公开(公告)号：US20090242508A1

公开(公告)日：2009-10-01

申请号：US12382653

申请日：2009-03-20

申请人： Kazuhiro Hattori ,  Shuichi Okawa ,  Narutoshi Fukuzawa ,  Takahiro Suwa

发明人： Kazuhiro Hattori ,  Shuichi Okawa ,  Narutoshi Fukuzawa ,  Takahiro Suwa

IPC分类号： B44C1/22

CPC分类号： G11B5/855 ,  B82Y10/00 ,  G11B5/743

摘要： A filling material different from a first mask layer (temporary coating material) is deposited over a workpiece to fill concave portions. At least part of excess portions of the filling material is removed by a dry etching method such that at least part of the side surfaces of the first mask layer over recording elements are exposed. Then, the first mask layer is removed by a dry etching method which uses a reactive gas having the property of chemically reacting with and removing both the filling material and the first mask layer as a processing gas and in which an etching rate for the first mask layer is higher than that for the filling material, and the etching rate for the filling material is higher than that for a recording layer (a lower layer that is in contact with a lower surface of the first mask layer over recording elements).

摘要翻译： 不同于第一掩模层（临时涂层材料）的填充材料沉积在工件上以填充凹部。 通过干蚀刻方法去除填充材料的多余部分的至少一部分，使得第一掩模层的超过记录元件的侧表面的至少一部分被暴露。 然后，通过干式蚀刻法除去第一掩模层，该干蚀刻方法使用具有与填充材料和第一掩模层化学反应的特性的反应气体作为处理气体，并且其中第一掩模的蚀刻速率 层高于填充材料的蚀刻速率，并且对于记录层（与记录元件上的第一掩模层的下表面接触的下层）的填充材料的蚀刻速率高。

公开(公告)号：US07531103B2

公开(公告)日：2009-05-12

申请号：US10947289

申请日：2004-09-23

申请人： Shuichi Okawa ,  Kazuhiro Hattori ,  Katsuyuki Nakada ,  Mitsuru Takai

发明人： Shuichi Okawa ,  Kazuhiro Hattori ,  Katsuyuki Nakada ,  Mitsuru Takai

IPC分类号： B44C1/22

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/855 ,  Y10T428/24802

摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.

摘要翻译： 掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案 通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模 使用B掩模蚀刻形成A掩模的功能层。 通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。

公开(公告)号：US07480924B2

公开(公告)日：2009-01-20

申请号：US11056976

申请日：2005-02-14

申请人： Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai ,  Shuichi Okawa

发明人： Kazuhiro Hattori ,  Yoshikazu Soeno ,  Mitsuru Takai ,  Shuichi Okawa

IPC分类号： G11B7/09

CPC分类号： B82Y10/00 ,  G11B5/012 ,  G11B5/65 ,  G11B5/74 ,  G11B5/743 ,  G11B5/855 ,  G11B2005/0002 ,  G11B2005/0005 ,  G11B2005/001 ,  G11B2005/0021 ,  G11B2005/0029

摘要： A magnetic recording and reproducing device includes: a magnetic recording medium in which a magnetic recording layer is formed in a concavo-convex pattern so that tracks are formed by convex portions of a predetermined track width and arranged in parallel in the track width direction; a heating head for heating the magnetic recording medium to partially reduce coercivity of the tracks; a recording head for applying a recording magnetic field to a heated portion of the magnetic recording medium to record magnetic data on the tracks; and a reproducing head for detecting a reproducing magnetic field of the tracks. In this configuration, an effective recording area has an effective recording width that is equal to or more than the track width, and equal to or less than a sum of the track width and a doubled value of width of concave portions between the tracks.

摘要翻译： 磁记录和再现装置包括：磁记录介质，其中磁记录层形成为凹凸图案，使得轨道由预定轨道宽度的凸部形成并沿轨道宽度方向平行布置; 用于加热磁记录介质以部分地降低轨道的矫顽力的加热头; 记录头，用于将记录磁场施加到磁记录介质的加热部分，以将磁数据记录在轨道上; 以及用于检测轨道的再现磁场的再现头。 在该配置中，有效记录区域具有等于或大于轨道宽度的有效记录宽度，并且等于或小于轨道宽度和轨迹之间的凹部宽度的双倍值之和。

公开(公告)号：US20080203053A1

公开(公告)日：2008-08-28

申请号：US12071463

申请日：2008-02-21

申请人： Narutoshi Fukuzawa ,  Kazuhiro Hattori ,  Minoru Fujita ,  Daisuke Yoshitoku

发明人： Narutoshi Fukuzawa ,  Kazuhiro Hattori ,  Minoru Fujita ,  Daisuke Yoshitoku

IPC分类号： C23F1/00 ,  B41C3/08

CPC分类号： G11B5/855 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： A reliable magnetic recording medium manufacturing method is provided in which a resin material used for processing a recording layer into a concavo-convex pattern can be removed reliably. In the magnetic recording medium manufacturing method, an energy ray curable resin material is spread over a continuous recording layer. Then, a stamper having a predetermined concavo-convex pattern is brought into contact with the resin material to transfer the concavo-convex pattern to the resin material, and the resin material is irradiated with energy rays such that the irradiation energy on a portion excluding the edge portion of the resin material is greater than that on the edge portions. The curing reaction proceeds to a greater extent in the portion excluding the edge portions than in the edge portions. Then, the resin material is etched and removed such that more resin material is removed from the edge portions than from the other portion.

