COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP
    31.
    发明申请
    COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP 有权
    组合泵系统,包括一个泵和一个泵

    公开(公告)号:US20120014814A1

    公开(公告)日:2012-01-19

    申请号:US13202890

    申请日:2010-03-09

    IPC分类号: H01J41/12

    CPC分类号: F04B37/14 F04B37/02 H01J41/12

    摘要: A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

    摘要翻译: 描述了包括吸气泵和离子泵的组合泵送系统。 吸气泵和离子泵串联安装在相同的法兰上,并且分别布置在其相对侧上,使得吸气剂和离子泵的电导率都朝向真空室中的气体通量源最大化,以便提高真空室的真空度 系统。