Pattern inspection apparatus
    41.
    发明授权
    Pattern inspection apparatus 失效
    图案检验仪

    公开(公告)号:US06883160B2

    公开(公告)日:2005-04-19

    申请号:US10252718

    申请日:2002-09-24

    摘要: A pattern inspection apparatus determines a difference of the measured dislocation of respective alignment marks of an opaque pattern and a phase shifting pattern (measurement difference), in addition to a difference between the both alignment mark positions in design (design difference). A difference between the measurement difference and the design difference is set as a difference in alignment mark position between the opaque pattern and the phase shifting pattern in a reference pattern which is later used in inspection. In this manner, by correcting one pattern data with respect to the other pattern data in the reference pattern, the displacement generated in the both patterns can be reflected, and the reference pattern data regarding an image of a sample which is actually observed can be created.

    摘要翻译: 除了设计中的两个对准标记位置(设计差异)之外,图案检查装置还确定不透明图案的各个对准标记的测量位错与相移图案(测量差异)之间的差异。 测量差异和设计差异之间的差异被设置为稍后在检查中使用的参考图案中的不透明图案和相移图案之间的对准标记位置的差异。 以这种方式,通过相对于参考图案中的其他图案数据校正一个图案数据,可以反映两种图案中产生的位移,并且可以创建关于实际观察到的样本的图像的参考图案数据 。

    Substrate carrier management system and program
    42.
    发明授权
    Substrate carrier management system and program 失效
    基板载体管理系统和程序

    公开(公告)号:US06823229B2

    公开(公告)日:2004-11-23

    申请号:US10131252

    申请日:2002-04-25

    IPC分类号: G06F1900

    CPC分类号: H01L21/67276

    摘要: The substrate carrier management system includes a pre-diffusion processing apparatus, a carrier cleaner, and a carrier conveyer. The pre-diffusion processing apparatus unloads a substrate from a supplied carrier in which the substrate is stored, performs predetermined processing on the substrate, and transfers the processed substrate stored in a carrier to be used after processing. The carrier cleaner cleans a carrier emptied as a result of taking a substrate out of the carrier. The carrier conveyer conveys a carrier between the pre-diffusion processing apparatus and the carrier cleaner. The empty carrier unloaded from the pre-diffusion processing apparatus is cleaned by the carrier cleaner, and the processed substrate is stored in the empty carrier. With this arrangement, it is possible to automatically change carriers and thereby continuously use a cleaned carrier in the subsequent step without using a dedicated carrier.

    摘要翻译: 衬底载体管理系统包括预扩散处理装置,载体清洁器和载体输送器。 预扩散处理装置从其中存储有基板的供应载体卸载基板,对基板执行预定处理,并且将处理后的待使用的载体进行转印。 载体清洁剂清洁由于将基板从载体中取出而导致的载体排空。 载体输送机在预扩散处理装置和载体清洁器之间传送载体。 从预扩散处理装置卸载的空载体被载体清洁器清洁,并且处理的基板被存储在空载体中。 利用这种布置,可以自动地改变载体,从而在不使用专用载体的情况下,在后续步骤中连续地使用清洁的载体。

    Noise control apparatus
    43.
    发明授权
    Noise control apparatus 有权
    噪音控制装置

    公开(公告)号:US6006858A

    公开(公告)日:1999-12-28

    申请号:US244633

    申请日:1999-02-04

    IPC分类号: E01F8/00 G10K11/00

    CPC分类号: E01F8/0041

    摘要: A noise control apparatus adapted for installation on top of a straight upright sound barrier, existing or newly erected, is provided which comprises a main body formed from a first screen inclined towards a sound source and a second screen inclined away from the sound source to have a generally V-shaped cross section; the first screen having formed at the top thereof a first additional screen inclined away from the sound source; the second screen having formed at the top thereof a second additional screen inclined towards the sound source; and the distance between free ends of the first and second additional screens being 55 to 88% of that between the tops of the first and second screens. This sound barrier structure has a highly improved effect of noise control while being very compact and lightweight.

