摘要:
A pattern inspection apparatus determines a difference of the measured dislocation of respective alignment marks of an opaque pattern and a phase shifting pattern (measurement difference), in addition to a difference between the both alignment mark positions in design (design difference). A difference between the measurement difference and the design difference is set as a difference in alignment mark position between the opaque pattern and the phase shifting pattern in a reference pattern which is later used in inspection. In this manner, by correcting one pattern data with respect to the other pattern data in the reference pattern, the displacement generated in the both patterns can be reflected, and the reference pattern data regarding an image of a sample which is actually observed can be created.
摘要:
The substrate carrier management system includes a pre-diffusion processing apparatus, a carrier cleaner, and a carrier conveyer. The pre-diffusion processing apparatus unloads a substrate from a supplied carrier in which the substrate is stored, performs predetermined processing on the substrate, and transfers the processed substrate stored in a carrier to be used after processing. The carrier cleaner cleans a carrier emptied as a result of taking a substrate out of the carrier. The carrier conveyer conveys a carrier between the pre-diffusion processing apparatus and the carrier cleaner. The empty carrier unloaded from the pre-diffusion processing apparatus is cleaned by the carrier cleaner, and the processed substrate is stored in the empty carrier. With this arrangement, it is possible to automatically change carriers and thereby continuously use a cleaned carrier in the subsequent step without using a dedicated carrier.
摘要:
A noise control apparatus adapted for installation on top of a straight upright sound barrier, existing or newly erected, is provided which comprises a main body formed from a first screen inclined towards a sound source and a second screen inclined away from the sound source to have a generally V-shaped cross section; the first screen having formed at the top thereof a first additional screen inclined away from the sound source; the second screen having formed at the top thereof a second additional screen inclined towards the sound source; and the distance between free ends of the first and second additional screens being 55 to 88% of that between the tops of the first and second screens. This sound barrier structure has a highly improved effect of noise control while being very compact and lightweight.
摘要:
Image pick-up device reads image pick-up signals of all the pixels of CCD2 once when an optical system is in light intercepted state. By comparing the image pick-up signal from each pixel with a first threshold value THL1, a possibly defective pixels are extracted. Thereafter, by reading the image pick-up signals for a prescribed number of times from the CCD2, accumulated value of the image pick-up signals of each of the possibly defective pixels is calculated. Based on the result of comparison between the accumulated value corresponding to each of the possibly defective pixels and second threshold value THL2, an actually defective pixel is specified from the possibly defective pixels.
摘要:
A pattern inspection apparatus for comparing/collating a test target pattern with a corresponding design pattern to detect the presence/absence of a defect which is present in the test target pattern includes a bit pattern generating circuit for developing the data of the design pattern into bits, a corner pattern detector for scanning a corner pattern detection window having a predetermined range with respect to reference pattern data as a reference of a pattern obtained by bit development performed by the bit pattern generating circuit to extract a contour pattern, and detecting a corner pattern to be subjected to corner rounding processing on the basis of the extracted contour pattern, a memory for storing predetermined change information corresponding to the corner detected by the corner pattern detector, a graphic pattern synthesizing circuit for changing a graphic pattern in accordance with the information in the memory, and a comparing circuit for comparing reference pattern data, obtained by rounding processing performed on the basis of the reference pattern data and the feature of the corresponding pattern, with test pattern data obtained from the test target pattern, and further includes a pattern correcting circuit constituted by an excessive rounding detector for detecting and correcting an inadequate excessive rounding operation, and a pattern changing circuit for changing the pattern data in accordance with the excessive rounding detection result.
摘要:
In a common bus communication system in which multiple bus interfaces (2) are connected to the common bus, each bus interface comprises a main memory (21) and an auxiliary memory (28, 29). When a packet destined to the own interface is detected by an address detector (22), memory control data is stored into the auxiliary memory in a location corresponding to a destination user terminal (5.sub.i) as well as to the location of the packet in the main memory. When a read request is received from the destination user terminal, control data is fetched from the auxiliary memory and a packet in the data memory is accessed according to the fetched control data, and a copy of the accessed packet is sent to the destination user terminal, and following the transmission the control data is updated. Packets propagating along the common bus are stored into the main memory according to the updated control data.
摘要:
A light-sensitive material comprising a light-sensitive layer containing silver halide, a reducing agent and a polymerizable compound provided on a support (the polymerizable compound is contained in microcapsules which are dispersed in the light-sensitive layer), characterized in that a colored layer is provided on the surface of the support, or the support is colored.
摘要:
A silver halide photographic light-sensitive material, in which a highly immobile novel arylidene bis type of dye which selectively dyes a specific layer and does not diffuse into other layers is incorporated in a hydrophilic colloidal layer. The dye used in this light-sensitive material can be easily removed upon photographic processing, and does not adversely affect photographic properties, particularly spectral sensitization, of the photographic emulsions.
摘要:
A method of mounting dual tires on motor vehicles, in which the tires have lateral grooves in the circumferential direction includes positioning the tires so that the neighboring lateral grooves on the respective tire faces nearest each other have phase differences in the circumferential direction. The phase difference between the neighboring lateral grooves is preferably one half of a pitch and the pitch is preferably smaller than 16 cm, and more preferably smaller than 13 cm.
摘要:
A recording material comprises a layer containing a leuco dye provided on a support, characterized in that the leuco dye has the formula (I): ##STR1## in which one of X and Y is a single bond and the other is sulfur atom; each of R.sub.1 and R.sup.2 independently is an alkyl group, a cycloalkyl group or an aralkyl group; each of R.sup.3 and R.sup.4 independently is hydrogen, a halogen atom, an alkyl group, an alkoxy group, a cycloalkyl group, an aralkyl group or an aryloxy group; R.sup.5 is hydrogen, a halogen atom, an alkyl group, an alkoxy group, nitro or amino; and each of R.sup.1, R.sup.2, R.sup.3, R.sup.4 and R.sup.5 may have one or more substituent groups.
摘要翻译:记录材料包括含有在载体上提供的无色染料的层,其特征在于所述无色染料具有式(I):其中X和Y中的一个是单键,另一个是硫 原子; R 1和R 2各自独立地为烷基,环烷基或芳烷基; R 3和R 4各自独立地为氢,卤素原子,烷基,烷氧基,环烷基,芳烷基或芳氧基; R5是氢,卤素原子,烷基,烷氧基,硝基或氨基; R 1,R 2,R 3,R 4和R 5可以具有一个或多个取代基。