公开(公告)号：US06592080B2

公开(公告)日：2003-07-15

申请号：US10224053

申请日：2002-08-20

申请人： Masanao Murata ,  Senzo Kyutoku ,  Hisashi Onishi

发明人： Masanao Murata ,  Senzo Kyutoku ,  Hisashi Onishi

IPC分类号： B61L2300

CPC分类号： B61L23/041 ,  B61L23/005

摘要： An object of the present invention is to improve the transportation efficiency of an automatic transport system for transporting an article. In order to attain the above object, the automatic transport system of the present invention comprises a front detecting device which detects an obstruction in a non-contact state in an area through which an automatic transport vehicle passes and a projection surface of said automatic transport vehicle, and when said front detecting device detects the obstruction in said area, the running speed of said automatic transport vehicle is reduced or said automatic transport vehicle is stopped.

公开(公告)号：US06427824B1

公开(公告)日：2002-08-06

申请号：US09446194

申请日：1999-12-17

申请人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

发明人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

IPC分类号： B65G3700

CPC分类号： B66C7/12 ,  B66C11/06 ,  B66C11/08 ,  Y10S414/14

摘要： An overhead conveyance device and an overhead conveyance vehicle that can convey a conveying object, while keeping it at a minimum distance from surrounding equipment when the overhead conveying vehicle turns around during conveyance of the conveying object. The overhead conveyance device (1) is so structured that even when a carriage part (6) of the overhead conveyance vehicle (5) enters a branching part (3) for allowing the carriage part to change in traveling direction and turns around, the conveying object (25) grasped by a hand (9) can be kept unchanged in direction.

摘要翻译： 一种架空输送装置和架空输送车辆，其能够在输送物体的输送期间在架空输送车辆转过时将输送物体输送到与周围设备的最小距离处。 架空输送装置（1）的结构使得即使当顶棚运输车辆（5）的托架部分（6）进入分支部分（3）以允许托架部分在行进方向上改变并转动时，输送 用手（9）抓住的物体（25）可以在方向上保持不变。

公开(公告)号：US06152669A

公开(公告)日：2000-11-28

申请号：US747113

申请日：1996-11-08

申请人： Teruya Morita ,  Masanao Murata ,  Hitoshi Kawano ,  Tsuyoshi Tanaka ,  Hiroyuki Oyobe ,  Toshiyuki Takaoka

发明人： Teruya Morita ,  Masanao Murata ,  Hitoshi Kawano ,  Tsuyoshi Tanaka ,  Hiroyuki Oyobe ,  Toshiyuki Takaoka

IPC分类号： B65D85/86 ,  H01L21/673 ,  H01L21/677 ,  B65G49/07

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/139 ,  Y10S414/14

摘要： A mechanical interface apparatus which is capable of loading semiconductor wafers stored in a sealed container into a processing apparatus without adversely affecting the surfaces of the semiconductor wafers due to exposure to external air or dust. When a sealed container 100 is placed on top of a processing apparatus 200, latch mechanisms 201 are activated to engage with a flange 103, so as to affix the container body 101. Then, valves 3 and 5 are opened to perform a gas purge, after which a drive mechanism provided inside a lock operating mechanism 220 is operated in order to withdraw lock arms 111 from concave portions 103a, thereby unlocking the bottom lid 110. Then, wafer cassettes 106 inside the container are lowered to a predetermined position by means of an in-apparatus elevator mechanism 202, and the wafer cassettes are loaded into the processing apparatus 200 by a cassette loading mechanism.

摘要翻译： 一种机械接口装置，其能够将存储在密封容器中的半导体晶片装载到处理设备中，而不会由于暴露于外部空气或灰尘而不利地影响半导体晶片的表面。 当将密封容器100放置在处理装置200的顶部时，闩锁机构201被启动以与凸缘103接合，以便固定容器主体101.然后，打开阀3和5以进行气体吹扫， 之后，设置在锁定操作机构220内部的驱动机构，以将锁定臂111从凹部103a中撤出，从而解锁底盖110.然后，容器内部的晶片盒106通过 装置内电梯机构202，并且晶片盒通过盒装载机构装载到处理装置200中。

公开(公告)号：US6092678A

公开(公告)日：2000-07-25

申请号：US323833

申请日：1999-06-02

申请人： Hitoshi Kawano ,  Masanao Murata ,  Susumu Nakagawa ,  Motonori Inagaki ,  Toshiyuki Takaoka

发明人： Hitoshi Kawano ,  Masanao Murata ,  Susumu Nakagawa ,  Motonori Inagaki ,  Toshiyuki Takaoka

IPC分类号： B25J13/08 ,  B65G17/20 ,  B66C13/18 ,  B66C13/48

CPC分类号： H01L21/67733 ,  H01L21/67736 ,  H01L21/681

摘要： In an overhead hoist transfer having a moving carriage with a hand portion, which holds a load, elevatably suspended therefrom; and a means for teaching an appointed stop position on a placement base, on which said load is placed, to said moving carriage, LEDs 7a and 7b are installed at the hand portion 6, and a position detecting portion 12 consisting of a lens 12a and PSD 12b is installed at the placement base 53 side, in order to automatically and accurately enable a teaching of position correcting data in a short time without use of any manpower. Further, a teaching portion is installed, which detects a deviation between the present stop position and the above appointed stop position on the basis of the relative position of the hand portion 6 with respect to the placement base, which is obtained by the position detecting portion 12, and carries out a teaching to the moving carriage by, for example, radio, whereby it is not necessary for an operator to carry out a teaching by actually moving the hand portion, wherein it is possible to accurately carry out a teaching of position correcting data in a short time.

