公开(公告)号：US08826735B2

公开(公告)日：2014-09-09

申请号：US13259976

申请日：2010-01-28

Applicant: Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

Inventor： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

Abstract translation: 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

公开(公告)号：US08453502B2

公开(公告)日：2013-06-04

申请号：US12924756

申请日：2010-10-05

Applicant: Daniel Christoph Meisel

Inventor： Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.

Abstract translation: 微机械摆动速率传感器包括具有主平面延伸的基板和两个科里奥利元件。 第一科里奥利元件可以沿着平行于延伸主平面的第二方向被驱动到第一振动。 第二科里奥利元件可被驱动到与第一振动反平行的第二振动。 可以检测第一科里奥利元件的第一偏转和第二科里奥利元件的第二偏转，在每种情况下沿着平行于延伸的主平面并垂直于第二方向的第一方向。 微机械传感器还具有间接或直接耦合到第一科里奥利元件和第二科里奥利元件的摇臂元件，该摇臂元件具有基本上平行于第二方向的扭转轴。

公开(公告)号：US20110219877A1

公开(公告)日：2011-09-15

申请号：US13057045

申请日：2009-08-03

Applicant: Daniel Christoph Meisel

Inventor： Daniel Christoph Meisel

IPC: G01P15/125

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B2201/0235

Abstract: A micromechanical sensor having at least one movably mounted measuring element which is opposite at least one stationary electrode, the electrode being situated in a first plane, and being contacted by at least one printed conductor track which is situated in a second plane. A third plane is located between the first plane and the second plane, the third plane including an electrically conductive material.

Abstract translation: 一种微机械传感器，其具有至少一个可移动地安装的测量元件，其与至少一个固定电极相对，所述电极位于第一平面中，并且被位于第二平面中的至少一个印刷导体轨道接触。 第三平面位于第一平面和第二平面之间，第三平面包括导电材料。

公开(公告)号：US20110186944A1

公开(公告)日：2011-08-04

申请号：US13055298

申请日：2009-06-15

Applicant: Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

Inventor： Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

IPC: H01L29/84 ,  H01L21/02

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  H02N1/008

Abstract: A micromechanical structure, includes at least two structure sections configured to bound a working gap, the at least two structure sections being movable relative to one another, and a working gap width setting device configured to broaden the at least one working gap by movement of a first structure section of the at least two structure sections relative to a second structure section of the at least two structure section, the first structure section is stationary relative to a reference point during operation of the micromechanical structure and (ii) the second structure section is movable relative to the reference point during operation.

Abstract translation: 微机械结构包括至少两个构造成结合工作间隙的结构部分，所述至少两个结构部分可相对于彼此移动;以及工作间隙宽度设定装置，其经配置以通过移动所述至少一个工作间隙 所述至少两个结构部分的第一结构部分相对于所述至少两个结构部分的第二结构部分，所述第一结构部分在所述微机械结构的操作期间相对于参考点是静止的，并且所述第二结构部分是 在运行期间相对于参考点可移动。

公开(公告)号：US20100199762A1

公开(公告)日：2010-08-12

申请号：US12452546

申请日：2008-09-26

Applicant: Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5684 ,  G01C19/5747

Abstract: A micromechanical device includes at least one drive frame and at least one vibrator, the vibrator being situated in a region surrounded by the drive frame; the vibrator being mechanically coupled to the drive frame. The drive frame is able to be excited to generate a flexural vibration.

Abstract translation: 微机械装置包括至少一个驱动框架和至少一个振动器，所述振动器位于由所述驱动框架包围的区域中; 振动器机械地联接到驱动框架。 驱动框架能够被激发以产生弯曲振动。