POLISHING PAD AND WAFER POLISHING METHOD
    43.
    发明公开

    公开(公告)号:US20240293915A1

    公开(公告)日:2024-09-05

    申请号:US18592822

    申请日:2024-03-01

    IPC分类号: B24D3/32 B24B5/36

    CPC分类号: B24D3/32 B24B5/36

    摘要: A polishing pad (1) is provided with higher polishing efficiency for polishing an outer circumferential edge part (3d, 3e) of a disc-shaped wafer (3). An unpolished part is less likely to occur during a polishing process with the polishing pad (1), and the polished wafer (3) is cleanable easily. In the polishing pad (1), a polishing surface is formed of a polishing body, and the polishing body includes a base material and polishing particles. The base material is composed of a binder resin and fibers and has a plurality of pores formed therein. The polishing particles are retained in the base material or in the pores and are diamond particles. The polishing pad (1) has a durometer hardness in a range from 16 to 27, a density in a range from 0.58 to 0.81 g/cm3, and an elastic modulus in a range from 21.5 to 37.5 N/mm2.

    Grindstone
    47.
    发明授权

    公开(公告)号:US10919125B2

    公开(公告)日:2021-02-16

    申请号:US16342886

    申请日:2016-10-19

    摘要: A grindstone that enables grinding, polishing, super-finish polishing by using the same grindstone, without clogging even if the grindstone is being used continuously, in which a grinding/polishing section for processing a workpiece has a honeycomb structure formed by arranging polygonal prisms with no clearance therebetween. The grindstone includes the grindstone columns consisting of abrasive grains and binder and having an axis in depth direction of grinding/polishing surface, which are disposed on intersections or wall portions of the honeycomb structure. Porous elastomer is disposed inside the honeycomb structure, thus making it possible to perform a super-finish polishing.

    Bonded abrasive articles and methods of manufacture

    公开(公告)号:US10350732B2

    公开(公告)日:2019-07-16

    申请号:US15525457

    申请日:2015-11-13

    发明人: Mark A. Lukowski

    摘要: Methods for manufacturing bonded abrasive articles, for example vitrified bonded grinding wheels. A bondable abrasive composition is prepared including abrasive particles, a binder medium and a gamma-pyrone pore inducing material, such as ethyl maltol. A precursor abrasive structure is formed from the composition. The gamma-pyrone pore inducing material is removed from the precursor abrasive structure to provide a porous precursor abrasive structure that is further processed to provide a bonded abrasive article. In some embodiments, the binder medium includes a vitreous bonding material, and the bonded abrasive article is a porous vitrified bonded grinding wheel.

    POROUS MATERIAL FOR POLISHING AND POLISHING TOOL HAVING THE SAME

    公开(公告)号:US20190047121A1

    公开(公告)日:2019-02-14

    申请号:US16079332

    申请日:2016-02-29

    摘要: An object of the present invention is to provide a porous material for polishing in which, during a polishing operation, it is possible to keep a proportion between abrasive grains in contact with an object to be polished and a resin portion in contact with the object to be polished within a certain range, even if an unskilled person attaches a polishing tool to an automated device and uses it, there is no need for complicated adjustment to stabilize the device, whereby it is possible to obtain precise surface accuracy. The above object is achieved by a porous material for polishing including an elastic foam having anisotropy, a polymer, and abrasive grains.

    Lapping pads and systems and methods of making and using the same

    公开(公告)号:US10195713B2

    公开(公告)日:2019-02-05

    申请号:US15234720

    申请日:2016-08-11

    发明人: Masahi Norimoto

    摘要: The present disclosure relates to lapping pads which include an abrading layer, wherein the abrading layer includes a working surface and a second surface opposite the working surface having a projected area Ap, and at least one cavity having a cavity opening located at the second surface, the at least one cavity being defined by at least one rib, each rib having a distal end at the second surface; and a phase transition material having a thermally reversible phase transition, wherein the phase transition material is disposed in the at least one cavity. The present disclosure further relates to a lapping system, the lapping system includes a lapping pad of the present disclosure and a working fluid; a method of making a lapping pad; and a method of lapping using a lapping pad of the present disclosure.