公开(公告)号：US07990339B2

公开(公告)日：2011-08-02

申请号：US12005485

申请日：2007-12-26

申请人： Kazuma Arai ,  Fusao Ishii ,  Yoshihiro Maeda

发明人： Kazuma Arai ,  Fusao Ishii ,  Yoshihiro Maeda

IPC分类号： G09G3/00

CPC分类号： H04N9/3123 ,  G02B26/0833 ,  G09G3/2022 ,  G09G3/346 ,  G09G2300/0842 ,  G09G2320/0223

摘要： A micromirror device, which makes an image display with digital image data, comprises pixel elements each of which makes pulse width modulation for incident light depending on the deflection state of light and which are arranged in the form of a matrix. Each of the pixel elements has a mirror, and at least one memory cell comprising a transistor and a capacitor. In such a micromirror device, the total value of the propagation delay time of a ROW line, which connects all of transistors of memory cells arranged successively in a ROW direction, and the switching time of each transistor is smaller than the driving interval of the ROW line driven in the minimum display duration of the micromirror device.

摘要翻译： 使用数字图像数据进行图像显示的微镜器件包括像素元件，每个像素元件根据光的偏转状态对入射光进行脉冲宽度调制，并且以矩阵的形式布置。 每个像素元件具有反射镜，并且至少一个存储单元包括晶体管和电容器。 在这样的微反射镜装置中，连接ROW方向连续配置的存储单元的所有晶体管的ROW线与各晶体管的切换时间的传播延迟时间的总和小于ROW的驱动间隔 线路以微镜装置的最小显示持续时间驱动。

公开(公告)号：US07969384B2

公开(公告)日：2011-06-28

申请号：US12005544

申请日：2007-12-26

申请人： Kazuma Arai ,  Fusao Ishii ,  Yoshihiro Maeda

发明人： Kazuma Arai ,  Fusao Ishii ,  Yoshihiro Maeda

IPC分类号： G09G3/00

CPC分类号： H04N9/3123 ,  G02B26/0833 ,  G09G3/2022 ,  G09G3/346 ,  G09G2300/0842 ,  G09G2320/0223

摘要： A micromirror device, which makes an image display with digital image data, comprises pixel elements each of which makes pulse width modulation (PWM) for incident light depending on the deflection state of light and which are arranged in the form of a matrix. Each of the pixel elements has a mirror, at least one memory cell comprising a transistor and a capacitor, and an electrode connected to each transistor. Memory cells arranged successively in a ROW direction are connected by a ROW line. The image data is loaded at a time interval during which the voltage of the electrode can hold the deflection state of a pixel element.

摘要翻译： 使用数字图像数据进行图像显示的微镜器件包括像素元件，每个像素元件根据光的偏转状态对入射光进行脉冲宽度调制（PWM），并且以矩阵的形式排列。 每个像素元件具有反射镜，至少一个包括晶体管和电容器的存储单元以及连接到每个晶体管的电极。 以ROW方向连续布置的存储单元通过ROW线连接。 图像数据以电极的电压可以保持像素元件的偏转状态的时间间隔被加载。

公开(公告)号：US07876492B2

公开(公告)日：2011-01-25

申请号：US12291948

申请日：2008-11-13

申请人： Naoya Sugimoto ,  Kazuma Arai ,  Yoshihiro Maeda ,  Fusao Ishii

发明人： Naoya Sugimoto ,  Kazuma Arai ,  Yoshihiro Maeda ,  Fusao Ishii

IPC分类号： G02B7/02

CPC分类号： G02B26/0841 ,  G09G3/2025 ,  G09G3/346 ,  G09G2300/0408 ,  G09G2300/0426 ,  G09G2300/0439 ,  G09G2300/0852 ,  G09G2310/0262 ,  G09G2310/0267 ,  G09G2310/0275 ,  G09G2310/04 ,  G09G2310/06 ,  G09G2320/0252 ,  G09G2360/18

摘要： The present invention provides a spatial light modulator, comprising: a plurality of mirror elements; a plurality of address electrodes for controlling the movement of each of the mirror elements; and first and second control circuits for generating a voltage in the address electrode, wherein the second control circuit applies a voltage to the address electrode when the mirror element is in a moving state.