摘要翻译： 提供了一种可靠的磁记录介质制造方法，其中可以可靠地去除用于将记录层处理成凹凸图案的树脂材料。 在磁记录介质制造方法中，能量射线固化树脂材料分布在连续记录层上。 然后，将具有预定凹凸图案的压模与树脂材料接触以将凹凸图案转印到树脂材料上，并且用能量射线照射树脂材料，使得对除了 树脂材料的边缘部分大于边缘部分的边缘部分。 在边缘部分以外的部分中，固化反应在边缘部分中进行得更大程度。 然后，树脂材料被蚀刻和去除，从而从边缘部分除去比从另一部分更多的树脂材料。

公开(公告)号：US07413819B2

公开(公告)日：2008-08-19

申请号：US11059532

申请日：2005-02-17

申请人： Kazuhiro Hattori ,  Mitsuru Takai

发明人： Kazuhiro Hattori ,  Mitsuru Takai

IPC分类号： G11B5/66

CPC分类号： B82Y10/00 ,  G11B5/65 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

摘要： A magnetic recording medium is provided, which has a recording layer formed in a concavo-convex pattern and makes it possible to obtain the stable flying characteristics of a head. In the magnetic recording medium, concave portions between recording elements are filled with a non-magnetic material. Thus, the surface of the magnetic recording medium takes a concavo-convex shape which is different from the concavo-convex pattern of the recording layer. Also, the arithmetical mean deviation of the assessed profile of the concavo-convex shape in the surface is restricted to 1 nm or less.

摘要翻译： 提供一种磁记录介质，其具有以凹凸图案形成的记录层，并且可以获得头部的稳定的飞行特性。 在磁记录介质中，记录元件之间的凹部填充有非磁性材料。 因此，磁记录介质的表面呈现与记录层的凹凸图案不同的凹凸形状。 此外，将表面中的凹凸形状的评估轮廓的算术平均偏差限制在1nm以下。

公开(公告)号：US20080087631A1

公开(公告)日：2008-04-17

申请号：US11907269

申请日：2007-10-10

申请人： Kazuhiro Hattori ,  Kazuya Shimakawa ,  Mitsuru Takai

发明人： Kazuhiro Hattori ,  Kazuya Shimakawa ,  Mitsuru Takai

IPC分类号： H01J27/02 ,  B44C1/22

CPC分类号： H01J27/024 ,  H01J37/08 ,  H01J37/3053 ,  H01J2237/24528

摘要： A compact ion gun capable of flattening both sides of a substrate, an ion beam etching apparatus provided with the ion gun, an ion beam etching facility, an etching method using them, and a method for manufacturing a magnetic recording medium are provided. The ion gun includes a plasma generation source and an extraction electrode unit. The extraction electrode unit has: a first electrode unit including a portion of a plurality of electrode plates on a first side of a reference plane intersecting the electrode plates, the portion being inclined with respect to the reference plane so as to face an irradiation target area along the reference plane; and a second electrode unit including a portion of the electrode plates on a second side of the reference plane, the portion being inclined with respect to the reference plane so as to face the irradiation target area along the reference plane.

摘要翻译： 提供能够使基板的两面变平的紧凑型离子枪，设置有离子枪的离子束蚀刻装置，离子束蚀刻装置，使用它们的蚀刻方法和制造磁记录介质的方法。 离子枪包括等离子体产生源和引出电极单元。 提取电极单元具有：第一电极单元，其包括在与电极板相交的参考平面的第一侧上的多个电极板的一部分，该部分相对于参考平面倾斜以面对照射目标区域 沿着参考平面; 以及第二电极单元，其包括在所述参考平面的第二侧上的所述电极板的一部分，所述部分相对于所述参考平面倾斜，以便沿着所述参考平面面对所述照射目标区域。

公开(公告)号：US07289283B2

公开(公告)日：2007-10-30

申请号：US11526823

申请日：2006-09-26

申请人： Kazuhiro Hattori

发明人： Kazuhiro Hattori

IPC分类号： G02B7/02

CPC分类号： G02B7/102 ,  H04N5/2254

摘要： A lens barrel includes a lens moving frame configured to hold an image pickup lens; a barrel member configured to support the lens moving frame for back and forth linear movement along the direction of an optical axis of the image pickup lens; the lens moving frame having a magnetized face magnetized alternately with N poles and S poles along the direction of the back and forth linear movement; and, a magnetic resistance sensor apparatus. The magnetic resistance sensor apparatus has a magnetic resistance sensor, a body, a single screw, and a plurality of resilient pieces. The resilient pieces are formed such that, in a state wherein the resilient pieces are resiliently deformed all by the same amount, the sum of moments by the resilient pieces which act upon the location of the body at which the screw is fitted is zero.

