公开(公告)号：US06265793B1

公开(公告)日：2001-07-24

申请号：US09438524

申请日：1999-11-12

申请人： Nobushige Korenaga

发明人： Nobushige Korenaga

IPC分类号： H02K4100

CPC分类号： H02K15/045 ,  G03F7/70758 ,  H02K3/04 ,  H02K41/03

摘要： A conductive foil is wound into a roll to provide a roll coil, and the roll coil is cut along wire paths, whereby a flat coil with a level difference is produced. Similarly, a flat coil without a level difference is sliced from the roll coil. The flat coil with a level difference and the flat coil without a level difference are then disposed with partial overlapping, while magnet side faces of the coils become coplanar with each other, to provide a unit coil. A plurality of unit coils can be placed juxtaposed with each other, to provide a stator for a linear motor. The number of working operations is reduced significantly, and the reliability of the coil itself is improved.

摘要翻译： 将导电箔缠绕成卷以提供卷线圈，并且沿线路切割卷线圈，由此产生具有电平差的扁平线圈。 类似地，没有电平差的扁平线圈从卷线圈切片。 然后将具有电平差的扁平线圈和没有电平差的扁平线圈布置成部分重叠，同时线圈的磁体侧面彼此共面，以提供单元线圈。 多个单元线圈可以彼此并置放置，以提供用于线性马达的定子。 工作量明显减少，线圈本身的可靠性得到提高。

公开(公告)号：US6157159A

公开(公告)日：2000-12-05

申请号：US240846

申请日：1999-02-01

申请人： Nobushige Korenaga ,  Shuichi Yabu

发明人： Nobushige Korenaga ,  Shuichi Yabu

IPC分类号： B65G35/06 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  B64C17/06

CPC分类号： G03F7/70358 ,  G03F7/70716 ,  Y10S414/136

摘要： A stage system includes a stage movable along a path, a first driving mechanism for accelerating or decelerating the stage on the basis of a resilience force of a resilient member, a first holding mechanism for holding a resilience force being accumulated through compression of the resilient member of the first driving mechanism, and a second holding mechanism for holding a resilience force being accumulated through extension of the resilient member of the first driving mechanism, wherein resilience energy of the resilient member is used for stage acceleration, which is very effective to prevent large heat generation, and wherein resilient energy accumulated in the resilient member during deceleration is used for subsequent stage acceleration, which is very effective for energy efficiency and for heat generation suppression.

摘要翻译： 舞台系统包括可沿着路径移动的舞台，用于基于弹性构件的弹力加速或减速舞台的第一驱动机构，用于保持通过弹性构件的压缩而积聚的弹力的第一保持机构 以及第二保持机构，用于保持通过第一驱动机构的弹性构件的延伸而积聚的弹力，其中弹性构件的弹性能用于载物台加速，这对于防止大的 发热，并且其中在减速期间积聚在弹性构件中的弹性能量用于后续加速，这对于能量效率和发热抑制非常有效。

公开(公告)号：US6037680A

公开(公告)日：2000-03-14

申请号：US121112

申请日：1998-07-23

申请人： Nobushige Korenaga ,  Ryuichi Ebinuma

发明人： Nobushige Korenaga ,  Ryuichi Ebinuma

IPC分类号： B23Q5/28 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  H02K41/03 ,  H02K41/035 ,  H02K41/00 ,  H02K41/02

CPC分类号： G03F7/70358 ,  G03F7/70725 ,  G03F7/70758 ,  H01L21/682 ,  H02K41/031 ,  H02K41/0356 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/3175

摘要： A linear motor includes a single-phase coil, a plurality of polyphase coils each of which is shorter than the single-phase coil and wound to be parallel to the single-phase coil, a first permanent magnet movable relative to the single-phase coil and the plurality of polyphase coils in an axial direction of the single-phase coil, a first yoke consisting of a ferromagnetic substance and extending through the single-phase coil in the axial direction, a second yoke consisting of a ferromagnetic substance and having, outside the single-phase coil, a portion arranged to be parallel to the first yoke, to form a closed magnetic circuit together with the first yoke and the first permanent magnet such that the closed magnetic circuit circulates magnetic fluxes from the first permanent magnet across a winding of the single-phase coil, and a second permanent magnet for connecting the first and second yokes.

摘要翻译： 线性电动机包括单相线圈，多个多相线圈，其每一个都短于单相线圈并缠绕成平行于单相线圈;第一永磁体，其可相对于单相线圈 所述单相线圈的轴向上的多个多相线圈，由铁磁性物质构成并沿轴向延伸通过单相线圈的第一磁轭，由铁磁性物质构成的第二磁轭，具有外部 所述单相线圈是与所述第一磁轭平行的部分，与所述第一磁轭和所述第一永磁体一起形成闭合磁路，使得所述闭合磁路使来自所述第一永久磁铁的磁通量绕过绕组 的单相线圈和用于连接第一和第二轭的第二永磁体。

公开(公告)号：US20110159189A1

公开(公告)日：2011-06-30

申请号：US12971696

申请日：2010-12-17

申请人： Hirohito Ito ,  Nobushige Korenaga ,  Makoto Miyazaki

发明人： Hirohito Ito ,  Nobushige Korenaga ,  Makoto Miyazaki

IPC分类号： B05D3/12 ,  B05C11/02

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

摘要： An imprint apparatus is disclosed that forms, by pressing a resin applied onto a substrate and a mold against each other, a pattern on the substrate. The imprint apparatus includes a substrate stage that holds the substrate, and a control unit for controlling the position of the stage by outputting a manipulating variable on the basis of a position error between a position of the stage which has been measured by position measurement unit and a target position. The control unit reduces a ratio of the manipulating variable to the position error while the substrate and the mold are in contact with each other until mold release.

