Machining strain removal apparatus
    31.
    发明授权
    Machining strain removal apparatus 有权
    加工应变去除装置

    公开(公告)号:US06780091B2

    公开(公告)日:2004-08-24

    申请号:US10217608

    申请日:2002-08-14

    IPC分类号: B24B700

    CPC分类号: B24B37/345 B24B53/017

    摘要: A machining strain removal apparatus for removing machining strain present on a treated surface of a workpiece, for example, a ground back of a semiconductor wafer by polishing the treated surface or ground back with a polishing tool with a high efficiency in a high quality. The apparatus includes a chuck for holding the workpiece while exposing the treated surface, and a polishing component for polishing the treated surface of the workpiece held on the chuck. The polishing component includes a polishing tool, and presses the polishing tool being rotated against the treated surface of the workpiece, thereby polishing the treated surface.

    摘要翻译: 一种加工应变消除装置,用于通过以高质量的高效率抛光处理的表面或用抛光工具抛光回去存在于工件的处理表面上的加工应变,例如半导体晶片的背面。 该装置包括用于在暴露经处理的表面的同时保持工件的卡盘和用于抛光保持在卡盘上的被处理表面的抛光部件。 抛光部件包括抛光工具,并且将抛光工具按压在被处理表面上的抛光工具,从而抛光经处理的表面。

    Grinding machine
    34.
    发明授权
    Grinding machine 有权
    磨床

    公开(公告)号:US06685542B2

    公开(公告)日:2004-02-03

    申请号:US09986408

    申请日:2001-11-08

    IPC分类号: B24B704

    CPC分类号: B24B7/04 B24B7/228 B24B41/047

    摘要: A grinding machine includes at least a turntable, rotary chuck tables for holding workpieces to be machined, a first grinding device for grinding the workpiece held on the chuck table and a second grinding device for grinding the first-ground workpiece held on the chuck table. The first grinding device comprises at least a first grinding wheel having pieces of grindstone set so as to define together a first grinding plane, and a first spindle fixed to the first grinding wheel. Likewise, the second grinding device comprises a second grinding wheel having pieces of grindstone set so as to define together a second grinding plane and a second spindle fixed to the second grinding wheel. The first and second grinding devices are so arranged that the first angle formed between the linear line connecting from the center of rotation of the turntable to the center of rotation of a selected chuck table and the linear line connecting from the center of rotation of the selected chuck table to the center of rotation of the first spindle is equal to the second angle formed between the linear line connecting from the center of rotation of the turntable to the center of rotation of the selected chuck table and the linear line connecting from the center of rotation of the selected chuck table to the center of rotation of the second spindle. This arrangement assures that all finished workpieces have the same thickness.

    摘要翻译: 研磨机至少包括用于保持要加工的工件的转盘,旋转卡盘台,用于研磨保持在卡盘台上的工件的第一研磨装置和用于研磨保持在卡盘台上的第一接地工件的第二研磨装置。 第一磨削装置包括至少第一砂轮,其具有被设置为一起限定第一研磨平面的磨石块和固定到第一砂轮的第一轴的第一砂轮。 同样地,第二研磨装置包括第二砂轮,该第二砂轮具有被设置为一起限定第二研磨平面的磨石块和固定到第二砂轮的第二轴。 第一和第二研磨装置被布置成使得在从转台的旋转中心连接到所选择的卡盘台的旋转中心的线性线之间形成的第一角度和从所选择的卡盘的旋转中心连接的线性线 卡盘台到第一主轴的旋转中心等于从转台的旋转中心到所选择的卡盘台的旋转中心的线性线之间形成的第二角度,以及从中心 所选择的卡盘台的旋转到第二主轴的旋转中心。 这种布置确保所有成品的工件具有相同的厚度。

    Projection exposure apparatus and method, and illumination optical system thereof
    35.
    发明授权
    Projection exposure apparatus and method, and illumination optical system thereof 失效
    投影曝光装置及方法及其照明光学系统

