摘要:
The object of the invention is to provide a method for fabricating a semiconductor device having a peeled layer bonded to a base material with curvature. Particularly, the object is to provide a method for fabricating a display with curvature, more specifically, a light emitting device having an OLED bonded to a base material with curvature. An external force is applied to a support originally having curvature and elasticity, and the support is bonded to a peeled layer formed over a substrate. Then, when the substrate is peeled, the support returns into the original shape by the restoring force, and the peeled layer as well is curved along the shape of the support. Finally, a transfer object originally having curvature is bonded to the peeled layer, and then a device with a desired curvature is completed.
摘要:
The present invention provides a manufacturing method of a light emitting device in which the number of display panels manufactured from one substrate is increased and display panel is mass produced is provided. One feature of the invention is that the shipping is performed not by separating the substrate over which a plurality of light emitting regions is formed and attaching the FPC to the each piece thereof but before separating, namely in the incomplete state (that can be also referred to as semi end products). However, the invention has a structure in which the inspection can be partly carried out before the shipping.
摘要:
The present invention provides a vapor deposition system for a film forming systems that promote an efficiency of utilizing an EL material and is excellent in uniformity or throughput of forming an EL layer and a vapor deposition method. According to the present invention, vapor deposition is carried out in a deposition chamber by moving an evaporation source holder 903 on which six containers 911 filled with an evaporation material are set at a certain pitch with respect to the substrate. The evaporation holder 903 is transported from an installation chamber 905 by a transport mechanism 902b. A heater is provided in a turntable 907. Throughput can be improved by heating the evaporation holder 903 in advance of transporting containers into the evaporation holder 903.
摘要:
An ink jet method known as a method for selectively forming a layer made of a polymeric organic compound is advantageous in that a layer containing an organic compound can be separately colored for emitting light of three colors (R, G, B) at a time. However, this ink jet method is disadvantageous in its poor film formation accuracy, and therefore, it is difficult to control the formation of the film for obtaining the uniformity. As a result, the obtained film is likely to have unevenness. In the present invention, an layer containing an organic compound is formed on the entire surface of a lower electrode connected to a thin film transistor by application. After forming an upper electrode on the lower electrode, an layer containing an organic compound is etched in a self-aligned manner by plasma etching using the upper electrode as a mask so as to allow the selective formation of an layer containing an organic compound. Furthermore, for connection with the upper electrode, the electrical connection is achieved by using an adhesive containing a conductive particle or a paste. Furthermore, a material emitting white light or a material emitting monochromatic light is used as the layer containing an organic compound. The full-color display is achieved by combining the layer containing an organic compound with a color conversion layer or a colored layer.
摘要:
(OBJECT) The object is to provide a lightened semiconductor device and a manufacturing method thereof by pasting a layer to be peeled to various base materials. (MEANS FOR SOLVING THE PROBLEM) In the present invention, a layer to be peeled is formed on a substrate, then a seal substrate provided with an etching stopper film is pasted with a binding material on the layer to be peeled, followed by removing only the seal substrate by etching or polishing. The remaining etching stopper film is functioned as a blocking film. In addition, a magnet sheet may be pasted as a pasting member.
摘要:
An organic light emitting element which can employ non-sublimable (non-volatile) or insoluble materials while keeping the same level of light emission as prior art is provided. Dispersive particles (202a) of an insoluble organic material that is dispersed in a solvent (201) in which a soluble organic material (203a) is dissolved is applied to a substrate (200) that has an electrode. Then, the solvent (201) is vaporized by heat treatment to form a uniform film (203b) of the soluble organic material in which aggregations (clusters) of the insoluble organic material are scattered. Since the soluble organic material film (203b) is thoroughly uniform, defects such as breakdown can be avoided to make it a fully functional organic light emitting element.
摘要:
The present invention provides a manufacturing method of a light emitting device in which the number of display panels manufactured from one substrate is increased and display panel is mass produced is provided. One feature of the invention is that the shipping is performed not by separating the substrate over which a plurality of light emitting regions is formed and attaching the FPC to the each piece thereof but before separating, namely in the incomplete state (that can be also referred to as semi end products). However, the invention has a structure in which the inspection can be partly carried out before the shipping.
摘要:
The present invention is a fabrication method of a light-emitting device characterized by ejecting a solution containing a luminescent material toward an anode or a cathode under a reduced pressure and characterized in that in a duration before the solution is arrived at the anode or the cathode, the solvent in the solution is volatilized, the remaining part of the luminescent material is deposited on the anode or the cathode, and thereby formed a light-emitting layer. By the present invention, a baking process for thickness reduction is not required after applying the solution. Accordingly, it is possible to provide a fabrication method with high throughput although the method is low in cost and simple.
摘要:
The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.
摘要:
A manufacturing apparatus is provided, which can improve a utilization efficiency of an evaporation material, reduce manufacturing costs of a light emitting device having an organic light emitting element, and shorten manufacturing time necessary to manufacture a light emitting device. According to the present invention, a multi-chamber manufacturing apparatus having plural film forming chambers includes a first film forming chamber for subjecting a first substrate to evaporation and a second film forming chamber for subjecting a second substrate to evaporation. In each film forming chamber, plural organic compound layers are laminated, thereby improving the throughput. Further, it is possible that the respective substrates in the plural film forming chambers are subjected to evaporation in the same manner in parallel, while another film forming chamber undergoes cleaning.