Semiconductor device inspection system
    41.
    发明授权
    Semiconductor device inspection system 失效
    半导体器件检测系统

    公开(公告)号:US6002792A

    公开(公告)日:1999-12-14

    申请号:US607873

    申请日:1996-02-29

    IPC分类号: G01N21/95 G01R31/302 G06K9/00

    CPC分类号: G01N21/9501 G01N21/956

    摘要: The present invention relates to an inspection system for transparently taking an image of inside of a semiconductor device to analyze anomalous occurrence. First, image data obtained under infrared ray illumination are converted into a first left-to-right reversed image data in which the obtained image data are reversed left to right and the first left-to-right reversed image data are stored. Next, very weak light emitted from an anomalous portion when the semiconductor device is biased is picked up under no illumination. Then, image data of very weak light is converted into a second left-to-right reversed image data in which the image data of weak light are reversed left to right. The first and second left-to-right image data are superimposed to superimpose the image specifying the anomalous location on an image of chip patterns in the semiconductor device and the superimposed image is displayed. Further, in the infrared-ray epi-irradiation means, an optical filter made of the same material as that of the semiconductor device to be measured is used to form infrared rays for illumination, so that when the back surface of the semiconductor device is irradiated with infrared rays produced by the optical filter, light having a short wavelength which is easily reflected on the surface of the semiconductor device is interrupted and infrared rays having high transmittance against the semiconductor device can be obtined.

    摘要翻译: 本发明涉及一种用于透明地拍摄半导体器件内部的图像以分析异常发生的检查系统。 首先,在红外线照射下获得的图像数据被转换成从左到右反转所获得的图像数据并且存储第一左右颠倒图像数据的第一左右反转图像数据。 接下来,在半导体器件偏置时从异常部分发射的非常弱的光在无照明的情况下被拾取。 然后,非常弱的光的图像数据被转换成其中弱光的图像数据从左到右反转的第二个左至右反转图像数据。 第一和第二左右图像数据被叠加以将指定异常位置的图像叠加在半导体器件中的芯片图案的图像上,并且显示叠加的图像。 此外,在红外线照射装置中,使用与被测量的半导体装置相同的材料制成的滤光器,以形成用于照明的红外线,使得当半导体器件的背面被照射时 利用由滤光器产生的红外线,中断在半导体器件的表面上容易反射的短波长的光,可以获得对半导体器件具有高透射率的红外线。

    Mercaptotetrazolylalkanohydroxamic acids, salts and ester thereof
    42.
    发明授权
    Mercaptotetrazolylalkanohydroxamic acids, salts and ester thereof 失效
    巯基四唑基烷酰氧肟酸,其盐和酯

    公开(公告)号:US4555578A

    公开(公告)日:1985-11-26

    申请号:US493573

    申请日:1983-05-11

    CPC分类号: C07D257/04 Y02P20/55

    摘要: 5-Mercapto-1H-tetrazole-1-alkanohydroxamic acid, its salts and its esters having the following formula: ##STR1## wherein A is an alkylene group;M is a hydrogen or light metal atom; andR is a hydrogen atom, an alkyl group or a hydroxy-protecting group,and its preparation are disclosed. The compounds are useful as medicines and intermediates.

    摘要翻译: 5-巯基-1H-四唑-1-烷酰氧肟酸,其盐及其酯具有下式:其中A是亚烷基; M是氢或轻金属原子; R是氢原子,烷基或羟基保护基,其制备方法。 该化合物可用作药物和中间体。

    Arylmalonamido-1-oxadethiacephalosporins
    44.
    发明授权
    Arylmalonamido-1-oxadethiacephalosporins 失效
    芳基丙二酰胺-1-氧杂硫菌醚

    公开(公告)号:US4323567A

    公开(公告)日:1982-04-06

    申请号:US156872

    申请日:1980-06-05

    摘要: Antibacterial 1-oxadethiacephalosporins of the formula: ##STR1## wherein Ar is ##STR2## (in which Acyl is organic or inorganic acyl); COB.sup.1 and COB.sup.2 each is carboxy or protected carboxy;Het is ##STR3## (in which COB.sup.3 is carboxy or protected carboxy); and Y is hydrogen or methoxy;and when COB.sup.1 and COB.sup.2, and/or COB.sup.3 is carboxy, pharmaceutically acceptable salts thereof are included, but with a proviso that when Y is methoxy, Het is ##STR4## a pharmaceutical or veterinary composition comprising the said 1-oxadethiacephalosporins and pharmaceutical carrier, and a method for treating or preventing human or veterinary infectious diseases comprising administering the said 1-oxadethiacephalosporin.Also disclosed are epimers of the compounds of formula (I) wherein the asymmetric carbon of the malonic methine is in the D(R)- or L(S)- configuration. The individual epimers are separable by column chromatography and/or crystallization. The bactericidal activity of the D-epimers is greater than that of the L-epimers or the mixtures of the epimers.

