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公开(公告)号：US11952265B2
公开(公告)日：2024-04-09
申请号：US17725804
申请日：2022-04-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu Takimoto , Yuki Morinaga , Daiki Suzuki , Yoshihisa Warashina
CPC classification number: B81B7/0006 , B81B3/0075 , G02B26/08 , G02B26/085 , B81B2201/042 , B81B2201/045 , B81B2203/0154 , B81B2203/0181 , B81B2203/058 , B81B2207/07
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US09577402B2
公开(公告)日：2017-02-21
申请号：US14909767
申请日：2014-06-26
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa Warashina
IPC: H01S3/106 , G02B26/00 , G01J3/10 , H01S3/07 , H01S3/08 , H01S3/082 , H01S5/14 , H01S5/10 , H01S5/183 , H01S3/105 , H01S5/022 , H01S3/02
CPC classification number: H01S3/1062 , G01J3/10 , G02B26/001 , H01S3/025 , H01S3/07 , H01S3/08027 , H01S3/08059 , H01S3/08086 , H01S3/0809 , H01S3/0823 , H01S3/105 , H01S5/02248 , H01S5/02288 , H01S5/1092 , H01S5/142 , H01S5/183
Abstract: A variable-wavelength light source is provided with a first laser medium, a first optical resonator constituted of a total reflection mirror and a half-mirror, a second laser medium, a second optical resonator constituted of a total reflection mirror and the half-mirror, a first filter having a pair of first mirrors configured to cause first light and second light to be transmitted and reflected selectively, a second filter having a pair of second mirrors configured to cause the first light and the second light to be transmitted and reflected selectively, a first drive mechanism configured to operate the first mirror and the second mirror in conjunction with each other, and a second drive mechanism configured to operate the second mirror.
Abstract translation: 可变波长光源设置有第一激光介质，由全反射镜和半反射镜构成的第一光谐振器，第二激光介质，由全反射镜和半反射镜构成的第二光谐振器 第一滤光器，具有一对第一反射镜，其被配置为使得第一光和第二光被选择性地透射和反射;第二滤光器，具有一对第二反射镜，其被配置为使得第一光和第二光被选择性地透射和反射 第一驱动机构，被配置为相互结合地操作第一反射镜和第二反射镜;以及第二驱动机构，被配置为操作第二反射镜。
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公开(公告)号：US11333882B2
公开(公告)日：2022-05-17
申请号：US16752941
申请日：2020-01-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yuki Morinaga , Anna Yoshida , Yoshihisa Warashina
Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.
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公开(公告)号：US11287320B2
公开(公告)日：2022-03-29
申请号：US16615151
申请日：2018-05-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa Warashina , Kei Tabata
Abstract: Provided is a filter controlling expression derivation method including: preparing a Fabry-Perot interference filter of which distance between a fixed mirror and a movable mirror is controlled by balancing an electrostatic force and an elastic force; deriving a relational expression between a deflection amount and an elasticity index in which the elasticity index of the movable mirror is described as a quadratic or higher-order polynomial with the deflection amount of the movable mirror as a variable by performing predetermined measurement; and deriving a relational expression between a transmission wavelength of light transmitted through the Fabry-Perot interference filter and the voltage as a filter controlling expression based on the relational expression between the deflection amount and the elasticity index and a relational expression between the electrostatic force and the elastic force.
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公开(公告)号：US10670461B2
公开(公告)日：2020-06-02
申请号：US15748286
申请日：2015-09-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori , Ryosuke Okumura , Kyosuke Kotani
Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit. The branching-combining unit includes a branching surface, an incident surface, a first output surface, a combining surface, and a second output surface on an interface of a transparent member, the branching surface partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light, the combining surface partially combines the first branched light and the second branched light to be output to the outside as first combined light, and combines the rest of the first branched light and the second branched light to be propagated into the interior as second combined light, and the second output surface partially outputs the second combined light to the outside.
