Pattern forming method and pattern verifying method
    33.
    发明授权
    Pattern forming method and pattern verifying method 失效
    图案形成方法和图案验证方法

    公开(公告)号:US08261217B2

    公开(公告)日:2012-09-04

    申请号:US12020275

    申请日:2008-01-25

    申请人: Sachiko Kobayashi

    发明人: Sachiko Kobayashi

    IPC分类号: G06F17/50 G06F9/455

    CPC分类号: G06F17/5081

    摘要: A pattern forming method including modifying design data subjected to a first design rule check in design data of a pattern to be formed in a semiconductor substrate, performing the first design rule check to the modified design data again, outputting the modified design data which does not violate the first design rule as pattern forming design data used in actual pattern formation, and performing a second design rule check having an allowable range wider than that of the first design rule to the modified design data which violates the first design rule, and outputting the modified design data which does not violate the second design rule as the pattern forming design data, and redesigning the pattern to satisfy the second design rule or adjusting the modification guideline such that the modified design data which violates the second design rule satisfies the second design rule.

    摘要翻译: 一种图案形成方法,包括修改经过第一设计规则的设计数据检查要在半导体衬底中形成的图案的设计数据,再次对经修改的设计数据执行第一设计规则检查,输出不改变的设计数据 违反第一设计规则作为在实际图案形成中使用的图案形成设计数据,并且对违反第一设计规则的修改后的设计数据执行具有比第一设计规则宽的容许范围的第二设计规则检查,并输出 修改的设计数据不违反第二设计规则作为图案形成设计数据,并且重新设计图案以满足第二设计规则或调整修改指南,使得违反第二设计规则的修改后的设计数据满足第二设计规则 。

    1,2,3,4-tetrahydroquinoxaline compound with a phenyl group substituent having a sulfonic acid ester structure or a sulfonic acid amide structure introduced therein and having glucocorticoid receptor-binding activity
    34.
    发明授权
    1,2,3,4-tetrahydroquinoxaline compound with a phenyl group substituent having a sulfonic acid ester structure or a sulfonic acid amide structure introduced therein and having glucocorticoid receptor-binding activity 失效
    具有引入其中具有磺酸酯结构或磺酰胺结构的苯基取代基的1,2,3,4-四氢喹喔啉化合物,并具有糖皮质激素受体结合活性

    公开(公告)号:US08193187B2

    公开(公告)日:2012-06-05

    申请号:US12451653

    申请日:2008-05-29

    IPC分类号: A61K31/495

    摘要: The compounds represented in general formula (1) or a salt thereof are useful for glucocorticoid receptor modulators. In the formula, R1 represents a lower alkyl group, a lower cycloalkyl group, an aryl group and the like; R2 represents a hydrogen atom, a lower alkyl group and the like; R3 represents a hydrogen atom, a lower alkyl group and the like; R4 and R5 represent a hydrogen atom, a lower alkyl group and the like; R6 represents a hydrogen atom, a lower alkyl group and the like; R7 represents a hydrogen atom, a lower alkyl group, a lower alkenyl group and the like; W represents an oxygen atom, a sulfur atom, NR8 and the like; R8 represents a hydrogen atom, a lower alkyl group and the like; X represents an oxygen atom or a sulfur atom; Y represents a lower alkylene group and the like; Z represents an oxygen atom, a sulfur atom, NR9, OCO or OSO2; R9 represents a hydrogen atom, a lower alkyl group and the like respectively.

