-
公开(公告)号:US20050196709A1
公开(公告)日:2005-09-08
申请号:US11066495
申请日:2005-02-28
Applicant: Suguru Sasaki , Satoshi Machida , Takashi Taguchi
Inventor: Suguru Sasaki , Satoshi Machida , Takashi Taguchi
IPC: G02B5/18
CPC classification number: G02B5/1857 , G03F7/0005 , G03F7/0035
Abstract: A method of forming a linear grating is disclosed. When forming a first resist pattern covering certain surface regions of a substrate, the mask pattern position is shifted and the first resist pattern is formed such that the trench in the target region is completely filled with the first resist pattern even when an error in positioning occurs. The surface of the first resist pattern is etched, and a lower resist pattern is left to the same level as the uppermost step of the silicon substrate. On top of this, an upper resist pattern having the same pattern as the first resist pattern is formed. At this time, the mask pattern position is shifted and the exposure dose is adjusted such that one edge of the upper resist pattern is positioned on the lower resist pattern, and the other edge is positioned in a prescribed region border portion. The lower resist pattern and upper resist pattern are used as a mask to etch the silicon substrate.
Abstract translation: 公开了一种形成线性光栅的方法。 当形成覆盖基板的某些表面区域的第一抗蚀剂图案时,掩模图案位置移动,并且形成第一抗蚀剂图案,使得即使当定位错误发生时,目标区域中的沟槽也完全被第一抗蚀剂图案填充 。 蚀刻第一抗蚀剂图案的表面,并且将下抗蚀剂图案保留到与硅衬底的最上层步骤相同的水平。 此外,形成具有与第一抗蚀剂图案相同的图案的上抗蚀剂图案。 此时,掩模图案位置移动,并且调整曝光剂量使得上抗蚀剂图案的一个边缘位于下抗蚀剂图案上,另一边缘位于规定区域边界部分中。 下抗蚀剂图案和上抗蚀剂图案用作掩模以蚀刻硅衬底。
-
52.
公开(公告)号:US6100542A
公开(公告)日:2000-08-08
申请号:US974731
申请日:1997-11-19
Applicant: Teruaki Kohara , Koichi Hoshino , Takashi Taguchi
Inventor: Teruaki Kohara , Koichi Hoshino , Takashi Taguchi
IPC: H01L29/06 , H01L21/338 , H01L29/15 , H01L29/778 , H01L29/812 , H01L29/267 , H01L29/205
CPC classification number: H01L29/155 , H01L29/7783
Abstract: A semiconductor device includes a semi-insulating substrate. A channel layer is formed on the semi-insulating substrate. An electron supply layer is formed on the semi-insulating substrate for generating a two-dimensional electron gas. The electron supply layer includes a doped superlattice layer. The superlattice layer includes layers of In.sub.X Al.sub.1-X As and layers of In.sub.Y Al.sub.1-Y As which alternate with each other, where 0.ltoreq.X.ltoreq.1.0 and 0.ltoreq.Y.ltoreq.1.0, and X differs from Y.
Abstract translation: 半导体器件包括半绝缘衬底。 在半绝缘基板上形成沟道层。 在半绝缘基板上形成电子供给层,生成二维电子气。 电子供应层包括掺杂的超晶格层。 超晶格层包括InXAl1-XAs层和InYAl1-YAs层,它们彼此交替,其中0≤X≤1.0且0≤Y≤1.0,并且X与Y不同。
-
公开(公告)号:US5901679A
公开(公告)日:1999-05-11
申请号:US951732
申请日:1997-10-16
Applicant: Shigekazu Tanaka , Takashi Taguchi , Shigemasa Kajiwara , Masashi Murata , Atsushi Iwamoto , Toshinari Sonoda , Masahiko Tashiro , Yasuyuki Kimura , Kaoru Aoki , Mitsuo Takashima
Inventor: Shigekazu Tanaka , Takashi Taguchi , Shigemasa Kajiwara , Masashi Murata , Atsushi Iwamoto , Toshinari Sonoda , Masahiko Tashiro , Yasuyuki Kimura , Kaoru Aoki , Mitsuo Takashima
CPC classification number: F02F7/0053 , F01M11/0004 , F02B2275/20 , F02F2007/0063 , F02F2200/06 , F05C2201/021 , F05C2201/0439
Abstract: In an engine for a vehicle including a bearing cap integral type oil pan which has a plurality of bearing cap sections integrally provided thereon and which is integrally coupled to a cylinder block, connecting bolts are screwed into the bearing cap sections from the cylinder block to integrally couple the cylinder block and the oil pan to each other. An oil pan chamber, which is an as-cast bore made by drawing a die in an axial direction of a crankshaft, is defined to extend continuously in the axial direction of the crankshaft between the bearing cap sections and a bottom wall of the oil pan. Thus, the oil pan can be produced simply, at a low cost, by a casting process and moreover, it is possible to reduce the weight and size of the oil pan and increase the rigidity of the oil pan.
Abstract translation: 在一种用于车辆的发动机中,包括具有一体地设置在其上的多个轴承盖部分的轴承盖一体式油盘,并且其一体地联接到气缸体,连接螺栓从气缸体螺纹连接到轴承盖部分中以一体地 将气缸体和油盘相互连接。 油盘室是通过在曲轴的轴向上拉模而制成的铸造孔,被定义为在轴承盖部分和油盘的底壁之间在曲轴的轴向方向上连续地延伸 。 因此,油底壳可以通过铸造方法简单地以低成本制造,并且还可以减小油盘的重量和尺寸并增加油盘的刚性。
-
公开(公告)号:US5454251A
公开(公告)日:1995-10-03
申请号:US186577
申请日:1994-01-26
Applicant: Takatsugu Funawatari , Daiki Kobayashi , Takashi Taguchi
Inventor: Takatsugu Funawatari , Daiki Kobayashi , Takashi Taguchi
CPC classification number: G11B23/0308 , Y10S72/702
Abstract: A manufacturing method of a shutter for a cartridge which is accommodating therein a recording medium includes the steps of punching out a plate-shaped metal material so as to provide a shutter of a developed shape having a pair of plate-shaped portions and a coupling portion for coupling the pair of plate-shaped portions, shaping the punched-out member in such a fashion that the pair of plate-shaped portions are opposed to each other across the coupling portion and that a spacing between free end sides of the pair of plate-shaped portions become narrower than a spacing of the pair of plate-shaped portions at its portion coupled by the coupling portion, and shaping the shaped member such that a spacing between free ends of the pair of plate-shaped portions of the member shaped by the second process become substantially equal to a spacing of the pair of plate-shaped portions at its portion coupled by the coupling member.
Abstract translation: 其中容纳有记录介质的盒的快门的制造方法包括以下步骤:冲压出板状金属材料,以便提供具有一对板状部分的开发形状的活门和耦合部分 为了联接所述一对板状部分,以使所述一对板状部分跨越所述联接部分彼此相对的方式成形所述冲压部件,并且所述一对板的自由端侧之间的间隔 形状部分变得比通过联接部分耦合的一对板状部分的间隔窄,并且成形构件使得成形的一对板状部分的自由端之间的间隔由 第二过程变得基本上等于一对板状部分在其由联接构件联接的部分处的间隔。
-
-
-