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    Optimization and matching of optical systems by use of orientation Zernike polynomials
    41.
    发明授权
    Optimization and matching of optical systems by use of orientation Zernike polynomials 有权
    通过使用方位泽尔尼克多项式优化和匹配光学系统

    公开(公告)号：US08126669B2

    公开(公告)日：2012-02-28

    申请号：US12421996

    申请日：2009-04-10

    申请人： Michael Totzeck ,  Daniel Kraehmer ,  Ralf Mueller ,  Johannes Ruoff ,  Vladan Blahnik

    发明人： Michael Totzeck ,  Daniel Kraehmer ,  Ralf Mueller ,  Johannes Ruoff ,  Vladan Blahnik

    IPC分类号： G01D18/00 ,  G01B9/00

    CPC分类号： G01M11/0257

    摘要： The present disclosure relates to specification, optimization and matching of optical systems by use of orientation Zernike polynomials. In some embodiments, a method for assessing the suitability of an optical system of a microlithographic projection exposure apparatus is provided. The method can include determining a Jones pupil of the optical system, at least approximately describing the Jones pupil using an expansion into orientation Zernike polynomials, and assessing the suitability of the optical system on the basis of the expansion coefficient of at least one of the orientation Zernike polynomials in the expansion.

    摘要翻译： 本公开涉及通过使用取向泽尔尼克多项式的光学系统的规范，优化和匹配。 在一些实施例中，提供了一种用于评估微光刻投影曝光设备的光学系统的适用性的方法。 该方法可以包括确定光学系统的琼斯光瞳，至少近似地使用扩展到定向泽尔尼克多项式来描述琼斯光瞳，并且基于至少一个取向的膨胀系数来评估光学系统的适用性 Zernike多项式在扩展中。

    Quantity conversion interface for external program calls
    43.
    发明授权
    Quantity conversion interface for external program calls 有权
    用于外部程序调用的数量转换界面

    公开(公告)号：US07962576B2

    公开(公告)日：2011-06-14

    申请号：US10896037

    申请日：2004-07-22

    申请人： Guenter Spens ,  Ralf Mueller ,  Markus Seng

    发明人： Guenter Spens ,  Ralf Mueller ,  Markus Seng

    IPC分类号： G06F15/16

    CPC分类号： H04L67/2823 ,  G06Q10/0875 ,  G06Q40/12 ,  H04L67/125 ,  H04L67/2852

    摘要： The application is directed to methods, systems, procedures, networks and storage apparatus used to conduct conversions of data using remote conversion servers. In one embodiment of the present invention, recent query results may be stored and then used to solve subsequent conversions rather than querying a remote conversion server when the same conversion was previously completed. A counter may be referenced to determine if too much time has passed since the original query was stored in the buffer and, if too much time has passed, the buffer may be cleared and the remote conversion server may be queried to convert the pending data. The resulting conversion may be stored for subsequent use.

    摘要翻译： 该应用针对的是用于使用远程转换服务器进行数据转换的方法，系统，过程，网络和存储设备。 在本发明的一个实施例中，可以存储最近的查询结果，然后用于解决后续转换，而不是在先前完成相同转换时查询远程转换服务器。 可以引用一个计数器来确定自从原来的查询是否存储在缓冲区中是否有太多的时间已经过去了，如果经过太多时间，缓冲区可能被清除，并且可以查询远程转换服务器来转换挂起的数据。 所得到的转换可以存储以供后续使用。

    POLARIZATION-MODULATING OPTICAL ELEMENT AND METHOD FOR MANUFACTURING THEREOF
    44.
    发明申请
    POLARIZATION-MODULATING OPTICAL ELEMENT AND METHOD FOR MANUFACTURING THEREOF 有权
    极化调制光学元件及其制造方法

    公开(公告)号：US20110109894A1

    公开(公告)日：2011-05-12

    申请号：US13008282

    申请日：2011-01-18

    申请人： Daniel Kraehmer ,  Ralf Mueller

    发明人： Daniel Kraehmer ,  Ralf Mueller

    IPC分类号： G03F7/20 ,  G02B5/30 ,  G03B27/72

    CPC分类号： G03F7/70966 ,  G02B5/3083 ,  G03F7/70566 ,  Y10S359/90 ,  Y10T29/49908

    摘要： The disclosure relates to a method of manufacturing a polarization-modulating optical element, wherein the element causes, for light passing through the element and due to stress-induced birefringence, a distribution of retardation between orthogonal states of polarization, the method comprising joining a first component and a second component, wherein a non-plane surface of the first component being provided with a defined height profile is joined with a plane surface of the second component, whereby a mechanical stress causing the stress-induced birefringence is produced in the such formed polarization-modulating optical element.