    摘要翻译: 其中Ar是有机或无机酰基的酰基;其中Ar是有机或无机酰基;其中Ar是有机或无机酰基。 COB1和COB2各自为羧基或被保护的羧基; Het是(其中COB 3是羧基或被保护的羧基); Y为氢或甲氧基; 并且当COB1和COB2和/或COB3为羧基时,包括其药学上可接受的盐,但条件是当Y为甲氧基时,Het为包含所述1-恶二硫醚类和药物载体的药物或兽用组合物, 以及用于治疗或预防人或兽传染性疾病的方法,包括施用所述1-恶二硫醚类。 还公开了式(I)化合物的差向异构体,其中丙二酸次甲基的不对称碳为D(R) - 或L(S) - 构型。 单独的差向异构体可通过柱色谱和/或结晶分离。 D-差向异构体的杀菌活性大于L-差向异构体或差向异构体的混合物的杀菌活性。

    Cephalosporin hydroxamic acids
    46.
    发明授权
    Cephalosporin hydroxamic acids 失效
    头孢菌素异羟肟酸

    公开(公告)号:US4614797A

    公开(公告)日:1986-09-30

    申请号:US576404

    申请日:1984-02-02

    CPC分类号: C07D505/00 Y02P20/55

    摘要: An antibacterial cephalosporin hydroxamic acid derivative represented by the following formula (I), processes for its preparation, compositions containing the same as an active ingredient, and a method for killing bacteria by contacting with said compound. ##STR1## (wherein, R is acyl; R.sup.1 is hydrogen or methoxy; R.sup.2 is alkylene; R.sup.3 is hydrogen, aliphatic group or a hydroxy-protecting group; R.sup.4 is hydrogen or amino-protecting group; R.sup.5 is hydrogen, light metal atom or carboxy-protecting group; and X is oxygen, sulfur, or sulfinyl).

    摘要翻译: 由下式(I)表示的抗菌头孢菌素异羟肟酸衍生物,其制备方法,含有该活性成分的组合物,以及通过与所述化合物接触来杀死细菌的方法。 (I)(I)(其中R为酰基; R 1为氢或甲氧基; R 2为亚烷基; R 3为氢,脂族基或羟基保护基; R 4为氢或氨基保护基; R 5为氢, 金属原子或羧基保护基; X是氧,硫或亚磺酰基)。

    Arylmalonamidomethoxycephalosporins
    47.
    发明授权
    Arylmalonamidomethoxycephalosporins 失效
    芳基酰胺基甲氧基头孢菌素

    公开(公告)号:US4203982A

    公开(公告)日:1980-05-20

    申请号:US819931

    申请日:1977-07-28

    CPC分类号: C07D501/36 C07D501/57

    摘要: Antibacterial 7.beta.-arylmalonamido-7.alpha.-methoxy-3-heterocyclic thiomethyl-3-cephem-4-carboxylic acids of the formula: ##STR1## wherein Ar is a heterocyclic group or p-oxysubstituted phenyl; COB.sup.1 and COB.sup.2 are each a carboxy or protected carboxy group; and Het is an unsubstituted or substituted heterocyclic group. These compounds are prepared from, e.g., 7.beta.-amino-7.alpha.-methoxy-3-heterocyclic thiomethyl-3-cephem-4-carboxylic acid derivatives by acylation with arylmalonic acid or reactive derivatives thereof. They are useful as an active ingredient in antibacterial pharmaceutical preparations.

    摘要翻译: 其中Ar是杂环基或对 - 氧代取代的苯基的抗菌7β-芳基丙二酰氨基-7α-甲氧基-3-杂环硫代甲基-3-头孢烯-4-羧酸。 COB1和COB2各自为羧基或被保护的羧基; 并且Het是未取代或取代的杂环基。 这些化合物通过用芳基丙二酸或其活性衍生物进行酰化由例如7β-氨基-7α-甲氧基-3-杂环硫代甲基-3-头孢烯-4-羧酸衍生物制备。 它们作为抗菌药物制剂中的活性成分是有用的。

    Thiadiazolyl cephalosporin analogs
    48.
    发明授权
    Thiadiazolyl cephalosporin analogs 失效
    噻二唑基头孢菌素类似物

    公开(公告)号:US4201782A

    公开(公告)日:1980-05-06

    申请号:US936506

    申请日:1978-08-24

    CPC分类号: C07D505/00

    摘要: Antibacterial 7.beta.-arylmalonamido-7.alpha.-methoxy-3-optionally alkylated thiadiazolylthiomethyl-1-oxadothiacephalosporins of the following formula: ##STR1## (wherein Ar is 2-thienyl, 3-thienyl, phenyl, p-hydroxyphenyl, p-acyloxyphenyl or p-protected hydroxyphenyl;COB.sup.1 and COB.sup.2 each is carboxy, protected carboxy or a carboxylate salt; andR is hydrogen or lower alkyl),processes for preparing said compounds, a pharmaceutical or veterinary composition comprising the said compounds and pharmaceutical carrier and a method for treating or preventing human or veterinary infectious diseases comprising administering the said compound.

