公开(公告)号：US20180072562A1

公开(公告)日：2018-03-15

申请号：US15698989

申请日：2017-09-08

Applicant: MEMS Drive, Inc.

Inventor： GERARDO MORABITO ,  Guiqin Wang

IPC: B81B3/00

Abstract: A micro-electrical-mechanical system (MEMS) assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to be coupled, on a lower surface, to a printed circuit board, an image sensor assembly coupled to an upper surface of the micro-electrical-mechanical system (MEMS) actuator, and a holder assembly coupled to and positioned with respect to the micro-electrical-mechanical system (MEMS) actuator.

公开(公告)号：US20170359496A1

公开(公告)日：2017-12-14

申请号：US15686710

申请日：2017-08-25

Applicant: MEMS Drive, Inc.

Inventor： Matthew NG ,  Roman Gutierrez ,  Guiqin Wang

IPC: H04N5/232 ,  H02N1/00 ,  B81B3/00 ,  H04N5/225

CPC classification number: H04N5/2328 ,  B81B3/0021 ,  B81B3/007 ,  B81B2203/0163 ,  B81B2207/07 ,  H02N1/008 ,  H04N5/225 ,  H04N5/2254 ,  H04N5/335 ,  Y10T29/49107

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

公开(公告)号：US09621775B2

公开(公告)日：2017-04-11

申请号：US14819413

申请日：2015-08-05

Applicant: MEMS DRIVE, INC.

Inventor： Matthew Ng ,  Roman Gutierrez ,  Guiqin Wang

IPC: H02N1/00 ,  H04N5/222 ,  H04N5/225 ,  H04N5/335 ,  B81B3/00

CPC classification number: H04N5/2328 ,  B81B3/0021 ,  B81B3/007 ,  B81B2203/0163 ,  B81B2207/07 ,  H02N1/008 ,  H04N5/225 ,  H04N5/2254 ,  H04N5/335 ,  Y10T29/49107

Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.

公开(公告)号：US09617142B1

公开(公告)日：2017-04-11

申请号：US14872123

申请日：2015-09-30

Applicant: MEMS DRIVE, INC.

Inventor： Roman Gutierrez ,  Tony Tang ,  Xiaolei Liu ,  Guiqin Wang ,  Matthew Ng

IPC: B81B7/00 ,  B81B7/02 ,  B81C1/00 ,  H01L23/00 ,  H01L23/31

CPC classification number: H01L21/76816 ,  B81B3/0045 ,  B81B7/0029 ,  B81B2203/0353 ,  B81C1/00674 ,  B81C1/00682 ,  B81C2201/0112 ,  B81C2201/0135 ,  H01L21/768 ,  H01L21/76898 ,  H01L23/485 ,  H01L2924/00 ,  H01L2924/00014 ,  H01L2924/0002 ,  H01L2924/1461 ,  H01L2924/181

Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.

公开(公告)号：US09578217B2

公开(公告)日：2017-02-21

申请号：US14692662

申请日：2015-04-21

Applicant: MEMS DRIVE, INC.

Inventor： Roman Gutierrez ,  Guiqin Wang ,  Xiaolei Liu

IPC: H04N5/228 ,  H04N5/225 ,  H05K1/18

CPC classification number: H04N5/2253 ,  H05K1/182 ,  H05K2201/10083 ,  H05K2201/10121 ,  Y10T29/4913

Abstract: A moving image sensor package is provided that may be used to provide optical image stabilization (OIS) in the same form factor as non-OIS enabled image sensors utilized in portable/mobile devices. The moving image sensor package includes an image sensor attached to a MEMS actuator mounted within a cutout in a circuit board, wherein the MEMS actuator has substantially the same thickness as the circuit board.

Abstract translation: 提供了一种运动图像传感器封装，其可用于以与便携式/移动设备中使用的非OIS启用的图像传感器相同的形状因数提供光学图像稳定（OIS）。 运动图像传感器封装包括附接到安装在电路板中的切口内的MEMS致动器的图像传感器，其中MEMS致动器具有与电路板基本相同的厚度。