Abstract:
A piezoelectric vibrator is provided in which a piezoelectric vibrating piece is accommodated in a package, the piezoelectric vibrating piece including: a pair of vibrating arm sections; a base section to which each base end of the pair of vibrating arm sections is connected; and a support arm section that is connected to the base section between the pair of vibrating arm sections and extends from the base section to the same side as the vibrating arm sections, in which the piezoelectric vibrating piece is supported within the package in mount sections provided in the support arm section, and in which the mount sections are provided in a region which is defined between a position of which a distance from an end section of the base section opposite to the side where the support arm section is connected to the side of a leading end of the support arm section is 25% of a width dimension of the base section along the width direction and a position of which the distance is 65% of the width dimension.
Abstract:
A piezoelectric vibrating piece including: a pair of vibrating arm sections which has a groove section, respectively; a base section which is disposed between the pair of vibrating arm sections; and a connecting section which connects each base end of the pair of vibrating arm sections and the base section. If a length from a base end to a leading end of the vibrating arm section in a longitudinal direction of the vibrating arm section is Lv, and a length from the base end of the vibrating arm section to an end of the connecting section on the opposite side to the vibrating arm section is Lc, a relationship of Lc/Lv≧0.1 is satisfied.
Abstract:
A piezoelectric vibrating piece includes: a pair of vibrating arm sections which are disposed at a distance away from each other in a width direction of a base section; the base section to which each base end of the pair of vibrating arm sections is connected; and a support arm section that is connected to the base section between the pair of vibrating arm sections and extends from the base section to the same side as the pair of vibrating arm sections, in which convex sections are formed continuous with side surfaces of roots of the vibrating arm sections and side surfaces of the base section.
Abstract:
A piezoelectric vibrating piece includes a pair of vibrating arm portions, a base portion which is arranged between a pair of vibrating arm portions, and connecting portions which connect proximal end portions of a pair of vibrating arm portions and a proximal end portion of the base portion. Narrow width portions are provided at the base of the base portion.
Abstract:
A piezoelectric vibrating piece includes a pair of vibrating arm portions which are arranged with a center axis interposed therebetween, a base portion which is arranged between a pair of vibrating arm portions and fixed to the outside, and a pair of connecting portions which connect proximal end portions of a pair of vibrating arm portions and a proximal end portion of the base portion. The distance between distal end portions of the vibrating arm portions and the center axis is smaller than the distance between the proximal end portions of the vibrating arm portions and the center axis.
Abstract:
A method for manufacturing a piezoelectric vibrator is provided. The piezoelectric vibrator includes: a package in which a first substrate and a second substrate are superimposed so as to form a cavity therebetween; extraction electrodes which are formed on the first substrate so as to be extracted from the inner side of the cavity to an outer edge of the first substrate; a piezoelectric vibrating reed which is sealed in the cavity and electrically connected to the extraction electrodes at an inner side of the cavity; and outer electrodes which are formed on an outer surface of the package so as to be electrically connected to the extraction electrodes at the outer side of the cavity. The method includes: a bonding film forming step of forming a bonding film on at least one of the first substrate and the second substrate using a low-melting-point glass so as to bond the two substrates; a mounting step of electrically connecting the piezoelectric vibrating reed to the extraction electrodes formed on the first substrate; and a bonding step of superimposing the first substrate and the second substrate onto each other with the bonding film disposed therebetween while heating the bonding film to a predetermined bonding temperature to thereby bond the two substrates by the bonding film.
Abstract:
A piezoelectric vibrating piece includes a pair of vibration arm portions that is placed in a row in a width direction; a base portion to which proximal end sides in the pair of vibration arm portions in an extending direction are connected; and weight metal films that are formed on outer surfaces of the vibration arm portions, wherein the weight metal films are formed in positions that avoid regions of tip portions in the vibration arm portions in a longitudinal direction.
Abstract:
There are provided an excitation electrode, a quartz crystal vibrator element, a quartz crystal vibrator, a sensor, an oscillator, and a method of manufacturing a quartz crystal vibrator element which are not affected by heat in a process or a use environment to surely prevent a frequency fluctuation from occurring, reduction in size of which can be achieved, and which are low in cost and excellent in productivity. The excitation electrodes are disposed on an outer surface of a quartz crystal plate, apply an electrical field for exciting the quartz crystal plate to the quartz crystal plate, have a single layer structure formed of a two-dimensional layered substance, and are used when arranged as a pair so as to be opposed to each other via the quartz crystal plate.
Abstract:
There is provided a piezoelectric vibrator element which is excellent in vibration characteristics, high in quality, and capable of suppressing a frequency fluctuation after a frequency adjustment. The piezoelectric vibrator element is provided with a piezoelectric plate having a pair of vibrating arm parts, an electrode film disposed on obverse and reverse surfaces of the piezoelectric plate, and weight metal films for a frequency adjustment disposed on the electrode film at the obverse surface side in the vibrating arm parts. The reverse surface of the vibrating arm part has a reverse side exposure part from which the piezoelectric plate is exposed. The obverse surface of the vibrating arm part has an obverse side exposure part from which the weight metal film and the electrode film are removed, and from which the piezoelectric plate is exposed. A whole of the obverse side exposure part overlaps the reverse side exposure part at a distance from the electrode film on the reverse surface viewed from a thickness direction of the piezoelectric plate.
Abstract:
A piezoelectric vibrator element includes a pair of vibrating arms extending from a base, and having a groove on each of opposing principal surfaces in the longitudinal direction of the vibrating arms. Two systems of excitation electrodes are included on the side surfaces and the opposing principal surfaces, and in the grooves of the vibrating arms. A width of a bank part formed by a side surface of the vibrating arms and a side surface of the groves is W0, and the separation distance between the excitation electrodes on the opposing principal surfaces is W1, such that 1 μm W1.