Integrated optical modulator and method for manufacturing the same
    41.
    发明授权
    Integrated optical modulator and method for manufacturing the same 有权
    集成光调制器及其制造方法

    公开(公告)号:US07440642B2

    公开(公告)日:2008-10-21

    申请号:US11304031

    申请日:2005-12-15

    CPC分类号: G02F1/3558 G02F1/2255

    摘要: An integrated optical modulator and method for manufacturing thereof are disclosed. The integrated optical modulator comprises a carrier wave band modulator using a double sideband modulation method and an intermediate frequency band modulator using a single sideband modulation method. The carrier wave band modulator and the intermediate frequency band modulator are connected in series. A method for manufacturing an integrated optical modulator comprises preparing a substrate having at least one polarization reversed section, forming a first optical waveguide part and a second optical waveguide part on the substrate, forming a buffer layer over the first and second optical waveguide parts, forming sequentially a first electrode part and a second electrode part over the first optical waveguide part, and forming a third electrode part over the second optical waveguide part.

    摘要翻译: 公开了一种集成光调制器及其制造方法。 集成光调制器包括使用双边带调制方法的载波频带调制器和使用单边带调制方法的中频带调制器。 载波调制器和中频带调制器串联连接。 一种集成光调制器的制造方法,其特征在于,准备具有至少一个极化反转部的基板,在所述基板上形成第一光波导部和第二光波导部,在所述第一和第二光波导部上形成缓冲层, 依次在第一光波导部分上方的第一电极部分和第二电极部分,并且在第二光波导部分上形成第三电极部分。

    Fabrication Method for Quasi-Phase-Matched Waveguides
    42.
    发明申请
    Fabrication Method for Quasi-Phase-Matched Waveguides 有权
    准相位匹配波导的制作方法

    公开(公告)号:US20080087632A1

    公开(公告)日:2008-04-17

    申请号:US11861447

    申请日:2007-09-26

    IPC分类号: B29D11/00

    CPC分类号: G02F1/3558

    摘要: The present invention relates to a fabrication method for a quasi-phase-matched waveguide. The method includes the steps of forming a metal etch mask on a ferroelectric single crystal substrate, etching the substrate by using the etch mask, removing the etch mask, forming conductive layers on the etched substrate, forming polarization regions by applying an electric field to the conductive layers, and flattening the substrate after removing the conductive layers. Accordingly, the present invention is advantageous in that it can be applied to various fields employing a ferroelectric substrate, such as LiNbO3, LiTaO3, Mg:LiNbO3 or Zn:LiNbO3, it can obtain more accurate and uniform periodic domain inversion devices with a high quality and can fabricate devices that are cheaper and have a better performance.

    摘要翻译: 本发明涉及准相位匹配波导的制造方法。 该方法包括以下步骤:在铁电单晶衬底上形成金属蚀刻掩模,通过使用蚀刻掩模蚀刻衬底,去除蚀刻掩模,在蚀刻的衬底上形成导电层,通过施加电场来形成极化区域 导电层,并且在去除导电层之后使基板平坦化。 因此,本发明的优点在于它可以应用于使用铁电衬底的各种领域,例如LiNbO 3,LiTaO 3,Mg:LiNbO 3 或Zn:LiNbO 3 3,可以获得更精确和更均匀的具有高质量的周期性畴反转装置,并且可以制造便宜且具有更好性能的装置。

    Symmetric optical modulator with low driving voltage
    43.
    发明授权
    Symmetric optical modulator with low driving voltage 有权
    具有低驱动电压的对称光调制器

    公开(公告)号:US07167607B2

    公开(公告)日:2007-01-23

    申请号:US11183636

    申请日:2005-07-18

    CPC分类号: G02F1/0356 G02F1/2255

    摘要: A symmetric optical modulator with low driving voltage, wherein polarization of any one of branched waveguides formed on a substrate is inverted, and the two branched waveguides are simultaneously controlled by a center electrode formed on a top portion thereof, thereby ensuring a low voltage driving and embodying a characteristic of there being no signal distortion due to chirp.

    摘要翻译: 具有低驱动电压的对称光调制器,其中形成在基板上的分支波导中的任何一个的极化反转,并且两个分支波导同时由形成在其顶部的中心电极控制,从而确保低电压驱动和 体现了由于啁啾而没有信号失真的特征。

    Security monitoring system using beamforming acoustic imaging and method using the same
    46.
    发明授权
    Security monitoring system using beamforming acoustic imaging and method using the same 有权
    使用波束成形声学成像的安全监控系统及其使用方法

    公开(公告)号:US09103908B2

    公开(公告)日:2015-08-11

    申请号:US13289392

    申请日:2011-11-04

    摘要: Disclosed is a security monitoring method determining whether a trespasser is detected and a position of the trespasser in a set security space and monitoring sound generated at the position of the trespasser by using an acoustic image generated from acoustic signals generated by an acoustic generating device and an acoustic measuring device in an array type. An exemplary embodiment of the present disclosure provides a security monitoring system including: an acoustic generating device that generates acoustic signals; a plurality of acoustic measuring devices that receive the acoustic signals; and an acoustic image processing device that generates an acoustic image using a beamforming algorithm from the acoustic signals received in the plurality of acoustic measuring devices and determines a position of a trespasser by comparing the acoustic image after the trespasser is detected with the acoustic image before the trespasser is detected.

