公开(公告)号：US20180335209A1

公开(公告)日：2018-11-22

申请号：US15598499

申请日：2017-05-18

Applicant: Edwards Limited

Inventor： Andrew James Seeley ,  Duncan Michael Price

IPC: F23D14/12 ,  F23D99/00

CPC classification number: F23D14/12 ,  F23D91/00

Abstract: An inlet assembly for a burner and a method are disclosed. The inlet assembly comprises: an inlet nozzle defining an inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the burner, a non-circular outlet aperture, and a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying the effluent gas stream from the inlet aperture to the outlet aperture for delivery to the combustion chamber of the burner, the nozzle bore having an inlet portion extending from the inlet aperture and an outlet portion extending to the non-circular outlet aperture. In this way, the non-circular outlet aperture provides a non-circular effluent gas stream flow into the combustion chamber. The non-circular effluent gas flow enables a greater volume of effluent gas stream to be introduced into the combustion chamber whilst still achieving or exceeding the required levels of abatement. This is because a non-circular effluent gas stream provides a reduced distance along which diffusion and reaction needs to occur compared to that of an equivalent circular effluent gas stream. Hence, an increased volume of effluent gas stream can be abated, compared to that of an equivalent circular effluent gas stream.

公开(公告)号：US20180209420A1

公开(公告)日：2018-07-26

申请号：US15745619

申请日：2016-06-15

Applicant: Edwards Limited

Inventor： Gary Peter Knight ,  Andrew James Seeley ,  Geoffrey Young ,  Duncan Michael Price

IPC: F04C19/00 ,  F04C25/00 ,  F04C29/00 ,  F04C29/02

CPC classification number: F04C19/005 ,  F04C19/00 ,  F04C19/004 ,  F04C25/00 ,  F04C29/0085 ,  F04C29/02 ,  F04C2280/04

Abstract: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.

公开(公告)号：US20180207581A1

公开(公告)日：2018-07-26

申请号：US15746266

申请日：2016-06-15

Applicant: Edwards Limited

Inventor： Christopher Mark Bailey ,  Clive Marcus Lloyd Tunna ,  Jack Raymond Tattersall ,  Ingo Stephen Graham ,  Michael Roger Czerniak ,  Gary Peter Knight ,  Darren Mennie ,  Duncan Michael Price ,  Derek Martin Baker ,  Andrew James Seeley

IPC: B01D53/75 ,  B01D53/68 ,  B01D53/78 ,  C23C16/44 ,  C23C16/24 ,  H01J37/32 ,  F04C19/00 ,  F04C29/00 ,  F04C23/00 ,  A62C4/00 ,  F23G7/06

CPC classification number: B01D53/75 ,  A62C4/00 ,  B01D53/68 ,  B01D53/78 ,  B01D2252/103 ,  B01D2257/204 ,  B01D2257/206 ,  B01D2258/0216 ,  C23C16/24 ,  C23C16/4405 ,  C23C16/4408 ,  C23C16/4412 ,  F04C19/001 ,  F04C19/005 ,  F04C23/006 ,  F04C29/0092 ,  F23G7/06 ,  H01J37/32807 ,  H01J37/32862 ,  H01J2237/335 ,  Y02C20/30

Abstract: Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.

公开(公告)号：US20170321893A1

公开(公告)日：2017-11-09

申请号：US15525298

申请日：2015-11-02

Applicant: Edwards Limited

Inventor： Andrew James Seeley

IPC: F23G7/06 ,  F23D14/14 ,  F23N1/02

CPC classification number: F23G7/065 ,  F23D14/145 ,  F23D2203/1012 ,  F23D2203/1055 ,  F23D2203/106 ,  F23D2212/103 ,  F23D2212/201 ,  F23G2207/101 ,  F23G2209/142 ,  F23G2900/50007 ,  F23N1/02 ,  F23N1/022 ,  F23N5/022 ,  F23N2025/16 ,  F23N2037/08

Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool, the radiant burner comprises: a sintered metal fibre sleeve through which combustion materials pass for combustion proximate to an inner combustion surface of the sintered metal fibre sleeve; and an insulating sleeve surrounding the sintered metal to fibre sleeve and through which the combustion materials pass. In this way, a radiant burner is provided which does not crack due to rapid cycling caused by frequent idle steps during which the burner is extinguished. Also, by providing an insulating sleeve, the temperature within the radiant burner and the temperature of an outer surface of the radiant burner remain comparable with existing ceramic burners. This enables the radiant burner to be substituted in place of existing ceramic burners as a line-replaceable unit which does not suffer from cracking during such frequent and short-duration periods of process tool inactivity.

公开(公告)号：US20160153655A1

公开(公告)日：2016-06-02

申请号：US14786596

申请日：2014-03-14

Applicant: EDWARDS LIMITED

Inventor： Andrew James Seeley

IPC: F23D14/12 ,  F23G7/06

CPC classification number: F23D14/12 ,  F23C99/006 ,  F23D14/16 ,  F23D14/70 ,  F23D2212/10 ,  F23G7/06 ,  F23G7/065 ,  F23G2209/142

Abstract: A radiant burner for treating an effluent gas stream from a manufacturing process tool may include: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; and a plenum surrounding the porous sleeve supplying the combustion materials to the porous sleeve, the plenum being configured to provide the combustion materials with varying stoichiometry along a length of the porous sleeve. This approach of varying the stoichiometric ratios of the combustion materials correspondingly varies the heat generated by those combustion materials along the length of the porous sleeve. By varying the stoichiometry of the combustion materials to compensate for variations in the heat generated within the combustion chamber along the length of the porous sleeve, a more uniform temperature can be achieved along the length of the porous sleeve within the combustion chamber.

