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    Spatial light modulators with light blocking/absorbing areas
    31.
    发明申请
    Spatial light modulators with light blocking/absorbing areas 有权
    具有遮光/吸收区域的空间光调制器

    公开(公告)号：US20050157376A1

    公开(公告)日：2005-07-21

    申请号：US11076640

    申请日：2005-03-09

    Applicant: Andrew Huibers ,  Satyadev Patel

    Inventor： Andrew Huibers ,  Satyadev Patel

    IPC: G02B26/08 ,  G02B26/00

    CPC classification number: B82Y30/00 ,  G02B26/0833 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/0102 ,  H01L2924/01024 ,  H01L2924/01074

    Abstract: A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.

    Abstract translation: 公开了投影系统，空间光调制器和用于形成诸如投影显示器的微镜阵列的方法。 空间光调制器可以具有与包括微镜阵列的基板之一粘合在一起的两个基板。 如果需要，在沉积吸气剂材料和/或固体或液体润滑剂在一个或两个晶片上之后，两个基底可以在晶片层上结合。 在本发明的一个实施例中，一个基板是透光基板，并且在透光基板上设置光吸收层，以选择性地阻挡光通过基板。 光吸收层可以形成图案，例如围绕微镜阵列的框架。

    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
    32.
    发明申请
    Micromirror array having reduced gap between adjacent micromirrors of the micromirror array 有权

    公开(公告)号：US20050122561A1

    公开(公告)日：2005-06-09

    申请号：US11034318

    申请日：2005-01-11

    Applicant: Andrew Huibers ,  Satyadev Patel

    Inventor： Andrew Huibers ,  Satyadev Patel

    IPC: B81C20060101 ,  G02B26/00 ,  G02B26/08 ,  G02F1/29 ,  H04N5/74

    CPC classification number: B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

    Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

    Micromirror having reduced space between hinge and mirror plate of the micromirror
    33.
    发明申请
    Micromirror having reduced space between hinge and mirror plate of the micromirror 有权

    公开(公告)号：US20050088719A1

    公开(公告)日：2005-04-28

    申请号：US10627303

    申请日：2003-07-24

    Applicant: Satyadev Patel ,  Andrew Huibers

    Inventor： Satyadev Patel ,  Andrew Huibers

    IPC: G02B20060101 ,  G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

    CPC classification number: G02B26/0841 ,  B82Y30/00

    Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

    High angle micro-mirrors and processes
    34.
    发明申请
    High angle micro-mirrors and processes 有权

    公开(公告)号：US20050078349A1

    公开(公告)日：2005-04-14

    申请号：US10990835

    申请日：2004-11-16

    Applicant: Satyadev Patel ,  Andrew Huibers ,  Peter Heureux

    Inventor： Satyadev Patel ,  Andrew Huibers ,  Peter Heureux

    IPC: G02B26/08 ,  G02B26/00

    CPC classification number: G02B26/0841

    Abstract: A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a mirror plate attached to the hinge structure is provided for use in display systems. The mirror plate is capable of rotating from a non-deflected resting state to a state that is at least 14° degrees. In operation, the micro-mirror switches between an “ON”-state and “OFF”-state, which are defined in accordance with a rotational position of the mirror plate. The OFF state can be a non-deflected position of the micro-mirror (generally parallel to the substrate), the same angle (though opposite direction) as the ON state, or an angle less than the ON state (though in the opposite direction). Reflected light from the “ON” and “OFF” states are thus separated and the contrast ratio is improved.

    Etching method used in fabrications of microstructures
    35.
    发明申请
    Etching method used in fabrications of microstructures 有权
    用于微结构制造中的蚀刻方法

    公开(公告)号：US20050020089A1

    公开(公告)日：2005-01-27

    申请号：US10666002

    申请日：2003-09-17

    Applicant: Hongqin Shi ,  Gregory Schaadt ,  Andrew Huibers ,  Satyadev Patel

    Inventor： Hongqin Shi ,  Gregory Schaadt ,  Andrew Huibers ,  Satyadev Patel

    IPC: G02B26/08 ,  H01L21/00 ,  H01L21/302 ,  H01L21/461

    CPC classification number: H01L21/67069 ,  B81C1/00595 ,  B81C2201/0132 ,  G02B26/0841

    Abstract: The present invention discloses a method and apparatus for removing the sacrificial materials in fabrications of microstructures using a vapor phase etchant recipe having a spontaneous vapor phase chemical etchant. The vapor phase etchant recipe has a mean-free-path corresponding to the minimum thickness of the sacrificial layers between the structural layers of the microstructure. This method is of particular importance in removing the sacrificial layers underneath the structural layers of the microstructure.