摘要翻译： 在具有具有手部的移动的支架的顶架式起重机转移中，其保持负载，可升降地悬挂在其上; 以及用于在所述移动托架上放置所述载荷的放置基座上指定指定的停止位置的装置，LED 7a和7b安装在手部6处，以及位置检测部分12，由透镜12a和 PSD 12b安装在放置基座53侧，以便在短时间内自动且准确地实现位置校正数据的教导而不使用任何人力。 此外，安装示教部，其基于由手部6相对于配置基座的相对位置来检测当前停止位置与上述指定停止位置之间的偏差，该位置由位置检测部 如图12所示，通过例如无线电向移动托架进行教导，由此操作者不需要通过实际移动手部来执行教导，其中可以准确地执行位置的教导 在短时间内纠正数据。

公开(公告)号：US6019563A

公开(公告)日：2000-02-01

申请号：US59361

申请日：1998-04-14

申请人： Masanao Murata ,  Tatsuo Tsubaki ,  Hitoshi Kawano

发明人： Masanao Murata ,  Tatsuo Tsubaki ,  Hitoshi Kawano

IPC分类号： B23Q7/14 ,  B25J5/00 ,  B25J5/02 ,  B65G49/07 ,  H01L21/00 ,  H01L21/677 ,  B25J19/00

CPC分类号： H01L21/67724 ,  B23Q7/1436 ,  B23Q7/1442 ,  B25J5/007 ,  B25J5/02 ,  H01L21/67259 ,  H01L21/67736 ,  G05B2219/37286 ,  G05B2219/40203 ,  G05B2219/50393 ,  Y10S414/14

摘要： An automated guided vehicle includes a transporting portion having an upper surface and a driving device, the transporting portion being movable by the driving device; a transferring device provided on the upper surface of the transporting portion, the transferring device being capable of transferring a workpiece to or from an apparatus; and a mounting portion formed on the upper surface of the transporting portion, the mounting portion having at least two opening portions which allow an operation for transferring the workpiece. In the automated guided vehicle, photosensors are respectively arranged on the opening portions to detect an object which intrudes into a predetermined area or projects from the predetermined area, and a control device monitors a state of the photosensors and controls the transferring device or the driving device in accordance with the state of the photosensors.

摘要翻译： 一种自动引导车包括具有上表面和驱动装置的传送部分，该传送部分可由驱动装置移动; 传送装置，其设置在所述传送部的上表面上，所述传送装置能够将工件传送到设备或从设备传送; 以及形成在所述输送部的上表面上的安装部，所述安装部具有至少两个开口部，所述至少两个开口部允许用于传送所述工件的操作。 在自动导引车辆中，光敏传感器分别布置在开口部分上以检测入侵到预定区域中的物体或从预定区域突出的物体，并且控制装置监视光传感器的状态并控制传送装置或驱动装置 按照照相机的状态。

公开(公告)号：US5743424A

公开(公告)日：1998-04-28

申请号：US582727

申请日：1996-01-04

申请人： Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita

发明人： Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita

IPC分类号： B65D81/20 ,  B01D46/00 ,  H01L21/02 ,  H01L21/673 ,  B65D51/16

CPC分类号： H01L21/67373

摘要： A sealable container for accommodating semiconductor wafers, which includes a hollow main body having an opening for receiving or removing the semiconductor wafers, a lid member for plugging the opening, a lock for locking and releasing the lid member in the opening of said main body, and a pressure-equalizing mechanism for allowing an interior portion of the main body to be communicable with an exterior portion thereof in cooperation with the lock.

摘要翻译： 一种用于容纳半导体晶片的可密封容器，其包括具有用于接收或移除半导体晶片的开口的中空主体，用于封闭开口的盖构件，用于在所述主体的开口中锁定和释放盖构件的锁， 以及压力均衡机构，用于允许主体的内部部分与锁的协调的外部部分连通。

公开(公告)号：US5621982A

公开(公告)日：1997-04-22

申请号：US329904

申请日：1994-10-27

申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Mitsuhiro Hayashi ,  Atsushi Okuno ,  Akio Nakamura

发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Mitsuhiro Hayashi ,  Atsushi Okuno ,  Akio Nakamura

