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公开(公告)号：US20060029834A1
公开(公告)日：2006-02-09
申请号：US11187912
申请日：2005-07-25
申请人： Takahiro Suwa , Kazuya Shimakawa
发明人： Takahiro Suwa , Kazuya Shimakawa
IPC分类号： G11B5/706
CPC分类号： G11B5/855
摘要： A magnetic recording medium in which a recording layer is formed in a predetermined concavo-convex pattern and recording and reproducing apparatus comprising the magnetic recording medium are disclosed. The magnetic recording medium has a high areal density and high reliability since the occurrence of a crash of a magnetic head is suppressed. The magnetic recording medium comprises a recording layer formed over a substrate in a predetermined concavo-convex pattern to form recording elements as a convex portion of the concavo-convex pattern and a non-magnetic filler element filled in a concave portion between the recording elements. In this configuration, the top surface of the filler element is formed in a shape partially recessed toward the substrate side to form a groove having a width smaller than the width of the concave portion on the surface of the magnetic recording medium.
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32.发明授权公开(公告)号：US07940494B2
公开(公告)日：2011-05-10
申请号：US12003919
申请日：2008-01-03
申请人： Takahiro Suwa , Kazuya Shimakawa
发明人： Takahiro Suwa , Kazuya Shimakawa
IPC分类号： G11B5/33
摘要： The magnetic recording medium includes a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer. Surface steps are formed in an outer area including a radially outermost portion of a recording area. Each surface step is formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element. The surface steps are formed such that the recording area can be sectioned into an annular area adjoining the outer area and the outer area where height of the surface steps is larger than that in the annular area.
摘要翻译： 磁记录介质包括基板和在基板上以预定的凹凸图案形成的记录层，记录层包括各自形成为记录层的凸部的记录元件。 表面台阶形成在包括记录区域的径向最外侧部分的外部区域中。 每个表面台阶形成为使得记录元件之间的凹部上方的部分朝向基板凹陷到记录元件上方的一个以下的水平。 表面台阶形成为使得记录区域可以被分割成与外部区域相邻的环形区域和表面台阶的高度大于环形区域中的高度的外部区域。
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公开(公告)号：US07741229B2
公开(公告)日：2010-06-22
申请号：US11297353
申请日：2005-12-09
申请人： Takahiro Suwa , Shuichi Okawa , Kazuya Shimakawa
发明人： Takahiro Suwa , Shuichi Okawa , Kazuya Shimakawa
IPC分类号： H01L21/302
摘要： A method for manufacturing a magnetic recording medium is provided, which can manufacture a magnetic recording medium that includes a recording layer having a concavo-convex pattern and has a sufficiently flat surface. The method includes the steps of: forming an object to be processed including a recording layer having a predetermined concavo-convex pattern formed over a substrate and a first mask layer (temporary underlying material) formed at least on recording elements (convex portions) of the recording layer; depositing a filling material on the object to be processed to fill concave portions; removing a part of the filling material by dry etching to expose at least side faces of the first mask layer; and removing the first mask layer by an etching method in which an etching rate of the first mask layer is higher than that of the filling material to flatten a surface.
摘要翻译： 提供一种制造磁记录介质的方法，其可以制造包括具有凹凸图案的记录层并具有足够平坦表面的磁记录介质。 该方法包括以下步骤：形成待处理对象，其包括在基板上形成具有预定凹凸图案的记录层，以及至少形成在所述记录元件（凸起部分）上的第一掩模层 记录层 将填充材料沉积在待处理物体上以填充凹部; 通过干蚀刻去除一部分填充材料以暴露第一掩模层的至少侧面; 并且通过蚀刻方法去除第一掩模层，其中第一掩模层的蚀刻速率高于填充材料的蚀刻速率以使表面变平。
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34.发明授权公开(公告)号：US07682711B2
公开(公告)日：2010-03-23
申请号：US11352376
申请日：2006-02-13
申请人： Kazuhiro Hattori , Takahiro Suwa
发明人： Kazuhiro Hattori , Takahiro Suwa
IPC分类号： G11B5/65
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49155
摘要： A magnetic recording medium is provided which includes a recording layer formed in a concavo-convex pattern including recording elements formed as convex portions, provides a good flying performance of a magnetic head, and has high reliability. A magnetic recording and reproducing apparatus including that magnetic recording medium and a manufacturing method of that magnetic recording medium are also provided. The magnetic recording medium includes: the recording layer formed in a predetermined concavo-convex pattern over a substrate, the recording elements being formed as convex portions of the concavo-convex pattern; filling elements with which concave portions between the recording elements are filled; a conductive film which has a smaller electric resistivity than the filling elements and is formed over the filling elements; and a protective layer which covers the recording elements and the filling elements and is in contact with an upper surface of the conductive film.
