公开(公告)号：US09116526B2

公开(公告)日：2015-08-25

申请号：US13327678

申请日：2011-12-15

申请人： Yuichiro Hashimoto ,  Junichi Miyaji

发明人： Yuichiro Hashimoto ,  Junichi Miyaji

IPC分类号： F17D3/00 ,  G05D11/13 ,  G01N33/00

CPC分类号： G05D11/132 ,  G01N33/0006 ,  Y10T137/0318 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/87249 ,  Y10T137/8729 ,  Y10T137/87314 ,  Y10T137/87676

摘要： The present invention is one that prevents standard gas from remaining in a standard gas line to prevent a concentration of standard gas from being reduced due to adsorption, modification, or the like, and has: a diluent gas line provided with a diluent gas flow rate controlling mechanism; a standard gas line provided with a standard gas flow rate controlling mechanism; an output gas line joined by the diluent gas line and standard gas line and outputs the standard gas having a predetermined concentration; an exhaust gas line connected to an upstream side of the standard gas flow rate controlling mechanism in the standard gas line and provided with an on/off valve and a flow rate control part; and a control part that, depending on a flow rate of the standard gas flowing through the standard gas line or the type of the standard gas, switches on/off the on/off valve.

摘要翻译： 本发明是防止标准气体残留在标准气体管线中，以防止标准气体由于吸附，改性等而降低的浓度，并具有：具有稀释气体流量的稀释气体管线 控制机制; 设有标准气体流量控制机构的标准气体管线; 通过稀释气体管线和标准气体管路连接的输出气体管线，输出具有预定浓度的标准气体; 与标准气体流量控制机构的标准气体流量控制机构的上游侧连接并配置有开关阀和流量控制部的排气管路， 以及控制部，其根据流过标准气体管路的标准气体的流量或标准气体的类型来开/关开闭阀。

公开(公告)号：US09091578B2

公开(公告)日：2015-07-28

申请号：US13727337

申请日：2012-12-26

申请人： HORIBA STEC, Co., Ltd.

发明人： Hiroyuki Okano ,  Takashi Shirai

IPC分类号： G01F1/684 ,  G01F1/696 ,  G05D7/06

CPC分类号： G01F1/684 ,  G01F1/6842 ,  G01F1/696 ,  G05D7/0635

摘要： A thermal flow rate sensor is provided which includes a main flow path through which a fluid flows, and a sensor flow path that branches off from the main flow path so as to cause the fluid to flow in a split flow and that is provided with a flow rate detecting mechanism configured to detect a flow rate of the fluid. The flow rate detecting mechanism includes an upstream-side coil and a downstream-side coil, each configured by using a heat-generating resistance wire wound around a sensor flow pipe forming the sensor flow path. A peak position of a temperature distribution generated in the sensor flow path by the upstream-side coil and the downstream-side coil is positioned on the upstream-side coil side relative to the middle position between the upstream-side coil and the downstream-side coil on the sensor flow path.

摘要翻译： 提供一种热流量传感器，其包括流体流过的主流路和从主流路分支的传感器流路，以使流体以分流流动，并且设有 流量检测机构，被配置为检测流体的流量。 流量检测机构包括上游侧线圈和下游侧线圈，每个线圈通过使用缠绕在形成传感器流路的传感器流量管上的发热电阻丝构成。 在上游侧线圈和下游侧线圈的传感器流路中产生的温度分布的峰值位置相对于上游侧线圈和下游侧线圈的中间位置位于上游侧线圈侧 线圈在传感器流路上。

公开(公告)号：US09091380B2

公开(公告)日：2015-07-28

申请号：US12957283

申请日：2010-11-30

申请人： Tatsuya Hayashi ,  Kazuhiro Oya ,  Yuji Yamaguchi

发明人： Tatsuya Hayashi ,  Kazuhiro Oya ,  Yuji Yamaguchi

IPC分类号： F16K27/00 ,  F16L23/10

CPC分类号： F16L23/10 ,  F16K27/003 ,  Y10T137/8593

摘要： In a fluid device composed of vertical and horizontal fluid lines, for a purpose of improving a compact size and of assuring ease of assembly, a plurality of vertical fluid lines are arranged in parallel to each other, and in the fluid device where, between the adjoining vertical fluid lines, a plurality of horizontal fluid lines for connecting them are arranged in parallel, one of the horizontal fluid lines connects pipes by using a flange joint to be fastened with a coupling ring, and the other one connects pipes by using joint pipes.

