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公开(公告)号:US12249492B2
公开(公告)日:2025-03-11
申请号:US17999823
申请日:2021-05-27
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Masaki Hirayama , Tetsuro Itagaki
IPC: H01J37/32 , H01L21/683
Abstract: An electrostatic chuck device includes: an electrostatic chuck plate having a dielectric substrate having a placement surface on which a wafer is placed and an adsorption electrode positioned in the dielectric substrate; a metal base supporting the electrostatic chuck plate from a back surface side opposite to the placement surface; and a focus ring installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface. The electrostatic chuck plate has a ring adsorption region which is adsorbed to the focus ring and is located on a surface positioned on the same side as the placement surface and has a base adsorption region which is adsorbed to the metal base and located on a back surface opposite to the placement surface.
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公开(公告)号:US09642785B2
公开(公告)日:2017-05-09
申请号:US14783135
申请日:2014-03-31
Applicant: Sumitomo Osaka Cement Co., Ltd.
Inventor: Tetsuro Itagaki , Yoshiki Kusahara , Gaku Fujihashi , Syunsuke Suma
CPC classification number: A61K8/27 , A61K8/0241 , A61K8/11 , A61K8/25 , A61K2800/413 , A61K2800/621 , A61K2800/651 , A61Q17/04 , B01J2/006 , C01P2002/86 , C01P2004/04 , C01P2004/64 , C01P2004/84 , C09C1/043
Abstract: Provided are a silicon-oxide-coated zinc oxide capable of suppressing the elution of zinc ions from zinc oxide particles, a method for manufacturing the same, a silicon-oxide-coated-zinc-oxide-containing composition, and a cosmetic. The silicon-oxide-coated zinc oxide is a silicon-oxide-coated zinc oxide formed by coating the surfaces of zinc oxide particles with a silicon oxide coating, in which the average particle diameter of the zinc oxide particles is in a range of 1 nm or more and 50 nm or less, when the abundance ratio of silicon in the silicon oxide coating in a Q3 environment is indicated by Q3, and the abundance ratio in a Q4 environment is indicated by Q4, Q3+Q4≧0.6 and Q4/(Q3+Q4)≧0.5, and furthermore, the decomposition ratio of Brilliant Blue generated by the photocatalytic activity of the zinc oxide particles is 3% or less.
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公开(公告)号:US12119212B2
公开(公告)日:2024-10-15
申请号:US17999833
申请日:2021-05-27
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Masaki Hirayama , Tetsuro Itagaki
IPC: H01J37/32 , H01L21/683
CPC classification number: H01J37/32724 , H01J37/32082 , H01J37/32568 , H01J37/32577 , H01L21/6833 , H01J37/32541 , H01J2237/2007
Abstract: A wafer support device includes a dielectric substrate and an RF electrode provided in the dielectric substrate. The RF electrode is divided into a plurality of zone electrodes arranged in a planar direction of the dielectric substrate. The wafer support device has: a short-circuit member interconnecting the plurality of zone electrodes; and a main power supply rod connected to the short-circuit member from a back side of the dielectric substrate.
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公开(公告)号:US11141363B2
公开(公告)日:2021-10-12
申请号:US16476109
申请日:2018-01-05
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Tetsuro Itagaki , Hirokazu Matsushita , Norito Morishita
Abstract: In an ultraviolet-shielding particle coated with silicon oxide of the present invention, a surface of the ultraviolet-shielding particle is coated with a silicon oxide coat, at least one functional group selected from the group consisting of an alkyl group, an alkenyl group, and a cycloalkyl group is present on a surface of the silicon oxide coat, and a content of the functional group is 0.0001% by mass or more and 0.30% by mass or less.
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5.
公开(公告)号:US10717658B2
公开(公告)日:2020-07-21
申请号:US16313426
申请日:2017-06-28
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Teppei Yakubo , Tetsuro Itagaki
IPC: C01G23/053 , A61K8/29 , A61Q1/12 , A61K8/04
Abstract: Titanium oxide particles of the present invention include octahedral-shaped particles, in which each particle of the octahedral-shaped particles has line segments each of which connects two apexes which face each other and has a maximum value of the line segments, an average value of the maximum values is 300 nm or more and 1,000 nm or less, and a value (the average value of the maximum values/BET-converted average particle diameter) obtained by dividing the average value of the maximum values of the line segments by an average particle diameter converted from a BET specific surface area is 1.0 or more and 2.5 or less.
