公开(公告)号：US11522124B2

公开(公告)日：2022-12-06

申请号：US16547670

申请日：2019-08-22

Applicant: TDK CORPORATION

Inventor： Tomoyuki Sasaki ,  Yohei Shiokawa

IPC: H01L43/06 ,  G11C11/18 ,  H01L27/22 ,  H01L43/08 ,  G11C11/16 ,  H01L43/04 ,  H01L43/10 ,  H01L43/12

Abstract: A spin-orbit torque type magnetoresistance effect element including a magnetoresistance effect element having a first ferromagnetic metal layer with a fixed magnetization direction, a second ferromagnetic metal layer with a varying magnetization direction, and a non-magnetic layer sandwiched between the first ferromagnetic metal layer and the second ferromagnetic metal layer; and spin-orbit torque wiring that extends in a first direction intersecting with a stacking direction of the magnetoresistance effect element and that is joined to the second ferromagnetic metal layer; wherein the magnetization of the second ferromagnetic metal layer is oriented in the stacking direction of the magnetoresistance effect element; and the second ferromagnetic metal layer has shape anisotropy, such that a length along the first direction is greater than a length along a second direction orthogonal to the first direction and to the stacking direction.

公开(公告)号：US11424404B2

公开(公告)日：2022-08-23

申请号：US16956802

申请日：2019-02-26

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: H01L21/02 ,  H01L21/00 ,  H01L43/04 ,  H01L27/22 ,  H01L43/10

Abstract: A ferromagnetic laminated film includes a plurality of first magnetic layers, at least one second magnetic layer, and at least one first non-magnetic layer, in which the first magnetic layers are alternately laminated with the second magnetic layer or the first non-magnetic layer, and a material forming the first magnetic layers is different from a material forming the second magnetic layer, and the first magnetic layers, the first non-magnetic layer, and the second magnetic layer are a material combination in which interface magnetic anisotropy is generated between the first magnetic layer and the first non-magnetic layer, and a material combination in which interface magnetic anisotropy is generated between the first magnetic layer and the second magnetic layer.

公开(公告)号：US11276815B2

公开(公告)日：2022-03-15

申请号：US17010329

申请日：2020-09-02

Applicant: TDK CORPORATION

Inventor： Tomoyuki Sasaki ,  Yohei Shiokawa

IPC: H01L29/82 ,  H01L43/04 ,  G11C11/18 ,  H01L43/02 ,  H01L43/14 ,  H01L43/08 ,  H01L43/10 ,  G11C11/16

Abstract: A spin-orbit torque type magnetization reversal element including a magnetoresistance effect element that comprises a first ferromagnetic layer, a non-magnetic layer and a second ferromagnetic layer which are laminated in this order; and a spin-orbit torque wiring that laminates on the magnetoresistance effect element; wherein a first surface of the spin-orbit torque wiring on the magnetoresistance effect element side is parallel to a plane orthogonal to a laminating direction, and a second surface opposite to the first surface is non-parallel to the plane perpendicular to the stacking direction.

公开(公告)号：US11127894B2

公开(公告)日：2021-09-21

申请号：US16349537

申请日：2018-10-30

Applicant: TDK CORPORATION

Inventor： Katsuyuki Nakada ,  Yohei Shiokawa

IPC: H01L43/02 ,  H01L27/22

Abstract: This spin-orbit-torque magnetization rotating element includes a spin-orbit torque wiring extending in a first direction and a first ferromagnetic layer laminated on the spin-orbit torque wiring, wherein the spin-orbit torque wiring includes a compound represented by XYZ or X2YZ with respect to a stoichiometric composition.

公开(公告)号：US11127641B2

公开(公告)日：2021-09-21

申请号：US16311546

申请日：2018-03-19

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki ,  Tomomi Kawano ,  Minoru Sanuki

IPC: H01L29/82 ,  H01L21/8239 ,  G11C11/16 ,  G11C11/18 ,  H01F10/32 ,  H01L27/105 ,  H01L43/04 ,  H01L43/08 ,  H01L43/10

Abstract: This spin current magnetization rotational element includes a first ferromagnetic metal layer for a magnetization direction to be changed, and a spin-orbit torque wiring extending in a second direction intersecting a first direction which is an orthogonal direction to a surface of the first ferromagnetic metal layer and configured to be joined to the first ferromagnetic metal layer, wherein the spin-orbit torque wiring has a structure in which a spin conduction layer joined to the first ferromagnetic metal layer and a spin generation layer joined to the spin conduction layer on a surface on a side opposite to the first ferromagnetic metal layer are laminated.