    公开(公告)号:US06526118B2

    公开(公告)日:2003-02-25

    申请号:US09391171

    申请日:1999-09-07

    IPC分类号: G21K500

    摘要: In a projection exposure apparatus used in lithography process for transferring a predetermined pattern formed on a reflection type mask onto a photosensitive substrate, the reflection mask and the substrate are moved relative to each other by a scanning driver, and the illumination optical system located between a radiation light source and the reflection mask includes a field stop located near a position conjugate with the reflection mask. In another embodiment a scanning driver changes the positional relationship between the reflection mask and the projection optical system, or/and between the substrate and the projection optical system. In another embodiment an image of the field stop is formed on the reflection mask by a relay optical system, preferably a catoptric system, forming the predetermined pattern. The projection optical system located between the reflection mask and the substrate directs the light reflected from the mask to the substrate, and illuminance distribution of the light on the exposure area of the substrate is adjustable by changing the position of reflection optical elements located along the optical path of the radiation light in the illumination optical system.

    摘要翻译: 在用于将形成在反射型掩模上的预定图案转印到感光基板上的光刻工艺中的投影曝光装置中,反射掩模和基板通过扫描驱动器相对于彼此移动,并且照明光学系统位于 辐射光源和反射掩模包括位于与反射掩模共轭的位置附近的场停止。 在另一个实施例中,扫描驱动器改变反射掩模与投影光学系统之间,或/和基板与投影光学系统之间的位置关系。 在另一个实施例中,通过形成预定图案的中继光学系统,优选地是反射系统,在反射掩模上形成场光阑的图像。 位于反射掩模和衬底之间的投影光学系统将从掩模反射的光引导到衬底,并且通过改变沿着光学器件的反射光学元件的位置来调节光在衬底的曝光区域上的照度分布 在照明光学系统中辐射光的路径。

    Multiplex type transmitting apparatus
    36.
    发明授权
    Multiplex type transmitting apparatus 失效
    复用型发送装置

    公开(公告)号:US06411631B1

    公开(公告)日:2002-06-25

    申请号:US09542294

    申请日:2000-04-04

    IPC分类号: H04J316

    CPC分类号: H04L12/2854 Y10S370/907

    摘要: A multiplex type transmitting apparatus is arranged to have a plurality of slow signal receive/transmit sections for accommodating a counterpart for a SONET system or an SDH system, a multiplex separation converting section, and a receive/transmit section for a SONET system or SDH system fast signal. The slow or fast signal receive/transmit section includes a receive processing unit on a receive side for receiving the SS bits of the SONET/SDH system signal received from a transmission path, an internal SS bits setting unit for setting the SS bits of the received signal to internal SS bits if the SS bits of the received signal are “10” or “00”, a transmit processing unit on the receive side for transmitting a signal to the multiplex separation converting section as keeping the SS bits as “11” when an AIS-P is transferred, and a transmit processing unit on a transmit side for transmitting the signal from the multiplex separation converting section onto the transmission path as keeping the SS bits identical with the internal SS bits.

    摘要翻译: 复用型发送装置被配置为具有用于容纳SONET系统或SDH系统的对方的多个慢信号接收/发送部分,多路复用分离转换部分和用于SONET系统或SDH系统的接收/发送部分 快速信号。 慢速或快速信号接收/发送部分包括接收侧的接收处理单元,用于接收从传输路径接收的SONET / SDH系统信号的SS位;内部SS位设置单元,用于设置接收到的SS位 如果接收信号的SS位为“10”或“00”,则发送到内部SS位,发送处理单元在接收侧用于将多个分离转换部分的信号作为“SS”位保持为“11” 传送AIS-P,发送侧发送处理单元,用于将信号从多路复用分离转换部发送到传输路径上,以保持SS位与内部SS位相同。

    Map display apparatus for motor vehicle
    37.
    发明授权
    Map display apparatus for motor vehicle 失效
    汽车地图显示装置

    公开(公告)号:US5862498A

    公开(公告)日:1999-01-19

    申请号:US678767

    申请日:1996-07-11

    摘要: A map display apparatus for a motor vehicle comprising: road map storage device which stores road map data relating to a road map; a display device capable of displaying the road map; bird's-eye view data converting circuit which converts the road map data into bird's-eye view data so that a bird's-eye view taken by obliquely looking down the road map from above is displayed on the display device; and display control circuit which displays a plurality of grid lines such that the grid lines are superposed on the bird's-eye view.

