PROJECTION OPTICAL SYSTEM
    41.
    发明申请
    PROJECTION OPTICAL SYSTEM 有权
    投影光学系统

    公开(公告)号:US20070297047A1

    公开(公告)日:2007-12-27

    申请号:US11751139

    申请日:2007-05-21

    IPC分类号: G02B17/08

    摘要: At least one exemplary embodiment is directed to a projection optical system that projects an image of a pattern of a first object onto a second object includes a first image forming optical system, a second image forming optical system, and a light-shielding member. The first image forming optical system forms an intermediate image of the pattern, and includes a concave mirror and a reflecting mirror. The concave mirror has a reflecting surface opposing the second object. The reflecting mirror directs light from the first object to the concave mirror. The second image forming optical system forms an image of the intermediate image onto the second object, and includes a lens. The light-shielding member is disposed between the concave mirror and the lens.

    摘要翻译: 至少一个示例性实施例涉及将第一物体的图案的图像投影到第二物体上的投影光学系统,包括第一成像光学系统,第二成像光学系统和遮光构件。 第一成像光学系统形成图案的中间图像,并且包括凹面镜和反射镜。 凹面镜具有与第二物体相对的反射面。 反射镜将来自第一物体的光引导到凹面镜。 第二成像光学系统将中间图像的图像形成到第二物体上,并且包括透镜。 遮光构件设置在凹面镜和透镜之间。

    Catadioptric projection optical system and exposure apparatus having the same
    42.
    发明授权
    Catadioptric projection optical system and exposure apparatus having the same 失效
    反射折射投影光学系统和具有其的曝光装置

    公开(公告)号:US07253971B2

    公开(公告)日:2007-08-07

    申请号:US11255371

    申请日:2005-10-20

    IPC分类号: G02B17/08

    摘要: A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.

    摘要翻译: 一种反射折射投影光学系统,用于形成第一物体的多个中间图像并将第一物体的图像成像到第二物体上,所述反射折射投影光学系统包括至少一个凹面镜,第一偏转反射器和第二偏转反射器 其中由所述第一偏转反射器反射的光直接被引导到所述第二偏转反射器。

    Lateral a-substituted acrylate compound and polymer thereof
    43.
    发明申请
    Lateral a-substituted acrylate compound and polymer thereof 有权
    侧面α-取代的丙烯酸酯化合物及其聚合物

    公开(公告)号:US20070134447A1

    公开(公告)日:2007-06-14

    申请号:US11634927

    申请日:2006-12-07

    申请人: Takashi Kato

    发明人: Takashi Kato

    摘要: The invention relates to compounds represented by Formula (1): wherein Ra is alkyl or the like; Rb is fluorine or —CF3; A is 1,4-cyclohexylene, 1,4-phenylene or the like; Z is a single bond, alkylene or the like; Y is a single bond, alkylene or the like; and m and n are an integer of approximately 0 to approximately 5.

    摘要翻译: 本发明涉及由式(1)表示的化合物:其中R a是烷基等; R b是氟或-CF 3 N; A是1,4-亚环己基,1,4-亚苯基等; Z是单键,亚烷基等; Y是单键,亚烷基等; m和n为大约0至大约5的整数。

    Error correction signal generating device and orthogonal modulator equipped with the error correction signal generating device
    44.
    发明申请
    Error correction signal generating device and orthogonal modulator equipped with the error correction signal generating device 失效
    纠错信号发生装置和配有纠错信号发生装置的正交调制器

    公开(公告)号:US20070030922A1

    公开(公告)日:2007-02-08

    申请号:US10571529

    申请日:2004-09-09

    申请人: Takashi Kato

    发明人: Takashi Kato

    IPC分类号: H04L27/20

    CPC分类号: H04L27/364

    摘要: An offset errors of a quadrature modulator is corrected. A device including a first correction signal output unit (50) for outputting a first correction signal based upon a local signal (phase: 0°) from a 180°-phase amplifier (27) or a phase shift local signal (phase: 180°) from a 180°-phase amplifier (23), a second correction signal output unit (60) for outputting a second correction signal based upon an orthogonal local signal (phase: 90°) from a 180°-phase amplifier (37) or an orthogonal phase shift local signal (phase: 270°) from a 180°-phase amplifier (33), and a correction signal output unit (70) for outputting a correction signal based upon the first and second correction signals, wherein a correction signal is further added to outputs from an I signal mixer (42) and a Q signal mixer (44) by an adder (46) resulting in correcting offset errors of the quadrature modulation.

