公开(公告)号：US20190103287A1

公开(公告)日：2019-04-04

申请号：US16106739

申请日：2018-08-21

Applicant: Samsung Display Co., Ltd. ,  Korea University Research and Business Foundation, Sejong Campus

Inventor： Sang Gab KIM ,  MunPyo HONG ,  Hyun Min CHO ,  Seong Yong KWON ,  Ho Won YOON

IPC: H01L21/3213 ,  C23F3/04 ,  H01L21/441 ,  H01L21/3105 ,  H01L21/02 ,  H01L21/311 ,  H01L23/532 ,  H01L29/786 ,  H01L29/49 ,  H05K3/06

Abstract: A copper plasma etching method according an exemplary embodiment includes: placing a substrate on a susceptor in a process chamber of a plasma etching apparatus; supplying an etching gas that include hydrogen chloride into the process chamber; plasma-etching a conductor layer that include copper in the substrate; and maintaining a temperature of the susceptor at 10° C. or less during the plasma-etching.

公开(公告)号：US20150044797A1

公开(公告)日：2015-02-12

申请号：US14194015

申请日：2014-02-28

Applicant: Samsung Display Co. Ltd.

Inventor： Ji Young PARK ,  Gwan Ha KIM ,  Dong Il KIM ,  Sang Gab KIM

IPC: H01L27/12

CPC classification number: H01L27/1259 ,  G02F2001/134372

Abstract: A method of manufacturing a thin film transistor array substrate includes providing a plurality of gate lines and a plurality of data lines on a first substrate, providing an organic layer on the gate lines and the data lines, providing a first electrode on the organic layer, providing a passivation layer on the first electrode, providing a second electrode on the passivation layer, providing a first cover layer on the second electrode to cover the second electrode, providing a plurality of photosensitive layer patterns on the first cover layer, providing a plurality of first cutout patterns in the first cover layer and a plurality of second cutout patterns in the second electrode using the photosensitive layer patterns as an etch mask, and providing a plurality of third cutout patterns in the passivation layer using the first cover layer as an etch mask.

Abstract translation: 制造薄膜晶体管阵列基板的方法包括：在第一基板上设置多个栅极线和多个数据线，在栅极线和数据线上提供有机层，在有机层上提供第一电极， 在所述第一电极上提供钝化层，在所述钝化层上提供第二电极，在所述第二电极上提供第一覆盖层以覆盖所述第二电极，在所述第一覆盖层上提供多个感光层图案，提供多个 第一覆盖层中的第一切除图案和使用感光层图案作为蚀刻掩模的第二电极中的多个第二切割图案，并且使用第一覆盖层作为蚀刻掩模在钝化层中提供多个第三切除图案 。

公开(公告)号：US20140367706A1

公开(公告)日：2014-12-18

申请号：US14105048

申请日：2013-12-12

Applicant: Samsung Display Co., Ltd.

Inventor： Ji-Young PARK ,  Dong Il KIM ,  Sang Gab KIM

IPC: H01L27/12

CPC classification number: H01L27/124 ,  G02F1/134363 ,  G02F1/136227 ,  H01L27/1248 ,  H01L27/1259

Abstract: A thin film transistor array panel includes a substrate; a gate line located over the substrate and including a gate pad portion; a data line located over the gate line and including a source electrode and a data pad portion; a drain electrode; a first passivation layer located over the data line and the drain electrode; an organic insulating layer located over the first passivation layer and having a contact hole; a first field generating electrode located over the organic insulating layer and having an opening; a second passivation layer located over the first field generating electrode; and a second field generating electrode located over the second passivation layer. The contact hole coincides with or is smaller than the opening, and the contact hole has a tapered structure.

Abstract translation: 薄膜晶体管阵列面板包括基板; 栅极线，位于衬底上并包括栅极焊盘部分; 位于栅极线上方并包括源电极和数据焊盘部分的数据线; 漏电极; 位于数据线和漏电极之上的第一钝化层; 位于所述第一钝化层上并具有接触孔的有机绝缘层; 位于所述有机绝缘层上方并具有开口的第一场产生电极; 位于第一场产生电极之上的第二钝化层; 以及位于所述第二钝化层上方的第二场产生电极。 接触孔与开口重合或小于开口，接触孔具有锥形结构。

公开(公告)号：US20140175424A1

公开(公告)日：2014-06-26

申请号：US13915342

申请日：2013-06-11

Applicant: Samsung Display Co., Ltd.

Inventor： Shin Il CHOI ,  Sang Gab KIM ,  Hyang-Shik KONG ,  Su Bin BAE ,  Yu-Gwang JEONG

IPC: H01L33/00

CPC classification number: H01L21/77 ,  H01L27/1225 ,  H01L27/124 ,  H01L27/1288 ,  H01L29/41733 ,  H01L29/45 ,  H01L29/66969 ,  H01L29/7869

Abstract: A thin film transistor array panel includes: a substrate, a gate line positioned on the substrate and including a gate electrode, a semiconductor layer positioned on the substrate and including an oxide semiconductor, a data wire layer positioned on the substrate and including a data line crossing the gate line, a source electrode connected to the data line, and a drain electrode facing the source electrode, and a capping layer covering the data wire layer, in which an end of the capping layer is inwardly recessed as compared to an end of the data wire layer.

Abstract translation: 薄膜晶体管阵列面板包括：衬底，位于衬底上并包括栅电极的栅极线，位于衬底上并包括氧化物半导体的半导体层，位于衬底上的数据线层，包括数据线 穿过栅极线，连接到数据线的源电极和面对源电极的漏电极和覆盖数据线层的覆盖层，其中封盖层的端部向内凹入，与顶端 数据线层。

公开(公告)号：US20140139795A1

公开(公告)日：2014-05-22

申请号：US13938106

申请日：2013-07-09

Applicant: Samsung Display Co., Ltd.

Inventor： Yong-Hwan RYU ,  Sang Gab KIM ,  Hong Sick PARK ,  Jung Ha SON ,  Shin Il CHOI

IPC: G02F1/1341

CPC classification number: G02F1/1341 ,  G02F1/133345

Abstract: A liquid crystal display is provided. The liquid crystal display includes a substrate, a thin film transistor disposed on the substrate, a pixel electrode connected with a terminal of the thin film transistor, a microcavity disposed on the pixel electrode, the microcavity including a liquid crystal injection hole disposed at an edge of the microcavity, a supporting member disposed on the microcavity, a first hydrophobic layer disposed on an edge portion of the supporting member, and a capping layer disposed on the supporting member with the capping layer covering the liquid crystal injection hole.

Abstract translation: 提供液晶显示器。 液晶显示器包括基板，设置在基板上的薄膜晶体管，与薄膜晶体管的端子连接的像素电极，设置在像素电极上的微腔，微腔包括设置在边缘的液晶注入孔 设置在所述微腔上的支撑构件，设置在所述支撑构件的边缘部分上的第一疏水层和设置在所述支撑构件上的覆盖层，所述覆盖层覆盖所述液晶注入孔。