摘要翻译： 提供一种磁记录介质，其包括形成为凹凸图案的记录层，其包括形成为凸部的记录元件，提供了良好的磁头飞行性能，并且具有高可靠性。 还提供了包括该磁记录介质和该磁记录介质的制造方法的磁记录和重放装置。 磁记录介质包括：在衬底上以预定的凹凸图案形成的记录层，记录元件形成为凹凸图案的凸部; 用于填充记录元件之间的凹部的填充元件; 导电膜，其具有比填充元件更小的电阻率，并形成在填充元件上; 以及覆盖记录元件和填充元件并与导电膜的上表面接触的保护层。
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35.发明申请Magnetic recording medium, magnetic recording and reproducing apparatus, and method for manufacturing magnetic recording medium 审中-公开磁记录介质，磁记录和再现装置以及磁记录介质的制造方法公开(公告)号：US20090168244A1
公开(公告)日：2009-07-02
申请号：US12314996
申请日：2008-12-19
摘要： The magnetic recording medium includes: a substrate; a recording layer formed in a predetermined concavo-convex pattern over the substrate, the concavo-convex pattern including a convex portion that serves as a recording element; and a filling portion that fills a concave portion between the recording elements. The filling portion comprises a metal-based main filling material and nitrogen. Nitrogen is unevenly distributed in the filling portion such that the ratio of the number of nitrogen atoms to the total number of atoms of the main filling material and nitrogen atoms is greater in the upper surface portion of the filling portion than in the lower portion thereof.
摘要翻译： 磁记录介质包括：基板; 在基板上形成为预定的凹凸图案的记录层，所述凹凸图案包括用作记录元件的凸部; 以及填充部分，其填充记录元件之间的凹部。 填充部分包括基于金属的主填充材料和氮气。 氮在填充部分中不均匀地分布，使得填充部分的上表面部分中的氮原子数与主填充材料和氮原子的总原子数之比大于其下部。
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36.发明申请公开(公告)号：US20080170318A1
公开(公告)日：2008-07-17
申请号：US12004074
申请日：2007-12-20
申请人： Takahiro Suwa , Kazuya Shimakawa
发明人： Takahiro Suwa , Kazuya Shimakawa
IPC分类号： G11B5/09
摘要： The magnetic recording medium includes a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, and the recording layer includes recording elements each formed as a convex portion of the recording layer. Surface steps are formed in an inner area including a radially innermost portion of a recording area. Each surface step is formed in such a manner that a portion over a concave portion between the recording elements is recessed toward a substrate to a level below a portion over the recording element. The surface steps are formed such that the recording area can be sectioned into an annular area adjoining the inner area and the inner area where height of the surface steps is larger than that in the annular area.
摘要翻译： 磁记录介质包括在基板上形成为预定的凹凸图案的基板和记录层，记录层包括各自形成为记录层的凸部的记录元件。 在包括记录区域的径向最内部的内部区域中形成表面台阶。 每个表面台阶形成为使得记录元件之间的凹部上方的部分朝向基板凹陷到记录元件上方的一级以下。 表面台阶形成为使得记录区域可以被分割成与内部区域相邻的环形区域和表面台阶的高度大于环形区域中的高度的内部区域。
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公开(公告)号：US07273563B2
公开(公告)日：2007-09-25
申请号：US11048728
申请日：2005-02-03
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
IPC分类号： H01F1/00
摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.
摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以有效地制造包括形成为凹凸图案的记录层并且具有良好的记录和再现特性的磁记录介质。 该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以填充凹凸图案的凹部， 磁性材料; 以及通过干蚀刻去除记录层上方的非磁性材料的多余部分以平坦化非磁性材料和记录层的表面的平整步骤。 扁平化步骤包括前一个平整步骤和后整理步骤。
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38.发明申请公开(公告)号：US20060172154A1
公开(公告)日：2006-08-03
申请号：US11222761
申请日：2005-09-12
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/65
CPC分类号： G11B5/855
摘要： The magnetic recording medium includes: recording elements formed as the convex portions of the recording layer formed in the predetermined concavo-convex pattern over a substrate; and a filling elements with which a concave portions between the recording elements are filled. A surface concave portion is formed in a surface of the magnetic recording medium above the recording element. The surface concave portion has a cross-sectional shape of which a portion corresponding to a center of the recording element lying thereunder in a width direction thereof is recessed deepest toward the substrate, and has a width monotonically increasing with increase of a distance from the substrate.
摘要翻译： 磁记录介质包括：在衬底上形成为以预定凹凸图案形成的记录层的凸部的记录元件; 以及填充元件，通过该填充元件填充记录元件之间的凹部。 表面凹部形成在记录元件上方的磁记录介质的表面上。 表面凹部具有截面形状，其与位于其下方的记录元件的沿其宽度方向的中心相对应的部分最深地朝向衬底凹入，并且随着距离衬底的距离的增加而具有单调增加的宽度 。
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公开(公告)号：US20060124585A1
公开(公告)日：2006-06-15
申请号：US11297353
申请日：2005-12-09
申请人： Takahiro Suwa , Shuichi Okawa , Kazuya Shimakawa
发明人： Takahiro Suwa , Shuichi Okawa , Kazuya Shimakawa
摘要： A method for manufacturing a magnetic recording medium is provided, which can manufacture a magnetic recording medium that includes a recording layer having a concavo-convex pattern and has a sufficiently flat surface. The method includes the steps of: forming an object to be processed including a recording layer having a predetermined concavo-convex pattern formed over a substrate and a first mask layer (temporary underlying material) formed at least on recording elements (convex portions) of the recording layer; depositing a filling material on the object to be processed to fill concave portions; removing a part of the filling material by dry etching to expose at least side faces of the first mask layer; and removing the first mask layer by an etching method in which an etching rate of the first mask layer is higher than that of the filling material to flatten a surface.
摘要翻译： 提供了一种用于制造磁记录介质的方法，其可以制造包括具有凹凸图案并具有足够平坦表面的记录层的磁记录介质。 该方法包括以下步骤：形成待处理对象，其包括在基板上形成具有预定凹凸图案的记录层，以及至少形成在所述记录元件（凸起部分）上的第一掩模层 记录层 将填充材料沉积在待处理物体上以填充凹部; 通过干蚀刻去除一部分填充材料以暴露第一掩模层的至少侧面; 并且通过蚀刻方法去除第一掩模层，其中第一掩模层的蚀刻速率高于填充材料的蚀刻速率以使表面变平。
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40.发明申请公开(公告)号：US20050199581A1
公开(公告)日：2005-09-15
申请号：US11015670
申请日：2004-12-20
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
CPC分类号： G11B5/855
摘要： A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.
摘要翻译： 用于填充凹凸图案的凹部的方法，通过该凹凸图案填充凹凸图案的凹部以可靠地使表面平坦化的方法，以及制造磁记录介质的方法，通过该方法具有 可以有效地制造具有足够平坦表面的凹凸图案的磁记录层。 用于填充凹部的填充剂沉积在待处理物体的表面上，该物体具有凹凸图案。 在填料上进一步沉积包层。 然后，通过使用对填料具有较低蚀刻速率的干式蚀刻方法，除去填充物的多余部分和物体表面上方的包层以进行平坦化。
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