公开(公告)号：US20160137491A1

公开(公告)日：2016-05-19

申请号：US14588983

申请日：2015-01-05

Applicant: Industrial Technology Research Institute

Inventor： Chung-Yuan Su ,  Chin-Fu Kuo ,  Tzung-Ching Lee ,  Chao-Ta Huang

IPC: B81B7/02 ,  B81C1/00

CPC classification number: B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/04 ,  B81C2203/0109

Abstract: A micro-electromechanical apparatus with multiple chambers and a method for manufacturing the same are provided, wherein various micro-electromechanical sensors are integrated into a single apparatus. For example, the micro-electromechanical apparatus in this disclosure may have two independent hermetically sealed chambers with different pressures, such that a micro-electromechanical barometer and a micro-electromechanical accelerometer can be operated in an optimal pressure circumstance.

Abstract translation: 提供具有多个室的微机电装置及其制造方法，其中各种微机电传感器集成到单个装置中。 例如，本公开中的微机电装置可以具有两个独立的密封室，其具有不同的压力，使得微机电气压计和微机电加速计可以在最佳压力环境中操作。

公开(公告)号：US09238576B2

公开(公告)日：2016-01-19

申请号：US14149833

申请日：2014-01-08

Applicant: Industrial Technology Research Institute

Inventor： Chung-Yuan Su ,  Chao-Ta Huang ,  Tzung-Ching Lee ,  Yu-Wen Hsu

IPC: G01P15/097 ,  B81B3/00 ,  H03H3/007

CPC classification number: B81B3/0008 ,  B81B2201/0271 ,  G01P15/097 ,  H03H3/0072

Abstract: A MEMS apparatus comprising composite vibrating unit and the manufacturing method thereof are disclosed. The vibrating unit includes a stiffness element on which a first material is disposed. A second material being a conductive material is disposed on the first material and is extended to the stiffness element to remove electric charge on first material. When a temperature is changed, a variation direction of a Young's modulus of the first material is opposite to a variation direction of a Young's modulus of the stiffness element. The unique attributes above allow vibrating unit of the MEMS apparatus such as resonator and gyroscope to have stable resonance frequency against the change of temperature.

Abstract translation: 公开了一种包括复合振动单元的MEMS装置及其制造方法。 所述振动单元包括其上设置有第一材料的刚度元件。 作为导电材料的第二材料设置在第一材料上并延伸到刚度元件以去除第一材料上的电荷。 当温度变化时，第一材料的杨氏模量的变化方向与刚度元件的杨氏模量的变化方向相反。 上述独特的属性允许诸如谐振器和陀螺仪之类的MEMS装置的振动单元相对于温度变化具有稳定的共振频率。

公开(公告)号：US09227840B2

公开(公告)日：2016-01-05

申请号：US14487104

申请日：2014-09-16

Applicant: Industrial Technology Research Institute

Inventor： Chung-Yuan Su ,  Chin-Fu Kuo ,  Chih-Yuan Chen ,  Chao-Ta Huang

IPC: H01L43/06 ,  B81B7/00 ,  G01P15/00 ,  G01R33/00 ,  G01R33/028

CPC classification number: B81B7/008 ,  B81B2201/0228 ,  B81B2201/025 ,  B81B2203/0109 ,  G01P15/00 ,  G01P15/124 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01R33/00 ,  G01R33/0286

Abstract: A micro-electro mechanical apparatus having a PN-junction is provided. The micro-electro mechanical apparatus includes a movable mass, a conductive layer, and an electrode. The movable mass includes a P-type semiconductor layer and an N-type semiconductor layer. The PN-junction is formed between the P-type semiconductor layer and the N-type semiconductor layer. The micro-electro mechanical apparatus is capable of eliminating abnormal voltage signal when an alternating current passes through the conductive layer. The micro-electro mechanical apparatus is adapted to measure acceleration and magnetic field. The micro-electro mechanical apparatus can be other types of micro-electro mechanical apparatus such as micro-electro mechanical scanning micro-mirror.

Abstract translation: 提供具有PN结的微机电装置。 微机电装置包括可移动质量块，导电层和电极。 可移动块包括P型半导体层和N型半导体层。 在P型半导体层和N型半导体层之间形成PN结。 微电子机械装置能够在交流电流通过导电层时消除异常电压信号。 微机电装置适用于测量加速度和磁场。 微电机械装置可以是其他类型的微电机械装置，例如微机电扫描微镜。

公开(公告)号：US20150183632A1

公开(公告)日：2015-07-02

申请号：US14487104

申请日：2014-09-16

Applicant: Industrial Technology Research Institute

Inventor： Chung-Yuan Su ,  Chin-Fu Kuo ,  Chih-Yuan Chen ,  Chao-Ta Huang

IPC: B81B3/00

CPC classification number: B81B7/008 ,  B81B2201/0228 ,  B81B2201/025 ,  B81B2203/0109 ,  G01P15/00 ,  G01P15/124 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01R33/00 ,  G01R33/0286

Abstract: A micro-electro mechanical apparatus having a PN-junction is provided. The micro-electro mechanical apparatus includes a movable mass, a conductive layer, and an electrode. The movable mass includes a P-type semiconductor layer and an N-type semiconductor layer. The PN-junction is formed between the P-type semiconductor layer and the N-type semiconductor layer. The micro-electro mechanical apparatus is capable of eliminating abnormal voltage signal when an alternating current passes through the conductive layer. The micro-electro mechanical apparatus is adapted to measure acceleration and magnetic field. The micro-electro mechanical apparatus can be other types of micro-electro mechanical apparatus such as micro-electro mechanical scanning micro-mirror.

Abstract translation: 提供具有PN结的微机电装置。 微机电装置包括可移动质量块，导电层和电极。 可移动块包括P型半导体层和N型半导体层。 在P型半导体层和N型半导体层之间形成PN结。 微电子机械装置能够在交流电流通过导电层时消除异常电压信号。 微机电装置适用于测量加速度和磁场。 微电机械装置可以是其他类型的微电机械装置，例如微机电扫描微镜。