ELECTROSTATIC CHUCK DEVICE
    52.
    发明申请

    公开(公告)号:US20200343125A1

    公开(公告)日:2020-10-29

    申请号:US16958094

    申请日:2018-12-11

    Abstract: An electrostatic chuck device includes: an electrostatic chuck part having, as a main surface, a mounting surface on which a plate-shaped sample is mounted, and provided with an electrostatic attraction electrode; a base part which is disposed on a side opposite to the mounting surface with respect to the electrostatic chuck part and is configured to cool the electrostatic chuck part; a heater which is disposed in a layered manner between the electrostatic chuck part and the base part or in an interior of the electrostatic chuck part; and an adhesion layer which bonds and integrates the electrostatic chuck part and the base part together, in which the electrostatic chuck part is provided with a first through-hole, the base part is provided with a second through-hole communicating with the first through-hole, the adhesion layer is provided with a third through-hole communicating with the first through-hole and the second through-hole, a tubular insulator is fixed in the second through-hole, and an end of the insulator which is located on the electrostatic chuck part side is separated from the electrostatic chuck part with a space interposed therebetween.

    Optical control element
    55.
    发明授权

    公开(公告)号:US10739624B2

    公开(公告)日:2020-08-11

    申请号:US16367762

    申请日:2019-03-28

    Abstract: An optical control element including an optical waveguide formed by using diffusion of titanium that is formed on a lithium niobate substrate and a control electrode formed on the lithium niobate substrate that is provided in the vicinity of the optical waveguide, in which an amount of a hydroxyl group absorbed into the lithium niobate substrate is set to be in a range of 0.5 to 2.5 cm−1.

    Optical modulator and optical transmission device using same

    公开(公告)号:US10732481B2

    公开(公告)日:2020-08-04

    申请号:US16073965

    申请日:2016-08-30

    Inventor: Toru Sugamata

    Abstract: To provide a highly-reliable low-cost small optical modulator in which temperature drift is suppressed and an optical transmission device using the same. An optical modulator including an optical waveguide substrate 1 on which an optical waveguide is formed, a signal electrode which is provided on the optical waveguide substrate and applies an electric field to the optical waveguide, a termination substrate 3 provided with a termination resistor that terminates the signal electrode, and a housing 6 in which the optical waveguide substrate and the termination substrate are mounted, in which, in order to suppress conduction of heat generated from the termination resistor to the optical waveguide substrate through the housing, a groove 8 is formed in the housing 6 between the termination substrate 3 and the optical waveguide substrate 1.

    Titanium oxide particles, and titanium oxide particle dispersion and cosmetics using same

    公开(公告)号:US10717658B2

    公开(公告)日:2020-07-21

    申请号:US16313426

    申请日:2017-06-28

    Abstract: Titanium oxide particles of the present invention include octahedral-shaped particles, in which each particle of the octahedral-shaped particles has line segments each of which connects two apexes which face each other and has a maximum value of the line segments, an average value of the maximum values is 300 nm or more and 1,000 nm or less, and a value (the average value of the maximum values/BET-converted average particle diameter) obtained by dividing the average value of the maximum values of the line segments by an average particle diameter converted from a BET specific surface area is 1.0 or more and 2.5 or less.

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