    摘要翻译: 提供了一种适用于安装在现有或新建立的直立声屏障的顶部上的噪声控制装置,其包括由朝向声源倾斜的第一屏幕形成的主体和远离声源倾斜的第二屏幕,以具有 一般为V形截面; 所述第一屏幕在其顶部形成有远离所述声源倾斜的第一附加屏幕; 所述第二屏幕在其顶部形成有朝向所述声源倾斜的第二附加屏幕; 并且第一和第二附加屏幕的自由端之间的距离为第一和第二屏幕顶部之间的距离的55至88%。 这种隔音结构在非常紧凑和重量轻的情况下具有高度改进的噪声控制效果。

    Defective pixel detecting circuit of a solid state image pick-up device
capable of detecting defective pixels with low power consumption and
high precision, and image pick-up device having such detecting circuit
    44.
    发明授权
    Defective pixel detecting circuit of a solid state image pick-up device capable of detecting defective pixels with low power consumption and high precision, and image pick-up device having such detecting circuit 失效
    能够以低功耗和高精度检测缺陷像素的固体摄像装置的有缺陷的像素检测电路,以及具有这种检测电路的图像拾取装置

    公开(公告)号:US5854655A

    公开(公告)日:1998-12-29

    申请号:US693684

    申请日:1996-08-12

    IPC分类号: H04N5/367 H04N5/335

    CPC分类号: H04N5/367

    摘要: Image pick-up device reads image pick-up signals of all the pixels of CCD2 once when an optical system is in light intercepted state. By comparing the image pick-up signal from each pixel with a first threshold value THL1, a possibly defective pixels are extracted. Thereafter, by reading the image pick-up signals for a prescribed number of times from the CCD2, accumulated value of the image pick-up signals of each of the possibly defective pixels is calculated. Based on the result of comparison between the accumulated value corresponding to each of the possibly defective pixels and second threshold value THL2, an actually defective pixel is specified from the possibly defective pixels.

    摘要翻译: 当光学系统处于遮光状态时,图像拾取装置读取CCD2的所有像素的图像拾取信号一次。 通过将来自每个像素的摄像信号与第一阈值THL1进行比较,提取可能的缺陷像素。 此后,通过从CCD2读取规定次数的图像拾取信号,计算每个可能故障像素的图像拾取信号的累积值。 基于与每个可能的故障像素的累积值和第二阈值THL2进行比较的结果,从可能有缺陷的像素指定实际缺陷像素。

    Pattern inspection apparatus with corner rounding of reference pattern
data
    45.
    发明授权
    Pattern inspection apparatus with corner rounding of reference pattern data 失效
    带有参考图形数据的四舍五入的图案检查装置

    公开(公告)号:US5475766A

    公开(公告)日:1995-12-12

    申请号:US941197

    申请日:1992-09-04

    摘要: A pattern inspection apparatus for comparing/collating a test target pattern with a corresponding design pattern to detect the presence/absence of a defect which is present in the test target pattern includes a bit pattern generating circuit for developing the data of the design pattern into bits, a corner pattern detector for scanning a corner pattern detection window having a predetermined range with respect to reference pattern data as a reference of a pattern obtained by bit development performed by the bit pattern generating circuit to extract a contour pattern, and detecting a corner pattern to be subjected to corner rounding processing on the basis of the extracted contour pattern, a memory for storing predetermined change information corresponding to the corner detected by the corner pattern detector, a graphic pattern synthesizing circuit for changing a graphic pattern in accordance with the information in the memory, and a comparing circuit for comparing reference pattern data, obtained by rounding processing performed on the basis of the reference pattern data and the feature of the corresponding pattern, with test pattern data obtained from the test target pattern, and further includes a pattern correcting circuit constituted by an excessive rounding detector for detecting and correcting an inadequate excessive rounding operation, and a pattern changing circuit for changing the pattern data in accordance with the excessive rounding detection result.

    摘要翻译: 用于将测试目标图案与相应的设计模式进行比较/整理以检测存在于测试目标图案中的缺陷的存在/不存在的图案检查装置包括位图形生成电路,用于将设计图案的数据显影为位 ,用于扫描具有相对于参考图案数据的预定范围的角图案检测窗口的拐角图案检测器,作为通过位图案生成电路进行的位展开而获得的图案的参考,以提取轮廓图案,以及检测拐角图案 基于所提取的轮廓图案进行转角加工处理;存储器,用于存储与由拐角图案检测器检测到的拐角对应的预定变化信息;图形图形合成电路,用于根据所述轮廓图案中的信息改变图形; 存储器和用于比较参考图案数据的比较电路 a,通过根据参考图案数据和相应图案的特征进行舍入处理获得的测试图案数据从测试对象图案获得,并且还包括图案校正电路,其由过度舍入检测器构成,用于检测和 校正不适当的过度舍入操作,以及用于根据过度舍入检测结果改变模式数据的模式改变电路。

