Ion gun, ion beam etching apparatus, ion beam etching facility, etching method, and method for manufacturing magnetic recording medium
    1.
    发明申请
    Ion gun, ion beam etching apparatus, ion beam etching facility, etching method, and method for manufacturing magnetic recording medium 审中-公开
    离子枪,离子束蚀刻装置,离子束蚀刻装置,蚀刻方法以及制造磁记录介质的方法

    公开(公告)号:US20080087631A1

    公开(公告)日:2008-04-17

    申请号:US11907269

    申请日:2007-10-10

    IPC分类号: H01J27/02 B44C1/22

    摘要: A compact ion gun capable of flattening both sides of a substrate, an ion beam etching apparatus provided with the ion gun, an ion beam etching facility, an etching method using them, and a method for manufacturing a magnetic recording medium are provided. The ion gun includes a plasma generation source and an extraction electrode unit. The extraction electrode unit has: a first electrode unit including a portion of a plurality of electrode plates on a first side of a reference plane intersecting the electrode plates, the portion being inclined with respect to the reference plane so as to face an irradiation target area along the reference plane; and a second electrode unit including a portion of the electrode plates on a second side of the reference plane, the portion being inclined with respect to the reference plane so as to face the irradiation target area along the reference plane.

    摘要翻译: 提供能够使基板的两面变平的紧凑型离子枪,设置有离子枪的离子束蚀刻装置,离子束蚀刻装置,使用它们的蚀刻方法和制造磁记录介质的方法。 离子枪包括等离子体产生源和引出电极单元。 提取电极单元具有:第一电极单元,其包括在与电极板相交的参考平面的第一侧上的多个电极板的一部分,该部分相对于参考平面倾斜以面对照射目标区域 沿着参考平面; 以及第二电极单元,其包括在所述参考平面的第二侧上的所述电极板的一部分,所述部分相对于所述参考平面倾斜,以便沿着所述参考平面面对所述照射目标区域。

    Method for manufacturing information recording medium, method of transferring concavo-convex pattern, and transfer apparatus
    2.
    发明申请
    Method for manufacturing information recording medium, method of transferring concavo-convex pattern, and transfer apparatus 审中-公开
    信息记录介质的制造方法,凹凸图案的传送方法以及传送装置

    公开(公告)号:US20080237938A1

    公开(公告)日:2008-10-02

    申请号:US12078166

    申请日:2008-03-27

    IPC分类号: B29C35/08

    摘要: A method for manufacturing an information recording medium, a method of transferring a concavo-convex pattern, and a transfer apparatus are provided which are capable of curing a resin material with reliability even when using a light-transmitting stamper repeatedly. A stamper made of a light-transmitting resin, having a predetermined concavo-convex pattern formed on its transfer area, is inspected for an optical characteristic. The stamper is brought into contact with an energy-ray curable resin material applied to an object to be processed, thereby transferring the concavo-convex pattern to the resin material, and the resin material is irradiated with an energy ray through the stamper so that the resin material cures. The stamper is used a plurality of times to repeat these steps a plurality of times, thereby manufacturing a plurality of information recording media.

    摘要翻译: 提供一种用于制造信息记录介质的方法,传递凹凸图案的方法和传送装置,其即使在重复使用透光压模时也能够可靠地固化树脂材料。 检查由传输区域形成的具有预定凹凸图案的透光树脂制成的压模的光学特性。 使压模与施加到被处理物体的能量射线固化性树脂材料接触,由此将凹凸图案转印到树脂材料上,并通过压模对能量射线照射树脂材料,使得 树脂材料固化。 多次使用压模多次重复这些步骤,从而制造多个信息记录介质。

    Magnetic recording medium including a patterned intermediate layer and a non-patterned soft magnetic layer and manufacturing method thereof
    3.
    发明授权
    Magnetic recording medium including a patterned intermediate layer and a non-patterned soft magnetic layer and manufacturing method thereof 失效
    包括图案化中间层和非图案化软磁性层的磁记录介质及其制造方法

    公开(公告)号:US07597972B2

    公开(公告)日:2009-10-06

    申请号:US11135441

    申请日:2005-05-24

    IPC分类号: G11B5/667

    CPC分类号: G11B5/855

    摘要: A magnetic recording medium is provided which has good recording/reproducing characteristics with a recording layer divided in a number of recording elements by a predetermined concavo-convex pattern, and a manufacturing method that enables efficient manufacture of such a magnetic recording medium. The magnetic recording medium includes a substrate, a soft magnetic layer formed over the substrate, a recording layer formed over the soft magnetic layer such as to have magnetic anisotropy in a direction perpendicular to surface, and being divided in a number of recording elements by a predetermined concavo-convex pattern, and a non-magnetic intermediate layer formed between the recording layer and the soft magnetic layer. The recording elements are formed to have a predetermined track shape in a data region.

