HETEROGENEOUS ARCHITECTURE INTEGRATION OF SILICON PHOTODIODE AND ACCELEROMETER

    公开(公告)号:US20210045643A1

    公开(公告)日:2021-02-18

    申请号:US16933396

    申请日:2020-07-20

    Inventor: Shrenik Deliwala

    Abstract: A novel, modified MEMS accelerometer with additional ability to measure optical radiation due to integration of silicon photodiode in the silicon cap. The silicon cap is used to protect the MEMS based accelerometer from the environment. The function of the cap is enhanced to include optical measurement. The entire sensor element including accelerometer and photodiode (XL+PD) occupies no more space than the XL alone.

    Integrated gesture sensor module
    43.
    发明授权

    公开(公告)号:US10884551B2

    公开(公告)日:2021-01-05

    申请号:US14276238

    申请日:2014-05-13

    Abstract: An integrated gesture sensor module includes an optical sensor die, an application-specific integrated circuit (ASIC) die, and an optical emitter die disposed in a single package. The optical sensor die and ASIC die can be disposed in a first cavity of the package, and the optical emitter die can be disposed in a second cavity of the package. The second cavity can be conical or step-shaped so that the opening defining the cavity increases with distance from the upper surface of the optical emitter die. The upper surface of the optical emitter die may be higher than the upper surface of the optical sensor die. An optical barrier positioned between the first and second cavities can include a portion of a pre-molded, laminate, or ceramic package, molding compound, and/or metallized vias.

    Optical and capacitive sensing of electroacoustic transducers

    公开(公告)号:US10070237B2

    公开(公告)日:2018-09-04

    申请号:US15157750

    申请日:2016-05-18

    Abstract: Speakers do not always operate linearly. Linearity of the speaker can affect the quality of the sound produced by the speaker, i.e., causing distortions in the sound, if the nonlinearites are not accounted for. To determine nonlinearities of the speaker, the speaker is often modeled and measurements are made to estimate the characteristics of the speaker based on the model. By using an angle sensor and a light source, a speaker manager can make a direct measurement of excursion or displacement of the speaker. Moreover, when the angle sensor, the light source, and the light beam are configured appropriately with respect to the moving cone of the speaker, the measurement can be substantially linear with respect to the amount of excursion or displacement. Such measurements are far simpler to use and in some cases more accurate than measurements made by other types of systems.

    FILTER COATING DESIGN FOR OPTICAL SENSORS
    48.
    发明申请
    FILTER COATING DESIGN FOR OPTICAL SENSORS 审中-公开
    光学传感器的过滤涂层设计

    公开(公告)号:US20160035914A1

    公开(公告)日:2016-02-04

    申请号:US14612649

    申请日:2015-02-03

    Inventor: Shrenik Deliwala

    CPC classification number: H01L31/02327 G02B5/28 H01L31/02165 H01L31/103

    Abstract: A silicon-based sensor with an integrated multilayer metal-dielectric filter coating for providing a UV transmission curve of interest is disclosed. The sensor includes a silicon-based photodiode and a filter coating integrated with the silicon-based photodiode and comprising a plurality of filter pairs stacked over the silicon-based photodiode. Each filter pair comprises a dielectric layer and a metal layer. The dielectric layers and the metal layers of the plurality of filter pairs are stacked in an alternating fashion. A thickness of the metal layer in at least one filter pair is different from a thickness of the metal layer in at least one other filter pair. A thickness of the dielectric layer in at least one filter pair is different from a thickness of the dielectric layer in at least one other filter pair.

    Abstract translation: 公开了一种具有集成的多层金属 - 介质滤波器涂层的硅基传感器,用于提供感兴趣的UV透射曲线。 传感器包括硅基光电二极管和与硅基光电二极管集成的滤光器涂层,并且包括堆叠在硅基光电二极管上的多个滤光片对。 每个滤波器对包括电介质层和金属层。 多个滤波器对的电介质层和金属层以交替的方式堆叠。 至少一个过滤器对中的金属层的厚度与至少一个其它过滤器对中的金属层的厚度不同。 至少一个滤波器对中的电介质层的厚度与至少一个其它滤波器对中的电介质层的厚度不同。

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