Reticle defect inspection apparatus and reticle defect inspection method

    公开(公告)号:US08072592B2

    公开(公告)日:2011-12-06

    申请号:US12985849

    申请日:2011-01-06

    IPC分类号: G01N21/00 G01N21/88

    摘要: A reticle defect inspection apparatus that can carry out a defect inspection with high detection sensitivity are provided. The apparatus includes an optical system of transmitted illumination for irradiating one surface of a sample with a first inspection light, an optical system of reflected illumination for irradiating another surface of the sample with a second inspection light, and a detecting optical system that can simultaneously detect a transmitted light obtained by the first inspection light being passed through the sample and a reflected light obtained by the second inspection light being reflected by the sample. And the optical system of transmitted illumination includes a focusing lens driving mechanism for correcting a focal point shift of the transmitted light resulting from thickness of the sample.

    PSEUDO BASE STATION APPARATUS
    33.
    发明申请
    PSEUDO BASE STATION APPARATUS 有权
    PSEUDO基站装置

    公开(公告)号:US20100240360A1

    公开(公告)日:2010-09-23

    申请号:US12723904

    申请日:2010-03-15

    IPC分类号: H04W24/00

    摘要: Provided is a pseudo base station apparatus which allow a user to certainly acquire log data at a desired timing. A set-up unit 41 sets filter conditions and acquisition conditions. A first log acquisition unit 32A includes a first buffer 32Aa, which stores log data and updates the stored content when the buffer capacity is full, and acquires a first log data that a user wants. A second log acquisition unit 32B includes a detector 32Ba, which detects log data that coincides with the log acquisition conditions among the log data, and a second buffer 32Bb, which stores the log data detected by the detector 32Ba and constantly updates the stored content within the range of the buffer capacity, and acquires a second log data that a user wants. The apparatus acquires the first log data by the first log acquisition unit 32A and, when the log data that coincides with the log acquisition conditions is generated, acquires the second log data by the second log acquisition unit 32B, and transmits the log data to be displayed on a display 43.

    摘要翻译: 提供一种伪基站装置,其允许用户在期望的定时肯定地获取日志数据。 设置单元41设置过滤条件和获取条件。 第一记录获取单元32A包括第一缓冲器32Aa,其存储日志数据,并且当缓冲器容量满时更新存储的内容,并且获取用户想要的第一日志数据。 第二日志获取单元32B包括检测器32Ba,其检测与日志数据中的日志获取条件一致的日志数据;以及第二缓冲器32Bb,其存储由检测器32Ba检测的日志数据,并且不断地更新存储的内容内 缓冲器容量的范围,并获取用户想要的第二个日志数据。 该设备通过第一日志获取单元32A获取第一日志数据,并且当生成与日志获取条件一致的日志数据时,由第二日志获取单元32B获取第二日志数据,并将日志数据发送到 显示在显示器43上。

    Pattern inspection apparatus
    34.
    发明授权
    Pattern inspection apparatus 有权
    图案检验仪

    公开(公告)号:US07551767B2

    公开(公告)日:2009-06-23

    申请号:US12040541

    申请日:2008-02-29

    IPC分类号: G06K9/00

    CPC分类号: G06T7/0004 G06T2207/30148

    摘要: A pattern inspection apparatus uses a die-to-database comparison method which compares detected pattern data obtained from an optical image of a pattern of a plate to be inspected with first reference pattern data obtained from designed pattern data in combination with a die-to-die comparison method which compares the detected pattern data with second reference pattern data obtained by detecting an area to be a basis for repetition. A computer detects presence of a plurality of repeated pattern areas from layout information contained in the designed pattern data, reads the arrangement, the number, the dimension and the repeated pitch of the repeated pattern areas, and automatically fetches an inspection area of the die-to-die comparison method.

    摘要翻译: 图案检查装置使用芯片对数据库比较方法,将从被检查板的图案的光学图像获得的检测图案数据与从设计图案数据获得的第一参考图案数据结合, 芯片比较方法,其将检测到的图案数据与通过检测作为重复基础的区域获得的第二参考图案数据进行比较。 计算机从包含在设计图案数据中的布局信息中检测多个重复图案区域的存在,读取重复图案区域的布置,数量,尺寸和重复间距,并且自动地取出模具数据的检查区域, 对比方法。

    Network control verification system, control communication terminal, server apparatus, and network control verification method
    35.
    发明授权
    Network control verification system, control communication terminal, server apparatus, and network control verification method 有权
    网络控制验证系统,控制通信终端,服务器设备和网络控制验证方法

    公开(公告)号:US07516203B2

    公开(公告)日:2009-04-07

    申请号:US10498205

    申请日:2003-10-08

    IPC分类号: G06F15/173 G06F15/16

    摘要: This invention relates to a network control verification system, a control communication terminal, a server apparatus, and a network control verification method whereby a user away from a recording apparatus is notified of information such as whether the recording apparatus has completed unattended recording of a broadcast program as reserved. Specifically, a recording/reproducing apparatus 4 records a broadcast program to a recording medium in accordance with unattended recording reservation settings. The apparatus 4 extracts one picture frame from the pictures recorded on the recording medium and turns the extracted frame into a thumbnail image. The recording/reproducing apparatus 4 then transmits an e-mail including a recording start date, a recording start time, a recording stop time, a broadcast channel, and a recording mode regarding the recorded broadcast program to a mobile phone 53 together with an attachment of the thumbnail. By checking the e-mail sent to the mobile phone 53, the user can verify that the recording has been completed as reserved. This invention may be applied advantageously to networked electronic apparatuses.