摘要翻译： 在由垂直和水平流体管线组成的流体装置中，为了改善紧凑的尺寸并且确保组装的容易性，多个垂直流体管线彼此平行地布置，并且在流体装置中， 相邻的垂直流体管线，多个用于连接它们的水平流体管线平行布置，一个水平流体管线通过使用用联接环紧固的法兰接头连接管道，另一个通过使用接头管道 。

公开(公告)号：US09081388B2

公开(公告)日：2015-07-14

申请号：US12861536

申请日：2010-08-23

申请人： Yuki Tanaka ,  Toshihiro Kashima

发明人： Yuki Tanaka ,  Toshihiro Kashima

IPC分类号： G05D7/06

CPC分类号： G01F25/0007 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A mass flow controller comprises a flow rate measuring part that measures a flow rate of a fluid flowing in a flow channel and outputs a measured flow rate value, a control valve, a valve control part that controls an opening degree of the control valve based on an entirely-close command to entirely close the control valve compulsorily or a set flow rate value set as a target value, and an external output part that outputs an external output flow rate value based on the measured flow rate value to the outside, and at a time when the valve control part receives the entirely close command or zero as the set flow rate value, the external output part outputs zero as the external output flow rate value, irrespective of the measured flow rate value.

摘要翻译： 质量流量控制器包括：流量测量部件，其测量在流动通道中流动的流体的流量，并输出测量的流量值;控制阀;控制阀的控制部件，其基于 一个完全关闭命令，强制地将控制阀完全关闭或设定为目标值的设定流量值;以及外部输出部分，其根据测量的流量值将外部输出流量值输出到外部， 当阀门控制部分接收完全关闭命令或零作为设定流量值的时间时，外部输出部分输出零作为外部输出流量值，而与所测量的流量值无关。

公开(公告)号：US20140324233A1

公开(公告)日：2014-10-30

申请号：US14261353

申请日：2014-04-24

申请人： HORIBA STEC, Co., Ltd.

发明人： Hiroshi Takakura ,  Daichi Kunita

IPC分类号： G05D7/06

CPC分类号： G01F1/684 ,  G05D7/0635

摘要： The present invention is intended to inhibit a communication program from crashing in the case where a power source is turned off while writing or rewriting of a measurement control program from an external device is performed by a communication part, and includes: a first recording part for storing the communication program for controlling the communication part; a second recording part for storing a measurement control program for controlling the measurement control part; and a central processing unit. In this configuration, the communication program stored in the first recording part is configured to be unrewritable by the central processing unit and the measurement control program stored in the second recording part is configured to be rewritable by the central processing unit.

摘要翻译： 本发明旨在在由通信部件执行写入或重写来自外部设备的测量控制程序的情况下禁止通信程序崩溃，并且包括：第一记录部分，用于 存储用于控制通信部分的通信程序; 第二记录部分，用于存储用于控制测量控制部分的测量控制程序; 和中央处理单元。 在该配置中，存储在第一记录部分中的通信程序被配置为由中央处理单元不可调节，并且存储在第二记录部分中的测量控制程序被配置为可由中央处理单元重写。

公开(公告)号：US20140319705A1

公开(公告)日：2014-10-30

申请号：US14261359

申请日：2014-04-24

申请人： HORIBA STEC, Co., Ltd.

发明人： Tatsuya Hayashi

IPC分类号： B01F3/04

CPC分类号： G05D11/138

摘要： The present claimed invention includes a first flow channel where a carrier gas or a mixed gas flows, a switch valve that is for flowing the mixed gas or the carrier gas to the first flow channel selectively, a fluid adjusting valve that adjusts a concentration of a gas flowing in the first flow channel, and a control part that conducts a feedback control on an opening degree of the fluid adjusting valve, and is characterized such that the control part initiates the feedback control by the use of an opening degree of the fluid adjusting valve at a time just before the gas flowing in the first flow channel is switched from the mixed gas to the carrier gas as an initial opening degree of the fluid adjusting valve at a time when the gas flowing in the first flow channel is again switched to the mixed gas afterward.

摘要翻译： 本发明的发明包括载气或混合气体流动的第一流动通道，用于选择性地将混合气体或载气流动到第一流动通道的切换阀，调节阀的浓度 在第一流路中流动的气体，以及对流体调节阀的开度进行反馈控制的控制部，其特征在于，所述控制部通过使用所述流体调整的开度开始所述反馈控制 在将在第一流路中流动的气体之前的时刻从混合气体切换为载气时，作为流体调节阀的初始开度，在将第一流路中流动的气体再次切换为 混合气后。

公开(公告)号：US20140290778A1

公开(公告)日：2014-10-02

申请号：US14226167

申请日：2014-03-26

申请人： HORIBA STEC Co., Ltd.

发明人： Tadahiro Yasuda ,  Shigeyuki Hayashi ,  Nobuyuki Kannan

IPC分类号： F16K15/14

CPC分类号： F16K41/10 ,  F16K31/007 ,  Y10T137/7895

摘要： In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

摘要翻译： 为了增加其直径和输出量，可以提供具有低排斥性的隔膜结构，即使不受到来自致动器的大的力的影响，也能够大幅度地变形以增加行程，并且不太可能产生 即使形成薄而具有缺陷或故障，并且流体控制阀设置有膜结构和按压膜结构的致动器，其中隔膜结构设置有：形成为管状并被按压的突出部 由致动器 从所述突出部的基端部相对于所述突出部向外侧扩展的边缘部; 以及支撑部，其形成在边缘部的外周并且附接到另一构件，并且边缘部形成为膜状。

公开(公告)号：US20140230559A1

公开(公告)日：2014-08-21

申请号：US14183414

申请日：2014-02-18

申请人： HORIBA STEC, Co., Ltd.

