Method for reducing pole height loss in the formation of a write pole for a magnetic write head
    43.
    发明申请
    Method for reducing pole height loss in the formation of a write pole for a magnetic write head 失效
    降低写入磁头写磁极的磁极高度损失的方法

    公开(公告)号:US20060070232A1

    公开(公告)日:2006-04-06

    申请号:US10957038

    申请日:2004-09-30

    IPC分类号: G11B5/187

    摘要: A method for reducing plated pole height loss in the formation of a write pole for a magnetic write head is disclosed. The method includes forming a conductive layer on a thin film substrate, forming a photoresist layer on the conductive layer and forming a trench in the photoresist layer. A thick seed layer is then placed on the trench and on the photoresist layer surface using a collimator. Moreover, the process includes plating while applying a voltage to the thin film substrate where the electrically isolated seed layer is removed and the trench is filled with plating material, removing the photoresist layer, and removing the exposed portions of the conductive layer on the thin film substrate.

    摘要翻译: 本发明公开了一种在形成写磁头写磁极时降低电极高度损耗的方法。 该方法包括在薄膜基板上形成导电层,在导电层上形成光致抗蚀剂层,并在光刻胶层中形成沟槽。 然后使用准直器将厚的种子层放置在沟槽和光致抗蚀剂层表面上。 此外,该方法包括电镀,同时向薄膜基板施加电压,其中去除电隔离种子层,并且沟槽填充有电镀材料,去除光致抗蚀剂层,以及去除薄膜上的导电层的暴露部分 基质。