公开(公告)号：US11561388B2

公开(公告)日：2023-01-24

申请号：US16492672

申请日：2018-03-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Kyosuke Kotani ,  Tomofumi Suzuki ,  Katsumi Shibayama ,  Noburo Hosokawa ,  Nao Inoue ,  Masashi Ito ,  Yutaka Kuramoto

IPC: G02B6/06 ,  B81B3/00 ,  G01J3/45 ,  G02B6/35 ,  G02B26/08 ,  B81C3/00 ,  G02B6/293 ,  G01J3/02 ,  G01J3/453 ,  G01J5/02 ,  G01N21/35 ,  G02B26/06

Abstract: A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

公开(公告)号：US11487104B2

公开(公告)日：2022-11-01

申请号：US16492712

申请日：2018-03-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto

IPC: G02B26/08 ,  G01J3/02 ,  G01J3/45 ,  G01J3/453

Abstract: An optical module includes a base which has a main surface and in which a mounting region and a driving region for moving the mounting region along a first direction parallel to the main surface are provided, a movable mirror which has a mirror surface having a positional relationship of intersecting the main surface and is mounted in the mounting region, a first fixed mirror which has a mirror surface having a positional relationship of intersecting the main surface and of which a position with respect to the base is fixed, and a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror. The mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction.

公开(公告)号：US11187872B2

公开(公告)日：2021-11-30

申请号：US16625698

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: G02B26/08 ,  G02B7/182

Abstract: In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.

公开(公告)号：US11131848B2

公开(公告)日：2021-09-28

申请号：US16456790

申请日：2019-06-28

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: G02B26/08 ,  G02B5/20 ,  G02B27/10 ,  G02B5/08

Abstract: An optical module includes: a mirror unit that includes a movable mirror and a fixed mirror, a beam splitter unit that constitutes an interference optical system in combination with the movable mirror and the fixed mirror; a light incident unit that causes measurement light to be incident to the beam splitter unit; a first light detector that detects interference light of the measurement light; a second light source that emits laser light; a second light detector that detects interference light of the laser light; a first mirror that has a function of allowing the measurement light to be transmitted therethrough and reflecting the laser light; a second mirror that has a function of reflecting a part of the laser light and allowing the remainder of the laser light to be transmitted therethrough; a third mirror that has a function of reflecting the laser light; and a first filter that has a function of allowing the measurement light to be transmitted therethrough and cutting off the laser light, and is disposed between the first mirror and the first light detector.

公开(公告)号：US11048076B2

公开(公告)日：2021-06-29

申请号：US16456747

申请日：2019-06-28

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani ,  Yutaka Kuramoto

IPC: G02B26/10

Abstract: A mirror unit includes a mirror device, a light incident/emission portion, and a support portion. The mirror device includes a base, a movable mirror, and a drive unit. The light incident/emission portion includes a first joining portion joined to a region that is located between a first electrode pad and a second electrode pad, and at least one of the movable mirror and the drive unit in a first surface of the base, and a first main body portion. The support portion includes a second joining portion joined to a region that overlaps each of the first electrode pad and the second electrode pad when viewed from a first direction in a second surface of the base, and a second main body portion. The first main body portion is provided with a first light passage region that overlaps a mirror surface of the movable mirror when viewed from the first direction.

公开(公告)号：US10935426B2

公开(公告)日：2021-03-02

申请号：US16456709

申请日：2019-06-28

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: G01J3/12 ,  G01J3/02 ,  G01J3/45 ,  G02B27/14

Abstract: An optical module includes: a mirror unit having a movable mirror and a fixed mirror; a beam splitter unit; a light incident unit that causes measurement light to be incident to the beam splitter unit; a first light detector that detects interference light of the measurement light; a second light source that emits laser light; a second light detector that detects interference light of the laser light; a first mirror that allows the measurement light to be transmitted therethrough and reflects the laser light; a second mirror that reflects a part of the laser light and allows the remainder of the laser light to be transmitted therethrough; a third mirror that reflects the laser light; and a return light suppressing unit that suppresses the laser light from becoming return light, and is disposed on a side opposite to the second optical device with respect to the second mirror.

公开(公告)号：US10670461B2

公开(公告)日：2020-06-02

申请号：US15748286

申请日：2015-09-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yoshihisa Warashina ,  Tomofumi Suzuki ,  Kohei Kasamori ,  Ryosuke Okumura ,  Kyosuke Kotani

IPC: G01J3/45 ,  G01B9/02

Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit. The branching-combining unit includes a branching surface, an incident surface, a first output surface, a combining surface, and a second output surface on an interface of a transparent member, the branching surface partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light, the combining surface partially combines the first branched light and the second branched light to be output to the outside as first combined light, and combines the rest of the first branched light and the second branched light to be propagated into the interior as second combined light, and the second output surface partially outputs the second combined light to the outside.