Method of manufacturing semiconductor device

    公开(公告)号:US10217647B2

    公开(公告)日:2019-02-26

    申请号:US16032127

    申请日:2018-07-11

    Abstract: A method of manufacturing a semiconductor device may include forming active patterns, forming a polygonal mask pattern having a first width and a second width on the active patterns, forming an active region by executing a first etching process using the mask pattern, forming a first cutting mask for removing a first corner rounding in which a width of the active region is the first width, removing the first corner rounding by executing a second etching process using the first cutting mask, forming a second cutting mask for removing a second corner rounding in which the width of the active region is changed from the first width to the second width, and executing a third etching process using the second cutting mask.

Patent Agency Ranking