公开(公告)号：US07421109B2

公开(公告)日：2008-09-02

申请号：US10642760

申请日：2003-08-19

申请人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

发明人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

IPC分类号： G06K9/00 ,  G01B11/00 ,  G01J1/10

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to a first direction using the imaging device to obtain a first measurement pattern representing at least parts of the first inspection region, scanning the second inspection region to the first direction using the imaging device to obtain a second measurement pattern representing at least parts of the second inspection region, comparing the first measurement pattern and the second measurement pattern with each other to determine presence or absence of a defect formed on the sample, and controlling a scanning condition for scanning a pattern of the second inspection region by the imaging device so as to keep the same with the scanning condition when the pattern of the first inspection region is scanned by the imaging device.

摘要翻译： 一种图案检查方法，包括准备具有第一和第二检查区域的样本和具有多个像素的成像装置，使用成像装置将第一检查区域扫描到第一方向，以获得表示至少部分的第一测量图案 使用所述成像装置将所述第二检查区域扫描到所述第一方向，以获得表示所述第二检查区域的至少一部分的第二测量图案，将所述第一测量图案和所述第二测量图案彼此进行比较，以确定 存在或不存在形成在样品上的缺陷，以及控制用于通过成像装置扫描第二检查区域的图案的扫描条件，以便当第一检查区域的图案被扫描时与扫描条件保持相同 成像装置。

公开(公告)号：US07551767B2

公开(公告)日：2009-06-23

申请号：US12040541

申请日：2008-02-29

申请人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

发明人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

IPC分类号： G06K9/00

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： A pattern inspection apparatus uses a die-to-database comparison method which compares detected pattern data obtained from an optical image of a pattern of a plate to be inspected with first reference pattern data obtained from designed pattern data in combination with a die-to-die comparison method which compares the detected pattern data with second reference pattern data obtained by detecting an area to be a basis for repetition. A computer detects presence of a plurality of repeated pattern areas from layout information contained in the designed pattern data, reads the arrangement, the number, the dimension and the repeated pitch of the repeated pattern areas, and automatically fetches an inspection area of the die-to-die comparison method.

摘要翻译： 图案检查装置使用芯片对数据库比较方法，将从被检查板的图案的光学图像获得的检测图案数据与从设计图案数据获得的第一参考图案数据结合， 芯片比较方法，其将检测到的图案数据与通过检测作为重复基础的区域获得的第二参考图案数据进行比较。 计算机从包含在设计图案数据中的布局信息中检测多个重复图案区域的存在，读取重复图案区域的布置，数量，尺寸和重复间距，并且自动地取出模具数据的检查区域， 对比方法。

公开(公告)号：US20080166054A1

公开(公告)日：2008-07-10

申请号：US12040541

申请日：2008-02-29

申请人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

发明人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

IPC分类号： G06K9/46

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： A pattern inspection apparatus uses a die-to-database comparison method which compares detected pattern data obtained from an optical image of a pattern of a plate to be inspected with first reference pattern data obtained from designed pattern data in combination with a die-to-die comparison method which compares the detected pattern data with second reference pattern data obtained by detecting an area to be a basis for repetition. A computer detects presence of a plurality of repeated pattern areas from layout information contained in the designed pattern data, reads the arrangement, the number, the dimension and the repeated pitch of the repeated pattern areas, and automatically fetches an inspection area of the die-to-die comparison method.

摘要翻译： 图案检查装置使用芯片对数据库比较方法，将从被检查板的图案的光学图像获得的检测图案数据与从设计图案数据获得的第一参考图案数据结合， 芯片比较方法，其将检测到的图案数据与通过检测作为重复基础的区域获得的第二参考图案数据进行比较。 计算机从包含在设计图案数据中的布局信息中检测多个重复图案区域的存在，读取重复图案区域的布置，数量，尺寸和重复间距，并且自动取出模具数据的检查区域， 对比方法。

公开(公告)号：US07415149B2

公开(公告)日：2008-08-19

申请号：US11674025

申请日：2007-02-12

申请人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

发明人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiyuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

IPC分类号： G06K9/00

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： A pattern inspection apparatus uses a die-to-database comparison method which compares detected pattern data obtained from an optical image of a pattern of a plate to be inspected with first reference pattern data obtained from designed pattern data in combination with a die-to-die comparison method which compares the detected pattern data with second reference pattern data obtained by detecting an area to be a basis for repetition. A computer detects presence of a plurality of repeated pattern areas from layout information contained in the designed pattern data, reads the arrangement, the number, the dimension and the repeated pitch of the repeated pattern areas, and automatically fetches an inspection area of the die-to-die comparison method.