IPC分类号： H01L21/68 ,  F26B21/14 ,  F26B25/00 ,  H01L21/00 ,  H01L21/677 ,  F26B19/00

CPC分类号： F26B21/14 ,  F26B25/001 ,  H01L21/67057 ,  H01L21/67769 ,  H01L21/67772

摘要： Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

摘要翻译： 公开了一种电子基板处理系统，包括用于处理包括半导体晶片和液晶基板的电子基板的处理设备; 用于在预定处理步骤中清洁所述电子基板的清洁设备; 用于容纳包含所述电子基板的盒的便携式密闭容器; 用于吹扫所述便携式密闭容器的清洗站; 以及用于存储所述便携式封闭容器的存储构件，其中所述盒容纳已经被所述清洁设备清洁的所述电子基板设置在所述便携式密闭容器中并在所述清洗站中用惰性气体吹扫，并且所述便携式密闭容器或 必要时将容器储存在所述储存部分中。

公开(公告)号：US5220263A

公开(公告)日：1993-06-15

申请号：US675482

申请日：1991-03-26

申请人： Masanori Onishi ,  Hidemitsu Tabata ,  Teppei Yamashita ,  Masanao Murata

发明人： Masanori Onishi ,  Hidemitsu Tabata ,  Teppei Yamashita ,  Masanao Murata

IPC分类号： B60K1/04 ,  B25J5/00 ,  B25J9/18 ,  B25J13/00 ,  B25J19/00 ,  B60L11/18 ,  G05B19/418 ,  G05D1/02

CPC分类号： G05B19/41895 ,  G05D1/0225 ,  G05D1/0265 ,  G05D1/0297 ,  G05B2219/31003 ,  G05B2219/31004 ,  G05D1/0274 ,  G05D2201/0216

摘要： A moving robot system, employing a charging control system for robots, is configured by plural moving robots, at least one charging station and a control station. Each moving robot is designed to perform an operation thereof in accordance with programs stored therein under control of the control station. When the power of a charging-type-battery equipped in each moving robot is consumed and lowered to the predetermined level, it automatically moves to its nearest charging station designated by the control station other than the charging station which is used for another moving robot. In this case, the control station controls the moving robots such that plural moving robots are not simultaneously concentrated to one charging station.

摘要翻译： 使用机器人的充电控制系统的移动机器人系统由多个移动机器人，至少一个充电站和控制站构成。 每个移动机器人被设计成在控制台的控制下根据存储在其中的程序执行其操作。 当每个移动机器人中装备的充电电池的功率被消耗并降低到预定水平时，它自动地移动到除了用于另一个移动机器人的充电站之外的控制站指定的最近的充电站。 在这种情况下，控制站控制移动机器人，使得多个移动机器人不能同时集中到一个充电站。

公开(公告)号：US20080217278A1

公开(公告)日：2008-09-11

申请号：US12045060

申请日：2008-03-10

申请人： Masanao Murata

发明人： Masanao Murata

IPC分类号： B66C19/00 ,  B66C1/10

CPC分类号： B66C1/28 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14

摘要： A suspended type transporting carriage (16) is provided with: a gripping mechanism (22) for gripping a transported object (17); a hoisting mechanism (21) for hoisting the gripping mechanism; and a traveling mechanism (60), on which the hoisting mechanism is mounted in a suspended condition, for traveling on a rail (20) installed on or near a ceiling. The gripping mechanism is provided with (i) an elongating and contracting device (23) capable of horizontally elongating and contracting and (ii) a gripping device (24) disposed at a tip portion of the elongating and contracting device for selectively gripping the transported object.

摘要翻译： 悬挂式运输托架（16）设有：夹持输送物体（17）的夹紧机构（22）。 用于提升夹持机构的提升机构（21）; 以及行驶机构（60），所述提升机构在悬挂状态下安装，用于在安装在天花板上或附近的轨道（20）上行驶。 夹持机构设置有（i）能够水平伸长和收缩的伸长和收缩装置（23）和（ii）设置在伸长和收缩装置的末端部分的夹紧装置（24），用于选择性地夹紧输送物体 。

公开(公告)号：US07365768B1

公开(公告)日：2008-04-29

申请号：US09483883

申请日：2000-01-18

申请人： Mitsunobu Ono ,  Masanao Murata

发明人： Mitsunobu Ono ,  Masanao Murata

IPC分类号： H04N7/18

CPC分类号： H04N9/735 ,  A61B1/042 ,  G02B23/2476 ,  H04N5/232 ,  H04N7/183 ,  H04N2005/2255

摘要： An endoscope includes an insert section, a CCD is mounted at the end of the insert section, and a CCU for producing a video signal is arranged in a control unit connected to a proximal end of the insert unit. The CCU includes a general-purpose DSP board having the function of producing a standard video signal, and a function adjustment/expansion circuit board for correcting a signal delay due to the length of a signal line connected to the CCD. The DSP boards and the function adjustment/expansion circuit boards, respectively remaining the same in circuit arrangement, are used for a plurality of types of endoscopes having insert sections having different insertion lengths.

摘要翻译： 内窥镜包括插入部，CCD安装在插入部的端部，并且用于产生视频信号的CCU布置在连接到插入单元的近端的控制单元中。 CCU包括具有产生标准视频信号的功能的通用DSP板，以及用于校正由连接到CCD的信号线的长度引起的信号延迟的功能调整/扩展电路板。 DSP板和功能调整/扩展电路板分别保持相同的电路布置，用于具有插入部分具有不同插入长度的多种类型的内窥镜。