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91 条记录 (耗时 0.049 秒)

    Mechanically clamping robot wrist
    41.
    发明授权
    Mechanically clamping robot wrist 失效
    机械手夹紧机械手

    公开(公告)号：US06222337B1

    公开(公告)日：2001-04-24

    申请号：US09324617

    申请日：1999-06-02

    申请人： Tony Kroeker ,  Jeffrey C. Hudgens

    发明人： Tony Kroeker ,  Jeffrey C. Hudgens

    IPC分类号： B25J1500

    CPC分类号： H01L21/68707 ,  B25J9/107 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/141

    摘要： The present invention generally provides a robot that can transfer a workpiece, such as a silicon wafer, at increased speeds and accelerations/decelerations. More particularly, the present invention provides a robot wrist for mechanically clamping a workpiece to a workpiece handling member of an extendable robot arm. The wafer clamp selectively applies sufficient force to center the workpiece and prevent slippage and damage to the workpiece during rapid rotation and radial movement of the handling member. In one embodiment, a clamp for securing silicon wafers uses two independent clamp fingers to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that wafers are normally clamped except during full extension of the wafer handling member to deliver or pickup a wafer.

    摘要翻译： 本发明通常提供一种可以以增加的速度和加速度/减速度传送诸如硅晶片的工件的机器人。 更具体地说，本发明提供了一种用于机械地将工件夹紧到可延伸机器人臂的工件处理构件上的机械手腕。 晶片夹具选择性地施加足够的力以使工件居中并防止在处理构件的快速旋转和径向运动期间滑动和损坏工件。 在一个实施例中，用于固定硅晶片的夹具使用两个独立的夹钳来以最小的颗粒产生和晶片损坏来定位和保持晶片。 夹具被设计成使得晶片通常被夹紧，除了晶片处理构件的完全延伸以递送或拾取晶片之外。

    Systems, apparatus and methods for transporting substrates
    42.
    发明授权
    Systems, apparatus and methods for transporting substrates 有权
    用于运输基材的系统，设备和方法

    公开(公告)号：US08777547B2

    公开(公告)日：2014-07-15

    申请号：US12684672

    申请日：2010-01-08

    申请人： Izya Kremerman ,  Jeffrey C. Hudgens

    发明人： Izya Kremerman ,  Jeffrey C. Hudgens

    IPC分类号： B25J9/06 ,  B25J9/04 ,  H01L21/677

    CPC分类号： B65G47/904 ,  B25J9/042 ,  B25J18/00 ,  H01L21/67742 ,  Y10S414/135 ,  Y10S414/141 ,  Y10S901/15 ,  Y10S901/16 ,  Y10S901/21 ,  Y10S901/28 ,  Y10S901/29 ,  Y10T74/20335

    摘要： A substrate transporting robot apparatus is disclosed which is adapted to transport a substrate to and from a chamber of an electronic device processing system. The apparatus may include an upper arm rotatable in an X-Y plane, a forearm rotatable relative to the upper arm in the X-Y plane, and a wrist member rotatable relative to the forearm in the X-Y plane, the wrist member including an end effector adapted to carry a substrate. The wrist member may be subjected to independent rotation such that various degrees of yaw may be imparted to the wrist member. In some aspects, the independent rotation is provided without a motive power device (e.g., motor) being provided on the arms or wrist member, i.e., the wrist member may be remotely driven. Systems and methods using the robot apparatus are also provided as are numerous other aspects.

    摘要翻译： 公开了一种基板传送机器人装置，其适于将基板输送到电子设备处理系统的室和从电子设备处理系统的室传送。 该装置可以包括可在XY平面中旋转的上臂，可相对于XY平面中的上臂旋转的前臂，以及可相对于XY平面中的前臂旋转的腕部构件，所述腕构件包括适于携带的末端执行器 底物。 手腕构件可以经受独立的旋转，使得可以将不同程度的偏转赋予手腕构件。 在一些方面，提供独立的旋转，而不需要在臂或腕构件上设置动力装置（例如，马达），即可以远程地驱动腕部件。 还提供了使用机器人装置的系统和方法以及许多其它方面。