    摘要翻译: 通式(1)表示的化合物或其盐可用于糖皮质激素受体调节剂。 在该式中,R 1表示低级烷基,低级环烷基,芳基等; R2表示氢原子,低级烷基等; R3表示氢原子,低级烷基等; R4和R5代表氢原子,低级烷基等; R6表示氢原子,低级烷基等; R7表示氢原子,低级烷基,低级烯基等; W表示氧原子,硫原子,NR 8等; R8表示氢原子,低级烷基等; X表示氧原子或硫原子; Y表示低级亚烷基等; Z表示氧原子,硫原子,NR 9,OCO或OSO 2; R 9分别表示氢原子,低级烷基等。

    MASK PATTERN GENERATING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND COMPUTER PROGRAM PRODUCT
    38.
    发明申请
    MASK PATTERN GENERATING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND COMPUTER PROGRAM PRODUCT 审中-公开
    掩模图形生成方法,半导体器件的制造方法和计算机程序产品

    公开(公告)号:US20110177457A1

    公开(公告)日:2011-07-21

    申请号:US12984190

    申请日:2011-01-04

    IPC分类号: G03F7/20 G06F17/50

    CPC分类号: G03F1/36

    摘要: According to the embodiment, a pattern after lithography is derived by using a mask pattern. The mask pattern is corrected by moving a first moving target pattern so that a first evaluation value calculated with respect to this pattern after lithography satisfies a first condition. Next, a pattern after lithography is derived by using the mask pattern after correction. The mask pattern after correction is further corrected by moving a second moving target pattern so that a second evaluation value calculated with respect to this pattern after lithography satisfies a second condition.

    摘要翻译: 根据实施例,通过使用掩模图案导出光刻之后的图案。 通过移动第一移动目标图案来校正掩模图案,使得在光刻之后相对于该图案计算的第一评估值满足第一条件。 接下来,通过在校正后使用掩模图案导出光刻之后的图案。 校正后的掩模图案通过移动第二移动目标图案进一步校正,使得在光刻之后相对于该图案计算的第二评估值满足第二条件。

    NOVEL 1,2-DIHYDROQUINOLINE DERIVATIVE HAVING SUBSTITUTED PHENYLAMINO LOWER ALKYL GROUP AND ESTER-INTRODUCED PHENYL GROUP AS SUBSTITUENTS
    39.
    发明申请
    NOVEL 1,2-DIHYDROQUINOLINE DERIVATIVE HAVING SUBSTITUTED PHENYLAMINO LOWER ALKYL GROUP AND ESTER-INTRODUCED PHENYL GROUP AS SUBSTITUENTS 失效
    具有取代的苯基亚氨基的新的1,2-二氢喹啉衍生物和作为取代基的酯引入的苯基

    公开(公告)号:US20090298827A1

    公开(公告)日:2009-12-03

    申请号:US12312396

    申请日:2007-11-14

    摘要: The compounds represented in general formula (1) and a salt thereof are useful for glucocorticoid receptor modulator. The R1 represents a hydrogen atom or a lower alkyl group; R2 represents a hydrogen atom or a lower alkyl group; R3 and R4 may be the same or different and represents a hydrogen atom or a lower alkyl group; R5 represents a hydrogen atom or a lower alkyl group; R6 represents a halogen atom, a lower alkyl group, a hydroxy group, a lower alkoxy group, a nitro group or a cyano group; X represents —C(O)—, —C(O)NR8—, —S(O)2— and the like; R7 and/or R8 may be the same or different and represent a hydrogen atom, a lower alkyl group which may have a substituent, an aryl group which may have a substituent, a heterocyclic group which may have a substituent, a lower alkoxy group which may have a substituent and the like; Y represents a lower alkylene group; and P represents 0, 1, 2 or 3.

    摘要翻译: 通式(1)表示的化合物及其盐可用于糖皮质激素受体调节剂。 R1表示氢原子或低级烷基; R2表示氢原子或低级烷基; R3和R4可以相同或不同,代表氢原子或低级烷基; R5表示氢原子或低级烷基; R6表示卤素原子,低级烷基,羟基,低级烷氧基,硝基或氰基; X表示-C(O) - , - C(O)NR 8 - , - S(O)2等) R 7和/或R 8可以相同或不同,表示氢原子,可以具有取代基的低级烷基,可以具有取代基的芳基,可以具有取代基的杂环基,低级烷氧基 可以具有取代基等; Y表示低级亚烷基; P表示0,1,2或3。