摘要翻译： 公开了一种压印装置，其通过将施加到基板和模具上的树脂彼此压制在基板上形成图案。 压印装置包括保持基板的基板台，以及控制单元，其通过基于由位置测量单元测量的台的位置与位置误差之间的位置误差输出操作变量来控制台的位置;以及控制单元， 目标位置。 控制单元减少操作变量与位置误差的比率，同时基板和模具彼此接触直到脱模。

公开(公告)号：US07383929B2

公开(公告)日：2008-06-10

申请号：US10782785

申请日：2004-02-23

申请人： Nobushige Korenaga

发明人： Nobushige Korenaga

IPC分类号： F16F7/10

CPC分类号： H02K41/031 ,  F16F15/03 ,  H02K7/09 ,  H02K2201/18

摘要： An anti-vibration apparatus includes a first magnet unit arranged on a support target and including a first permanent magnet, and a second magnet unit including a pair of second permanent magnets. The pair of second permanent magnets is arranged to interpose the first permanent magnet without contact such that the same magnetic poles of the first and second permanent magnets oppose each other. Sizes of the first and second magnet units are set such that a force acting between the first and second magnet units in a direction perpendicular to a direction in which the first magnet unit supports the support target is zero in a relative positional range between the first and second magnet units.

摘要翻译： 防振装置包括布置在支撑目标上并包括第一永磁体的第一磁体单元和包括一对第二永磁体的第二磁体单元。 所述一对第二永久磁铁布置成使第一永久磁铁不接触地插入，使得第一和第二永磁体的相同磁极彼此相对。 第一和第二磁体单元的尺寸被设定为使得在与第一磁体单元支撑支撑目标的方向垂直的方向上在第一和第二磁体单元之间作用的力在第一和第二磁体单元之间的相对位置范围内为零 第二磁体单元。

公开(公告)号：US20060202568A1

公开(公告)日：2006-09-14

申请号：US11415175

申请日：2006-05-02

申请人： Nobushige Korenaga

发明人： Nobushige Korenaga

IPC分类号： H02K41/00 ,  G03B27/42

CPC分类号： G03F7/70758 ,  H02K3/47 ,  H02K16/02 ,  H02K41/031 ,  H02K2201/18

摘要： An aligning apparatus includes a moving member, a magnetic member arranged vertically above the moving member, a stator unit which is arranged vertically below the moving member and has a plurality of coils, a first magnet unit which is provided to the moving member and generates a force with the magnetic member, and a second magnet unit which is provided to the moving member and generates a force with the stator unit.

摘要翻译： 一种定位装置，包括移动构件，垂直于移动构件上方布置的磁性构件，定子单元，其垂直地设置在移动构件的下方并具有多个线圈;第一磁体单元，设置在移动构件上， 与磁性构件的力，以及设置在移动构件上并与定子单元产生力的第二磁体单元。

公开(公告)号：US07075198B2

公开(公告)日：2006-07-11

申请号：US11178568

申请日：2005-07-12

申请人： Nobushige Korenaga

发明人： Nobushige Korenaga

IPC分类号： H02K41/02

CPC分类号： G03F7/70758 ,  H02K9/19 ,  H02K16/00 ,  H02K16/02 ,  H02K41/031 ,  H02K2201/18 ,  H02N15/02

摘要： An exposure apparatus that includes a first movable stage which holds a first wafer and aligns the first wafer at a predetermined position, a second movable stage which holds a second wafer and aligns the second wafer at a predetermined position, first stator coils for driving in a first direction one of the first and second movable stages located in a measurement region for measuring an exposure result, second stator coils for driving the other of the first and second movable stages located in an exposure region for performing exposure in the first direction independently of the movable stage in the measurement region, third stator coils for independently driving the first and second movable stages in a second direction perpendicular to the first direction, and a current control device for supplying to the first to third stator coils control currents having phase differences to generate driving forces between movable element magnets of the first and second movable stages and the stator coils facing the movable element magnets.