    摘要翻译： 本发明涉及一种制造偏振调制光学元件的方法，其中，对于通过元件的光并由于应力引起的双折射，元件引起正交偏振态之间的延迟分布，该方法包括将第一 组件和第二部件，其中设置有限定高度轮廓的第一部件的非平面表面与第二部件的平面连接，从而在这种形成的部件中产生引起应力引起的双折射的机械应力 偏振调制光学元件。

    Inclination sensor with optoelectronic level
    46.
    发明授权
    Inclination sensor with optoelectronic level 有权
    倾角传感器具有光电位

    公开(公告)号：US07818891B2

    公开(公告)日：2010-10-26

    申请号：US12473886

    申请日：2009-05-28

    申请人： Dieter Roemhild ,  Gerd Freydank ,  Herbert Rink ,  Olaf Brodersen ,  Ralf Mueller

    发明人： Dieter Roemhild ,  Gerd Freydank ,  Herbert Rink ,  Olaf Brodersen ,  Ralf Mueller

    IPC分类号： G01C9/06

    CPC分类号： G01C9/06 ,  G01C9/24 ,  G01C2009/066

    摘要： An inclination sensor is provided having a level that has a liquid and a gas bubble under a covering glass in a housing. A light source is arranged above the covering glass. The inclination sensor can be used to determine a direction and degree of an inclination with high accuracy and which is suitable for automatically aligning an apparatus provided with the inclination sensor. An arrangement is provided that has at least two light receivers arranged above the covering glass such that the light that is emitted from the light source and, in the case of a centered gas bubble, is scattered on the surface of the covering glass coming in contact with the gas bubble can be detected by the at least two light receivers. Different quantities of light can be detected by the light receivers when the gas bubble is not centered, and the light source and the light receivers are arranged on a chip substrate.

    摘要翻译： 提供了一种倾斜传感器，其具有在壳体内具有覆盖玻璃下方的液体和气泡的水平面。 光源设在覆盖玻璃上方。 倾斜传感器可以用于以高精度确定倾斜的方向和程度，并且适合于自动对准具有倾斜传感器的装置。 提供一种布置，其具有布置在覆盖玻璃上方的至少两个光接收器，使得从光源发射的光和在中心气泡的情况下散射在接触的覆盖玻璃的表面上 气泡可由至少两个光接收器检测。 当气泡不居中时，光接收器可以检测不同数量的光，并且光源和光接收器布置在芯片衬底上。

    Controlled Lighting System and Use of Such a System
    48.
    发明申请
    Controlled Lighting System and Use of Such a System 审中-公开
    控制照明系统和这种系统的使用

    公开(公告)号：US20100066641A1

    公开(公告)日：2010-03-18

    申请号：US12227370

    申请日：2007-04-17

    申请人： Christoph Kronhagel ,  Ralf Mueller

    发明人： Christoph Kronhagel ,  Ralf Mueller

    IPC分类号： G09G5/00 ,  G06F17/30

    CPC分类号： G09F27/00 ,  G06Q30/02 ,  G09F19/22 ,  G09F19/226

    摘要： Programming illuminated displays in open spaces poses special challenges to the operator. The invention proposes a controlled lighting system and the use of such a system. An exemplary program is generated, which is highly variable, and hence can be approved for open spaces.

    摘要翻译： 在开放空间编程照明显示器对操作员构成特殊挑战。 本发明提出了受控照明系统和这种系统的使用。 生成一个高度可变的示例性程序，因此可以被批准用于开放空间。