公开(公告)号：US20150319893A1

公开(公告)日：2015-11-05

申请号：US14696525

申请日：2015-04-27

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Masakatsu OHNO ,  Satoru IDOJIRI ,  Koichi TAKESHIMA ,  Kayo KUMAKURA ,  Yoshiharu HIRAKATA ,  Kohei YOKOYAMA

IPC: H05K13/04 ,  B32B38/10 ,  B32B43/00

CPC classification number: B32B38/10 ,  B32B38/1858 ,  B32B43/006 ,  B32B2457/00 ,  H05K13/0486 ,  Y10T156/1105 ,  Y10T156/1132 ,  Y10T156/1906 ,  Y10T156/1944

Abstract: A separation apparatus (1) for separating a thin-film flexible stacked body (3) from a component (16) where the thin-film flexible stacked body (3) including an element layer is formed over a rigid substrate (2) such as a glass substrate, a quartz substrate, a ceramic substrate, or a metal substrate is provided. The separation apparatus (1) mainly includes a fixing device (10) for fixing the substrate (2) of the component (16), suction jigs (11) for lifting the flexible stacked body (3) by suction to be separated, circular suction pads (13) that are brought into direct contact with the flexible stacked body (3) and attached to the flexible stacked body (3) by suction, and clamp jigs (9) for holding an edge of the flexible stacked body (3). A position sensor such as a laser measuring instrument for measuring or monitoring a separation state of the flexible stacked body may be used together.

Abstract translation: 一种用于将薄膜柔性层叠体（3）从包括元件层的薄膜柔性层叠体（3）的部件（16）分离的分离装置（1）形成在刚性基板（2）上，例如 玻璃基板，石英基板，陶瓷基板或金属基板。 分离装置（1）主要包括用于固定部件（16）的基板（2）的固定装置（10），用于通过抽吸提升柔性堆叠体（3）以分离的吸入夹具（11），圆形抽吸 与柔性层叠体（3）直接接触并通过抽吸附接到柔性层叠体（3）的垫（13）和用于保持柔性层叠体（3）的边缘的夹具（9）。 可以一起使用诸如用于测量或监测柔性层叠体的分离状态的激光测量仪器的位置传感器。

公开(公告)号：US20150314456A1

公开(公告)日：2015-11-05

申请号：US14699614

申请日：2015-04-29

Applicant: Semiconductor Energy Laboratory Co., LTD.

Inventor： Kayo KUMAKURA ,  Satoru IDOJIRI ,  Masakatsu OHNO ,  Koichi TAKESHIMA ,  Yoshiharu HIRAKATA ,  Kohei YOKOYAMA

IPC: B25J15/06 ,  B25J11/00

CPC classification number: B25J15/0616 ,  B25J11/00 ,  B25J15/0004 ,  B25J15/0028 ,  B25J15/0061

Abstract: A film suction mechanism is provided which can prevent a film-like member from warping or sagging for reliable suction, handing over, or the like of the film-like member. A film suction mechanism of the present invention is a film suction mechanism for processing or transferring a flexible film-like member. The film suction mechanism includes a suction unit having a function of attaching the film-like member thereto by suction and an air nozzle having a function of blowing pressurized air onto a first surface of the film-like member. The suction unit includes a plurality of suction pads. The suction unit is capable of attaching a second surface of the film-like member thereto by suction while the pressurized air is blown onto the first surface of the film-like member.

Abstract translation: 提供了一种胶片吸引机构，其可以防止膜状构件翘曲或下垂以获得膜状构件的可靠抽吸，移交等。 本发明的吸膜机构是用于加工或转移柔性膜状部件的膜吸引机构。 薄膜抽吸机构包括具有通过抽吸将薄膜状构件附接到其上的功能的抽吸单元和具有将加压空气吹送到薄膜状构件的第一表面上的功能的空气喷嘴。 抽吸单元包括多个吸盘。 抽吸单元能够通过抽吸将薄膜状构件的第二表面附着在压力空气吹到薄膜状构件的第一表面上。