摘要翻译： 一种曝光装置，包括保持第一晶片并将第一晶片对准在预定位置的第一可移动台，保持第二晶片并将第二晶片对准在预定位置的第二可移动台，第一定子线圈，用于在 位于用于测量曝光结果的测量区域中的第一和第二可移动台之一的第一方向，用于驱动位于曝光区域中的另一个的第二定子线圈，用于独立于第一方向执行曝光 在测量区域中的可移动台，用于在垂直于第一方向的第二方向上独立地驱动第一和第二可动台的第三定子线圈和用于向第一至第三定子线圈供给控制具有相位差的电流的电流控制装置， 第一和第二可移动级的可移动元件磁体与静脉之间的驱动力 r线圈面对可动元件磁铁。

公开(公告)号：US07067942B2

公开(公告)日：2006-06-27

申请号：US10777196

申请日：2004-02-13

申请人： Nobushige Korenaga ,  Toshiya Asano

发明人： Nobushige Korenaga ,  Toshiya Asano

IPC分类号： H02K41/00

CPC分类号： H01J37/20 ,  G03F7/70758 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/3175 ,  H02K1/276 ,  H02K41/031

摘要： A linear motor including a coil, a plurality of first magnet groups having polar directions disposed in periodically different directions, and a plurality of second magnet groups having polar directions disposed in periodically different directions. In a set including a predetermined magnet of the first magnet groups and a magnet of the second magnet groups, corresponding to the predetermined magnet, magnetization directions of the set of magnets have mutually different tilts with respect to the central axis of the coil. The coil includes a first coil effective to produce a Lorentz's force between the first coil and the first magnet groups, and a second coil effective to produce a Lorentz's force between the second coil and the second magnet groups.

摘要翻译： 一种线性电动机，包括线圈，具有沿周向不同方向设置的极性方向的多个第一磁体组和具有沿周期性不同方向设置的极性方向的多个第二磁体组。 在包括对应于预定磁体的第一磁体组的预定磁体和第二磁体组的磁体的组中，磁体组的磁化方向相对于线圈的中心轴线具有相互不同的倾斜。 线圈包括有效地在第一线圈和第一磁体组之间产生洛伦兹力的第一线圈，以及有效地在第二线圈和第二磁体组之间产生洛伦兹力的第二线圈。

公开(公告)号：US06954041B2

公开(公告)日：2005-10-11

申请号：US10434058

申请日：2003-05-09

申请人： Nobushige Korenaga

发明人： Nobushige Korenaga

IPC分类号： F16C32/04 ,  F16C29/00 ,  F16C39/06 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  H02K41/02 ,  H02K41/00 ,  H01L21/00

CPC分类号： F16C39/063 ,  F16C29/00 ,  G03F7/70816

摘要： Compatibility of a small spring constant and large supporting load is realized, so that a stable operation is assured even if a fine-movement linear motor fails. A supporting unit, having a plurality of magnets whose same poles are arranged facing each other, is adapted to support the self-weight of a top plate on which an object to be positioned is mounted, using a repulsive force in a direction orthogonal to the facing direction of the plurality of magnets. In a characteristic curve representing the relationship between the floating force and displacement in a floating direction, the tangent inclination when the object is at a first position in the floating direction is negative, and the relationship of floating force

摘要翻译： 实现了小弹簧常数和大的支撑负载的兼容性，使得即使微动线性电动机故障也可以确保稳定的操作。 支撑单元具有多个磁极，其相同的磁极彼此相对配置，用于支撑安装有待定位物体的顶板的自重，使用与所述第一磁体的正交方向相反的方向的排斥力 面对多个磁体的方向。 在表示浮动力与浮动方向上的位移之间的关系的特性曲线中，当物体处于浮动方向的第一位置时的切线倾斜为负，并且当浮力 物体处于比第一位置低的第二位置。

公开(公告)号：US20050218335A1

公开(公告)日：2005-10-06

申请号：US11091673

申请日：2005-03-29

申请人： Atsushi Kimura ,  Nobushige Korenaga ,  Hiroyoshi Kubo

发明人： Atsushi Kimura ,  Nobushige Korenaga ,  Hiroyoshi Kubo

IPC分类号： H01L21/68 ,  G03F7/20 ,  H01L21/027 ,  H02K41/02 ,  G01N21/00 ,  A61N5/00

CPC分类号： G03F7/70733

摘要： In an alignment apparatus having two movable elements which move on a stator having a planer portion, the two movable elements are prevented from moving to deviate from target position while enabling the two movable elements to swap. The alignment apparatus includes a stator which has a planer portion including first and second areas, first and second movable elements which move on the planer portion, and a regulating mechanism which regulates positions of the first and second movable elements. The first and second movable elements are driven to target positions by the Lorentz force that acts with respect to the stator. The regulating mechanism includes a first regulator which regulates the position of the movable element which is located in the first area such that the movable element will not deviate from the target position, and a second regulator which regulates the position of the movable element which is located in the second area such that the movable element will not deviate from the target position.

摘要翻译： 在具有在具有平面部分的定子上移动的两个可移动元件的对准装置中，两个可移动元件被阻止移动以偏离目标位置，同时使两个可移动元件互换。 定位装置包括具有包括第一和第二区域的平面部分的定子，在平面部分上移动的第一和第二可移动元件以及调节第一和第二可移动元件的位置的调节机构。 通过相对于定子作用的洛伦兹力将第一和第二可移动元件驱动到目标位置。 调节机构包括：第一调节器，其调节位于第一区域中的可移动元件的位置，使得可移动元件不会偏离目标位置，第二调节器调节可移动元件的位置 在第二区域中使得可移动元件不会偏离目标位置。