摘要翻译： 本发明提供了一种空间光调制器，包括：多个镜元件; 多个地址电极，用于控制每个反射镜元件的移动; 以及用于在寻址电极中产生电压的第一和第二控制电路，其中当反射镜元件处于移动状态时，第二控制电路向寻址电极施加电压。

公开(公告)号：US07782524B2

公开(公告)日：2010-08-24

申请号：US12286837

申请日：2008-10-01

申请人： Akira Shirai ,  Yoshihiro Maeda ,  Hirokazu Nishino ,  Fusao Ishii

发明人： Akira Shirai ,  Yoshihiro Maeda ,  Hirokazu Nishino ,  Fusao Ishii

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  G03B21/005

摘要： The mirror device comprising a plurality of deflectable mirrors for reflecting light, wherein the mirror is controllable to deflect to a first direction during an incident period with the light incident to the deflectable mirror and at an end of the incident period the mirror is controllable to deflect to a second direction opposite to the first direction during a non-incidence period in which the light is not incident to the present mirror.

摘要翻译： 反射镜装置包括多个用于反射光的可偏转镜，其中在入射到可偏转反射镜的光入射期间，反射镜可控制地偏转到第一方向，并且在入射周期结束时，反射镜可控制以偏转 在不入射到本反射镜的非入射期间，与第一方向相反的第二方向。

公开(公告)号：US20100046061A1

公开(公告)日：2010-02-25

申请号：US12589907

申请日：2009-10-29

申请人： Hirotoshi Ichikawa ,  Yoshihiro Maeda ,  Fusao Ishii

发明人： Hirotoshi Ichikawa ,  Yoshihiro Maeda ,  Fusao Ishii

IPC分类号： G02B26/00 ,  H01L21/50

CPC分类号： G02B26/0841 ,  H01L24/97 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/15311 ,  H01L2924/16195 ,  H01L2924/16235 ,  H01L2924/181 ,  H01L2924/00012 ,  H01L2924/00

摘要： An image projection system comprises a micro-electromechanical system (MEMS) package wherein the MEMS package further includes: a first substrate and a second substrate joined together at a joinder surface applied with a ponder material thereon to provide an internal space to contain and package a MEMS device therein, wherein at least one of the first and second substrate is configured to have a an inclined surface near the joinder surface.

摘要翻译： 一种图像投影系统包括微机电系统（MEMS）封装，其中MEMS封装还包括：在其上施加有沉淀材料的接合表面上连接在一起的第一基板和第二基板，以提供内部空间以容纳和封装 MEMS器件，其中第一和第二衬底中的至少一个被配置为在接合表面附近具有倾斜表面。

公开(公告)号：US07649673B2

公开(公告)日：2010-01-19

申请号：US12072451

申请日：2008-02-25

申请人： Yoshihiro Maeda ,  Fusao Ishii ,  Hirokazu Nishino ,  Kazuma Arai

发明人： Yoshihiro Maeda ,  Fusao Ishii ,  Hirokazu Nishino ,  Kazuma Arai

IPC分类号： G09G3/34 ,  G02B26/00

CPC分类号： G02B26/0841

摘要： A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected to the mirror via the elastic hinge, for applying to the mirror an address voltage for independently controlling the deflection of the mirror.

摘要翻译： 微反射镜装置包括布置在基板上的多个反射镜，用于支撑任何每个反射镜以在多个方向上可偏转的弹性铰链，布置成面向反射镜的电极和驱动电路，其连接到 通过弹性铰链反射镜，用于向镜子施加用于独立控制反射镜偏转的地址电压。

公开(公告)号：US07595927B2

公开(公告)日：2009-09-29

申请号：US11823947

申请日：2007-06-29

申请人： Fusao Ishii ,  Yoshihiro Maeda ,  Hirotoshi Ichikawa

发明人： Fusao Ishii ,  Yoshihiro Maeda ,  Hirotoshi Ichikawa

IPC分类号： G02B26/00

CPC分类号： G03B21/14 ,  G03B21/008 ,  H04N9/312 ,  H04N9/3155

摘要： An image projection device receives a light emitted from a light source through an illumination optic for projecting to a spatial light modulator (SLM) having a plurality of deflectable micromirrors The micromirrors further formed with a sub-wavelength microstructure on a reflective surface of the micromirrors having a reflection guided mode resonant grating to take advantage of an ultra-fine processing technology available in recent years used in semiconductor manufacture and micro-machining to fabricate a sub-wavelength grating (SWG) having a pitch between the grating ridges that is smaller than the wavelength of light.

