公开(公告)号：US08443668B2

公开(公告)日：2013-05-21

申请号：US12925750

申请日：2010-10-27

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Markus Heitz ,  Robert Sattler ,  Daniel Christoph Meisel ,  Thorsten Balslink

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Markus Heitz ,  Robert Sattler ,  Daniel Christoph Meisel ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.

Abstract translation: 描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可被第二激励装置激发到第二振动 并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

公开(公告)号：US20110219877A1

公开(公告)日：2011-09-15

申请号：US13057045

申请日：2009-08-03

Applicant: Daniel Christoph Meisel

Inventor： Daniel Christoph Meisel

IPC: G01P15/125

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B2201/0235

Abstract: A micromechanical sensor having at least one movably mounted measuring element which is opposite at least one stationary electrode, the electrode being situated in a first plane, and being contacted by at least one printed conductor track which is situated in a second plane. A third plane is located between the first plane and the second plane, the third plane including an electrically conductive material.

Abstract translation: 一种微机械传感器，其具有至少一个可移动地安装的测量元件，其与至少一个固定电极相对，所述电极位于第一平面中，并且被位于第二平面中的至少一个印刷导体轨道接触。 第三平面位于第一平面和第二平面之间，第三平面包括导电材料。

公开(公告)号：US20110186944A1

公开(公告)日：2011-08-04

申请号：US13055298

申请日：2009-06-15

Applicant: Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

Inventor： Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

IPC: H01L29/84 ,  H01L21/02

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  H02N1/008

Abstract: A micromechanical structure, includes at least two structure sections configured to bound a working gap, the at least two structure sections being movable relative to one another, and a working gap width setting device configured to broaden the at least one working gap by movement of a first structure section of the at least two structure sections relative to a second structure section of the at least two structure section, the first structure section is stationary relative to a reference point during operation of the micromechanical structure and (ii) the second structure section is movable relative to the reference point during operation.

Abstract translation: 微机械结构包括至少两个构造成结合工作间隙的结构部分，所述至少两个结构部分可相对于彼此移动;以及工作间隙宽度设定装置，其经配置以通过移动所述至少一个工作间隙 所述至少两个结构部分的第一结构部分相对于所述至少两个结构部分的第二结构部分，所述第一结构部分在所述微机械结构的操作期间相对于参考点是静止的，并且所述第二结构部分是 在运行期间相对于参考点可移动。

公开(公告)号：US20100199762A1

公开(公告)日：2010-08-12

申请号：US12452546

申请日：2008-09-26

Applicant: Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5684 ,  G01C19/5747

Abstract: A micromechanical device includes at least one drive frame and at least one vibrator, the vibrator being situated in a region surrounded by the drive frame; the vibrator being mechanically coupled to the drive frame. The drive frame is able to be excited to generate a flexural vibration.

Abstract translation: 微机械装置包括至少一个驱动框架和至少一个振动器，所述振动器位于由所述驱动框架包围的区域中; 振动器机械地联接到驱动框架。 驱动框架能够被激发以产生弯曲振动。

公开(公告)号：US20100122576A1

公开(公告)日：2010-05-20

申请号：US12587487

申请日：2009-10-06

Applicant: Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5755 ,  G01C19/574 ,  G01C19/5747 ,  G01C19/5762

Abstract: A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.

Abstract translation: 旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。