摘要翻译： 图案检查装置使用芯片对数据库比较方法，将从被检查板的图案的光学图像获得的检测图案数据与从设计图案数据获得的第一参考图案数据结合， 芯片比较方法，其将检测到的图案数据与通过检测作为重复基础的区域获得的第二参考图案数据进行比较。 计算机从包含在设计图案数据中的布局信息中检测多个重复图案区域的存在，读取重复图案区域的布置，数量，尺寸和重复间距，并且自动取出模具数据的检查区域， 对比方法。

公开(公告)号：US20070127806A1

公开(公告)日：2007-06-07

申请号：US11674025

申请日：2007-02-12

申请人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

发明人： Hideo Tsuchiya ,  Kyoji Yamashita ,  Toshiuki Watanabe ,  Ikunao Isomura ,  Toru Tojo ,  Yasushi Sanada

IPC分类号： G06K9/00

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： A pattern inspection apparatus uses a die-to-database comparison method which compares detected pattern data obtained from an optical image of a pattern of a plate to be inspected with first reference pattern data obtained from designed pattern data in combination with a die-to-die comparison method which compares the detected pattern data with second reference pattern data obtained by detecting an area to be a basis for repetition. A computer detects presence of a plurality of repeated pattern areas from layout information contained in the designed pattern data, reads the arrangement, the number, the dimension and the repeated pitch of the repeated pattern areas, and automatically fetches an inspection area of the die-to-die comparison method.

摘要翻译： 图案检查装置使用芯片对数据库比较方法，将从被检查板的图案的光学图像获得的检测图案数据与从设计图案数据获得的第一参考图案数据结合， 芯片比较方法，其将检测到的图案数据与通过检测作为重复基础的区域获得的第二参考图案数据进行比较。 计算机从包含在设计图案数据中的布局信息中检测多个重复图案区域的存在，读取重复图案区域的布置，数量，尺寸和重复间距，并且自动取出模具数据的检查区域， 对比方法。

公开(公告)号：US6084716A

公开(公告)日：2000-07-04

申请号：US112641

申请日：1998-07-09

申请人： Yasushi Sanada ,  Toru Tojo ,  Mitsuo Tabata ,  Kyoji Yamashita ,  Hideo Nagai ,  Noboru Kobayashi ,  Hisakazu Yoshino ,  Makoto Taya ,  Akemi Miwa

发明人： Yasushi Sanada ,  Toru Tojo ,  Mitsuo Tabata ,  Kyoji Yamashita ,  Hideo Nagai ,  Noboru Kobayashi ,  Hisakazu Yoshino ,  Makoto Taya ,  Akemi Miwa

IPC分类号： G01B11/30 ,  G01N21/84 ,  G01N21/88 ,  G01N21/94 ,  G01N21/956 ,  G03F1/84 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66 ,  G02B27/10 ,  G02B27/14

CPC分类号： G03F1/84 ,  G01N21/95607 ,  G03F7/70616

摘要： A single light emitted from a laser source is split into multiple beams. The multiple beams are illuminated by a multi-beam scanner to scan a substrate of interest. An optical system is provided for focusing the multiple beams independently on the substrate and directing a reflected light or a transmitted light of the multiple beams on the substrate. Aperture regulating members are disposed at equal intervals corresponding to the interval between the multiple beams for controlling the multiple beams directed from the substrate by the optical system. The multiple beams passed through their respective aperture regulating members are received by an optical detector assembly which detect a change in the amount of the multiple beams. The substrate is continuously moved by a movable table on a plane substantially vertical to the multiple beams and in a direction arranged at substantially a right angle to the scanning direction of the multiple beams. Then, a scanned image is produced by an image processor from a signal output of the detector assembly and data of the coordinate location of the movable table and compared by a comparator with a corresponding reference image.