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Patent Agency Ranking
公开(公告)号：US10759655B2
公开(公告)日：2020-09-01
申请号：US16071558
申请日：2016-12-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu Takimoto , Yuki Morinaga , Daiki Suzuki , Yoshihisa Warashina
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.
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公开(公告)号：US11339050B2
公开(公告)日：2022-05-24
申请号：US16789795
申请日：2020-02-13
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu Takimoto , Yuki Morinaga , Daiki Suzuki , Yoshihisa Warashina
IPC: H01L41/113 , H01L41/047 , B81B7/00 , G02B26/08 , B81B3/00
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US10422696B2
公开(公告)日：2019-09-24
申请号：US16072634
申请日：2017-02-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa Warashina , Tomofumi Suzuki , Kohei Kasamori , Ryosuke Okumura , Kyosuke Kotani
Abstract: An optical module includes an actuator that includes a movable part to be moved along a predetermined direction; a first interference optical system that includes a first movable mirror, a first stationary mirror, and a first beam splitter; and a second interference optical system that includes a second movable mirror, a second stationary mirror, and a second beam splitter. The first interference optical system is adapted so that first light reciprocates m times (m is a natural number) between the first beam splitter and the first movable mirror along the predetermined direction. The second interference optical system is adapted so that second light reciprocates n times (n is a natural number greater than m) between the second beam splitter and the second movable mirror along the predetermined direction.
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公开(公告)号：US10221061B2
公开(公告)日：2019-03-05
申请号：US15025691
申请日：2014-09-08
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa Warashina
Abstract: An optical module includes a semiconductor substrate, an electrostatic actuator including a fixed portion fixed to the semiconductor substrate and a movable portion moved with respect to the fixed portion by an electrostatic force generated between the movable portion and the fixed portion, a first spring portion connected to the movable portion and having a first spring constant K1, a second spring portion connected between the first spring portion and the semiconductor substrate and having a second spring constant K2 greater than the first spring constant K1, and a movable mirror which is an optical component connected to a connection portion between the first spring portion and the second spring portion.
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公开(公告)号：US20130178005A1
公开(公告)日：2013-07-11
申请号：US13725291
申请日：2012-12-21
Applicant: Hamamatsu Photonics K.K.
Inventor： Yoshihisa Warashina , Masayuki Ishida
IPC: H01L33/60 , H01L31/0232
CPC classification number: H01L33/60 , G02B6/4214 , G02B6/423 , H01L25/075 , H01L31/02325 , H01L33/58 , H01L2924/0002 , H01L2924/00
Abstract: A method of manufacturing an optical element module in which an optical element and a semiconductor circuit element are mounted on one surface of a silicon substrate, a mirror surface inclined at approximately 45 degrees is formed on the other surface, and an optical fiber facing the mirror surface is disposed in a V groove formed along the other surface, the method of manufacturing includes the steps of forming the mirror surface and V-shaped side surfaces of the V groove simultaneously by first crystal anisotropic etching on the other surface, and forming an attaching surface substantially perpendicular to the one surface and the other surface, which is formed at an end side of the V groove, and for attaching an end of the optical fiber, by second crystal anisotropic etching in a crystal plane orientation different from that of the first crystal anisotropic etching.
Abstract translation: 一种光学元件模块的制造方法，其中将光学元件和半导体电路元件安装在硅衬底的一个表面上，在另一个表面上形成大约45度倾斜的镜面，并且与该镜面对置的光纤 表面设置在沿着另一个表面形成的V形槽中，该制造方法包括以下步骤：通过在另一个表面上的第一晶体各向异性蚀刻同时形成V形槽的V形侧表面和V形侧表面，并且形成附着 基本上垂直于形成在V槽的端侧的一个表面和另一个表面的表面，并且用于通过第二晶体各向异性蚀刻在不同于第一 晶体各向异性蚀刻。
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