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公开(公告)号：US20130299926A1
公开(公告)日：2013-11-14
申请号：US13946479
申请日：2013-07-19
Applicant: CAVENDISH KINETICS INC.
Inventor： Mickael RENAULT , Joseph Damian Gordon LACEY , Vikram JOSHI , Thomas L. MAGUIRE
IPC: B81B3/00
CPC classification number: B81B3/0072 , B81B2203/0118 , B81B2203/0307 , B81B2207/096 , B81C1/00039 , B81C1/00333 , B81C1/00476 , B81C2201/0132 , B81C2201/014 , B81C2203/0145 , B81C2203/0714
Abstract: The present invention generally relates to methods for producing MEMS or NEMS devices and the devices themselves. A thin layer of a material having a lower recombination coefficient as compared to the cantilever structure may be deposited over the cantilever structure, the RF electrode and the pull-off electrode. The thin layer permits the etching gas introduced to the cavity to decrease the overall etchant recombination rate within the cavity and thus, increase the etching rate of the sacrificial material within the cavity. The etchant itself may be introduced through an opening in the encapsulating layer that is linearly aligned with the anchor portion of the cantilever structure so that the topmost layer of sacrificial material is etched first. Thereafter, sealing material may seal the cavity and extend into the cavity all the way to the anchor portion to provide additional strength to the anchor portion.
Abstract translation: 本发明一般涉及用于生产MEMS或NEMS装置和装置本身的方法。 与悬臂结构相比，具有较低复合系数的材料的薄层可以沉积在悬臂结构，RF电极和拉出电极上。 薄层允许引入空腔的蚀刻气体降低空腔内的整体蚀刻剂复合速率，从而提高空腔内的牺牲材料的蚀刻速率。 蚀刻剂本身可以通过与悬臂结构的锚固部分线性对准的封装层中的开口引入，使得首先蚀刻最顶层的牺牲材料。 此后，密封材料可以密封空腔并且一直延伸到空腔中，以锚定部分，以向锚固部分提供额外的强度。
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公开(公告)号：US11476245B2
公开(公告)日：2022-10-18
申请号：US15771245
申请日：2016-11-14
Applicant: CAVENDISH KINETICS, INC.
Inventor： Roberto Gaddi , James Douglas Huffman , Chenhui Niu , Ray Parkhurst
Abstract: The present disclosure generally relates to the combination of MEMS intrinsic technology with specifically designed solid state ESD protection circuits in state of the art solid state technology for RF applications. Using ESD protection in MEMS devices has some level of complexity in the integration which can be seen by some as a disadvantage. However, the net benefits in the level of overall performance for insertion loss, isolation and linearity outweighs the disadvantages.
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公开(公告)号：US11114265B2
公开(公告)日：2021-09-07
申请号：US15770698
申请日：2016-11-14
Applicant: CAVENDISH KINETICS, INC.
Inventor： Robertus Petrus Van Kampen , Richard L. Knipe
Abstract: The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed that provide added electrical contact along the MEMS device so that when in contact current and heat are removed from the MEMS structure close to the hottest points.
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公开(公告)号：US10896787B2
公开(公告)日：2021-01-19
申请号：US15771026
申请日：2016-11-14
Applicant: CAVENDISH KINETICS, INC.
Inventor： Robertus Petrus Van Kampen , James Douglas Huffman , Mickael Renault , Shibajyoti Ghosh Dastider , Jacques Marcel Muyango
Abstract: The present invention generally relates to a mechanism for making a MEMS switch that has a robust RF-contact by avoiding currents to run through a thin sidewall in a via from the RF-contact to the underlying RF-electrode.
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公开(公告)号：US10714812B2
公开(公告)日：2020-07-14
申请号：US16342935
申请日：2017-10-18
Applicant: CAVENDISH KINETICS, INC.
Inventor： Paul Anthony Tornatta, Jr. , Young Joong Lee , Hak Ryol Kim
Abstract: The present disclosure generally relates to any device capable of wireless communication, such as a mobile telephone or wearable device, having one or more antennas. The antenna has a structure with multiple resonances to cover all commercial wireless communications bands from a single antenna with one feed connection to the main radio system. The antenna is usable where there are two highly efficient, closely spaced resonances in the lower part of the frequency band. One of those resonances can be adjusted in real time by using a variable reactance attached to the radiator while the other resonance is fixed.
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Patent Agency Ranking
公开(公告)号：US20200185176A1
公开(公告)日：2020-06-11
申请号：US16343912
申请日：2017-09-14
Applicant: CAVENDISH KINETICS, INC.
Abstract: The present disclosure generally relates to the design of a MEMS ohmic switch which provides for a low-impact landing of the MEMS device movable plate on the RF contact and a high restoring force for breaking the contacts to improve the lifetime of the switch. The switch has at least one contact electrode disposed off-center of the switch device and also has a secondary landing post disposed near the center of the switch device. The secondary landing post extends to a greater height above the substrate as compared to the RF contact of the contact electrode so that the movable plate contacts the secondary landing post first and then gently lands on the RF contact. Upon release, the movable plate will disengage from the RF contact prior to disengaging from the secondary landing post and have a longer lifetime due to the high restoring force.
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公开(公告)号：US10594024B2
公开(公告)日：2020-03-17
申请号：US16247529
申请日：2019-01-14
Applicant: CAVENDISH KINETICS, INC.
Inventor： Ray Parkhurst , Paul Anthony Tornatta, Jr.
Abstract: The present disclosure generally relates to a device having a capacitance sensor that detects a change in capacitance that occurs in the antenna whenever the antenna is in close proximity to a user's hand and/or head. Following detection of the capacitance change, the capacitance of the antenna may be changed by using a variable capacitor that is coupled to the sensor through a controller.
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公开(公告)号：US10224614B2
公开(公告)日：2019-03-05
申请号：US15301277
申请日：2015-04-02
Applicant: CAVENDISH KINETICS, INC.
Inventor： Ray Parkhurst , Paul Anthony Tornatta, Jr.
Abstract: The present disclosure generally relates to a device having a capacitance sensor that detects a change in capacitance that occurs in the antenna whenever the antenna is in close proximity to a user's hand and/or head. Following detection of the capacitance change, the capacitance of the antenna may be changed by using a variable capacitor that is coupled to the sensor through a controller.
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公开(公告)号：US10163566B2
公开(公告)日：2018-12-25
申请号：US15548992
申请日：2016-01-28
Applicant: CAVENDISH KINETICS, INC.
Inventor： Robertus Petrus Van Kampen , Roberto Gaddi , Richard L. Knipe
Abstract: The present disclosure generally relates to a MEMS DVC utilizing one or more MIM capacitors located in the anchor of the DVC and an Ohmic contact located on the RF-electrode. The MIM capacitor in combination with the ohmic MEMS device ensures that a stable capacitance for the MEMS DVC is achieved with applied RF power.
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公开(公告)号：US20180315748A1
公开(公告)日：2018-11-01
申请号：US15771245
申请日：2016-11-14
Applicant: CAVENDISH KINETICS, INC.
Inventor： Roberto GADDI , James Douglas HUFFMAN , Chenhui NIU , Ray PARKHURST
CPC classification number: H01H1/0036 , H01H59/0009 , H01L27/0248
Abstract: The present disclosure generally relates to the combination of MEMS intrinsic technology with specifically designed solid state ESD protection circuits in state of the art solid state technology for RF applications. Using ESD protection in MEMS devices has some level of complexity in the integration which can be seen by some as a disadvantage. However, the net benefits in the level of overall performance for insertion loss, isolation and linearity outweighs the disadvantages.
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