公开(公告)号：US20070024403A1

公开(公告)日：2007-02-01

申请号：US11439144

申请日：2006-05-24

Applicant: Sang-wook Kwon ,  Jun-o Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Jong-seok Kim ,  Che-heung Kim

Inventor： Sang-wook Kwon ,  Jun-o Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Jong-seok Kim ,  Che-heung Kim

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H2057/006

Abstract: A MEMS (Micro Electro Mechanical Systems) switch actuated by electrostatic and piezoelectric forces, includes a substrate; a first contact point positioned in a predetermined first area on an upper surface of the substrate; a support layer suspended at a predetermined distance from the upper surface of the substrate; a second contact point formed on a lower surface of the support layer; a first actuator operative to move the support layer in a predetermined direction using an electrostatic force; and a second actuator operative to move the support layer in a predetermined direction using a piezoelectric force. The first actuator is used to turn on the MEMS switch. The second actuator can be used together with the first actuator to turn on the MEMS switch or can be separately used to turn off the MEMS switch. As a result, a stiction can be prevented from occurring between contact points.

Abstract translation: 由静电和压电力驱动的MEMS（微机电系统）开关包括基板; 位于所述基板的上表面上的预定第一区域中的第一接触点; 从衬底的上表面预定距离悬挂的支撑层; 形成在所述支撑层的下表面上的第二接触点; 第一致动器，用于使用静电力使支撑层沿预定方向移动; 以及第二致动器，其用于使用压电力使支撑层沿预定方向移动。 第一个致动器用于打开MEMS开关。 第二致动器可以与第一致动器一起使用以打开MEMS开关，或者可以单独使用来关闭MEMS开关。 结果，可以防止在接触点之间发生静电。

公开(公告)号：US20060144681A1

公开(公告)日：2006-07-06

申请号：US11322267

申请日：2006-01-03

Applicant: Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

Inventor： Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

IPC: H01H57/00

CPC classification number: H01H59/0009

Abstract: A micro electromechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes spaced apart by a distance and formed over the substrate; an actuating beam installed above the main electrodes at a certain height; a support unit to support the actuating beam; and sub-electrodes formed above the actuating beam at a distance from the actuating beam and facing the corresponding main electrodes. The method includes depositing and patterning a metal layer on a substrate; depositing and patterning a sacrificial layer to form actuator beam support holes and first sub-electrode contact holes; depositing and patterning an actuating beam layer on the sacrificial layer, thereby forming spacers; depositing and patterning second sub-electrode contact holes from another sacrificial layer; depositing and patterning a sub-electrode layer on the sacrificial layer; and removing the two sacrificial layers.

Abstract translation: 提供了微机电系统（MEMS）开关及其制造方法。 MEMS开关包括基板; 形成在基板上的信号线; 主电极隔开一段距离并形成在衬底上; 在一定高度安装在主电极上方的致动梁; 用于支撑致动梁的支撑单元; 以及形成在致动梁上方一定距离致动梁并面对相应主电极的子电极。 该方法包括在衬底上沉积和图案化金属层; 沉积和图案化牺牲层以形成致动器梁支撑孔和第一子电极接触孔; 沉积和图案化牺牲层上的致动束层，从而形成间隔物; 从另一牺牲层沉积和构图第二子电极接触孔; 在牺牲层上沉积和构图子电极层; 并去除两个牺牲层。

公开(公告)号：US20060131147A1

公开(公告)日：2006-06-22

申请号：US11251804

申请日：2005-10-18

Applicant: Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

Inventor： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC: H01H57/00 ,  H02N1/00

CPC classification number: H01H59/0009 ,  H01H2059/0054

Abstract: A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.

公开(公告)号：US20060012940A1

公开(公告)日：2006-01-19

申请号：US11179460

申请日：2005-07-13

Applicant: Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

Inventor： Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

IPC: H01L21/683

CPC classification number: H01H59/0009 ,  H01H2059/0018

Abstract: A MEMS RF-switch is provided for controlling switching on/off of transmission of AC signals. The MEMS RF-switch of the present invention includes: a first electrode coupled to one terminal of the power source; a semiconductor layer combined with an upper surface of the first electrode, and forming a potential barrier to become insulated when a bias signal is applied from the power source; and a second electrode disposed at a predetermined distance away from the semiconductor layer, and being coupled to the other terminal of the power source, wherein the second electrode contacts the semiconductor layer when a bias signal is applied from the power source. Therefore, although the bias signal may not be cut off, free electrons and holes are recombined in the semiconductor layer, whereby charge buildup and sticking can be prevented.

