公开(公告)号：US5946587A

公开(公告)日：1999-08-31

申请号：US741352

申请日：1996-10-29

申请人： Yasushi Fujioka ,  Shotaro Okabe ,  Masahiro Kanai ,  Takehito Yoshino ,  Akira Sakai ,  Tadashi Hori

发明人： Yasushi Fujioka ,  Shotaro Okabe ,  Masahiro Kanai ,  Takehito Yoshino ,  Akira Sakai ,  Tadashi Hori

IPC分类号： C23C14/56 ,  C23C16/54 ,  H01L31/20 ,  C23C16/00

CPC分类号： H01L31/206 ,  C23C14/562 ,  C23C14/568 ,  C23C16/545 ,  H01L31/202 ,  Y02E10/50 ,  Y02P70/521

摘要： The present invention aims to provide a continuous forming method and apparatus for functional deposited films having excellent characteristics while preventing any mutual mixture of gases between film forming chambers having different pressures, wherein each of semiconductor layers of desired conduction type is deposited on a strip-like substrate within a plurality of film forming chambers, by plasma CVD, while the strip-like substrate is being moved continuously in a longitudinal direction thereof through the plurality of film forming chambers connected via a gas gate having the structure of introducing a scavenging gas into a slit-like separation passage, characterized in that at least one of the gas gates connecting the i-type layer film forming chamber for forming the semiconductor junction and the n- or p-type layer film forming chamber having higher pressure than the i-type layer film forming chamber has the scavenging gas introducing position disposed on the n- or p-type layer film forming chamber side off the center of the separation chamber of the gas gate.

摘要翻译： 本发明的目的在于提供一种具有优异特性的功能性沉积膜的连续成型方法和装置，同时防止在具有不同压力的成膜室之间的气体之间的任何相互混合，其中期望的导电类型的每个半导体层沉积在带状 通过等离子体CVD在多个成膜室内的基板，同时带状基板沿着其长度方向连续移动通过多个成膜室，该多个成膜室通过具有引入清除气体的结构的气门连接到 狭缝状分离通道，其特征在于，连接形成半导体结的i型层成膜室和n型或p型层成膜室中的至少一个具有比i型 层成膜室具有设置在n型或p型层上的清除气体导入位置 成膜室一侧离开气门分离室的中心。

公开(公告)号：US5468521A

公开(公告)日：1995-11-21

申请号：US334032

申请日：1994-11-02

申请人： Masahiro Kanai ,  Yasushi Fujioka ,  Takehito Yoshino ,  Tadashi Hori

发明人： Masahiro Kanai ,  Yasushi Fujioka ,  Takehito Yoshino ,  Tadashi Hori

IPC分类号： C23C16/50 ,  C23C16/455 ,  C23C16/511 ,  C23C16/54 ,  H01L21/205 ,  H01L31/04 ,  H01L31/075 ,  H01L31/20 ,  B05D3/06 ,  H01L31/00

CPC分类号： C23C16/455 ,  C23C16/511 ,  C23C16/545 ,  H01L31/075 ,  H01L31/206 ,  Y02E10/548 ,  Y02P70/521

摘要： A deposited film forming method includes the steps of: continuously carrying a long substrate into or out of a vacuum chamber, flowing a first deposited film forming gas in a reverse direction parallel to the substrate and opposite to a conveying direction of the substrate from first gas discharging means into the vacuum chamber, exhausting the gas from first gas exhausting means, flowing a second deposited film forming gas in a forward direction parallel to the substrate and equivalent to the conveying direction of the substrate, exhausting the gas through the second gas exhausting means, and applying a discharge energy to the first and second gases.

摘要翻译： 沉积膜形成方法包括以下步骤：将长衬底连续地携带到真空室中或从真空室流出，使第一沉积膜形成气体沿平行于衬底的相反方向流动并与第一气体与衬底的输送方向相反 排出装置进入真空室，从第一气体排出装置排出气体，使平行于基板的向前方向流动第二沉积成膜气体并等效于基板的输送方向，排出气体通过第二排气装置 并且向第一和第二气体施加放电能量。

公开(公告)号：US5087542A

公开(公告)日：1992-02-11

申请号：US455227

申请日：1989-12-21

申请人： Koji Yamazaki ,  Toshimitsu Kariya ,  Tatsuyuki Aoike ,  Toshiyuki Ehara ,  Takehito Yoshino ,  Hirokazu Otoshi

发明人： Koji Yamazaki ,  Toshimitsu Kariya ,  Tatsuyuki Aoike ,  Toshiyuki Ehara ,  Takehito Yoshino ,  Hirokazu Otoshi

IPC分类号： G03G5/082 ,  G03G9/08 ,  G03G21/20

CPC分类号： G03G5/08235 ,  G03G21/206 ,  G03G9/0819

摘要： In an electrophotographic image-forming method to be practiced in an electrophotographic image-forming system including a halogen lamp light source, an optical system, a cylindrical photosensitive member, a main corona charger, an electrostatic latent image-forming mechanism, a development mechanism containing magnetic toner, a transfer sheet feeding mechanism, a transfer charger, a separating charger, a transfer sheet conveying mechanism, a cleaning mechanism and a charge-removing light source which is capable of adjusting an image-forming process speed, the improvement comprises: using an amorphous silicon light receiving member which comprises a substrate and a light receiving layer disposed on said substrate, said light receiving layer comprising a first layer capable of exhibiting a photoconductivity, a second layer capable of supporting a latent image and a third layer capable of supporting a developed image being laminated in this order on said substrate, said first layer being formed of an amorphous material containing silicon atoms as a matrix, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, said second layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms, atoms of an element belonging to Group III of the Periodic Table, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, and said third layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms; and using a fine particle insulating toner having a volume average particle size in the range of 4.5 to 9 .mu.m.

