公开(公告)号：US20050173413A1

公开(公告)日：2005-08-11

申请号：US11024245

申请日：2004-12-28

申请人： Yoshinobu Goto

发明人： Yoshinobu Goto

IPC分类号： H05B3/20 ,  H01L21/00 ,  H05B3/10 ,  H05B3/12 ,  H05B3/14 ,  H05B3/74 ,  H05B3/44

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： An object of the present invention is to provide a heater having an insulating substrate and a heating resistance so that the temperature on the heating face can be easily controlled without the necessity of providing a temperature controlling member separate from the insulating substrate. The heater 1 comprises a substrate 2 comprising an insulating material and a heating resistance 3 provided in the substrate 2. The heating resistance 3 comprises parallel-connected portions 6A to 6J each comprising a plurality of heat generating parts 6a, 6b and 6c connected in parallel. For example, at least one of the heat generating portions 6a, 6b and 6c has a resistance adjusting means 8A, 8B or 8C.

摘要翻译： 本发明的目的是提供一种具有绝缘基板和耐热性的加热器，使得可以容易地控制加热面上的温度，而不需要设置与绝缘基板分离的温度控制部件。 加热器1包括基板2，其包括设置在基板2中的绝缘材料和加热电阻3.加热电阻3包括平行连接部分6A-6J，每个部分包括多个发热部分6a，6b和 6 c并联连接。 例如，发热部分6a，6b和6c中的至少一个具有电阻调节装置8A，8B或8C。

公开(公告)号：US08336891B2

公开(公告)日：2012-12-25

申请号：US12400830

申请日：2009-03-10

申请人： Yoshinobu Goto

发明人： Yoshinobu Goto

IPC分类号： B23B31/28 ,  H01L21/683

CPC分类号： H01L21/6831 ,  Y10T279/23

摘要： An electrostatic chuck includes (a) a cooling device serving as an RF electrode, including a gas supply port penetrating through the cooling device, the gas supply port extending from one main surface to the other main surface, and a main counter bore portion having a diameter larger than that of the gas supply port, the main counter bore portion provided in an opening of the gas supply port; (b) an arc prevention member buried in the main counter bore portion and made of an insulating member, wherein a gas path is provided, the gas path is configured to communicate with the gas supply port; and (c) an electrostatic chuck body arranged on the cooling device, defining a work mounting surface on a top surface of the electrostatic chuck body, provided with a pore in communication with the gas supply port via the gas path.

摘要翻译： 静电卡盘包括：（a）用作RF电极的冷却装置，包括穿过冷却装置的气体供给口，从一个主表面延伸到另一主表面的气体供给口，以及具有 直径大于气体供给口的直径，设置在气体供给口的开口内的主计数孔部分; （b）防弧构件，其埋设在所述主底孔部中并由绝缘构件制成，其中设置有气体路径，所述气体路径构造成与所述气体供给口连通; 以及（c）设置在冷却装置上的静电卡盘体​​，其在静电卡盘主体的上表面上形成工件安装表面，该静电卡盘体​​具有经由气体路径与气体供给口连通的孔。

公开(公告)号：US07274006B2

公开(公告)日：2007-09-25

申请号：US11498378

申请日：2006-08-03

申请人： Hisakazu Okajima ,  Yoshinobu Goto

发明人： Hisakazu Okajima ,  Yoshinobu Goto

IPC分类号： H05B3/68 ,  C23C16/00

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A heater includes a heating member formed in a plate shape that includes a substrate-heating surface on which a substrate is mounted and a heating member rear surface which is on the opposite side of the substrate-heating surfaces. The heater also has a resistance heating element embedded therein. An auxiliary member is placed on the side of the heating member rear surface of the heating member and has an opposing surface which opposes the heating member rear surface. A planar gas path for gas ejected on the substrate-heating surface is formed between the heating member rear surface and the opposing surface.

摘要翻译： 加热器包括形成为板状的加热构件，该加热构件包括其上安装有基板的基板加热面和位于基板加热面相反一侧的加热构件背面。 加热器还具有嵌入其中的电阻加热元件。 辅助构件放置在加热构件的加热构件背面的一侧，并且具有与加热构件后表面相对的相对表面。 在加热构件后表面和相对表面之间形成用于喷射在基板加热表面上的气体的平面气体路径。

公开(公告)号：US20070215597A1

公开(公告)日：2007-09-20

申请号：US11687919

申请日：2007-03-19

申请人： Yoshinobu Goto ,  Hisakazu Okajima

发明人： Yoshinobu Goto ,  Hisakazu Okajima

IPC分类号： H05B3/68

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A heating device includes: a plate-shaped heating substrate; and a hollow rod material an end face of which is joined to one surface of the heating substrate, and the heating substrate includes a lateral surface portion and a concave surface portion in the vicinity of a joint with the hollow rod material. The lateral surface portion forms a same plane surface with an outer peripheral surface of the hollow rod material, and the concave surface portion connects to the lateral surface portion. Moreover, an edge of a joint interface of the heating substrate and the hollow rod material is located between the lateral surface portion of the heating substrate and the outer peripheral surface of the hollow rod material.