Abstract translation: 提供了用于控制AC信号的传输的接通/断开的MEMS RF开关。 本发明的MEMS RF开关包括：耦合到电源的一个端子的第一电极; 与所述第一电极的上表面组合的半导体层，并且当从所述电源施加偏置信号时，形成电位势垒以变得绝缘; 以及第二电极，设置在距离半导体层预定距离处，并且耦合到电源的另一个端子，其中当从电源施加偏置信号时，第二电极接触半导体层。 因此，尽管偏置信号可能不会被切断，但自由电子和空穴在半导体层中重新结合，从而可以防止电荷积累和粘附。

公开(公告)号：US08147150B2

公开(公告)日：2012-04-03

申请号：US13270723

申请日：2011-10-11

Applicant: Che-heung Kim ,  Woon-bae Kim ,  Jong-oh Kwon ,  Kyu-Dong Jung

Inventor： Che-heung Kim ,  Woon-bae Kim ,  Jong-oh Kwon ,  Kyu-Dong Jung

IPC: G03B9/34

CPC classification number: G03B9/28

Abstract: A micro shutter with an iris function includes a base plate with a transparent portion formed in a circular shape corresponding to an image sensor which allows light to pass through; a plurality of rollup blades which block the light, arranged in a regular polygon at a circumference of the transparent portion on the base plate to cover the transparent portion, and each of the plurality of rollup blades to have a fixing portion fixed to the base plate and a moving portion rolled up toward the fixing portion; and a controller electrically connected with the base plate and the plurality of rollup blades which controls unrolling degrees of the plurality of rollup blades.

Abstract translation: 具有虹膜功能的微型快门包括：底板，其具有与允许光通过的图像传感器相对应的圆形形状的透明部分; 多个汇集叶片，其将光线布置在基板上的透明部分的圆周上的正多边形以覆盖透明部分，并且多个汇总叶片中的每一个具有固定到基板的固定部分 以及朝向固定部分卷起的移动部分; 以及与所述基板和所述多个汇总叶片电连接的控制器，其控制所述多个汇总叶片的展开度。

公开(公告)号：US08111464B2

公开(公告)日：2012-02-07

申请号：US12053110

申请日：2008-03-21

Applicant: Jeong-yub Lee ,  Seung-wan Lee ,  Seung-tae Choi ,  Woon-bae Kim ,  Jae-ho You ,  Che-heung Kim

Inventor： Jeong-yub Lee ,  Seung-wan Lee ,  Seung-tae Choi ,  Woon-bae Kim ,  Jae-ho You ,  Che-heung Kim

IPC: G02B3/12 ,  G02B3/14

CPC classification number: G02B3/14

Abstract: A liquid optical lens which changes a focus due to a change in a shape of a translucent elastic membrane according to a change in a fluid pressure of a lens chamber and a manufacturing method thereof are provided. The liquid optical lens forms a dampproof coating membrane on the translucent elastic membrane to prevent a fluid from permeating through the translucent elastic membrane and a swelling phenomenon of the translucent elastic membrane.

Abstract translation: 提供一种液晶光学透镜，其根据透镜室的流体压力的变化而改变由于透光性弹性膜的形状的变化而产生的焦点及其制造方法。 液体光学透镜在半透明弹性膜上形成防潮涂层膜，以防止流体渗透半透明弹性膜和半透明弹性膜的膨胀现象。