    摘要翻译: 校正正交调制器的偏移误差。 一种装置,包括第一校正信号输出单元(50),用于基于来自180°相位放大器(27)的本地信号(相位:0°)或相移本地信号(相位:180°)输出第一校正信号 ),用于基于来自180°相位放大器(37)的正交本地信号(相位:90°)输出第二校正信号的第二校正信号输出单元(60),或者 来自180°相位放大器(33)的正交相移本地信号(相位:270°)和用于基于第一和第二校正信号输出校正信号的校正信号输出单元(70),其中校正信号 进一步通过加法器(46)从I信号混合器(42)和Q信号混合器(44)输出,导致校正正交调制的偏移误差。

    Magneto-optical device
    45.
    发明申请
    Magneto-optical device 有权
    磁光装置

    公开(公告)号:US20070002425A1

    公开(公告)日:2007-01-04

    申请号:US10569097

    申请日:2004-08-26

    IPC分类号: G02F1/09

    CPC分类号: G02F1/09 G02F1/093

    摘要: It is possible to reduce the size of a magneto-optical device, increase the speed of optical control, simplify power supply structure and its control, and maintain a Faraday rotation angle in an arbitrary state even after shut-off of the excitation current. The magneto-optical device includes a magnetic yoke (10) made of a high-permeability magnetic material, the magnetic yoke including a tabular portion (16) and four pillar portions (18) protruding from one side of the tabular portion (16), a coil (12) wound on each of the pillar portions, and a magneto-optical element (14) arranged in an open-magnetic-circuit region surrounded by the end portions of the four pillar portions. A magnetic field obtained by a coil is applied to the magneto-optical element.

    摘要翻译: 即使关闭励磁电流,也可以减小磁光装置的尺寸,提高光控制的速度,简化电源结构及其控制,并将法拉第旋转角保持在任意状态。 磁光装置包括由高磁导率磁性材料制成的磁轭(10),磁轭包括平板状部分(16)和从平板状部分(16)的一侧突出的四个柱部分(18) 卷绕在每个柱部上的线圈(12)和布置在由四个柱部分的端部包围的开放磁路区域中的磁光元件(14)。 通过线圈获得的磁场被施加到磁光元件。

    Projection optical system, exposure apparatus, and device manufacturing method
    47.
    发明授权
    Projection optical system, exposure apparatus, and device manufacturing method 失效
    投影光学系统,曝光装置和装置制造方法

    公开(公告)号:US07053986B2

    公开(公告)日:2006-05-30

    申请号:US11267858

    申请日:2005-11-03

    IPC分类号: G03B27/54 G03B27/42

    摘要: A projection optical system projects an image of a first object onto a second object. A first imaging optical system forms a first intermediate image of the first object, and is a refractive optical system. A second imaging optical system forms a second intermediate image of the first object, and includes two mirrors, one of the two being concave. A third imaging optical system forms an image of the first object onto the second object, and includes a lens. The first, second and third imaging optical systems are arranged along an optical path from the first object in this order. The system satisfies the expression 0.80

    摘要翻译: 投影光学系统将第一物体的图像投射到第二物体上。 第一成像光学系统形成第一物体的第一中间图像,并且是折射光学系统。 第二成像光学系统形成第一物体的第二中间图像,并且包括两个反射镜,两个反射镜之一是凹形的。 第三成像光学系统在第二物体上形成第一物体的图像,并且包括透镜。 第一,第二和第三成像光学系统沿着从第一物体的光路依次排列。 该系统满足表达式0.80 <|β1beta2<2.0,其中β1和β2分别是第一和第二成像光学系统的近轴放大率。 第一成像光学系统和凹面镜具有共同的直线光轴。