    摘要翻译: 具有下式的抗菌7β-芳基丙酰胺基-7α-甲氧基-3-任选的烷基化噻二唑基硫代甲基-1-氧代硫代头孢菌素:其中Ar是2-噻吩基,3-噻吩基,苯基,对羟基苯基,对 - 酰氧基苯基或 对保护的羟基苯基; COB1和COB2各自为羧基,保护的羧基或羧酸盐; R为氢或低级烷基),制备所述化合物的方法,包含所述化合物和药物载体的药物或兽医组合物和 治疗或预防人或兽医感染性疾病,包括给予所述化合物。

    Sample information measuring method and scanning confocal microscope
    49.
    发明申请
    Sample information measuring method and scanning confocal microscope 有权
    样品信息测量方法和扫描共聚焦显微镜

    公开(公告)号:US20050161592A1

    公开(公告)日:2005-07-28

    申请号:US10991123

    申请日:2004-11-17

    CPC分类号: G02B21/006

    摘要: When irradiating a sample with light from a light source through an object lens, discretely changing a relative position between a beam condensing position of the object lens and the sample in an optical axis direction of the converging beam, obtaining light intensity information from the sample at each relative position, extracting plural pieces of light intensity information from a light intensity information group, estimating a maximum value on a change curve adaptive to the plural pieces of extracted light intensity information and the relative position for the maximum value, and obtaining the estimated maximum value of the light intensity information and relative position as brightness information and height information, these information about the sample can be continuously obtained by discretely performing an iterative operation on the relative position between a beam condensing position of the object lens and the sample in an optical axis direction of the converging beam.

    摘要翻译: 当通过物镜将来自光源的光照射样品时,离散地改变物镜的聚光位置和聚光束的光轴方向上的样品之间的相对位置,从样品中获得光强度信息 每个相对位置,从光强度信息组中提取多个光强度信息,根据多个提取的光强度信息和最大值的相对位置估计适应于变化曲线的最大值,并获得估计的最大值 光强度信息的值和相对位置作为亮度信息和高度信息,关于样本的这些信息可以通过离散地对物镜的光束聚光位置和光学器件的样品之间的相对位置进行迭代操作来连续获得 会聚光束的轴向。

    Semiconductor device inspection system involving superimposition of
image data for detecting flaws in the semiconductor device
    50.
    发明授权
    Semiconductor device inspection system involving superimposition of image data for detecting flaws in the semiconductor device 失效
    包括用于检测半导体器件中的缺陷的图像数据的叠加的半导体器件检查系统

    公开(公告)号:US5532607A

    公开(公告)日:1996-07-02

    申请号:US274716

    申请日:1994-07-18

    CPC分类号: H01L22/12

    摘要: A semiconductor device inspection system having an improved measurement accuracy and in operability. A semiconductor device is observed from the bottom surface side. First, image data obtained upon image pickup under infrared illumination is converted into first left-to-right-reversed image data corresponding to a left-to-right-reversed image and the first reversed image data is stored. Then an image is obtained under no illumination from very weak light emitted from an abnormal portion when a bias is applied to the semiconductor device. Image data of the very weak light image is then converted into second left-to-right-reversed image data corresponding to a left-to-right-reversed image. The first and second left-to-right-reversed image data are superimposedly added to each other and a superimposed image is displayed with the abnormal portion being superimposed on a chip pattern as seen from the top surface of the semiconductor device.

    摘要翻译: 一种具有改进的测量精度和可操作性的半导体器件检查系统。 从底面观察半导体器件。 首先,在红外照明下拍摄的图像数据被转换成与从左到右反转的图像对应的第一左右颠倒图像数据,并存储第一反转图像数据。 然后,当向半导体器件施加偏压时,从异常部分发出的非常弱的光线在无照明条件下获得图像。 然后,非常弱的光图像的图像数据被转换成对应于从左到右的反转图像的第二左至右反转的图像数据。 第一和第二左至右反转的图像数据彼此叠加,并且从半导体器件的顶表面看,叠加的图像被显示,异常部分叠加在芯片图案上。