    摘要翻译: 提供了具有良好的记录/再现特性的磁记录介质,其中记录层通过预定的凹凸图案分成多个记录元件,并且能够有效地制造这种磁记录介质的制造方法。 磁记录介质包括基板,形成在基板上的软磁层,形成在软磁层上的记录层,以便在垂直于表面的方向上具有磁各向异性,并被多个记录元件划分为 预定的凹凸图案和形成在记录层和软磁性层之间的非磁性中间层。 记录元件形成为在数据区域中具有预定轨迹形状。

    Magnetic recording medium and magnetic recording/reproducing device
    4.
    发明授权
    Magnetic recording medium and magnetic recording/reproducing device 失效
    磁记录介质和磁记录/再现装置

    公开(公告)号:US07541106B2

    公开(公告)日:2009-06-02

    申请号:US11334343

    申请日:2006-01-19

    IPC分类号: G11B5/66

    CPC分类号: G11B5/855

    摘要: A magnetic recording medium is provided that includes a recording layer having recording elements formed as convex portions and a filling material filled within the concave portions between the recording elements. The medium is highly reliable and has a surface less liable to damages when a magnetic head contacts the surface, so that good recording/reproducing characteristics are ensured. The magnetic recording medium includes a recording layer formed in a predetermined concavo-convex pattern over a substrate and having recording elements formed as convex portions in the concavo-convex pattern and a filling material filled within the concave portions between the recording elements. The filling material is substantially composed of Si and O, and the ratio of the number of O atoms to the number of Si atoms is equal to or more than 1.5 and less than 2.

    摘要翻译: 提供了一种磁记录介质,其包括具有形成为凸部的记录元件和填充在记录元件之间的凹部内的填充材料的记录层。 介质是高度可靠的,并且当磁头接触表面时表面较不易损坏,从而确保良好的记录/再现特性。 磁记录介质包括在基板上形成为预定的凹凸图案的记录层,并且具有形成为凹凸图案中的凸部的记录元件和填充在记录元件之间的凹部内的填充材料。 填充材料基本上由Si和O组成,O原子数与Si原子数之比等于或大于1.5且小于2。

    Magnetic recording medium and magnetic recording/reproducing device

    公开(公告)号:US20060188751A1

    公开(公告)日:2006-08-24

    申请号:US11334343

    申请日:2006-01-19

    IPC分类号: G11B5/64

    CPC分类号: G11B5/855

    摘要: A magnetic recording medium is provided that includes a recording layer having recording elements formed as convex portions and a filling material filled within the concave portions between the recording elements. The medium is highly reliable and has a surface less liable to damages when a magnetic head contacts the surface, so that good recording/reproducing characteristics are ensured. The magnetic recording medium includes a recording layer formed in a predetermined concavo-convex pattern over a substrate and having recording elements formed as convex portions in the concavo-convex pattern and a filling material filled within the concave portions between the recording elements. The filling material is substantially composed of Si and O, and the ratio of the number of O atoms to the number of Si atoms is equal to or more than 1.5 and less than 2.

    Magnetic recording/reproducing device, magnetic recording medium, and magnetic head
    6.
    发明申请
    Magnetic recording/reproducing device, magnetic recording medium, and magnetic head 审中-公开
    磁记录/再现装置,磁记录介质和磁头

    公开(公告)号:US20060132970A1

    公开(公告)日:2006-06-22

    申请号:US11297362

    申请日:2005-12-09

    IPC分类号: G11B5/127

    摘要: A perpendicular magnetic recording/reproducing device that can suppress broadening of recording magnetic fields and that is capable of effective application of magnetic field to a recording target track is provided. The device includes a magnetic recording medium having a soft magnetic layer and a recording layer having a perpendicular magnetic anisotropy formed in this order over a substrate, and a magnetic head. The soft magnetic layer is formed with a concavo-convex pattern in which at least part of regions corresponding to tracks of the recording layer protrudes toward the recording layer, and convex portions are provided with the magnetic anisotropy in the circumferential direction of the tracks. The magnetic head includes a main pole for generating a recording magnetic field, and a return pole to which the magnetic field returns, the main pole and the return pole being arranged side by side in a track width direction.

    摘要翻译: 提供了一种能够抑制记录磁场扩大并且能够有效地将磁场施加到记录目标轨迹的垂直磁记录/再现装置。 该装置包括具有软磁性层和在基板上依次形成垂直磁各向异性的记录层的磁记录介质和磁头。 软磁性层形成为凹凸图案,其中对应于记录层的轨道的区域的至少一部分朝向记录层突出,并且凸部在轨道的圆周方向上具有磁各向异性。 磁头包括用于产生记录磁场的主极和磁场返回的返回极,主极和返回极在轨道宽度方向上并排布置。

    Magnetic recording medium
    7.
    发明申请
    Magnetic recording medium 失效
    磁记录介质

    公开(公告)号:US20050243467A1

    公开(公告)日:2005-11-03

    申请号:US11115116

    申请日:2005-04-27

    摘要: A magnetic recording medium having high reliability is provided, in which concave portions between recording elements formed as convex portions of a concavo-convex pattern are approximately completely filled with a non-magnetic material. The magnetic recording medium is a plate-like body including: a substrate; a recording layer that is formed in a predetermined concavo-convex pattern over the substrate and includes recording elements for recording information formed as convex portions of the concavo-convex pattern; and the non-magnetic material filling concave portions between the recording elements. Side faces of the recording elements are inclined to face a surface of the plate-like body on a side toward which the recording elements 16 project in the concavo-convex pattern. An inclination angle of the side faces of the recording elements with respect to a direction perpendicular to that surface is smaller than 90° and 5° or more.