公开(公告)号：US08061910B2

公开(公告)日：2011-11-22

申请号：US12134324

申请日：2008-06-06

Applicant: Che-heung Kim ,  Woon-bae Kim ,  Jong-oh Kwon ,  Kyu-dong Jung

Inventor： Che-heung Kim ,  Woon-bae Kim ,  Jong-oh Kwon ,  Kyu-dong Jung

IPC: G03B9/34

CPC classification number: G03B9/28

Abstract: A micro shutter with an iris function includes a base plate with a transparent portion formed in a circular shape corresponding to an image sensor which allows light to pass through; a plurality of rollup blades which block the light, arranged in a regular polygon at a circumference of the transparent portion on the base plate to cover the transparent portion, and each of the plurality of rollup blades to have a fixing portion fixed to the base plate and a moving portion rolled up toward the fixing portion; and a controller electrically connected with the base plate and the plurality of rollup blades which controls unrolling degrees of the plurality of rollup blades.

Abstract translation: 具有虹膜功能的微型快门包括：底板，其具有与允许光通过的图像传感器相对应的圆形形状的透明部分; 多个汇集叶片，其将光线布置在基板上的透明部分的圆周上的正多边形以覆盖透明部分，并且多个汇总叶片中的每一个具有固定到基板的固定部分 以及朝向固定部分卷起的移动部分; 以及与所述基板和所述多个汇总叶片电连接的控制器，其控制所述多个汇总叶片的展开度。

公开(公告)号：US20110108400A1

公开(公告)日：2011-05-12

申请号：US13007017

申请日：2011-01-14

Applicant: Young-tack HONG ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

Inventor： Young-tack HONG ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC: H01H57/00

CPC classification number: B41J2/04581 ,  B41J2/04541

Abstract: A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

Abstract translation: 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US07923793B2

公开(公告)日：2011-04-12

申请号：US12119611

申请日：2008-05-13

Applicant: Min-seog Choi ,  Seung-wan Lee ,  Woon-bae Kim ,  Eun-sung Lee ,  Kyu-dong Jung ,  Che-heung Kim

Inventor： Min-seog Choi ,  Seung-wan Lee ,  Woon-bae Kim ,  Eun-sung Lee ,  Kyu-dong Jung ,  Che-heung Kim

IPC: G01L1/12

CPC classification number: H04N5/335 ,  H01L24/97 ,  H01L27/14618 ,  H01L27/14683 ,  H01L2224/16 ,  H01L2924/15788 ,  H01L2924/3511 ,  H04N5/2253 ,  H04N5/2257 ,  H04N5/3696 ,  H01L2924/00

Abstract: An image sensor module having a sensor chip closely adhered on a concave surface and a fabrication method thereof are disclosed. The image sensor module includes at least one sensor chip, at least one sensor chip-mounting structure comprising a substrate and a polymer layer formed on the substrate, the polymer layer having an concave surface formed on an upper part thereof by a polymer molding method, so that the sensor chip is bent and bonded on the concave surface, and at least one lens fixed on the at least one sensor chip-mounting structure above the sensor chip.

Abstract translation: 公开了一种具有密封在凹面上的传感器芯片的图像传感器模块及其制造方法。 图像传感器模块包括至少一个传感器芯片，至少一个传感器芯片安装结构，包括基板和形成在基板上的聚合物层，所述聚合物层通过聚合物模塑法在其上部形成有凹形表面， 使得传感器芯片弯曲并接合在凹面上，以及固定在传感器芯片上方的至少一个传感器芯片安装结构上的至少一个透镜。

公开(公告)号：US20100225990A1

公开(公告)日：2010-09-09

申请号：US12782386

申请日：2010-05-18

Applicant: Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

Inventor： Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

IPC: G02B26/00

CPC classification number: H01H59/0009 ,  H01H1/0036

Abstract: A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.

Abstract translation: 微型薄膜结构，微机电系统（MEMS）开关及其制造方法。 该微薄膜结构包括至少两层具有不同性质的薄膜并依次层叠以形成上层和下层，其中上层和下层之间的界面形成为至少朝两个方向取向。 微型薄膜结构和形成方法可以应用于MEMS开关的可动电极。 薄膜结构可以通过在下层中形成通孔而形成，并且以接合在通孔中的形式沉积上层。 或者，薄膜结构可以通过在下层的顶侧上形成突起和凹陷部分，然后将上层沉积在具有突出部分和凹陷部分的下层的顶侧上而制成。