公开(公告)号：US06543988B2

公开(公告)日：2003-04-08

申请号：US09908528

申请日：2001-07-18

申请人： Yi-Li Hsiao ,  Cheng-Chieh Hung ,  Yu-Tsung Fu ,  Weng-Liang Fang

发明人： Yi-Li Hsiao ,  Cheng-Chieh Hung ,  Yu-Tsung Fu ,  Weng-Liang Fang

IPC分类号： B25J915

CPC分类号： H01L21/67259 ,  B25B5/147 ,  B25J9/107 ,  B25J15/10 ,  H01L21/68707

摘要： A wafer is carried on a blade supported on robotic arms. A plurality of guide clamps both move the wafer into a desired position on the blade and clamp the wafer in place during transport by the arms. The clamps are reciprocally mounted on the blade and are connected with and driven by a rotatable hub carried on the blade and rotated by the movement of the arms. Both the blade and the clamps include beveled surfaces that guide the wafer into place. The operation of the clamps is controlled by a laser that detects when the wafer is out of place or tilted on the blade.

摘要翻译： 晶片承载在机器人手臂上的刀片上。 多个引导夹具将晶片移动到刀片上的期望位置，并且在通过臂传送期间将晶片夹紧就位。 夹具相互安装在叶片上并与托架在叶片上的可旋转轮毂连接并由其驱动，并通过臂的运动而旋转。 刀片和夹具都包括将晶片引导到位的斜面。 夹具的操作由激光器控制，该激光器检测晶片何时不在位置或在叶片上倾斜。

公开(公告)号：US08276648B2

公开(公告)日：2012-10-02

申请号：US13356950

申请日：2012-01-24

申请人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

发明人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

IPC分类号： B22D11/00

CPC分类号： C23C14/3407 ,  C23C14/3414 ,  H01J37/3435 ,  H01J37/3479 ,  H01J37/3482 ,  Y10T29/49826 ,  Y10T29/4998

摘要： A method for forming a tube-based detector for signaling when a PVD target is reduced to a predetermined quantity of the PVD target material includes providing a mold member having an inner molding member and an outer molding member defining a space therebetween, melting a desired tube material, injecting the molten tube material into the space between the inner molding member and the outer molding member, cooling the molten tube material, removing the tube from the mold member after the molten tube material has cooled and solidified into a tube, embedding the tube in the physical vapor deposition target, wherein the tube forms an enclosure of the tube-based detector.

摘要翻译： 一种用于形成用于在PVD靶减少到预定量的PVD靶材料时进行信号传导的基于管的检测器的方法包括提供具有内部模制构件的模具构件和在其间限定空间的外部模制构件，熔化所需的管 材料，将熔融管材注入内部模制件和外部模制件之间的空间中，冷却熔融管材料，在熔融管材冷却并固化成管之后，从模具构件中取出管子，将管子 在物理气相沉积靶中，其中管形成基于管的检测器的外壳。

公开(公告)号：US20120131784A1

公开(公告)日：2012-05-31

申请号：US13356950

申请日：2012-01-24

申请人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

发明人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

IPC分类号： B23P11/00

CPC分类号： C23C14/3407 ,  C23C14/3414 ,  H01J37/3435 ,  H01J37/3479 ,  H01J37/3482 ,  Y10T29/49826 ,  Y10T29/4998

摘要： A method for forming a tube-based detector for signaling when a PVD target is reduced to a predetermined quantity of the PVD target material includes providing a mold member having an inner molding member and an outer molding member defining a space therebetween, melting a desired tube material, injecting the molten tube material into the space between the inner molding member and the outer molding member, cooling the molten tube material, removing the tube from the mold member after the molten tube material has cooled and solidified into a tube, embedding the tube in the physical vapor deposition target, wherein the tube forms an enclosure of the tube-based detector.

摘要翻译： 一种用于形成用于在PVD靶减少到预定量的PVD靶材料时进行信号传导的基于管的检测器的方法包括提供具有内部模制构件的模具构件和在其间限定空间的外部模制构件，熔化所需的管 材料，将熔融管材注入内部模制件和外部模制件之间的空间中，冷却熔融管材料，在熔融管材冷却并固化成管之后，从模具构件中取出管子，将管子 在物理气相沉积靶中，其中管形成基于管的检测器的外壳。

公开(公告)号：US20110126397A1

公开(公告)日：2011-06-02

申请号：US13022221

申请日：2011-02-07

申请人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

发明人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

IPC分类号： B23P11/00 ,  B29C41/42 ,  B29C41/02

CPC分类号： C23C14/3407 ,  C23C14/3414 ,  H01J37/3435 ,  H01J37/3479 ,  H01J37/3482 ,  Y10T29/49826 ,  Y10T29/4998

摘要： A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure. Each detector includes an enclosure which may be made by forming a plurality of bores in a bulk material and separating the bulk material into a plurality of discrete enclosure units each including one of the bores. Alternatively, the enclosure of the detector may be made using a mold having one or more mold members and an extrusion, casting, electrical chemical plating, and/or sheet forming method.