摘要翻译： 加热装置包括：板状加热基板; 以及中空棒材，其端面与所述加热基板的一个表面接合，所述加热基板在与所述中空棒材料的接合部附近具有侧面部和凹面部。 侧面部与中空棒材的外周面形成同一平面，凹面部与侧面部连接。 此外，加热基板和中空棒材料的接合界面的边缘位于加热基板的侧表面部分和中空棒材料的外周表面之间。

公开(公告)号：US20070033824A1

公开(公告)日：2007-02-15

申请号：US11498413

申请日：2006-08-03

申请人： Hisakazu Okajima ,  Yoshinobu Goto

发明人： Hisakazu Okajima ,  Yoshinobu Goto

IPC分类号： F26B17/30 ,  F26B25/18

CPC分类号： H01L21/67103 ,  H01L21/67109

摘要： A heating device includes: a base containing ceramics, in which a resistance heating body is embedded; gas flow passages formed in an inside of the base; and adjustment members which vary flow rates of gas in the gas flow passages.

摘要翻译： 一种加热装置，包括：包含陶瓷的基体，其中嵌有电阻加热体; 形成在基部内部的气流通道; 以及改变气体流动通道中的气体流量的调节构件。

公开(公告)号：US07011712B2

公开(公告)日：2006-03-14

申请号：US10395536

申请日：2003-03-24

申请人： Kazuaki Yamaguchi ,  Yoshinobu Goto

发明人： Kazuaki Yamaguchi ,  Yoshinobu Goto

IPC分类号： H01L21/00 ,  C23C16/00

CPC分类号： H01L21/68792 ,  B32B2315/02 ,  C04B37/005 ,  C04B2237/066 ,  Y10T279/23

摘要： A supporting structure is provided, including a ceramic susceptor to be heated and having a mounting face and a back face. A ceramic supporting member is joined with the back face of the susceptor. The ceramic supporting member has an outer wall surface, a joining face joined with the susceptor and an end face opposing the joining face. A curved part is formed between the outer wall surface and back face, and has a radius of curvature R in a range of 4 mm to 25 mm in the longitudinal direction of the ceramic supporting member.

摘要翻译： 提供了一种支撑结构，包括待加热的陶瓷基座，并具有安装面和背面。 陶瓷支撑构件与基座的背面接合。 陶瓷支撑构件具有外壁表面，与基座接合的接合面和与接合面相对的端面。 在外壁表面和背面之间形成弯曲部分，并且在陶瓷支撑构件的纵向上具有在4mm至25mm范围内的曲率半径R。

公开(公告)号：US20050210974A1

公开(公告)日：2005-09-29

申请号：US11059576

申请日：2005-02-16

申请人： Yutaka Unno ,  Yoshinobu Goto ,  Taiji Kiku

发明人： Yutaka Unno ,  Yoshinobu Goto ,  Taiji Kiku

IPC分类号： H05B3/06 ,  G01F1/68 ,  H01L21/00 ,  H01L21/02 ,  H01L21/205 ,  H01L21/3065 ,  H01S4/00 ,  H05B3/10 ,  H05B3/74

CPC分类号： H01L21/67103 ,  Y10T29/49002 ,  Y10T29/49083 ,  Y10T29/49085 ,  Y10T29/49087 ,  Y10T29/49096 ,  Y10T29/49098

摘要： A manufacturing method for a substrate heating device comprises forming a base plate having a substrate heating surface in which a resistance heating element is buried, forming a tubular member, joining the tubular member to the base plate, measuring temperature distribution in the substrate heating surface by supplying power to the resistance heating element, and grinding the tubular member according to a grinding condition based on a measurement result of the temperature distribution.

摘要翻译： 一种基板加热装置的制造方法，其特征在于，形成具有基板加热面的基板，所述基板加热面埋设有电阻加热元件，形成管状部件，将所述管状部件与所述基板接合，测定所述基板加热面的温度分布， 向电阻加热元件供电，并且根据温度分布的测量结果根据研磨条件研磨管状构件。

公开(公告)号：US20050173412A1

公开(公告)日：2005-08-11

申请号：US11016979

申请日：2004-12-20

申请人： Nobuyuki Kondou ,  Yoshinobu Goto

发明人： Nobuyuki Kondou ,  Yoshinobu Goto

IPC分类号： H05B3/10 ,  H01L21/00 ,  H01L21/02 ,  H01L21/324 ,  H05B3/14 ,  H05B3/74 ,  H05B3/44

CPC分类号： H01L21/67103 ,  H05B3/143

摘要： A wafer heating system 1 has a substrate portion 2a having a mounting face 2c for mounting and heating a wafer “W” and a side wall portion 2b surrounding the side edge of the wafer “W”. The height “D” of the side wall portion 2b from the mounting face 2c is not smaller than the thickness “C” of the wafer “W”.