摘要翻译： 透镜镜筒包括构造成保持图像拾取透镜的透镜移动框架; 镜筒构件，其构造成沿着所述图像拾取透镜的光轴的方向支撑所述透镜移动框架以进行前后线性移动; 所述透镜移动框架具有沿着前后线性运动的方向以N极和S极交替地磁化的磁化面; 和磁阻传感器装置。 磁阻传感器装置具有磁阻传感器，主体，单个螺钉和多个弹性件。 弹性件形成为使得在弹性片全部弹性变形的状态下，作用于安装螺钉的主体位置的弹性片的力矩之和为零。

公开(公告)号：US20070146909A1

公开(公告)日：2007-06-28

申请号：US11526823

申请日：2006-09-26

申请人： Kazuhiro Hattori

发明人： Kazuhiro Hattori

IPC分类号： G02B7/02

CPC分类号： G02B7/102 ,  H04N5/2254

摘要： A lens barrel includes a lens moving frame configured to hold an image pickup lens; a barrel member configured to support the lens moving frame for back and forth linear movement along the direction of an optical axis of the image pickup lens; the lens moving frame having a magnetized face magnetized alternately with N poles and S poles along the direction of the back and forth linear movement; and a magnetic resistance sensor apparatus. The magnetic resistance sensor apparatus has a magnetic resistance sensor, a body, a single screw, and a plurality of resilient pieces. The resilient pieces is formed such that, in a state wherein the resilient pieces are resiliently deformed all by the same amount, the sum of moments by the resilient pieces which act upon the location of the body at which the screw is fitted is zero.

摘要翻译： 透镜镜筒包括构造成保持图像拾取透镜的透镜移动框架; 镜筒构件，其构造成沿着所述图像拾取透镜的光轴的方向支撑所述透镜移动框架以进行前后线性移动; 所述透镜移动框架具有沿着前后线性运动的方向以N极和S极交替地磁化的磁化面; 和磁阻传感器装置。 磁阻传感器装置具有磁阻传感器，主体，单个螺钉和多个弹性件。 弹性片形成为使得在弹性片全部相同量的弹性变形的状态下，作用于安装螺钉的主体位置的弹性片的力矩之和为零。

公开(公告)号：US20070023704A1

公开(公告)日：2007-02-01

申请号：US11457545

申请日：2006-07-14

申请人： Katsuyuki Nakada ,  Kazuhiro Hattori ,  Shuichi Okawa

发明人： Katsuyuki Nakada ,  Kazuhiro Hattori ,  Shuichi Okawa

IPC分类号： G21K5/10

CPC分类号： H01J37/3026 ,  B82Y10/00 ,  B82Y40/00 ,  G11B5/82 ,  G11B5/855 ,  H01J37/3174

摘要： A pattern drawing method capable of drawing a pattern such that opposite ends of a formation region on an inner periphery side and an outer periphery side are substantially linearly formed. A drawing beam is intermittently irradiated N times onto a generally belt-shaped exposure area extending in a direction of rotation of the substrate from one end to the other end of the belt-shaped exposure area in the direction of rotation of the substrate, the belt-shaped exposure area being defined within a formation region, in which one of the convex or concave portions is to be formed, to thereby irradiate the drawing beam onto N generally belt-shaped irradiation areas extending in the direction of rotation of the substrate.

摘要翻译： 一种图形绘制方法，其能够绘制使内周侧和外周侧的形成区域的相对端基本线性地形成的图案。 拉伸梁被间歇地照射N次到沿着基板的旋转方向延伸的大致带状的曝光区域，从基板的旋转方向的带状曝光区域的一端到另一端，带 形状的曝光区域被限定在其中要形成一个凸部或凹部的形成区域内，从而将拉伸光束照射到在基板的旋转方向上延伸的N个大致带状的照射区域上。

公开(公告)号：US07164548B2

公开(公告)日：2007-01-16

申请号：US10805357

申请日：2004-03-22

申请人： Kazuhiro Hattori ,  Kuniyasu Ito

发明人： Kazuhiro Hattori ,  Kuniyasu Ito

IPC分类号： G11B5/09

CPC分类号： B82Y10/00 ,  G11B5/59633 ,  G11B5/74 ,  G11B5/743 ,  G11B5/852 ,  G11B5/855 ,  G11B11/10578 ,  G11B11/10584

摘要： A magnetic recording medium and a method of manufacturing the same which serve for stable head behavior and efficient recording of servo information. In each servo area, a magnetic layer is separated into a plurality of servo pattern unit parts for forming a predetermined servo pattern and a plurality of servo pattern gap filling parts patterned to fill gaps between the plurality of servo pattern unit parts partly. The servo pattern unit parts and the servo pattern gap filling parts are formed in different sizes so as to have different magnetic properties.

摘要翻译： 一种磁记录介质及其制造方法，其用于稳定的头部行为和伺服信息的有效记录。 在每个伺服区域中，将磁性层分成用于形成预定的伺服模式的多个伺服模式单元部分和多个伺服模式间隙填充部分，以部分地填充多个伺服模式单元部件之间的间隙。 伺服图案单元部件和伺服图案间隙填充部分形成为不同的尺寸以具有不同的磁性。