公开(公告)号：US11187579B2

公开(公告)日：2021-11-30

申请号：US16619630

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto

IPC: G02B26/08 ,  G01J3/14 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/45 ,  G01B9/02 ,  G02B7/182 ,  G02B27/14 ,  G01J3/453

Abstract: In an optical device, an elastic support unit includes a pair of levers which face in a second direction perpendicular to a first direction, a pair of first torsion support portions which are connected between the levers and the base, a pair of second torsion support portions which are connected between the pair of levers and the movable unit, and a first link member that bridges the levers. The levers and the first link member define a light passage opening. Each of connection positions between the levers and the first torsion support portions is located on a side opposite to the movable unit with respect to the center of the light passage opening in a third direction perpendicular to the first direction and the second direction. A maximum width of the light passage opening in the second direction is defined by a gap between the levers in the second direction.

公开(公告)号：US11054309B2

公开(公告)日：2021-07-06

申请号：US16625682

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

IPC: G01J3/45 ,  G01J3/14 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01B9/02 ,  G02B7/182 ,  G02B26/08

Abstract: An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so as to face that same side, and to be aligned in this order. A length of an optical path between the unit 3 and the detector 6 is shorter than a length of an optical path between the unit 3 and the detector 8, and a length of an optical path between the unit 3 and the source 7.

公开(公告)号：USD901569S1

公开(公告)日：2020-11-10

申请号：US29667090

申请日：2018-10-18

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

公开(公告)号：USD900903S1

公开(公告)日：2020-11-03

申请号：US29667071

申请日：2018-10-18

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

公开(公告)号：USD900187S1

公开(公告)日：2020-10-27

申请号：US29667056

申请日：2018-10-18

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

公开(公告)号：US09618323B2

公开(公告)日：2017-04-11

申请号：US14911583

申请日：2014-07-31

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Yoshihisa Warashina ,  Kohei Kasamori ,  Tatsuya Sugimoto ,  Jo Ito

IPC: G01B9/02 ,  G01J3/02 ,  G01J3/453

CPC classification number: G01B9/02051 ,  G01J3/0256 ,  G01J3/4532 ,  G01J3/4535

Abstract: A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.