摘要翻译： 图像投影装置通过照明光学器件接收从光源发射的光，以投射到具有多个可偏转微镜的空间光调制器（SLM）。微反射镜还在微反射镜的反射表面上形成有亚波长微结构， 反射引导模式谐振光栅，以利用近年来用于半导体制造和微加工的超细加工技术，以制造在光栅脊之间的间距小于 光的波长。

公开(公告)号：US20090207325A1

公开(公告)日：2009-08-20

申请号：US12381581

申请日：2009-03-12

申请人： Naoya Sugimoto ,  Yoshihiro Maeda ,  Fusao Ishii

发明人： Naoya Sugimoto ,  Yoshihiro Maeda ,  Fusao Ishii

IPC分类号： H04N5/74

CPC分类号： G02B26/0841 ,  G09G3/2014 ,  G09G3/2022 ,  G09G3/2029 ,  G09G3/3413 ,  G09G3/346 ,  G09G2300/0439 ,  G09G2300/0842 ,  G09G2300/0857 ,  G09G2310/0221 ,  G09G2310/0235

摘要： The present invention provides a spatial light modulator, comprising: a pixel array comprising a plurality of pixel elements; a plurality of word lines each connected to a row of pixel elements; a plurality of plate lines; and a plurality of bit lines each connected to a column of pixel elements, wherein each of the pixel elements further comprises a memory and an electrode connected to the memory, wherein the memory is connected to the word line and the word line is further connected to the plate line.

摘要翻译： 本发明提供了一种空间光调制器，包括：包括多个像素元件的像素阵列; 多个字线，各自连接到一行像素元件; 多条板条; 以及多个位线，每个位线连接到一列像素元件，其中每个像素元件还包括存储器和连接到存储器的电极，其中存储器连接到字线，并且字线进一步连接到 板线。

公开(公告)号：US20090207164A1

公开(公告)日：2009-08-20

申请号：US12381484

申请日：2009-03-11

申请人： Naoya Sugimoto ,  Yoshihiro Maeda ,  Kazuma Arai ,  Fusao Ishii

发明人： Naoya Sugimoto ,  Yoshihiro Maeda ,  Kazuma Arai ,  Fusao Ishii

IPC分类号： G09G5/00

CPC分类号： G02B26/0841 ,  H04N9/312

摘要： The present invention provides a spatial light modulator, comprising: a plurality of pixel elements; a first control circuit for supplying control signal data to each of the pixel elements in a time slot having a predetermined time interval to control and apply a first control process to operate the pixel element; and a second control circuit for applying a second control process in the time slot to operate each of the pixel elements wherein the second control process is different from the first control process.

摘要翻译： 本发明提供一种空间光调制器，包括：多个像素元件; 第一控制电路，用于在具有预定时间间隔的时隙中向每个像素元件提供控制信号数据，以控制和应用第一控制处理来操作像素元件; 以及第二控制电路，用于在时隙中施加第二控制处理以操作每个像素元件，其中第二控制处理与第一控制处理不同。

公开(公告)号：US20090201568A1

公开(公告)日：2009-08-13

申请号：US12378656

申请日：2009-02-18

申请人： Fusao Ishii ,  Naoya Sugimoto ,  Hirotoshi Ichikawa ,  Yoshihiro Maeda

发明人： Fusao Ishii ,  Naoya Sugimoto ,  Hirotoshi Ichikawa ,  Yoshihiro Maeda

IPC分类号： G02F1/31

CPC分类号： G02B26/0833

摘要： The present invention provides a spatial light modulator, comprising a mirror modulating a light emitted from a light source, wherein the mirror is further controlled to operate with at least three stationary states whereby an image is projected with a gray scale expression through a combination of modulation of the light operated in the three stationary states.

摘要翻译： 本发明提供了一种空间光调制器，其包括调制从光源发出的光的反射镜，其中所述反射镜被进一步控制为以至少三个静止状态操作，由此通过调制的组合以灰度表达式投射图像 的光在三个固定状态下运行。