摘要翻译： 晶片加热系统1具有：基板部分2a，其具有用于安装和加热晶片“W”的安装面2c和围绕晶片“W”的侧边缘的侧壁部分2b。 侧壁部分2b从安装面2c的高度“D”不小于晶片“W”的厚度“C”。

公开(公告)号：US06875960B2

公开(公告)日：2005-04-05

申请号：US10244986

申请日：2002-09-17

申请人： Shinji Yamaguchi ,  Yoshinobu Goto ,  Hisakazu Okajima ,  Yutaka Unno

发明人： Shinji Yamaguchi ,  Yoshinobu Goto ,  Hisakazu Okajima ,  Yutaka Unno

IPC分类号： H05B3/20 ,  H01L21/00 ,  H01L21/324 ,  H05B3/00 ,  H05B3/16 ,  H05B3/18 ,  H05B3/68

CPC分类号： H01L21/67103

摘要： A heating system 25 has a main electric heat-generating element 3 and a heating surface 4a for heating an object, auxiliary electric heat-generating elements 5A to 5D, and a main power source 1 for supplying power to the main heating element. The system 25 further has an auxiliary power source 2 for supplying power to the auxiliary heating elements, and a power source controller for controlling the power supplied to the main heating element and to the auxiliary heating elements respectively and independently. Power supplied to the main heating element 3 is controlled by the controller within a first power range and power supplied to the auxiliary heating elements is controlled by the controller within a second power range. The second power range has a width smaller than that of the first power range so as to control temperature distribution on the heating surface 4a.

摘要翻译： 加热系统25具有主电热元件3和用于加热物体的加热面4a，辅助发热元件5A至5D和用于向主加热元件供电的主电源1。 系统25还具有用于向辅助加热元件供电的辅助电源2和分别独立地控制供给主加热元件和辅助加热元件的电力的电源控制器。 供给主加热元件3的电力由控制器在第一功率范围内控制，并且供给辅助加热元件的功率由控制器在第二功率范围内控制。 第二功率范围的宽度小于第一功率范围的宽度，以便控制加热表面4a上的温度分布。

公开(公告)号：US5941302A

公开(公告)日：1999-08-24

申请号：US812710

申请日：1997-03-06

申请人： Mitsuru Hattori ,  Yoshinobu Goto

发明人： Mitsuru Hattori ,  Yoshinobu Goto

IPC分类号： B23P15/26 ,  C04B35/584 ,  C04B37/00 ,  F28F1/32 ,  F28F9/16 ,  F28F21/04 ,  F28D1/04

CPC分类号： C04B35/584 ,  C04B37/001 ,  F28F1/32 ,  F28F21/04 ,  C04B2235/6567 ,  C04B2235/658 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/62 ,  C04B2237/66 ,  C04B2237/704 ,  C04B2237/765 ,  C04B2237/82 ,  C04B2237/84 ,  Y10S165/905

摘要： A method for manufacturing a ceramic shell-and tube type heat exchanger provided with fins includes the steps of: inserting heat transfer tubes of sintered tubular ceramic into throughholes of tubular plates of unsintered plate-like ceramic each having a plurality of the throughholes for fixing the heat transfer tubes inserted thereinto; standing the heat transfer tubes vertically to a floor surface; positioning the tubular plates at both the upper and lower end portions of the heat transfer tubes; disposing between the tubular plates many fin plates of unsintered ceramic so as to pile up the fin plates in the direction of a length of the heat transfer tubes, each of the fin plates including a thin plate having a plurality of throughholes for fixing the heat transfer tubes inserted thereinto, and protrusions formed on both edge portions of the thin plate; firing the components so as to unitarily join them by the utilization of differences of firing shrinkage ratios among the heat transfer tubes, the tubular plates, and the fin plates; and removing the protrusions from the fin plates.

摘要翻译： 一种制造具有翅片的陶瓷壳管式热交换器的方法包括以下步骤：将烧结的管状陶瓷的传热管插入未烧结的板状陶瓷的管状板的通孔中，每个管状板具有多个通孔，用于固定 插入传热管; 将传热管垂直放置在地板表面上; 将管状板定位在传热管的上端和下端; 在管状板之间设置许多未烧结陶瓷的翅片板，以便在传热管的长度方向上堆积鳍板，每个鳍板包括具有多个用于固定传热的通孔的薄板 插入其中的管和形成在薄板的两个边缘部分上的突起; 通过利用传热管，管状板和翅板之间的烧成收缩率的差异来对部件进行烧结，以使其一体地接合; 并从翅片板上移除突起。