    Common bus communication system with reduced interface memories
    46.
    发明授权
    Common bus communication system with reduced interface memories 失效
    具有减少接口存储器的公共总线通信系统

    公开(公告)号:US5144621A

    公开(公告)日:1992-09-01

    申请号:US766178

    申请日:1991-09-27

    IPC分类号: H04L13/08 H04L29/06

    CPC分类号: H04L29/06

    摘要: In a common bus communication system in which multiple bus interfaces (2) are connected to the common bus, each bus interface comprises a main memory (21) and an auxiliary memory (28, 29). When a packet destined to the own interface is detected by an address detector (22), memory control data is stored into the auxiliary memory in a location corresponding to a destination user terminal (5.sub.i) as well as to the location of the packet in the main memory. When a read request is received from the destination user terminal, control data is fetched from the auxiliary memory and a packet in the data memory is accessed according to the fetched control data, and a copy of the accessed packet is sent to the destination user terminal, and following the transmission the control data is updated. Packets propagating along the common bus are stored into the main memory according to the updated control data.

    摘要翻译: 在其中多个总线接口(2)连接到公共总线的公共总线通信系统中,每个总线接口包括主存储器(21)和辅助存储器(28,29)。 当通过地址检测器(22)检测到目的地为自己的接口的分组时,存储器控制数据被存储到与目的用户终端(5i)相对应的位置中的辅助存储器中以及分组的位置 主记忆 当从目的地用户终端接收到读取请求时,从辅助存储器取出控制数据,并且根据获取的控制数据访问数据存储器中的数据包,并将所访问的数据包的副本发送到目标用户终端 并且在发送之后控制数据被更新。 根据更新的控制数据,沿着公共总线传播的分组被存储到主存储器中。

    Light-sensitive material containing silver halide, reducing agent and
polymerizable compound
    47.
    发明授权
    Light-sensitive material containing silver halide, reducing agent and polymerizable compound 失效
    含有卤化银,还原剂和可聚合化合物的感光材料

    公开(公告)号:US5030543A

    公开(公告)日:1991-07-09

    申请号:US604400

    申请日:1990-10-29

    摘要: A light-sensitive material comprising a light-sensitive layer containing silver halide, a reducing agent and a polymerizable compound provided on a support (the polymerizable compound is contained in microcapsules which are dispersed in the light-sensitive layer), characterized in that a colored layer is provided on the surface of the support, or the support is colored.

    摘要翻译: 一种感光材料,其包含含有卤化银的光敏层,还原剂和设置在载体上的可聚合化合物(可聚合化合物包含在分散在感光层中的微胶囊中),其特征在于,着色 层设置在支撑体的表面上,或者支撑体着色。

    Recording material containing leuco dye
    50.
    发明授权
    Recording material containing leuco dye 失效
    含有无色染料的记录材料

    公开(公告)号:US4775656A

    公开(公告)日:1988-10-04

    申请号:US115064

    申请日:1987-10-30

    摘要: A recording material comprises a layer containing a leuco dye provided on a support, characterized in that the leuco dye has the formula (I): ##STR1## in which one of X and Y is a single bond and the other is sulfur atom; each of R.sub.1 and R.sup.2 independently is an alkyl group, a cycloalkyl group or an aralkyl group; each of R.sup.3 and R.sup.4 independently is hydrogen, a halogen atom, an alkyl group, an alkoxy group, a cycloalkyl group, an aralkyl group or an aryloxy group; R.sup.5 is hydrogen, a halogen atom, an alkyl group, an alkoxy group, nitro or amino; and each of R.sup.1, R.sup.2, R.sup.3, R.sup.4 and R.sup.5 may have one or more substituent groups.

    摘要翻译: 记录材料包括含有在载体上提供的无色染料的层,其特征在于所述无色染料具有式(I):其中X和Y中的一个是单键,另一个是硫 原子; R 1和R 2各自独立地为烷基,环烷基或芳烷基; R 3和R 4各自独立地为氢,卤素原子,烷基,烷氧基,环烷基,芳烷基或芳氧基; R5是氢,卤素原子,烷基,烷氧基,硝基或氨基; R 1,R 2,R 3,R 4和R 5可以具有一个或多个取代基。