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39 条记录 (耗时 0.024 秒)

    NON-CONDENSING THERMOS CHUCK
    33.
    发明申请
    NON-CONDENSING THERMOS CHUCK 有权
    非冷凝温泉

    公开(公告)号：US20100187447A1

    公开(公告)日：2010-07-29

    申请号：US12358788

    申请日：2009-01-23

    申请人： William D. Lee ,  Ashwin M. Purohit ,  Marvin R. LaFontaine

    发明人： William D. Lee ,  Ashwin M. Purohit ,  Marvin R. LaFontaine

    IPC分类号： H01J37/08 ,  B05D5/00

    CPC分类号： H01L21/6831 ,  H01L21/67109 ,  Y10T279/11

    摘要： The present invention is directed to an apparatus and method of forming a thermos layer surrounding a chuck for holding a wafer during ion implantation. The thermos layer is located below a clamping surface, and comprises a vacuum gap and an outer casing encapsulating the vacuum gap. The thermos layer provides a barrier blocking condensation to the outside of the chuck within a process chamber by substantially preventing heat transfer between the chuck when it is cooled and the warmer environment within the process chamber.

    摘要翻译： 本发明涉及一种在离子注入期间形成用于保持晶片的卡盘周围的热水层的装置和方法。 热水层位于夹紧表面下方，并且包括真空间隙和封装真空间隙的外壳。 热水器层通过基本上防止卡盘在冷却时的热传递和处理室内的较暖环境之间在处理室内向卡盘的外部提供阻挡阻塞冷凝。

    WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS
    35.
    发明申请
    WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS 有权
    用于静电夹的波浪接地方法

    公开(公告)号：US20100110603A1

    公开(公告)日：2010-05-06

    申请号：US12262399

    申请日：2008-10-31

    申请人： Marvin R. LaFontaine ,  Ari Eiriksson ,  Ashwin M. Purohit ,  William D. Lee

    发明人： Marvin R. LaFontaine ,  Ari Eiriksson ,  Ashwin M. Purohit ,  William D. Lee

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831 ,  H01L21/68742

    摘要： An electrostatic chuck and method for clamping and de-clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. An arc pin operably coupled to the clamping plate and a power source provides an arc for penetrating an insulating layer of the workpiece. The arc pin is selectively connected to an electrical ground, wherein upon removal of the insulative layer of the workpiece, the arc pin provides an electrical ground connection to the workpiece.

    摘要翻译： 提供了用于夹紧和去夹紧工件的静电卡盘和方法。 ESC包括具有夹紧表面的夹板和一个或多个电极。 施加到一个或多个电极的电位选择性地将工件夹紧到夹紧表面。 可操作地联接到夹持板的电弧销和电源提供用于穿透工件的绝缘层的电弧。 弧形销被选择性地连接到电接地，其中在移除工件的绝缘层时，电弧销提供与工件的电接地连接。

    Reduction of sulfur emissions from crude fractions
    36.
    发明授权
    Reduction of sulfur emissions from crude fractions 失效
    减少粗馏分的硫排放

    公开(公告)号：US07544239B2

    公开(公告)日：2009-06-09

    申请号：US11250665

    申请日：2005-10-14

    申请人： Paul J. Buras ,  William D. Lee ,  James R. Butler

    发明人： Paul J. Buras ,  William D. Lee ,  James R. Butler

    IPC分类号： C08L95/00

    CPC分类号： C08L95/00 ,  C08L9/06 ,  C08L81/04 ,  E01C7/18 ,  C08L2666/08

    摘要： Methods of modifying crude fractions are described herein. The methods generally include blending a crude fraction with an emissions reducing additive to form a modified crude fraction, wherein the modified crude fraction exhibits reduced sulfur emissions. The emissions reducing additive generally includes a dispersion of a metal oxide.

    摘要翻译： 本文描述了改性粗馏分的方法。 所述方法通常包括将粗馏分与排放减少添加剂混合以形成改性的粗馏分，其中改性的粗馏分表现出减少的硫排放。 减排添加剂通常包括金属氧化物的分散体。

    Motion simulator
    39.
    发明授权
    Motion simulator 失效
    运动模拟器

    公开(公告)号：US4753596A

    公开(公告)日：1988-06-28

    申请号：US896784

    申请日：1986-08-15

    申请人： John W. Hart ,  Anthony J. Summerfield ,  William D. Lee

    发明人： John W. Hart ,  Anthony J. Summerfield ,  William D. Lee

    IPC分类号： G09B9/14 ,  G09B9/04

    CPC分类号： G09B9/14

    摘要： A motion simulator for simulating the working characteristics of motion vehicles is based on the synergistic `six degrees of freedom` system. The apparatus of the simulator comprises a main frame 10 mounted on three pairs of extensible and retractable legs 11 by means of a corresponding number of universal pivots. The pairs of legs 11 are arranged in a triangular formation on the underside of the frame 10 such that adjacent legs 11 from adjacent vertices of the formation converge to a common foot, to which they are secured by further universal pivots 13. Movement of the frame 10 is achieved by the relative extension and retraction of the legs 11.Supplementary longitudinal acceleration effects are simulated by means of a surge frame 14 slidably mounted on the main frame 10 and independently actuated by means of a piston and cylinder device 17 to move in a fore/aft sense with respect to the frame 10.

    摘要翻译： 用于模拟运动车辆的工作特性的运动模拟器是基于协同的“六自由度”系统。 模拟器的装置包括通过相应数量的通用枢轴安装在三对可伸缩腿11上的主框架10。 腿部对11在框架10的下侧布置成三角形形状，使得从地层的相邻顶点的相邻腿部11会聚到共同的脚部，通过另外的通用枢轴13将腿部11固定。框架的移动 通过腿部11的相对的伸展和缩回来实现。通过可滑动地安装在主框架10上的喘振框架14来模拟补充的纵向加速度效果，并通过活塞和气缸装置17独立地致动以在 前后方向相对于框架10。