摘要翻译： 从激光源发射的单个光被分成多个光束。 多光束被多光束扫描仪照射以扫描感兴趣的衬底。 提供了一种光学系统，用于将多个光束独立地聚焦在衬底上并且将多个光束的反射光或透射光引导到衬底上。 光圈调节构件以与多个光束之间的间隔相等的间隔设置，用于通过光学系统控制从衬底引导的多个光束。 通过其各自的孔径调节构件的多个光束被检测多个光束的量的变化的光学检测器组件接收。 基板在与多个光束大致垂直的平面上并且在与多个光束的扫描方向大致成直角的方向上由可移动台连续移动。 然后，扫描图像由图像处理器从检测器组件的信号输出和可移动表的坐标位置的数据产生，并由具有相应参考图像的比较器进行比较。

公开(公告)号：US07068364B2

公开(公告)日：2006-06-27

申请号：US10627702

申请日：2003-07-28

申请人： Shinji Sugihara ,  Mitsuo Tabata ,  Hideo Tsuchiya ,  Yasushi Sanada

发明人： Shinji Sugihara ,  Mitsuo Tabata ,  Hideo Tsuchiya ,  Yasushi Sanada

IPC分类号： G01N21/88

CPC分类号： G01N21/95607

摘要： A pattern inspection apparatus includes a light source irradiating a plate having a pattern, a photoelectric device photoelectrically converting the image of the pattern, a generator generating detected pattern data based on a photoelectrically converted signal, a generator generating reference pattern data from designed data, a comparator comparing the detected pattern data with the reference pattern data, a sensor detecting a light intensity of the light source, a barometric pressure sensor detecting a barometric pressure in the apparatus, a detector detecting at least one of the light intensity and barometric pressure deviating from predetermined ranges, a memory storing the detected and reference pattern data at a point of time when the abnormal status is generated in synchronization with position data and detected values of the light intensity and barometric pressure and an output device which outputs these.

摘要翻译： 图案检查装置包括照射具有图案的板的光源，对图案的图像进行光电转换的光电装置，基于光电转换信号产生检测图案数据的发生器，从设计数据生成参考图案数据的发生器， 将检测到的图案数据与参考图案数据进行比较，检测光源的光强度的传感器，检测设备中的气压的大气压传感器，检测到偏离的光强度和大气压力中的至少一个 预定范围，在与位置数据同步生成异常状态的时间点和检测到的光强度和大气压值的同时存储检测到的参考图形数据的存储器和输出这些数据的输出装置。

公开(公告)号：US07359043B2

公开(公告)日：2008-04-15

申请号：US10743830

申请日：2003-12-24

申请人： Hideo Tsuchiya ,  Yoshihide Kato ,  Kazuto Matsuki ,  Yasushi Sanada ,  Riki Ogawa ,  Takuro Nagao

发明人： Hideo Tsuchiya ,  Yoshihide Kato ,  Kazuto Matsuki ,  Yasushi Sanada ,  Riki Ogawa ,  Takuro Nagao

IPC分类号： G01N21/00 ,  G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： A pattern inspecting method, comprising preparing a sample having a first and a second inspection regions and an imaging device having a plurality of pixels, scanning the first inspection region to a first direction using the imaging device to obtain a first measurement pattern representing at least parts of the first inspection region, scanning the second inspection region to the first direction using the imaging device to obtain a second measurement pattern representing at least parts of the second inspection region, comparing the first measurement pattern and the second measurement pattern with each other to determine presence or absence of a defect formed on the sample, and controlling a scanning condition for scanning a pattern of the second inspection region by the imaging device so as to keep the same with the scanning condition when the pattern of the first inspection region is scanned by the imaging device.