    摘要翻译: 公开了一种安全监控方法,其通过使用由声发生装置产生的声信号产生的声像来确定是否检测到侵入者以及在设定的安全空间中的侵入者的位置以及在侵入者的位置处产生的监听声音, 阵列式声学测量装置。 本公开的示例性实施例提供了一种安全监控系统,包括:产生声信号的声产生装置; 多个声学测量装置,其接收声学信号; 以及声学图像处理装置,其使用来自在所述多个声学测量装置中接收的声学信号的波束形成算法生成声学图像,并且通过将侵入侵入者之后的声学图像与所述声学图像进行比较来确定侵入者的位置, 检测到侵入者。

    Acoustic sensor and fabrication method thereof
    47.
    发明授权
    Acoustic sensor and fabrication method thereof 有权
    声传感器及其制造方法

    公开(公告)号:US09066184B2

    公开(公告)日:2015-06-23

    申请号:US13557108

    申请日:2012-07-24

    IPC分类号: H04R31/00 H04R19/00 H04R19/04

    摘要: A method for fabricating an acoustic sensor according to an exemplary embodiment of the present disclosure includes: forming an acoustic sensor unit by forming a lower electrode on an upper portion of a substrate, forming etching holes on the lower electrode, forming a sacrifice layer on an upper portion of the lower electrode, and coupling a diaphragm to an upper portion of the sacrifice layer; coupling a lower portion of the substrate of the acoustic sensor unit to a printed circuit board on which a sound pressure input hole is formed so as to expose the lower portion of the substrate of the acoustic sensor unit to the outside through the sound pressure input hole; attaching a cover covering the acoustic sensor unit on the printed circuit board; etching the substrate of the acoustic sensor unit to form an acoustic chamber; and removing the sacrifice layer.

    摘要翻译: 根据本公开的示例性实施例的用于制造声学传感器的方法包括:通过在基板的上部形成下电极来形成声传感器单元,在下电极上形成蚀刻孔,在其上形成牺牲层 下部电极的上部,并且将隔膜连接到牺牲层的上部; 将声学传感器单元的基板的下部耦合到其上形成有声压输入孔的印刷电路板,以便通过声压输入孔将声学传感器单元的基板的下部暴露于外部 ; 将覆盖所述声学传感器单元的盖附着在所述印刷电路板上; 蚀刻声学传感器单元的基板以形成声学室; 并去除牺牲层。

    Acoustic sensor
    48.
    发明授权
    Acoustic sensor 有权
    声传感器

    公开(公告)号:US08415717B2

    公开(公告)日:2013-04-09

    申请号:US13012489

    申请日:2011-01-24

    IPC分类号: H01L29/84

    摘要: Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.

    摘要翻译: 提供了一种声学传感器。 声学传感器包括:基底,其包括侧壁部分和从侧壁部分的底部延伸的底部部分; 固定在所述基板上的下部电极,具有凹部和凸部,所述凹部包括在所述底部的中间区域的第一孔,所述凸部包括在所述底部的边缘区域上的第二孔; 隔膜面向下电极的凹部,其间具有振动空间; 隔膜支撑体设置在隔膜侧面的下电极上,具有与隔膜相同高度的顶表面; 以及设置在下部电极下方的底部和侧壁部之间的空间中的声学室。

    MEMS ELECTROCHEMICAL GAS SENSOR
    49.
    发明申请
    MEMS ELECTROCHEMICAL GAS SENSOR 有权
    MEMS电化学气体传感器

    公开(公告)号:US20130075255A1

    公开(公告)日:2013-03-28

    申请号:US13620546

    申请日:2012-09-14

    IPC分类号: G01N27/407

    CPC分类号: G01N27/18 G01N33/004

    摘要: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

    摘要翻译: 公开了一种使用微机电系统(MEMS)的电化学气体传感器。 MEMS电化学气体传感器包括:其下部中心区域被预定厚度蚀刻的衬底; 形成在所述基板上的第一绝缘膜; 形成在第一绝缘膜上的发热电阻体; 形成在所述发热电阻体上的第二绝缘膜; 参考电极,其形成在所述第二绝缘膜的上中央区域中; 形成在参比电极上的固体电解质; 和形成在固体电解质上的检测电极。

    Fabrication method for quasi-phase-matched waveguides
    50.
    发明授权
    Fabrication method for quasi-phase-matched waveguides 有权
    准相位匹配波导的制作方法

    公开(公告)号:US07864409B2

    公开(公告)日:2011-01-04

    申请号:US11861447

    申请日:2007-09-26

    IPC分类号: G02F1/35 G02F2/02

    CPC分类号: G02F1/3558

    摘要: The present invention relates to a fabrication method for a quasi-phase-matched waveguide. The method includes the steps of forming a metal etch mask on a ferroelectric single crystal substrate, etching the substrate by using the etch mask, removing the etch mask, forming conductive layers on the etched substrate, forming polarization regions by applying an electric field to the conductive layers, and flattening the substrate after removing the conductive layers. Accordingly, the present invention is advantageous in that it can be applied to various fields employing a ferroelectric substrate, such as LiNbO3, LiTaO3, Mg:LiNbO3 or Zn:LiNbO3, it can obtain more accurate and uniform periodic domain inversion devices with a high quality and can fabricate devices that are cheaper and have a better performance.

    摘要翻译: 本发明涉及准相位匹配波导的制造方法。 该方法包括以下步骤:在铁电单晶衬底上形成金属蚀刻掩模,通过使用蚀刻掩模蚀刻衬底,去除蚀刻掩模,在蚀刻的衬底上形成导电层,通过施加电场来形成极化区域 导电层,并且在去除导电层之后使基板平坦化。 因此,本发明的优点在于可以应用于LiNbO 3,LiTaO 3,Mg:LiNbO 3,Zn:LiNbO 3等铁电性基板的各种领域,可以获得更高精度,更均匀的周期性畴反转装置 并且可以制造便宜且性能更好的设备。