    Abstract translation: 本发明公开了一种使用具有自发气相化学蚀刻剂的气相蚀刻剂配方去除微结构制造中的牺牲材料的方法和装置。 气相蚀刻剂配方具有对应于微结构的结构层之间的牺牲层的最小厚度的平均自由程。 该方法在去除微结构结构层下面的牺牲层时尤其重要。

    Performance analyses of micromirror devices
    37.
    发明授权
    Performance analyses of micromirror devices 有权
    微镜器件的性能分析

    公开(公告)号：US07483126B2

    公开(公告)日：2009-01-27

    申请号：US10875760

    申请日：2004-06-23

    Applicant: Igor Volfman ,  Andrew Huibers ,  Satyadev Patel ,  Peter Richards ,  Leonid Frenkel ,  Jim Dunphy ,  Regis Grasser ,  Greg Schaadt

    Inventor： Igor Volfman ,  Andrew Huibers ,  Satyadev Patel ,  Peter Richards ,  Leonid Frenkel ,  Jim Dunphy ,  Regis Grasser ,  Greg Schaadt

    IPC: G01N21/88 ,  G02B26/00

    CPC classification number: G01N21/55 ,  G01N21/95

    Abstract: The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.

    Abstract translation: 本发明提供一种用于通过测量各个微镜对电场驱动力的机电响应来评估微镜阵列器件的产品质量和性能的方法和装置。 根据本发明的微反射镜的机电响应以与操作状态相关联的旋转角度进行描述，例如当微镜阵列器件在二进制编码器中操作时，ON和OFF状态的ON和OFF状态角， 状态模式以及各个微镜对驱动场的响应速度（即，微镜器件从一个状态转移到另一个状态所需的时间间隔）。

    Spatial light modulators with non-uniform pixels
    39.
    发明授权
    Spatial light modulators with non-uniform pixels 有权
    具有不均匀像素的空间光调制器

    公开(公告)号：US07158279B2

    公开(公告)日：2007-01-02

    申请号：US10969503

    申请日：2004-10-19

    Applicant: Satyadev Patel ,  Regis Grasser ,  Andrew Huibers ,  Peter Heureux

    Inventor： Satyadev Patel ,  Regis Grasser ,  Andrew Huibers ,  Peter Heureux

    IPC: G02B26/00 ,  G02B26/08

    CPC classification number: G02B26/0833 ,  G02B26/0841 ,  H04N9/3114 ,  Y10S359/904

    Abstract: A micromirror array comprises micromirrors of different properties for use particularly in display systems. Micromirrors of different properties can be arranged within the micromirror array according to a predetermined pattern, or randomly. However, it is advantageous to arrange the micromirrors with different properties within the micromirror array neither in complete order nor complete in random.

    Abstract translation: 微镜阵列包括用于特别在显示系统中的不同性质的微镜。 可以根据预定图案或随机地将不同性质的微镜布置在微镜阵列内。 然而，有利的是在微镜阵列内布置具有不同特性的微反射镜，既不是完全顺序的也不是随机完成的。

    Micromirror and post arrangements on substrates
    40.
    发明授权
    Micromirror and post arrangements on substrates 有权

    公开(公告)号：US07042622B2

    公开(公告)日：2006-05-09

    申请号：US10698563

    申请日：2003-10-30

    Applicant: Andrew Huibers ,  Satyadev Patel

    Inventor： Andrew Huibers ,  Satyadev Patel

    IPC: G02B26/00

    CPC classification number: G02B26/0841

    Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

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