公开(公告)号：US20030010934A1

公开(公告)日：2003-01-16

申请号：US09414004

申请日：1999-10-07

Inventor： VICTOR KATSAP ,  PIETER KRUIT ,  DANIEL MOONEN ,  WARREN KAZMIR WASKIEWICZ

IPC: H01J003/14

CPC classification number: H01J37/065 ,  H01J37/12 ,  H01J2237/1205 ,  H01J2237/31774

Abstract: A method and apparatus for controlling beam emittance by placing a lens array in a drift space of an illumination system component. The illumination system component may be an electron gun or a liner tube or drift tube, attachable to an electron gun. The lens array may be one or more mesh grids or a combination of grids and continuous foils. The lens array forms a multitude of microlenses resembling an optical nullfly's eyenull lens. The lens array splits an incoming solid electron beam into a multitude of subbeams, such that the outgoing beam emittance is different from the incoming beam emittance, while beam total current remains unchanged. The method and apparatus permit independent control of beam current and beam emittance, which is beneficial in a SCALPEL illumination system.

Abstract translation: 一种通过将透镜阵列放置在照明系统部件的漂移空间中来控制光束发射的方法和装置。 照明系统部件可以是可附接到电子枪的电子枪或衬管或漂移管。 透镜阵列可以是一个或多个网状网格或网格和连续箔片的组合。 透镜阵列形成大量类似于光学“飞眼”透镜的微透镜。 透镜阵列将输入的固体电子束分裂成多个子束，使得输出光束发射不同于入射光束发射，而光束总电流保持不变。 该方法和装置允许对束电流和光束发射的独立控制，这在SCALPEL照明系统中是有益的。

公开(公告)号：US20020195552A1

公开(公告)日：2002-12-26

申请号：US10160153

申请日：2002-06-04

Inventor： Takeshi Ueda

IPC: H01J003/14 ,  H01J005/16

CPC classification number: B41J2/442 ,  G02B26/123 ,  G02B26/127

Abstract: A scanning type optical device comprises one optical characteristics measuring unit per color. Each optical characteristics measuring unit further includes three units. The first unit is provided on a writing start side within a scanning region, the second unit is provided on the other end side within the scanning region, and the third unit is arranged substantially at the center in the scanning region. Laser beams emitted from each of four semiconductor lasers are demodulated based on signals detected by the three units in such a manner that a difference between a real image height and an ideal image height is reduced over the entire scanning region.

Abstract translation: 扫描型光学装置包括每种颜色的一个光学特性测量单元。 每个光学特性测量单元还包括三个单元。 第一单元设置在扫描区域内的写入开始侧，第二单元设置在扫描区域内的另一端侧，第三单元大致位于扫描区域的中心。 从四个半导体激光器中的每一个发射的激光束基于由三个单元检测到的信号被解调，使得在整个扫描区域上实际图像高度和理想图像高度之间的差减小。

公开(公告)号：US20020195549A1

公开(公告)日：2002-12-26

申请号：US10086643

申请日：2002-03-04

Applicant: Rafael Armament Development Authority Ltd.

Inventor： Evgeny Frumker ,  Eliezer Rosenblum ,  Ezra Shamay

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G01V8/12 ,  G01S7/4816 ,  G01S17/026 ,  G02B3/005 ,  G02B27/0911

Abstract: A method and system for monitoring a region of interest are presented. Incident radiation is transmitted towards the region of interest with a certain transmitting angle and with a predetermined angular intensity distribution of the incident radiation. The transmitting angle defines a plane of propagation of the incident radiation, the region of interest being located within this plane. Reflections of the incident radiation are collected with a solid angle of collection intersecting with said plane. A region of intersection presents a detecting window of a predetermined geometry containing at least a portion of the region of interest. The collected radiation coming from within the detecting window is detected, and output signals indicative thereof are generated.

Abstract translation: 提出了一种监测感兴趣区域的方法和系统。 入射辐射以一定的透射角度和入射辐射的预定角度强度分布被发射到感兴趣区域。 透射角定义入射辐射的传播平面，感兴趣区域位于该平面内。 以与所述平面相交的收集的立体角收集入射辐射的反射。 交叉区域呈现包含感兴趣区域的至少一部分的预定几何形状的检测窗口。 检测从检测窗口内收集的辐射，产生表示其的输出信号。

公开(公告)号：US20020166952A1

公开(公告)日：2002-11-14

申请号：US10131720

申请日：2002-04-24

Applicant: Matsushita Electric Industrial Co., Ltd.

