摘要:
A machining strain removal apparatus for removing machining strain present on a treated surface of a workpiece, for example, a ground back of a semiconductor wafer by polishing the treated surface or ground back with a polishing tool with a high efficiency in a high quality. The apparatus includes a chuck for holding the workpiece while exposing the treated surface, and a polishing component for polishing the treated surface of the workpiece held on the chuck. The polishing component includes a polishing tool, and presses the polishing tool being rotated against the treated surface of the workpiece, thereby polishing the treated surface.
摘要:
There is provided a heat sink comprising a base plate provided with a plurality grooves and concave portions, each of which has a substantially trapezoidal cross section having a flat bottom face and inclined side faces and is formed into a tapered shape, formed between the adjacent grooves by plastic deformation; and a plurality of thin-sheet fins which are inserted in the grooves and are crimped from both sides by the inclined side faces formed by the plastic deformation of the concave portion.
摘要:
In a transmission network including multiplex transmission units A, F, G, D and E, when the line breakage has occurred on the OC-12 transmission path of the direction from unit A to unit F, the unit F detects the signal coming in from the OC-12 path indicative of the line breakage. The unit F inserts the APS bytes which comes in from the unit A into the undefined area of the OC-192 transport overhead which is reserved for the through-transport of APS bytes, and transports it to the unit G. On receiving the through-transport APS bytes, the unit G inserts it intact into the defined area for the APS bytes in the OC-12 transport overhead, and sends it to the unit D. In this manner, protection switching between the units A and D is carried out.
摘要:
A grinding machine includes at least a turntable, rotary chuck tables for holding workpieces to be machined, a first grinding device for grinding the workpiece held on the chuck table and a second grinding device for grinding the first-ground workpiece held on the chuck table. The first grinding device comprises at least a first grinding wheel having pieces of grindstone set so as to define together a first grinding plane, and a first spindle fixed to the first grinding wheel. Likewise, the second grinding device comprises a second grinding wheel having pieces of grindstone set so as to define together a second grinding plane and a second spindle fixed to the second grinding wheel. The first and second grinding devices are so arranged that the first angle formed between the linear line connecting from the center of rotation of the turntable to the center of rotation of a selected chuck table and the linear line connecting from the center of rotation of the selected chuck table to the center of rotation of the first spindle is equal to the second angle formed between the linear line connecting from the center of rotation of the turntable to the center of rotation of the selected chuck table and the linear line connecting from the center of rotation of the selected chuck table to the center of rotation of the second spindle. This arrangement assures that all finished workpieces have the same thickness.
摘要:
In a projection exposure apparatus used in lithography process for transferring a predetermined pattern formed on a reflection type mask onto a photosensitive substrate, the reflection mask and the substrate are moved relative to each other by a scanning driver, and the illumination optical system located between a radiation light source and the reflection mask includes a field stop located near a position conjugate with the reflection mask. In another embodiment a scanning driver changes the positional relationship between the reflection mask and the projection optical system, or/and between the substrate and the projection optical system. In another embodiment an image of the field stop is formed on the reflection mask by a relay optical system, preferably a catoptric system, forming the predetermined pattern. The projection optical system located between the reflection mask and the substrate directs the light reflected from the mask to the substrate, and illuminance distribution of the light on the exposure area of the substrate is adjustable by changing the position of reflection optical elements located along the optical path of the radiation light in the illumination optical system.
摘要:
A multiplex type transmitting apparatus is arranged to have a plurality of slow signal receive/transmit sections for accommodating a counterpart for a SONET system or an SDH system, a multiplex separation converting section, and a receive/transmit section for a SONET system or SDH system fast signal. The slow or fast signal receive/transmit section includes a receive processing unit on a receive side for receiving the SS bits of the SONET/SDH system signal received from a transmission path, an internal SS bits setting unit for setting the SS bits of the received signal to internal SS bits if the SS bits of the received signal are “10” or “00”, a transmit processing unit on the receive side for transmitting a signal to the multiplex separation converting section as keeping the SS bits as “11” when an AIS-P is transferred, and a transmit processing unit on a transmit side for transmitting the signal from the multiplex separation converting section onto the transmission path as keeping the SS bits identical with the internal SS bits.
摘要:
A map display apparatus for a motor vehicle comprising: road map storage device which stores road map data relating to a road map; a display device capable of displaying the road map; bird's-eye view data converting circuit which converts the road map data into bird's-eye view data so that a bird's-eye view taken by obliquely looking down the road map from above is displayed on the display device; and display control circuit which displays a plurality of grid lines such that the grid lines are superposed on the bird's-eye view.
摘要:
An aminobenzoic acid derivative represented by the following general formulas (I), (I-2) or (I-3), or a pharmacologically acceptable salt thereof, which exhibits a serotonin antagonism and an acetylcholine release accelerating activity at a well-balanced activity ratio and which is efficacious as a drug for patients with gastrointestinal unindentified complaints: ##STR1## wherein R.sup.1 represents a group such as an alkynyl or cyanoalkyl group; R.sup.2 represents a group such as an amino or acylamino group; R.sup.3 represents a halogen atom; X represents --O-- or --NH--; and A represents an oxygen or sulfur atom.
摘要:
An illumination apparatus for uniformly illuminating an illuminated object surface. The apparatus comprises light source means for supplying an illumination light beam having parallel rays, an optical integrator for forming a plurality of beams from the illumination light beam from said light source means, a condenser optical system for converging the plurality of beams from said optical integrator to illuminate the illuminated object surface in a superimposed manner, and an optical member having a light quantity attenuator for transmitting said illumination light beam so as to attenuate a light quantity of said illumination light beam by a predetermined amount, said optical member being located at or in the vicinity of a position conjugate with said illuminated object surface.
摘要:
A self-commutated static var compensator and a method is used for stabilizing a power system by controlling an output of a self-commutated converter for receiving/supplying power from/to the power system. A constant system voltage maintaining controller calculates a first target value signal of the reactive current in accordance with a difference between a reference voltage and a voltage detected by a voltage detector, and a reactive current controller generates a second target value signal of the reactive current in accordance with a difference between the first target value signal of the reactive current and a detected current. A converter controller applies a gate driving pulse to the self-commutated converter in response to the second target value signal of the reactive current and second target value signal of the active current. A loss reduction circuit stops the gate driving pulse corresponding to the second target value of the reactive current from being supplied to the gate of the self-commutated converter when reactive power output from the self-commutated converter is close to zero.