发明人： Hidetaka Yada ,  Sotaro Kishida ,  Takehisa Hataita

IPC分类号： G01L7/08

CPC分类号： G01L19/0023 ,  G01F1/38 ,  G01L7/00 ,  G01L7/08 ,  G01L7/082

摘要： A structure comprising: a base; a diaphragm; a peripheral wall member of which one end surface is attached to a circumferential edge part of the diaphragm and the other end surface is attached on the top surface of the base to form an internal space together with the base and the diaphragm; a protruding part that protrudes from the top surface of the base; and a communicatively connecting path that extends from a bottom surface side of the base toward the diaphragm, and communicatively connects the internal space and the outside to each other to flow fluid, wherein on an outer lateral surface of the protruding part, an opening is formed in a part intersecting with an inner lateral surface of the communicatively connecting path, and a part of a fore end inner surface of the communicatively connecting path is formed in the protruding part.

摘要翻译： 一种结构，包括：基底; 隔膜 周壁部件，其一端面安装在隔膜的周缘部，另一端面安装在基座的上表面上，与基座和隔膜一起形成内部空间; 突出部，其从所述基部的顶面突出; 以及从基座的底面朝向隔膜延伸的通信连接路径，并且将内部空间和外部彼此连通地连通以流动流体，其中在突出部分的外侧表面上形成有开口 在与所述通信连接路径的内侧面相交的部分中，所述通信连接路径的前端内表面的一部分形成在所述突出部中。

公开(公告)号：US08800589B2

公开(公告)日：2014-08-12

申请号：US12609965

申请日：2009-10-30

申请人： Masakazu Minami ,  Masaki Inoue

发明人： Masakazu Minami ,  Masaki Inoue

IPC分类号： C23C16/448 ,  G05D11/13 ,  C30B25/14

CPC分类号： G05D11/139 ,  C23C16/4482 ,  C30B25/14 ,  Y10T137/2499 ,  Y10T137/2509

摘要： An object of this invention is to provide a responsive material gas concentration control system that can be mounted on a bubbling system and that can control a concentration of a material gas in a mixed gas at a constant value even though a partial pressure of the material gas fluctuates. The material gas concentration control system is used for a material evaporation system, and comprises a body that is connected to an outlet line and that has an internal flow channel for flowing the mixed gas, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a first valve that is arranged downstream of the concentration measuring part and that adjusts the measured concentration measured by the concentration measuring part at a previously determined set concentration, wherein the concentration measuring part and the first valve are mounted on the body.

摘要翻译： 本发明的目的是提供一种响应性材料气体浓度控制系统，其可以安装在鼓泡系统上，并且即使材料气体的分压也可以将混合气体中的原料气体的浓度控制在恒定值 波动 材料气体浓度控制系统用于材料蒸发系统，并且包括连接到出口管线并具有用于使混合气体流动的内部流动通道的主体，测量材料气体浓度的浓度测量部件 在所述混合气体中配置有第一阀，所述第一阀配置在所述浓度测定部的下游，并且以预先设定的浓度调整由所述浓度测定部测定的测定浓度，其中，所述浓度测定部和所述第一阀安装在 身体。

公开(公告)号：US08789556B2

公开(公告)日：2014-07-29

申请号：US13651089

申请日：2012-10-12

申请人： Horiba STEC, Co., Ltd.

发明人： Tadahiro Yasuda ,  Shigeyuki Hayashi ,  Akito Takahashi ,  Tetsuo Shimizu

IPC分类号： F16K31/02 ,  G05D7/06 ,  G01F1/34 ,  G01F1/684 ,  G01F25/00

CPC分类号： G01F1/34 ,  G01F1/6842 ,  G01F25/0053 ,  G05D7/06 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/7761

摘要： The flow rate control device is provided with: a fluid resistor provided on the flow channel; a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor; a pressure calculating part configured to calculate a pressure in a side with respect to the fluid resistor where the pressure sensor is not provided; a flow rate calculating part configured to calculate a flow rate based on the measurement pressure value and a calculation pressure value calculated by the pressure calculating part; and an abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on the measurement flow rate value and a calculation flow rate value.

摘要翻译： 流量控制装置设置有设置在流路上的流体电阻器; 设置在流体电阻器的上游侧或下游侧的压力传感器; 压力计算部，被配置为计算相对于不设置压力传感器的流体电阻器的一侧的压力; 流量计算部，被配置为基于所述测量压力值和由所述压力计算部计算出的计算压力值来计算流量; 以及异常诊断部，其基于所述测量流量值和计算流量值，构成为诊断所述测量流量值的异常。