Inventor： Yasuhiro Tanaka ,  Michihiro Yamagata ,  Tomohiko Sasano

IPC: H01J003/14

CPC classification number: G02B27/0955 ,  G02B27/09 ,  G02B27/0911 ,  G11B7/1378 ,  G11B7/13922 ,  G11B7/1398

Abstract: A beam shaper is made up of a single lens whose both surfaces are toric surfaces. Assuming that directions where the beam divergence angle are larger and smaller in the far field from the semiconductor laser source are referred to as the vertical and horizontal directions, respectively, both of the toric surfaces have aspheric surfaces in a cross-section in the vertical direction, both of the toric surfaces have spherical surfaces in a cross-section in the horizontal direction, and both centers of curvature of the spherical surfaces are located substantially at a luminous point of the semiconductor laser source.

Abstract translation: 光束整形器由单个透镜组成，其两个表面是复曲面。 假设在远离半导体激光源的远场中的光束发散角越来越大的方向分别被称为垂直和水平方向，两个复曲面都具有垂直方向的横截面中的非球面 两个复曲面都具有在水平方向的横截面中的球形表面，并且球面的两个曲率中心基本上位于半导体激光源的发光点。

公开(公告)号：US20020162955A1

公开(公告)日：2002-11-07

申请号：US10106533

申请日：2002-03-26

Applicant: Leica Microsystems Heidelberg GmbH

Inventor： Johann Engelhardt

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G02B21/002

Abstract: A scanning microscope has at least one illumination source for emitting a light beam, which is fed via a microscope optic to a specimen and scans the latter. In order to correct the imaging defect of the microscope optic, said defect is determined and a correction value is determined therefrom. This correction value is used for influencing control signals which control the impinging of the light beam on the specimen.

Abstract translation: 扫描显微镜具有用于发射光束的至少一个照明源，其通过显微镜光学元件供给到样品并扫描光束。 为了校正显微镜光学元件的成像缺陷，确定所述缺陷并从其确定校正值。 该校正值用于影响控制信号，其控制光束在样本上的撞击。

公开(公告)号：US20020158193A1

公开(公告)日：2002-10-31

申请号：US10074561

申请日：2002-02-12

Inventor： Abdurrahman Sezginer ,  Kenneth C. Johnson ,  Fred E. Stanke

IPC: H01J003/14

CPC classification number: G03F7/70633 ,  H01L22/34 ,  H01L2223/54453

Abstract: Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. The instrument can measure transmission, reflectance, and/or ellipsometric parameters as a function of wavelength, polar angle of incidence, azimuthal angle of incidence, and/or polarization of the illumination and detected light. Overlay error or offset between those layers containing the test gratings is determined by a processor programmed to calculate an optical response for a set of parameters that include overlay error, using a model that accounts for diffraction by the gratings and interaction of the gratings with each others' diffracted field. The model parameters might also take account of manufactured asymmetries. The calculation may involve interpolation of pre-computed entries from a database accessible to the processor. The calculated and measured responses are iteratively compared and the model parameters changed to minimize the difference.

Abstract translation: 使用包括在被测试层的测试区域中形成的基本上重叠的衍射光栅的测量目标来测量两个或更多个图案化层之间的对准精度。 光学仪器照亮目标区域的全部或部分，并测量光学响应。 仪器可以测量作为波长，极角入射角，入射方位角和/或照明和检测光的偏振的函数的透射率，反射率和/或椭偏参数。 包含测试光栅的那些层之间的叠加误差或偏移量被编程为使用考虑光栅衍射的模型和光栅与彼此的相互作用计算包括重叠误差的一组参数的光学响应的​​处理器来确定 '衍射场 模型参数也可能考虑到制造的不对称性。 该计算可以包括从处理器可访问的数据库插入预先计算的条目。 迭代比较计算和测量的响应，改变模型参数以最小化差异。

