Substrate treatment apparatus
    34.
    发明授权
    Substrate treatment apparatus 失效
    基板处理装置

    公开(公告)号:US06955178B1

    公开(公告)日:2005-10-18

    申请号:US10626517

    申请日:2003-07-25

    摘要: A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.

    摘要翻译: 一种基板处理装置,具备:将基板保持在比室温以上的温度下的基板加热装置,通过用处理液润湿含臭氧的气体来生产含湿臭氧的气体的润湿装置,以及供给装置 来自润湿装置的湿臭氧的气体到基板表面上的工件。 供给装置包括气体分散器,其包括在工作对象的宽度方向上成行排列的孔。 相邻行中的孔在垂直于行的方向上彼此不对齐。 气体分散器和基板中的至少一个可以在垂直于行的方向上移动。 气体管道将润湿装置连接到供应装置。 含湿臭氧的气体加热装置将含湿臭氧的气体加热至至少等于基板温度的温度。

    Disk drive
    39.
    发明授权
    Disk drive 失效
    磁盘驱动器

    公开(公告)号:US06865061B2

    公开(公告)日:2005-03-08

    申请号:US10348573

    申请日:2003-01-21

    CPC分类号: G11B5/5569

    摘要: A disk drive is rotatably disposed in a direction vertical to the recording surface of a recording medium. The disk drive comprises a support arm having a head at one side thereof, and a first member which abuts the other end of the support arm, generating a frictional force between the member and the support arm, when the support arm is moved in a direction along the recording surface of the recording medium.

    摘要翻译: 磁盘驱动器可旋转地设置在与记录介质的记录表面垂直的方向上。 磁盘驱动器包括一个支撑臂,该支撑臂在其一侧具有头部,以及第一构件,该第一构件抵靠支撑臂的另一端,当该支撑臂沿该方向移动时,在该构件和该支撑臂之间产生摩擦力 沿着记录介质的记录表面。

    Inertial latching mechanism and information recorder using the mechanism
    40.
    发明申请
    Inertial latching mechanism and information recorder using the mechanism 审中-公开
    惯性闭锁机构和信息记录仪采用机构

    公开(公告)号:US20050013054A1

    公开(公告)日:2005-01-20

    申请号:US10883674

    申请日:2004-07-06

    IPC分类号: G11B5/54 G11B21/12 G11B21/22

    CPC分类号: G11B21/22 G11B5/54

    摘要: An inertial latching mechanism of high reliability, which can be incorporated in a slim profile disk drive or the like information recorders. Describing practically, the mechanism includes freely revolvable inertia arm 6 which couples with actuator 3when head arm is in a shunt position or the vicinity, whereas the coupling is released when the actuator is in proximity with disk 1 or the neighborhood; a drive means for holding inertia arm 6 to a right posture by taking advantage of magnetic pulling force at the place where the inertia arm is released from the coupling with actuator 3. Furthermore, coil arm 9's restriction section 9b and inertia arm 6's contact section 6b are disposed opposed to each other for forming a revolution restriction means which restricts an anti-clockwise revolution of inertia arm 6, as viewed from the above, when coil arm 9's coupling section 9a and inertia arm 6's coupling section 6a are in uncoupled state. The above-configured inertial latching mechanism can be used in a magnetic disk drive, an optical disk drive, a magneto-optical disk drive and other disk information recorders.

    摘要翻译: 一种高可靠性的惯性锁定机构,其可以结合在细长型盘驱动器等信息记录器中。 实际上,该机构包括可自由旋转的惯性臂6,当头臂处于分流位置或附近时,其与致动器3耦合,而当致动器靠近盘1或附近时,联接器被释放; 通过利用从致动器3的联轴器释放惯性臂的位置处的磁力拉力,将惯性臂6保持在正确的姿势的驱动装置。此外,线圈臂9的限制部分9b和惯性臂6的接触部分6b 当线圈臂9的联接部分9a和惯性臂6的联接部分6a处于非耦合状态时,形成一个限制惯性臂6的逆时针旋转的旋转限制装置,如上所述。 上述配置的惯性闭锁机构可用于磁盘驱动器,光盘驱动器,磁光盘驱动器和其他盘信息记录器中。