公开(公告)号：US10937480B2

公开(公告)日：2021-03-02

申请号：US16751318

申请日：2020-01-24

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: G11C11/00 ,  G11C11/16 ,  G01R33/09 ,  H01L43/12 ,  H01L43/10 ,  H01L43/08 ,  H01L43/02

Abstract: A spin current magnetization rotational element including a first ferromagnetic metal layer in which a magnetization direction is variable, and a spin-orbit torque wiring that extends in a second direction intersecting a first direction that is a plane-orthogonal direction of the first ferromagnetic metal layer, and is joined to the first ferromagnetic metal layer. The first ferromagnetic metal layer has a lamination structure including a plurality of ferromagnetic constituent layers and a plurality of nonmagnetic constituent layers which are respectively interposed between the ferromagnetic constituent layers adjacent to each other. At least one ferromagnetic constituent layer among the plurality of ferromagnetic constituent layers has a film thickness different from a film thickness of the other ferromagnetic constituent layers, and/or at least one nonmagnetic constituent layer among the plurality of nonmagnetic constituent layers has a film thickness different from a film thickness of the other nonmagnetic constituent layers.

公开(公告)号：US10910554B2

公开(公告)日：2021-02-02

申请号：US16467157

申请日：2018-08-08

Applicant: TDK CORPORATION

Inventor： Tomoyuki Sasaki ,  Yohei Shiokawa

IPC: H01L27/22 ,  H01L43/04 ,  H01L43/06 ,  H01L43/10 ,  H01L43/14

Abstract: A spin-current magnetization rotational element includes a spin orbit torque wiring extending in a first direction and a first ferromagnetic layer disposed in a second direction intersecting the first direction of the spin orbit torque wiring, the spin orbit torque wiring having a first surface positioned on the side where the first ferromagnetic layer is disposed, and a second surface opposite to the first surface, and the spin orbit torque wiring has a second region on the first surface outside a first region in which the first ferromagnetic layer is disposed, the second region being recessed from the first region to the second surface side.

公开(公告)号：US10854258B2

公开(公告)日：2020-12-01

申请号：US16785987

申请日：2020-02-10

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: G11C11/16 ,  H01L43/04 ,  H01L43/10 ,  H01L27/22 ,  H01L29/82 ,  H01L43/08 ,  H01L27/105 ,  H01L21/8239

Abstract: Provided is a spin current magnetization rotational element including: a first ferromagnetic metal layer for a magnetization direction to be changed; and a spin-orbit torque wiring. The spin-orbit torque wiring has a structure in which a spin conduction layer and an interfacial spin generation layer are alternately laminated in the first direction, the number of a plurality of the interfacial spin generation layers is two or greater, and in the spin-orbit torque wiring, one of the plurality of interfacial spin generation layers is closest to the first ferromagnetic metal layer.

公开(公告)号：US10651366B2

公开(公告)日：2020-05-12

申请号：US16113592

申请日：2018-08-27

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: H01L29/82 ,  H01L43/02 ,  H01L43/06 ,  G11C11/18 ,  H01L43/08 ,  G11C11/16 ,  H01L27/22 ,  H01L43/10 ,  H01L43/12

Abstract: A spin flow magnetization reversal element includes a first ferromagnetic metal layer capable of changing a direction of magnetization; and a spin orbit torque wiring layer joined to the first ferromagnetic metal layer and extending in a direction intersecting a direction perpendicular to a plane of the first ferromagnetic metal layer. The spin orbit torque wiring layer includes at least one light element L among B, C, Si and P and at least one noble gas element among Ar, Kr and Xe.

公开(公告)号：US10580470B2

公开(公告)日：2020-03-03

申请号：US15956523

申请日：2018-04-18

Applicant: TDK CORPORATION

Inventor： Yohei Shiokawa ,  Tomoyuki Sasaki

IPC: G11C11/00 ,  G11C11/16 ,  G01R33/09 ,  H01L43/12 ,  H01L43/10 ,  H01L43/08 ,  H01L43/02

Abstract: A spin current magnetization rotational element including a first ferromagnetic metal layer in which a magnetization direction is variable, and a spin-orbit torque wiring that extends in a second direction intersecting a first direction that is a plane-orthogonal direction of the first ferromagnetic metal layer, and is joined to the first ferromagnetic metal layer. The first ferromagnetic metal layer has a lamination structure including a plurality of ferromagnetic constituent layers and a plurality of nonmagnetic constituent layers which are respectively interposed between the ferromagnetic constituent layers adjacent to each other. At least one ferromagnetic constituent layer among the plurality of ferromagnetic constituent layers has a film thickness different from a film thickness of the other ferromagnetic constituent layers, and/or at least one nonmagnetic constituent layer among the plurality of nonmagnetic constituent layers has a film thickness different from a film thickness of the other nonmagnetic constituent layers.