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公开(公告)号:US10363204B2
公开(公告)日:2019-07-30
申请号:US15614126
申请日:2017-06-05
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Tetsuro Itagaki , Syunsuke Suma , Gaku Fujihashi
IPC: A61K8/02 , A61K8/27 , C09C1/04 , A61K8/25 , A61Q19/00 , A61Q17/04 , A61Q1/06 , A61Q1/08 , A61Q1/10 , A61Q1/12
Abstract: Zinc oxide coated with silicon oxide of the present invention is zinc oxide which is coated with silicon oxide wherein surfaces of zinc oxide particles are coated with silicon oxide coatings, and the coated zinc oxide particles comprises at least one element selected from a group consisting of Mg, Ca, and Ba.
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公开(公告)号:US10238589B2
公开(公告)日:2019-03-26
申请号:US15126140
申请日:2015-03-30
Applicant: Sumitomo Osaka Cement Co., Ltd
Inventor: Tetsuro Itagaki , Gaku Fujihashi , Syunsuke Suma
Abstract: Provided are a silicon oxide-coated zinc oxide, a method for producing the same, a composition and a cosmetic including a silicon oxide-coated zinc oxide. The silicon oxide-coated zinc oxide is a silicon oxide-coated zinc oxide formed by coating surfaces of zinc oxide particles with a silicon oxide coat, in which an average particle diameter of the zinc oxide particles is in a range of more than 50 nm and 500 nm or less, and, when an abundance ratio of silicon in the silicon oxide coat in a Q3 environment is indicated by Q3, and an abundance ratio in a Q4 environment is indicated by Q4, Q3+Q4≥0.6 and Q4/(Q3+Q4)≥0.5 are satisfied.
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8.
公开(公告)号:US09403691B1
公开(公告)日:2016-08-02
申请号:US14811096
申请日:2015-07-28
Applicant: Sumitomo Osaka Cement Co., Ltd.
Inventor: Tadashi Neya , Tetsuro Itagaki , Syunsuke Suma
CPC classification number: C01G9/02 , A61K8/27 , A61K2800/413 , A61K2800/591 , A61K2800/651 , A61Q17/04 , C01P2004/62 , C01P2004/64 , C01P2006/12 , C01P2006/40 , C08K2003/2296 , C08K2201/003 , C08K2201/006 , C08K2201/011 , C09C1/043 , C09D7/61 , C09D7/62
Abstract: Zinc oxide powder of the present invention has a specific surface area which is in a range of 1.5 m2/g to 65 m2/g, a conductivity which is 150 μS/cm or less and a bulk specific volume which is in a range of 0.5 mL/g to 10 mL/g.
Abstract translation: 本发明的氧化锌粉末的比表面积为1.5m 2 / g〜65m 2 / g,导电率为150μS/ cm以下,体积比为0.5的范围 mL / g至10mL / g。
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公开(公告)号:US11254583B2
公开(公告)日:2022-02-22
申请号:US16957376
申请日:2018-12-27
Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
Inventor: Teppei Yakubo , Tsutomu Nozoe , Tetsuro Itagaki
IPC: C01G23/047 , A61K8/04 , A61K8/29
Abstract: A titanium oxide powder of the present invention has a BET specific surface area of 5 m2/g or more and 15 m2/g or less and contains polyhedral-shaped titanium oxide particles having eight or more faces, in which a mass reduction rate in a case of being heated at 800° C. for 1 hour in an air atmosphere is 0.03% by mass or more and 0.5% by mass or less.
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公开(公告)号:US09855197B2
公开(公告)日:2018-01-02
申请号:US15035620
申请日:2014-11-13
Applicant: Sumitomo Osaka Cement Co., Ltd.
Inventor: Tetsuro Itagaki , Syunsuke Suma , Gaku Fujihashi
IPC: A61K8/02 , A61Q1/08 , A61Q1/12 , A61Q19/00 , A61Q1/06 , A61K8/25 , C09C1/04 , A61K8/27 , A61Q17/04 , A61Q1/10
CPC classification number: A61K8/0241 , A61K8/25 , A61K8/27 , A61K2800/412 , A61K2800/413 , A61K2800/621 , A61Q1/06 , A61Q1/08 , A61Q1/10 , A61Q1/12 , A61Q17/04 , A61Q19/007 , C01P2002/76 , C01P2002/77 , C01P2004/62 , C01P2004/64 , C01P2004/84 , C09C1/043
Abstract: Zinc oxide coated with silicon oxide of the present invention is zinc oxide which is coated with silicon oxide wherein surfaces of zinc oxide particles are coated with silicon oxide coatings, and the coated zinc oxide particles comprises at least one element selected from a group consisting of Mg, Ca, and Ba.
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