摘要翻译： 在包括卤素灯光源，光学系统，圆柱形感光部件，主电晕充电器，静电潜像形成机构的电子照相图像形成系统中实施的电子照相成像方法中，包含 磁性调色剂，转印纸供给机构，转印充电器，分离充电器，转印纸传送机构，清洁机构和能够调整图像形成处理速度的电荷去除光源，其改进包括：使用 一种非晶硅光接收元件，包括基片和设置在所述基底上的光接收层，所述光接收层包括能够呈现光电导性的第一层，能够支持潜像的第二层和能够支撑潜像的第三层 显影图像依次层叠在所述基板上，所述第一层为 由含有硅原子作为基质的非晶质材料和选自氢原子和卤素原子的至少一种原子形成，所述第二层由含有硅原子作为基体的无定形材料形成，碳原子， 属于周期表第III族元素的原子和选自氢原子和卤素原子的至少一种原子，所述第三层由含有硅原子作为基体的无定形材料形成，碳 原子和选自氢原子和卤素原子的至少一种原子; 并使用体积平均粒径在4.5〜9μm的微粒绝缘调色剂。

公开(公告)号：US4886723A

公开(公告)日：1989-12-12

申请号：US182156

申请日：1988-04-15

申请人： Tatsuyuki Aoike ,  Masafumi Sano ,  Takehito Yoshino ,  Toshimitsu Kariya ,  Hiroaki Niino

发明人： Tatsuyuki Aoike ,  Masafumi Sano ,  Takehito Yoshino ,  Toshimitsu Kariya ,  Hiroaki Niino

IPC分类号： G03G5/082

CPC分类号： G03G5/08228

摘要： There is provided an improved light receiving member for electrophotography which is made up of an aluminum support and a multilayered light receiving layer exhibiting photoconductivity formed on said aluminum support, wherein said multilayered light receiving layer consists of a lower layer in contact with said support and an upper layer, said lower layer being made of an inorganic material containing at least aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H), and having a part in which said aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) are unevenly distributed across the layer thickness, said upper layer being made of a non-single material composed of silicon atoms (Si) as the matrix and at least either of hydrogen atoms (H) or halogen atoms (X). The light receiving member for electrophotography exhibits outstanding electric characteristics, optical characteristics, photoconductive characteristics, durability, image characteristics, and adaptability to use environments.

摘要翻译： 提供了一种用于电子照相的改进的光接收元件，其由铝支架和在所述铝支架上形成的具有光电导性的多层光接收层构成，其中所述多层光接收层由与所述支撑体接触的下层和 所述下层由至少含有铝原子（Al），硅原子（Si）和氢原子（H）的无机材料制成，并且其中所述铝原子（Al），硅原子（ Si）和氢原子（H）跨越层厚度不均匀地分布，所述上层由以硅原子（Si）为基体和氢原子（H）或卤素（H）中的至少一个的非单一材料制成 原子（X）。 用于电子照相的光接收元件具有出色的电特性，光学特性，光导特性，耐久性，图像特性和对使用环境的适应性。

公开(公告)号：US4882251A

公开(公告)日：1989-11-21

申请号：US183701

申请日：1988-04-19

申请人： Tatsuyuki Aoike ,  Masafumi Sano ,  Takehito Yoshino ,  Toshimitsu Kariya ,  Hiroaki Niino

发明人： Tatsuyuki Aoike ,  Masafumi Sano ,  Takehito Yoshino ,  Toshimitsu Kariya ,  Hiroaki Niino

IPC分类号： G03G5/082

CPC分类号： G03G5/08228

摘要： A light receiving member for electrophotography made up of an aluminum support and a multilayered light receiving layer exhibiting photoconductivity formed on the aluminum support, wherein the multilayered light receiving layer consists of a lower layer in contact with the support and an upper layer, the lower layer being made of an inorganic material containing at least aluminum atom (Al), silicon atoms (Si) and hydrogen atoms (H), and having portion in which the aluminum atoms (Al), silicon atoms (Si), and hydrogen atoms (H) are unevenly distributed across the layer thickness, the upper layer being made of a non-single-crystal material composed of silicon atoms (Si) as the matrix and at least either of hydrogen atoms (H) or halogen atoms (X) and containing atoms to control conductivity in the layer region in adjacent with the lower layer. The light receiving member for electrophotography can overcome all of the foregoing problems and exhibits extremely excellent electrical property, optical property, photoconductivity, durability, image property and circumstantial property of use.

摘要翻译： 一种由铝支架和形成在铝支架上形成的具有光电导性的多层光接收层构成的电子摄影用光接收元件，其中多层光接收层由与支撑体接触的下层和上层组成，下层 由至少含有铝原子（Al），硅原子（Si）和氢原子（H）的无机材料制成，并且其中铝原子（Al），硅原子（Si）和氢原子（H ）不均匀地分布在层厚度上，上层由以硅原子（Si）为基体和氢原子（H）或卤素原子（X）中的至少一个组成的非单晶材料制成，并含有 原子以控制与下层相邻的层区域中的导电性。 用于电子照相的光接收元件可以克服所有上述问题，并且表现出非常优异的电性能，光学性能，光电导性，耐久性，图像特性和使用的环境性质。