公开(公告)号：US20210202824A1

公开(公告)日：2021-07-01

申请号：US17205062

申请日：2021-03-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya KUROKAWA ,  Shinsuke IKEUCHI ,  Yoichi MOCHIDA ,  Seiji UMEZAWA ,  Nobuyoshi ADACHI ,  Yutaka KISHIMOTO

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/113 ,  H01L41/187

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

公开(公告)号：US20210146402A1

公开(公告)日：2021-05-20

申请号：US17161726

申请日：2021-01-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI ,  Katsumi FUJIMOTO ,  Tetsuya KIMURA ,  Fumiya KUROKAWA

IPC: B06B1/06 ,  H01L41/047 ,  H01L41/08 ,  H01L41/09

Abstract: A MEMS device includes a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in a membrane portion. The first electrode is covered with the first layer and includes a recess. The piezoelectric layer includes a through hole that passes through the piezoelectric layer between a surface of the piezoelectric layer, which is opposite to the first direction, and the recess at a position corresponding to at least a portion of the first electrode.

公开(公告)号：US20210143315A1

公开(公告)日：2021-05-13

申请号：US17153916

申请日：2021-01-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka KISHIMOTO ,  Shinsuke IKEUCHI

IPC: H01L41/113 ,  H01L41/18 ,  H01L41/047 ,  H01L41/09

Abstract: A piezoelectric device includes a base portion and a membrane portion. The membrane portion is indirectly supported by the base portion, and is located on the upper side relative to the base portion. The membrane portion includes a plurality of layers. The membrane portion does not overlap with the base portion, and includes a single crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The membrane portion is provided with a through-groove penetrating in the up-down direction. The through-groove includes a first step portion provided in the thickest layer among the plurality of layers defining the membrane portion. The width of the through-groove is narrower on a lower side than on an upper side with the first step portion as a boundary.

公开(公告)号：US20200168787A1

公开(公告)日：2020-05-28

申请号：US16777926

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke IKEUCHI ,  Tetsuya KIMURA ,  Katsumi FUJIMOTO ,  Yutaka KISHIMOTO ,  Fumiya KUROKAWA

IPC: H01L41/09 ,  H01L41/257 ,  H01L41/047 ,  H01L41/083 ,  H01L41/08 ,  H01L41/053

Abstract: A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.