    摘要翻译: 本发明涉及一种网络控制验证系统,控制通信终端,服务器装置和网络控制验证方法,其中远离记录装置的用户被通知诸如记录装置是否完成无人值守的广播记录 节目保留。 具体地,记录/再现装置4根据无人值守的记录预约设置将广播节目记录到记录介质。 设备4从记录在记录介质上的图像中提取一幅图像,并将提取的帧转换为缩略图。 记录/再现装置4随后将一个包括记录开始日期,记录开始时间,记录停止时间,广播频道以及关于记录的广播节目的记录模式的电子邮件连同附件一起发送到移动电话53 的缩略图。 通过检查发送到移动电话53的电子邮件,用户可以验证已经完成了保留的记录。 本发明可有利地应用于联网的电子设备。

    MAGNETO ROTOR
    37.
    发明申请
    MAGNETO ROTOR 失效
    MAGNETO转子

    公开(公告)号:US20080272663A1

    公开(公告)日:2008-11-06

    申请号:US11875210

    申请日:2007-10-19

    IPC分类号: H02K21/24

    CPC分类号: H02K1/2786

    摘要: A magneto rotor in which a plurality of magnets are secured on an inner periphery of a peripheral wall portion of a cup-like rotor yoke, and a magnet protecting cover is provided that integrally has a cylindrical portion that covers inner peripheries of the magnets, and an outer flange that is formed at one axial end of the cylindrical portion and covers end surfaces of the magnets, wherein an annular protrusion protruding toward the opening of the rotor yoke is formed on an area closer to an inner periphery of the outer flange of the magnet protecting cover, an annular adhesive storage portion is formed between the peripheral wall portion closer to the open end of the rotor yoke and the annular protrusion, a groove opening into the adhesive storage portion and continuing circumferentially of the rotor yoke is also formed in the peripheral wall portion closer to the open end of the rotor yoke, and the adhesive storage portion and the groove are filled with an adhesive to seal a boundary between the outer flange of the magnet protecting cover and the peripheral wall portion of the rotor yoke with the adhesive.

    摘要翻译: 一种磁转子,其中多个磁体固定在杯形转子磁轭的周壁部分的内周上,并且磁体保护盖设置成整体地具有覆盖磁体的内周的圆筒部分,以及 形成在所述圆筒部的一个轴向端部并且覆盖所述磁体的端面的外部凸缘,其中朝向所述转子轭的开口突出的环状突起形成在更接近所述磁体的外部凸缘的内周的区域上 磁体保护盖,在更靠近转子磁轭的开口端的周壁部分与环形突起之间形成有环形的粘合剂存储部分,在该粘合剂存储部分中开口的并且在转子磁轭周向延续的槽也形成在 周壁部分更靠近转子轭的开口端,并且粘合剂存储部分和槽被填充有粘合剂以密封边界 y与磁体保护盖的外凸缘和转子轭的周壁部分之间的距离。

    Pattern inspection apparatus
    39.
    发明授权
    Pattern inspection apparatus 失效
    图案检验仪

    公开(公告)号:US07209584B2

    公开(公告)日:2007-04-24

    申请号:US11079338

    申请日:2005-03-15

    IPC分类号: G06F17/50 G06F9/00

    摘要: A pattern inspection apparatus determines a difference of the measured dislocation of respective alignment marks of an opaque pattern and a phase shifting pattern (measurement difference), in addition to a difference between the both alignment mark positions in design (design difference). A difference between the measurement difference and the design difference is set as a difference in alignment mark position between the opaque pattern and the phase shifting pattern in a reference pattern which is later used in inspection. In this manner, by correcting one pattern data with respect to the other pattern data in the reference pattern, the displacement generated in the both patterns can be reflected, and the reference pattern data regarding an image of a sample which is actually observed can be created.

    摘要翻译: 除了设计中的两个对准标记位置(设计差异)之外,图案检查装置还确定不透明图案的各个对准标记的测量位错与相移图案(测量差异)之间的差异。 测量差异和设计差异之间的差异被设置为稍后在检查中使用的参考图案中的不透明图案和相移图案之间的对准标记位置的差异。 以这种方式,通过相对于参考图案中的其他图案数据校正一个图案数据,可以反映两种图案中产生的位移,并且可以创建关于实际观察到的样本的图像的参考图案数据 。

    Pattern inspection apparatus
    40.
    发明授权
    Pattern inspection apparatus 失效
    图案检验仪

    公开(公告)号:US06883160B2

    公开(公告)日:2005-04-19

    申请号:US10252718

    申请日:2002-09-24

    摘要: A pattern inspection apparatus determines a difference of the measured dislocation of respective alignment marks of an opaque pattern and a phase shifting pattern (measurement difference), in addition to a difference between the both alignment mark positions in design (design difference). A difference between the measurement difference and the design difference is set as a difference in alignment mark position between the opaque pattern and the phase shifting pattern in a reference pattern which is later used in inspection. In this manner, by correcting one pattern data with respect to the other pattern data in the reference pattern, the displacement generated in the both patterns can be reflected, and the reference pattern data regarding an image of a sample which is actually observed can be created.

    摘要翻译: 除了设计中的两个对准标记位置(设计差异)之外,图案检查装置还确定不透明图案的各个对准标记的测量位错与相移图案(测量差异)之间的差异。 测量差异和设计差异之间的差异被设置为稍后在检查中使用的参考图案中的不透明图案和相移图案之间的对准标记位置的差异。 以这种方式,通过相对于参考图案中的其他图案数据校正一个图案数据,可以反映两种图案中产生的位移,并且可以创建关于实际观察到的样本的图像的参考图案数据 。