    摘要翻译: 一种用于机动车辆的地图显示装置,包括:路线图存储装置,其存储与路线图相关的路线图数据; 能够显示路线图的显示装置; 鸟瞰图数据转换电路,其将道路地图数据转换为鸟瞰数据,使得从显示装置上显示从上方倾斜地俯视路线图拍摄的鸟瞰图; 以及显示控制电路,其显示多个网格线,使得网格线叠加在鸟瞰图上。

    Illumination apparatus and exposure apparatus using it
    39.
    发明授权
    Illumination apparatus and exposure apparatus using it 失效
    照明装置和使用它的曝光装置

    公开(公告)号:US5615047A

    公开(公告)日:1997-03-25

    申请号:US259761

    申请日:1994-06-14

    CPC分类号: G03F7/70058 F21V5/04

    摘要: An illumination apparatus for uniformly illuminating an illuminated object surface. The apparatus comprises light source means for supplying an illumination light beam having parallel rays, an optical integrator for forming a plurality of beams from the illumination light beam from said light source means, a condenser optical system for converging the plurality of beams from said optical integrator to illuminate the illuminated object surface in a superimposed manner, and an optical member having a light quantity attenuator for transmitting said illumination light beam so as to attenuate a light quantity of said illumination light beam by a predetermined amount, said optical member being located at or in the vicinity of a position conjugate with said illuminated object surface.

    摘要翻译: 一种用于均匀照射被照射物体表面的照明装置。 该装置包括用于提供具有平行光线的照明光束的光源装置,用于从所述光源装置的照明光束形成多个光束的光学积分器,用于会聚来自所述光学积分器的多个光束的聚光器光学系统 以叠加方式照亮被照明物体表面;以及光学构件,具有用于透射所述照明光束的光衰减器,以将所述照明光束的光量衰减预定量,所述光学构件位于或 在与所述被照射物体表面共轭的位置附近。

    Reactive power compensating apparatus and method for reducing in
switching loss in steady state operation thereof
    40.
    发明授权
    Reactive power compensating apparatus and method for reducing in switching loss in steady state operation thereof 失效
    无功功率补偿装置及其稳态运行中的开关损耗降低的方法

    公开(公告)号:US5485075A

    公开(公告)日:1996-01-16

    申请号:US269025

    申请日:1994-06-30

    IPC分类号: G05F1/70 H02J3/18 G05F3/00

    CPC分类号: H02J3/18 Y02E40/12 Y02E40/30

    摘要: A self-commutated static var compensator and a method is used for stabilizing a power system by controlling an output of a self-commutated converter for receiving/supplying power from/to the power system. A constant system voltage maintaining controller calculates a first target value signal of the reactive current in accordance with a difference between a reference voltage and a voltage detected by a voltage detector, and a reactive current controller generates a second target value signal of the reactive current in accordance with a difference between the first target value signal of the reactive current and a detected current. A converter controller applies a gate driving pulse to the self-commutated converter in response to the second target value signal of the reactive current and second target value signal of the active current. A loss reduction circuit stops the gate driving pulse corresponding to the second target value of the reactive current from being supplied to the gate of the self-commutated converter when reactive power output from the self-commutated converter is close to zero.

    摘要翻译: 自整定静态无功补偿器和方法用于通过控制用于从/向电力系统接收/供应电力的自换换转换器的输出来稳定电力系统。 恒定系统电压保持控制器根据参考电压和由电压检测器检测到的电压之间的差异来计算无功电流的第一目标值信号,无功电流控制器产生无功电流的第二目标值信号 根据无功电流的第一目标值信号与检测电流之间的差。 A转换器控制器响应于有功电流的无功电流和第二目标值信号的第二目标值信号,向自整流转换器施加栅极驱动脉冲。 当从自整流转换器输出的无功功率接近零时,损耗减小电路将对应于无功电流的第二目标值的栅极驱动脉冲停止供给到自整流转换器的栅极。