    Catadioptric projection optical system and exposure apparatus having the same
    48.
    发明申请
    Catadioptric projection optical system and exposure apparatus having the same 失效
    反射折射投影光学系统和具有其的曝光装置

    公开(公告)号:US20060082904A1

    公开(公告)日:2006-04-20

    申请号:US11255371

    申请日:2005-10-20

    IPC分类号: G02B17/00

    摘要: A catadioptric projection optical system for forming plural intermediate images of a first object and for imaging the image of the first object onto a second object, said catadioptric projection optical system includes at least one concave mirror, a first deflective reflector, and a second deflective reflector, wherein a light reflected by the first deflective reflector is directly led to the second deflective reflector.

    摘要翻译: 一种反射折射投影光学系统,用于形成第一物体的多个中间图像并将第一物体的图像成像到第二物体上,所述反射折射投影光学系统包括至少一个凹面镜,第一偏转反射器和第二偏转反射器 其中由所述第一偏转反射器反射的光直接被引导到所述第二偏转反射器。

    Projection optical system, exposure apparatus, and device manufacturing method
    49.
    发明申请
    Projection optical system, exposure apparatus, and device manufacturing method 失效
    投影光学系统,曝光装置和装置制造方法

    公开(公告)号:US20060055907A1

    公开(公告)日:2006-03-16

    申请号:US11267858

    申请日:2005-11-03

    IPC分类号: G03B27/54

    摘要: A projection optical system for projecting an image of a first object onto a second object includes a first imaging optical system that forms a first intermediate image of the first object, and includes a lens, a second imaging optical system that forms a second intermediate image of the first object, and includes a lens and a concave mirror, and a third imaging optical system that forms an image of the first object onto the second object, and includes a lens, wherein the first, second and third imaging optical systems are arranged along an optical path from the first object in this order, and 0.7

    摘要翻译: 一种用于将第一物体的图像投影到第二物体上的投影光学系统包括形成第一物体的第一中间图像的第一成像光学系统,并且包括透镜,第二成像光学系统,其形成第二物镜的第二中间图像 第一物体,并且包括透镜和凹面镜,以及第三成像光学系统,其在第二物体上形成第一物体的图像,并且包括透镜,其中第一,第二和第三成像光学系统沿着 第一成像光学系统的近轴放大倍数为β1,第二成像光学系统的近轴倍率为β2,满足0.7 <| lbeta1beta2 | <3.0的光路。

    Optical unit, image taking apparatus and optical finder
    50.
    发明申请
    Optical unit, image taking apparatus and optical finder 有权
    光学单元,摄像设备和光学取景器

    公开(公告)号:US20060050412A1

    公开(公告)日:2006-03-09

    申请号:US11214756

    申请日:2005-08-31

    IPC分类号: G02B13/02

    CPC分类号: G02B15/00 G02F1/167 G02F1/29

    摘要: An optical unit capable of freely changing the refractive power and operating with a reduced deterioration in performance, an image taking apparatus having an image taking lens using the optical unit, and an optical finder using the optical unit. The optical unit includes a lens body having an electromagnetic field generator which changes the focal length of the lens body by moving, by an electromagnetic force, a dispersoid which is dispersed in a light-transmissive dispersion medium enclosed in a container, which is light-transmissive, and which has a refractive index different from the refractive index of the dispersion medium. The optical unit also includes a focal length changing section which changes the focal length of the lens body in three steps by controlling an electromagnetic field generated by the electromagnetic field generator.

    摘要翻译: 一种光学单元,其能够自由地改变屈光度并且降低性能的降低,具有使用该光学单元的摄像镜头的摄像装置以及使用该光学单元的光学取景器。 光学单元包括具有电磁场发生器的透镜体,其通过电磁力移动分散在包围在容器中的透光分散介质中的分散体来改变透镜体的焦距, 透射性,折射率不同于分散介质的折射率。 光学单元还包括焦距改变部分,其通过控制由电磁场发生器产生的电磁场,三个步骤改变透镜体的焦距。