    摘要翻译: 提供了具有高可靠性的磁记录介质,其中形成为凹凸图案的凸部的记录元件之间的凹部大致完全填充有非磁性材料。 磁记录介质是板状体,包括:基板; 记录层,其形成在所述基板上的预定的凹凸图案中,并且包括用于记录形成为所述凹凸图案的凸部的信息的记录元件; 和非磁性材料填充记录元件之间的凹部。 记录元件的侧面在记录元件16突出于凹凸图案的一侧面对板状体的表面倾斜。 记录元件的侧面相对于与该表面垂直的方向的倾斜角度小于90°和5°以上。

    Information recording medium
    8.
    发明授权
    Information recording medium 失效
    信息记录介质

    公开(公告)号:US07604880B2

    公开(公告)日:2009-10-20

    申请号:US11085522

    申请日:2005-03-22

    IPC分类号: G11B5/64 G11B5/72

    CPC分类号: G11B5/855

    摘要: In an information recording medium where respective concave parts of a magnetic layer, which is formed on at least one side e of a substrate and in which a predetermined convex/concave pattern has been formed, are filled with non-magnetic material and non-magnetic layers are formed by the non-magnetic material in at least partial regions of respective upper surfaces of respective convex parts of the magnetic layer, the non-magnetic layers are formed so that parts thereof protrude further in a direction in which the convex parts protrude than other parts of the non-magnetic layers.

    摘要翻译: 在其中形成在基板的至少一个面e上并且其中形成有预定的凸/凹图案的磁性层的各个凹部填充有非磁性材料和非磁性的信息记录介质中 在磁性层的各个凸部的各个上表面的至少部分区域中,由非磁性材料形成层,非磁性层形成为使得其部分在凸部突出的方向上进一步突出, 其他部分的非磁性层。

    Magnetic recording medium
    9.
    发明授权
    Magnetic recording medium 失效
    磁记录介质

    公开(公告)号:US07482070B2

    公开(公告)日:2009-01-27

    申请号:US11115116

    申请日:2005-04-27

    IPC分类号: G11B5/66

    摘要: A magnetic recording medium having high reliability is provided, in which concave portions between recording elements formed as convex portions of a concavo-convex pattern are approximately completely filled with a non-magnetic material. The magnetic recording medium is a plate-like body including: a substrate; a recording layer that is formed in a predetermined concavo-convex pattern over the substrate and includes recording elements for recording information formed as convex portions of the concavo-convex pattern; and the non-magnetic material filling concave portions between the recording elements. Side faces of the recording elements are inclined to face a surface of the plate-like body on a side toward which the recording elements 16 project in the concavo-convex pattern. An inclination angle of the side faces of the recording elements with respect to a direction perpendicular to that surface is smaller than 90° and 5° or more.

    摘要翻译: 提供了具有高可靠性的磁记录介质,其中形成为凹凸图案的凸部的记录元件之间的凹部大致完全填充有非磁性材料。 磁记录介质是板状体,包括:基板; 记录层,其形成在所述基板上的预定的凹凸图案中,并且包括用于记录形成为所述凹凸图案的凸部的信息的记录元件; 和非磁性材料填充记录元件之间的凹部。 记录元件的侧面在记录元件16突出于凹凸图案的一侧面对板状体的表面倾斜。 记录元件的侧面相对于与该表面垂直的方向的倾斜角度小于90°和5°以上。

    Magnetic recording medium and manufacturing method thereof
    10.
    发明申请
    Magnetic recording medium and manufacturing method thereof 失效
    磁记录介质及其制造方法

    公开(公告)号:US20050287397A1

    公开(公告)日:2005-12-29

    申请号:US11135441

    申请日:2005-05-24

    CPC分类号: G11B5/855

    摘要: A magnetic recording medium is provided which has good recording/reproducing characteristics with a recording layer divided in a number of recording elements by a predetermined concavo-convex pattern, and a manufacturing method that enables efficient manufacture of such a magnetic recording medium. The magnetic recording medium includes a substrate, a soft magnetic layer formed over the substrate, a recording layer formed over the soft magnetic layer such as to have magnetic anisotropy in a direction perpendicular to surface, and being divided in a number of recording elements by a predetermined concavo-convex pattern, and a non-magnetic intermediate layer formed between the recording layer and the soft magnetic layer. The recording elements are formed to have a predetermined track shape in a data region.

    摘要翻译: 提供了具有良好的记录/再现特性的磁记录介质,其中记录层通过预定的凹凸图案分成多个记录元件,并且能够有效地制造这种磁记录介质的制造方法。 磁记录介质包括基板,形成在基板上的软磁层,形成在软磁层上的记录层,以便在垂直于表面的方向上具有磁各向异性,并被多个记录元件划分为 预定的凹凸图案和形成在记录层和软磁性层之间的非磁性中间层。 记录元件形成为在数据区域中具有预定轨迹形状。