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公开(公告)号：US4293767A
公开(公告)日：1981-10-06
申请号：US69610
申请日：1979-08-24
申请人： Helmut Fischer , Albert Ott , Willi Steegmuller
发明人： Helmut Fischer , Albert Ott , Willi Steegmuller
IPC分类号： G01N23/203 , G01N23/00
CPC分类号： G01N23/203
摘要： The apparatus measures the thickness of thin layers on strips and wires which are moved relative to the apparatus. The apparatus is stationary and includes one or more beta emitters directed towards the layer and spatially arranges relative to the longitudinal axis of a beta radiation detector or counting tube which is arranged to the rear of the beta emitter for counting the backscattered beta radiation, and a guide for the strip or wire at a specified distance from the beta emitter. The ratio of the characteristic cross-sectional dimension (D) of the window of the beta radiation detector to the intersecting surface diameter (d) of the intersecting surface layer/intensity distribution curve of the beta emitter, being expressed as D/d=15 . . . 2; with the distance between the layer and the beta radiation emitter being in the plateau region of the curve of the counting rate/distance characteristic obtained by the above feature.
摘要翻译： 该装置测量相对于装置移动的条和线上的薄层的厚度。 该装置是静止的并且包括一个或多个指向该层的β发射体，并相对于β辐射检测器或计数管的纵向轴线在空间上布置，该β辐射检测器或计数管被布置到用于计数背散射β辐射的β发射器的后部， 在距离beta发射器一定距离处的条或导线的引导。 β辐射检测器的窗口的特征截面尺寸（D）与β发射体的相交表面层/强度分布曲线的交叉表面直径（d）的比值表示为D / d = 15 。 。 。 2; 其中层和β辐射发射器之间的距离在通过上述特征获得的计数速率/距离特性的曲线的平台区域中。
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公开(公告)号：US20220404140A1
公开(公告)日：2022-12-22
申请号：US17775564
申请日：2020-12-16
发明人： Rüdiger Mästle
摘要： An apparatus for transmitting and/or receiving terahertz, THz, radiation, comprising at least one terahertz element which is configured to generate and/or detect a THz signal, and at least one field-shaping element which in particular is assigned to the at least one terahertz element, wherein the at least one terahertz element is arranged in the region of a first surface of the field-shaping element.
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43.发明授权公开(公告)号：US11385151B2
公开(公告)日：2022-07-12
申请号：US16070617
申请日：2017-01-09
发明人： Helmut Fischer
IPC分类号： G01N3/46
摘要： A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member. The measuring device also includes at least one first measuring element for measuring the penetration depth of the penetrating member into the surface of the test object or a traversing movement of the penetrating member along the longitudinal axis relative to the housing during a sensing movement on the surface of the test object, wherein a transmission element is provided which extends between the force generating device and the penetrating member.
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公开(公告)号：US11062934B2
公开(公告)日：2021-07-13
申请号：US16901503
申请日：2020-06-15
发明人： Werner Volz , Paul Boos
IPC分类号： H01L21/683 , H01L21/687 , H01L21/677 , B25B11/00 , H01L21/67 , G01N23/223
摘要： A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.
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公开(公告)号：US20210116344A1
公开(公告)日：2021-04-22
申请号：US16464395
申请日：2017-11-06
发明人： HELMUT FISCHER
IPC分类号： G01N3/46
摘要： The invention relates to a measuring System, a measuring arrangement and a method for detecting measuring signals during a penetration movement of a penetration body (41) into a surface of a test body (14), in particular for hardness measurement or for determining the Scratch resistance of the surface of the test body (14), or for detecting measuring signals during a scanning movement of the penetration body (41) on the surface of the test body (14), in particular for determining the surface roughness, comprising a housing (47) provided with a power generating device (44) which is operatively connected to a penetration body (41) for generating a displacement movement of the penetration body (41) along a displacement axis (48) of the penetration body (41) and which actuates a penetration movement of the penetration body (41) into the surface to be examined of the test body (14), or which positions the penetration body (41) on the surface of the test body (14) for scanning, and further comprising at least one first measuring device (78) for measuring the penetration depth in the surface of the test body (14) or a displacement movement of the penetration body (41) along its displacement axis (48) during a scanning movement on the surface of the test body (14), wherein the power generating device (44) actuates the displacement movement of the penetration body (41) by means of a magnetic force.