摘要翻译： 一种图案检查方法，包括准备具有第一和第二检查区域的样本和具有多个像素的成像装置，使用成像装置将第一检查区域扫描到第一方向，以获得表示至少部分的第一测量图案 使用所述成像装置将所述第二检查区域扫描到所述第一方向，以获得表示所述第二检查区域的至少一部分的第二测量图案，将所述第一测量图案和所述第二测量图案彼此进行比较，以确定 存在或不存在形成在样品上的缺陷，以及控制用于通过成像装置扫描第二检查区域的图案的扫描条件，以便当第一检查区域的图案被扫描时与扫描条件保持相同 成像装置。

公开(公告)号：US06909501B2

公开(公告)日：2005-06-21

申请号：US09956010

申请日：2001-09-20

申请人： Riki Ogawa ,  Yasushi Sanada ,  Mitsuo Tabata

发明人： Riki Ogawa ,  Yasushi Sanada ,  Mitsuo Tabata

IPC分类号： G01B11/30 ,  G01N21/956 ,  G03F1/84 ,  G06T1/00 ,  G06T7/00 ,  H01L21/66 ,  G01N21/88

CPC分类号： G06T7/001 ,  G06T7/0002 ,  G06T2207/30148

摘要： A pattern inspection apparatus includes a pulse laser light source sequentially generating pulse laser light, an illumination optics applying the pulse laser light onto a mask substrate, an imaging optics collecting light from the mask substrate to form an image thereof, an area sensor sensing the image of the mask substrate obtained by the optics in a rectangular area unit, a comparator comparing image data acquired by the area sensor with previously prepared reference data to detect a defect of a pattern, a stage driving apparatus two-dimensionally scanning a stage having the mask substrate placed thereon, and a stage position detector detecting a position of the stage. With the above configuration, it is possible to efficiently inspect the surface of the mask substrate by adequately setting the moving speed of the mask substrate and the sensing timing of the sensing apparatus.

摘要翻译： 图案检查装置包括顺序产生脉冲激光的脉冲激光光源，将脉冲激光施加到掩模基板上的照明光学器件，从掩模基板收集光以形成其图像的成像光学元件，感测图像的区域传感器 通过光学器件以矩形区域单位获得的掩模基板，比较器，将由区域传感器获取的图像数据与预先准备的参考数据进行比较，以检测图案的缺陷;平台驱动装置，二维地扫描具有掩模 放置在其上的基板，以及检测台的位置的台位置检测器。 利用上述结构，可以通过适当地设定掩模基板的移动速度和感测装置的检测定时来有效地检查掩模基板的表面。

公开(公告)号：US20060273758A1

公开(公告)日：2006-12-07

申请号：US11444492

申请日：2006-06-01

申请人： Yasushi Sanada ,  Yoshinao Tatebayashi ,  Nobuo Shibuya ,  Shinichiro Kosugi

发明人： Yasushi Sanada ,  Yoshinao Tatebayashi ,  Nobuo Shibuya ,  Shinichiro Kosugi

IPC分类号： H02J7/00

CPC分类号： H01M2/0212 ,  H01M2/1061 ,  H01M10/052

摘要： A battery pack includes: a plurality of flat-shaped cells each including a generator element sealed by a laminate film; a case for accommodating the cells so as to be laminated in a thickness direction thereof, the case having an opening formed at least at one end thereof; a lid member fixed to the opening of the case and pressing the laminated cells in a laminating direction thereof; a bottom member provided between the case and the cell located at an end of the laminated cells on a side opposite to the opening of the case; a first tray provided between the cells and brought into contact with the case; a second tray provided between the lid member and the cells and brought into contact with the case; and a third tray provided between the bottom member and the cells and brought into contact with the case. The lid member and the bottom member are formed of a material having a thermal conductivity lower than a thermal conductivity of any one of the first tray, the second tray and the third tray.

摘要翻译： 电池组包括：多个扁平电池，每个电池单元包括由层压膜密封的发电机元件; 壳体，用于容纳电池以在其厚度方向上层压，所述壳体具有至少在其一端形成的开口; 固定在所述壳体的开口部的盖构件，并且在层压方向上按压所述层叠电池单元; 底部构件，其设置在壳体和位于层叠单元的与壳体的开口相对的一侧的端部处的单元; 设置在电池之间并与壳体接触的第一托盘; 设置在所述盖构件和所述单元之间并与所述壳体接触的第二托盘; 以及第三托盘，其设置在所述底部构件和所述单元之间并与所述壳体接触。 盖构件和底部构件由导热率低于第一托盘，第二托盘和第三托盘中的任一个的导热率的材料形成。