias sputtering method which applies a bias power thereon. In this configuration, a surface roughness of the sub-substrate is smaller than a surface roughness of the base surface of the main substrate.

摘要翻译： 提供了一种用于低成本地具有小表面粗糙度的磁记录介质的基板，包括用于磁记录介质的基板的磁记录介质及其制造方法。 用于磁记录介质的基片包括其一面用作基面的主基片和通过诸如偏压溅射法的沉积技术形成在主基片的基面上的副基片， 上。 在该结构中，副基板的表面粗糙度小于主基板的基面的表面粗糙度。

公开(公告)号：US20050013047A1

公开(公告)日：2005-01-20

申请号：US10891055

申请日：2004-07-15

申请人： Mitsuru Takai ,  Kazuhiro Hattori

发明人： Mitsuru Takai ,  Kazuhiro Hattori

IPC分类号： G11B5/00 ,  G11B5/012 ,  G11B5/60 ,  G11B5/82 ,  G11B21/21

CPC分类号： B82Y10/00 ,  G11B5/012 ,  G11B5/6082 ,  G11B5/743 ,  G11B5/82 ,  G11B2005/001

摘要： A magnetic recording medium capable of preventing contact with a magnetic head for use in recording or reproduction, during recording or reproducing of record data. The magnetic recording medium has a disk-shaped substrate having a surface formed with an annular data-recording area, an outer area outward of the data-recording area, and an inner area inward of the same. The annular data-recording area has a plurality of tracks separated from each other by concentric separating grooves. At least one of the outer area and the inner is subjected to lift-adjusting treatment for enabling adjustment of lifts applied to the magnetic head. This makes it possible to effectively prevent the magnetic head from being inclined to be brought into contact with the magnetic recording medium.

摘要翻译： 一种磁记录介质，能够在记录或再现记录数据期间防止与用于记录或再现的磁头的接触。 磁记录介质具有一个具有形成有环形数据记录区域，数据记录区域外部的外部区域和其内部的内部区域的盘形基板。 环形数据记录区域具有通过同心分隔槽彼此分离的多个轨道。 对外部区域和内部中的至少一个进行升降调节处理，以便能够调节施加到磁头的电梯。 这使得可以有效地防止磁头倾斜于与磁记录介质接触。

公开(公告)号：US07538041B2

公开(公告)日：2009-05-26

申请号：US11206874

申请日：2005-08-19

申请人： Mitsuru Takai ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Shuichi Okawa

发明人： Mitsuru Takai ,  Kazuhiro Hattori ,  Takahiro Suwa ,  Shuichi Okawa

IPC分类号： H01L21/302

CPC分类号： G11B5/855

摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.

摘要翻译： 提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，并且非磁性 形成在非磁性材料的凹部的底面的非磁性材料形成的层16形成在凹凸图案的凸部上，同时凸部和凹部的表面基本平坦化， 非磁性层16的厚度为1nm以下。

公开(公告)号：US07488429B2

公开(公告)日：2009-02-10

申请号：US11156469

申请日：2005-06-21

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Mikiharu Hibi ,  Mitsuru Takai

IPC分类号： B44C1/22 ,  G11B5/82 ,  G11B5/65 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00

CPC分类号： B82Y10/00 ,  C23F4/00 ,  G11B5/732 ,  G11B5/7325 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.

摘要翻译： 在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。 接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。 通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。 主掩模层主要由碳制成。 在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

公开(公告)号：US07470374B2

公开(公告)日：2008-12-30

申请号：US10535265

申请日：2004-07-28

申请人： Kazuhiro Hattori ,  Mitsuru Takai ,  Shuichi Okawa

发明人： Kazuhiro Hattori ,  Mitsuru Takai ,  Shuichi Okawa

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： G11B5/855

摘要： A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer 20. Before dry etching of the continuous recording layer 20, a resist layer 26 is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.

摘要翻译： 提供了一种磁记录介质的制造方法等，其可以抑制分割的记录元件的加工形状的不对准和磁性劣化，并且可以有效地制造具有良好磁特性的磁记录介质。 在制造方法中，使用离子束蚀刻作为连续记录层20的干蚀刻技术。在连续记录层20的干蚀刻之前，去除抗蚀剂层26。 作为覆盖连续记录层的第一掩模层的材料，使用类金刚石碳。

公开(公告)号：US07223439B2

公开(公告)日：2007-05-29

申请号：US10805434

申请日：2004-03-22

申请人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori

发明人： Takahiro Suwa ,  Mitsuru Takai ,  Kazuhiro Hattori

IPC分类号： B05D5/12

CPC分类号： G11B5/855 ,  G11B5/8408

摘要： A magnetic recording medium and a method for manufacturing the same are provided, which provide high surface recording density and high recording/reading performance. The magnetic recording medium is manufactured by forming an intermediate protective layer between a continuous recording layer and a first mask layer, dividing the continuous recording layer to form divided recording elements, and then removing the first mask layer while leaving the intermediate protective layer on the top of the divided recording elements. Further, gaps between the divided recording elements are filled with a non-magnetic material before removing the first mask layer.

摘要翻译： 提供一种提供高表面记录密度和高记录/读取性能的磁记录介质及其制造方法。 通过在连续记录层和第一掩模层之间形成中间保护层，分割连续记录层以形成分割的记录元件，然后在将中间保护层留在顶部的同时除去第一掩模层来制造磁记录介质 的分割记录元素。 此外，在去除第一掩模层之前，用非磁性材料填充划分的记录元件之间的间隙。