公开(公告)号：US20020153480A1

公开(公告)日：2002-10-24

申请号：US10164460

申请日：2002-06-06

Inventor： Jason P. Cleveland ,  David Grigg

IPC: H01J003/14

CPC classification number: G01Q10/04 ,  G02B26/10 ,  Y10S977/872

Abstract: A flexure carriage assembly (24) has a carriage (25) formed of a substantially rigid material. The carriage has four elongate columns (32A, 32B, 32C, 32D) arranged spaced apart and parallel to one another. Each of the elongate columns has first and second ends. The flexure carriage (25) has four first cross members disposed between adjacent pairs of elongate columns and arranged to interconnect the first ends. The flexure carriage also includes four second cross members (38A-D) arranged between adjacent pairs of elongate columns and arranged to interconnect the bottom ends. The elongate columns and first and second cross members define a three-dimensional rectangular structure. The flexure carriage also has disposed centrally between the four elongate columns a translating section (29) spaced equidistant between the first and second ends of the columns. A plurality of flexures (50) are disposed between the translating element and elongate columns and between the elongate columns and first and second cross members in order to permit precise movement of the translating section (20) in a plane according to applied forces against edges of the translating section. A pair of piezoelectric assemblies (26) are connected to the translating section. One applies force to the translating section in a first linear path and the other applies force to the translating section in a second linear path perpendicular path.

Abstract translation: 挠性托架组件（24）具有由基本上刚性的材料形成的托架（25）。 滑架具有四个细长的列（32A，32B，32C，32D），它们间隔开并且彼此平行。 每个细长柱具有第一和第二端。 弯曲滑架（25）具有四个第一横向构件，其布置在相邻的细长柱对之间并且布置成互连第一端。 挠性托架还包括布置在相邻的细长柱对之间的四个第二横向构件（38A-D），并布置成互连底端。 细长的柱和第一和第二横向构件限定三维矩形结构。 弯曲托架还在四个细长柱之间的中央布置有在柱的第一和第二端之间等距离的平移部分（29）。 多个弯曲件（50）设置在平移元件和细长柱之间以及在细长柱与第一和第二横向构件之间，以便允许平移部分（20）在平面内根据施加的力沿着 翻译部分。 一对压电组件（26）连接到平移部分。 一个在第一线性路径中对平移部施加力，另一个在第二线性路径垂直路径中对平移部施加力。

公开(公告)号：US20020148955A1

公开(公告)日：2002-10-17

申请号：US09917400

申请日：2001-07-27

Inventor： Henry A. Hill

IPC: H01J003/14 ,  G02B007/04 ,  G02B027/40

CPC classification number: G01Q70/06 ,  G01Q10/06 ,  G01Q60/22

Abstract: A multiple source array for illuminating an object including: a reflective mask having an array of spatially separated apertures; at least one optic positioned relative to the mask to form an optical cavity with the mask; and a source providing electromagnetic radiation to the optical cavity to resonantly excite a mode supported by the optical cavity, wherein during operation a portion of the electromagnetic radiation built-up in the cavity leaks through the mask apertures towards the object.

Abstract translation: 一种用于照射物体的多源阵列，包括：具有空间分离孔阵列的反射掩模; 至少一个光学器件相对于所述掩模定位以与所述掩模形成光腔; 以及向光学腔提供电磁辐射以共振地激发由光学腔体支撑的模式的源，其中在操作期间，积聚在空腔中的电磁辐射的一部分通过掩模孔向着物体泄漏。

公开(公告)号：US20020139923A1

公开(公告)日：2002-10-03

申请号：US09187631

申请日：1998-11-06

Inventor： RALPH LANGE ,  TORSTEN ANTRACK ,  MARTIN VOELCKER

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G01Q60/22

Abstract: An illumination device for a light microscope comprises a scanning microscope probe which is integrated in the center thereof. A scanning probe microscope comprising such illumination device is also disclosed.

Abstract translation: 用于光学显微镜的照明装置包括集成在其中心的扫描显微镜探针。 还公开了包括这种照明装置的扫描探针显微镜。

公开(公告)号：US20020079430A1

公开(公告)日：2002-06-27

申请号：US09745315

申请日：2000-12-22

Inventor： David Rossi

IPC: H01J003/14

CPC classification number: H01S5/02248 ,  H01J5/16 ,  H01S5/141 ,  H01S5/183

Abstract: A method and apparatus are provided for securing an optical component, such as a lens, into a receptacle hole. A spring ring is provided having a plurality of sections that exert pressure on the periphery of the optical component and the inside surface of the receptacle hole, thus holding the optical component in place.

Abstract translation: 提供了一种用于将诸如透镜的光学部件固定到插座孔中的方法和装置。 弹簧环设置有多个部分，其在光学部件的周边和容纳孔的内表面上施加压力，从而将光学部件保持在适当位置。