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公开(公告)号：US10060718B2
公开(公告)日：2018-08-28
申请号：US14786218
申请日：2014-04-24
发明人： Werner Volz
摘要： A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.
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公开(公告)号：US09857171B2
公开(公告)日：2018-01-02
申请号：US13066796
申请日：2011-04-25
申请人： Helmut Fischer
发明人： Helmut Fischer
摘要： The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers on an object with a measuring head, which comprises at least one sensor element for contact on a measurement surface of an object, and with a support device for receiving the measuring head, which is at least partly surrounded by a housing, wherein at least one further measuring head, which is adjacent to and separated from the first measuring head, is arranged on the support device, which can be controlled independently of the first measuring head.
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公开(公告)号：US07076021B2
公开(公告)日：2006-07-11
申请号：US10739673
申请日：2003-12-17
申请人： Helmut Fischer , Volker Rössiger
发明人： Helmut Fischer , Volker Rössiger
IPC分类号： G01N23/223
CPC分类号： G01B15/02 , G01N23/223 , G01N2223/076
摘要： An apparatus for measurement of the thickness of thin layers by means of X-rays using an X-ray tube which emits X-rays which are directed at a layer to be measured, has at least one aperture apparatus arranged between the X-ray tube and the layer to be measured. The apparatus includes an area absorbing X-rays and an aperture opening. At least one aperture opening in the aperture apparatus has a geometric shape which, seen in the beam direction, projects an area which at least in places is matched to the geometry of the layer to be measured.
摘要翻译： 一种利用X射线管测量薄层厚度的装置，该X射线管发射指向被测层的X射线，具有至少一个孔径装置，其设置在X射线管 和要测量的层。 该装置包括吸收X射线和孔径开口的区域。 开口装置中的至少一个开口开口具有几何形状，其在波束方向上看到至少在与被测量层的几何形状匹配的区域上突出。
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公开(公告)号：US5193289A
公开(公告)日：1993-03-16
申请号：US872921
申请日：1992-04-23
申请人： Helmut Fischer
发明人： Helmut Fischer
摘要： A long arm bears a probe at its end and is arranged in such a way that it can swivel by small angular amounts. This low-mass and slowly movable system is protected by a protective device from which it emerges only partly during the measuring operation. A lowering device which both decouples and entrains, interacts with a damping element. An article to be measured is pushed onto the protective device, an actuating device is pressed and the probe slowly emerges from the protective device and ultimately rests in a defined manner and with adequately low force on a layer of the article.
摘要翻译： 长臂在其端部处具有探针，并且以这样的方式布置，使得其可以以小角度量旋转。 这种低质量和缓慢移动的系统由保护装置保护，在测量操作期间它仅部分地出现。 两个解耦和夹带的降低装置与阻尼元件相互作用。 要测量的物品被推到保护装置上，按下致动装置，并且探针从保护装置缓慢地出现，并且最终以限定的方式以足够的力将其放置在制品的一层上。
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公开(公告)号：US4799246A
公开(公告)日：1989-01-17
申请号：US858689
申请日：1986-05-02
申请人： Helmut Fischer
发明人： Helmut Fischer
IPC分类号： G01B15/02 , G01N23/06 , G01N23/223
CPC分类号： G01B15/02
摘要： A deflecting mirror is in the optical path between a monocular microscope for viewing the region of a layer on which an X-ray beam falls, and the region of a layer, the thickness of which is measured according to the X-ray fluroescence principle. The mirror is in an apparatus that has an X-ray beam generator which emits an X-ray beam along a longitudinal geometrical axis, a table device arranged to support the layer, a diaphragm device of a material which absorbs X-rays, having an aperture which is in the longitudinal geometrical axis, and a light source which can be directed onto the region for the layer. The mirror is composed of glass and has a hole at 45.degree. to the plane of the mirror. The longitudinal geometrical axis of the X-ray beam passes through the hole.
摘要翻译： 偏转镜位于用于观察X射线束落下的层的区域的单目显微镜与根据X射线荧光原理测量其厚度的层的区域之间的光路中。 反射镜在具有沿着纵向几何轴线发射X射线束的X射线束发生器的装置中，布置成支撑该层的台装置，吸收X射线的材料的隔膜装置，具有 处于纵向几何轴线的孔，以及可以被引导到该层的区域上的光源。 镜子由玻璃制成，在镜子的平面上有一个45度的孔。 X射线束的纵向几何轴通过孔。
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