摘要翻译： 用于物理气相沉积的PVD靶结构。 PVD目标结构包括源材料的可消耗板和一个或多个检测器，用于指示源材料的板块何时接近或已经被减少到表示目标结构的使用寿命端点的给定量。 每个检测器包括可以通过在散装材料中形成多个孔并将散装材料分离成多个分立的包围单元而构成的外壳，每个孔包括孔中的一个。 或者，检测器的外壳可以使用具有一个或多个模具构件的模具和挤出，铸造，电化学镀和/或片材成型方法来制造。

公开(公告)号：US07918251B2

公开(公告)日：2011-04-05

申请号：US12177598

申请日：2008-07-22

申请人： Chen-Hua Yu ,  Yi-Li Hsiao

发明人： Chen-Hua Yu ,  Yi-Li Hsiao

IPC分类号： B65B1/04

CPC分类号： H01L21/67376 ,  H01L21/67393 ,  H01L21/67772

摘要： A carrier comprises an enclosure, a cabinet and at least one substrate holder. The enclosure comprises a door. The cabinet is coupled to the carrier. The cabinet comprises at least one valve and contains at least one reduction fluid. The substrate holder is disposed within the enclosure to support at least one substrate.

摘要翻译： 载体包括外壳，机壳和至少一个基板保持器。 外壳包括一个门。 机柜耦合到载体。 所述柜包括至少一个阀并且包含至少一个还原流体。 衬底保持器设置在外壳内以支撑至少一个衬底。

公开(公告)号：US07891536B2

公开(公告)日：2011-02-22

申请号：US11427618

申请日：2006-06-29

申请人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

发明人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

IPC分类号： B21D39/00

CPC分类号： C23C14/3407 ,  C23C14/3414 ,  H01J37/3435 ,  H01J37/3479 ,  H01J37/3482 ,  Y10T29/49826 ,  Y10T29/4998

摘要： A PVD target structure for use in physical vapor deposition. The PVD target structure includes a consumable slab of source material and one or more detectors for indicating when the slab of source material is approaching or has been reduced to a given quantity representing a service lifetime endpoint of the target structure. Each detector includes an enclosure which may be made by forming a plurality of bores in a bulk material and separating the bulk material into a plurality of discrete enclosure units each including one of the bores. Alternatively, the enclosure of the detector may be made using a mold having one or more mold members and an extrusion, casting, electrical chemical plating, and/or sheet forming method.

摘要翻译： 用于物理气相沉积的PVD靶结构。 PVD目标结构包括源材料的可消耗板和一个或多个检测器，用于指示源材料的板块何时接近或已经被减少到表示目标结构的使用寿命端点的给定量。 每个检测器包括可以通过在散装材料中形成多个孔并将散装材料分离成多个分立的包围单元而构成的外壳，每个孔包括孔中的一个。 或者，检测器的外壳可以使用具有一个或多个模具构件的模具和挤出，铸造，电化学镀和/或片材成型方法来制造。

公开(公告)号：US20080295412A1

公开(公告)日：2008-12-04

申请号：US11755508

申请日：2007-05-30

申请人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Jui-Pin Hung ,  Ming-Shih Yeh

发明人： Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Jui-Pin Hung ,  Ming-Shih Yeh

IPC分类号： E06B7/16 ,  H01L21/00

CPC分类号： H01L21/67373 ,  H01L21/67376 ,  H01L21/67389

摘要： An apparatus includes an enclosure and a door configured to seal the enclosure. The door includes a plate. A rotational apparatus is disposed over the plate. At least one first member with a first arm extends from a first rib of the first member. At least one second member with a second arm extends from a second rib of the second member. The first and second arms are connected to the rotational apparatus. At least one corner member has a first edge. The first edge has a shape corresponding to a shape of a corner of the frame. The corner member is connected to a first end of the third arm. A second end of the third arm is connected to the rotational apparatus. A sealing material is disposed along a first longitudinal side of the first rib and a second longitudinal side of the second rib.

摘要翻译： 一种装置包括外壳和构造成密封外壳的门。 门包括一个板。 旋转装置设置在板上。 具有第一臂的至少一个第一构件从第一构件的第一肋延伸。 具有第二臂的至少一个第二构件从第二构件的第二肋延伸。 第一和第二臂连接到旋转装置。 至少一个角部件具有第一边缘。 第一边缘具有与框架的角部的形状对应的形状。 角部件连接到第三臂的第一端。 第三臂的第二端连接到旋转装置。 密封材料沿着第一肋的第一纵向侧面和第二肋的第二纵向侧面设置。

公开(公告)号：US20080083710A1

公开(公告)日：2008-04-10

申请号：US11534495

申请日：2006-09-22

申请人： Ying-Lin Chen ,  Chi-An Kao ,  Po-Zen Chen ,  Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

发明人： Ying-Lin Chen ,  Chi-An Kao ,  Po-Zen Chen ,  Yi-Li Hsiao ,  Chen-Hua Yu ,  Jean Wang ,  Lawrance Sheu

IPC分类号： B23K9/00

CPC分类号： H01J37/32568 ,  H01J37/32091 ,  H01J37/321

摘要： A adjustable upper coil or electrode for a reaction chamber apparatus useable in semiconductor processing, is constructed so that its shape may be selectively changed or so at least two portions thereof may be selectively driven at different power and/or frequencies. The adjustable upper coil or electrode, therefore, enables the plasma density distribution in the reaction chamber apparatus to be selectively controlled.

摘要翻译： 用于可用于半导体处理的反应室装置的可调整的上部线圈或电极被构造成使得其形状可以选择性地改变，或者至少两个部分可以以不同的功率和/或频率被选择性地驱动。 因此，可调节的上部线圈或电极能够选择性地控制反应室设备中的等离子体密度分布。