Abstract translation: 用于处理来自制造工艺工具的废气流的辐射式燃烧器可以包括：具有多孔套筒的燃烧室，燃烧材料通过所述多孔套管燃烧，靠近所述多孔套筒的燃烧表面进行燃烧; 以及围绕所述多孔套管的气室，其将所述燃烧材料供应到所述多孔套筒，所述增压室被构造成沿着所述多孔套筒的长度提供具有变化的化学计量的所述燃烧材料。 改变燃烧材料的化学计量比的这种方法相应地改变沿着多孔套筒的长度由那些燃烧材料产生的热量。 通过改变燃烧材料的化学计量以补偿沿着多孔套管的长度在燃烧室内产生的热量的变化，可以沿着多孔套管在燃烧室内的长度获得更均匀的温度。

公开(公告)号：US20160146458A1

公开(公告)日：2016-05-26

申请号：US14904964

申请日：2014-06-16

Applicant: EDWARDS LIMITED

Inventor： Andrew James Seeley

IPC: F23D14/12 ,  B23P15/00 ,  F23D14/20

CPC classification number: F23D14/12 ,  B23P15/00 ,  F23D14/20 ,  F23D14/50 ,  F23D2900/00002 ,  F23G7/065

Abstract: A head assembly for a radiant burner, an inlet assembly and a method are disclosed. The head assembly is for a radiant burner. The head assembly may include a housing defining a plurality of identical housing apertures extending therethrough, an insulator received by the housing and defining a corresponding plurality of identical, complimentarily-located insulator apertures extending therethrough, and at least one inlet assembly configured to be received by one of the identical housing apertures. Each inlet assembly may include a housing portion configured to be received by the one of the identical housing apertures, and an insulator portion configured to fill the complimentarily-located insulator aperture. In this way, a head assembly is provided which has a number of apertures, any of which may receive an inlet assembly. Given that each inlet assembly is configured to be received by any of the apertures, this provides flexibility for the insertion and removal of the assemblies, without needing to completely disassemble the head assembly from the radiant burner. Also, by forming the inlet assembly with a housing portion and insulation portion, the assembly can be located within the head assembly and the insulating portion prevents heat damage.

Abstract translation: 公开了一种用于辐射燃烧器的头组件，入口组件和方法。 头组件用于辐射式燃烧器。 头部组件可以包括限定穿过其延伸的多个相同的壳体孔的壳体，由壳体接收并且限定相应的多个相同的，相互补充的位于其间延伸的绝缘体孔的绝缘体，以及至少一个入口组件，其被构造成由 一个相同的外壳孔。 每个入口组件可以包括构造成由相同的壳体孔中的一个容纳的壳体部分，以及被配置为填充位于相互不同的绝缘体孔径的绝缘体部分。 以这种方式，提供了具有多个孔的头部组件，其中任何一个可以接收入口组件。 假设每个入口组件被构造成由任何孔接收，这提供了用于插入和移除组件的灵活性，而不需要将头部组件从辐射式燃烧器完全拆卸。 而且，通过形成具有壳体部分和绝缘部分的入口组件，组件可以位于头部组件内，并且绝缘部分防止热损坏。

公开(公告)号：US20150176838A1

公开(公告)日：2015-06-25

申请号：US14416457

申请日：2013-06-20

Applicant: Edwards Limited

Inventor： Andrew James Seeley

IPC: F23D14/50

CPC classification number: F23D14/50 ,  B01D53/68 ,  B01D2257/204 ,  B01D2258/0216 ,  F23D11/386 ,  F23G7/06 ,  F23G2209/142

Abstract: An inlet assembly for a burner includes a manifold having an inlet aperture and a coaxially aligned outlet aperture, the manifold having a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying an effluent gas from an inlet pipe coupleable with the inlet aperture to the outlet aperture for delivery to a combustion chamber of the burner. A nozzle bore scraper is housed within the nozzle bore. An actuator is operable to reciprocate the nozzle bore scraper relative to the nozzle bore, the nozzle bore scraper reciprocating along the longitudinal axis within the nozzle bore between a rest position and an actuated position to reduce effluent gas deposits within the nozzle bore.

Abstract translation: 用于燃烧器的入口组件包括具有入口孔和同轴对齐的出口孔的歧管，所述歧管具有沿入口孔和出口孔之间的纵向轴线延伸的喷嘴孔，用于将来自可与 到出口孔的入口孔，用于输送到燃烧器的燃烧室。 喷嘴孔刮刀容纳在喷嘴孔内。 致动器可操作以使喷嘴孔刮刀相对于喷嘴孔往复运动，喷嘴孔刮刀沿喷嘴孔内的纵向轴线在静止位置和致动位置之间往复运动，以减少喷嘴孔内的流出气体沉积。